DE602005021818D1 - Mehrfachsensoranordnung - Google Patents

Mehrfachsensoranordnung

Info

Publication number
DE602005021818D1
DE602005021818D1 DE602005021818T DE602005021818T DE602005021818D1 DE 602005021818 D1 DE602005021818 D1 DE 602005021818D1 DE 602005021818 T DE602005021818 T DE 602005021818T DE 602005021818 T DE602005021818 T DE 602005021818T DE 602005021818 D1 DE602005021818 D1 DE 602005021818D1
Authority
DE
Germany
Prior art keywords
wafer
sensor arrangement
assembly
multiple sensor
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005021818T
Other languages
English (en)
Inventor
Padraig O'mahony
Frank Caris
Theo Kersjes
Christian Paquet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP BV
Original Assignee
NXP BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NXP BV filed Critical NXP BV
Publication of DE602005021818D1 publication Critical patent/DE602005021818D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M2250/00—Details of telephonic subscriber devices
    • H04M2250/12—Details of telephonic subscriber devices including a sensor for measuring a physical value, e.g. temperature or motion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Position Input By Displaying (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Image Input (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measuring Fluid Pressure (AREA)
DE602005021818T 2004-12-06 2005-12-06 Mehrfachsensoranordnung Active DE602005021818D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63393204P 2004-12-06 2004-12-06
PCT/IB2005/054085 WO2006061781A1 (en) 2004-12-06 2005-12-06 Multisensor assembly

Publications (1)

Publication Number Publication Date
DE602005021818D1 true DE602005021818D1 (de) 2010-07-22

Family

ID=36050046

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005021818T Active DE602005021818D1 (de) 2004-12-06 2005-12-06 Mehrfachsensoranordnung

Country Status (8)

Country Link
US (1) US8735198B2 (de)
EP (1) EP1828048B1 (de)
JP (1) JP2008523466A (de)
KR (1) KR20070093990A (de)
CN (1) CN101115675B (de)
AT (1) ATE470646T1 (de)
DE (1) DE602005021818D1 (de)
WO (1) WO2006061781A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8546240B2 (en) 2011-11-11 2013-10-01 International Business Machines Corporation Methods of manufacturing integrated semiconductor devices with single crystalline beam
US8629036B2 (en) 2011-11-11 2014-01-14 International Business Machines Corporation Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure
US9105751B2 (en) 2011-11-11 2015-08-11 International Business Machines Corporation Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
CN104649217B (zh) * 2014-12-23 2016-03-23 北京时代民芯科技有限公司 一种多mems传感器的单芯片加工方法
CN104819730B (zh) * 2015-05-06 2017-12-05 歌尔股份有限公司 一种mems惯性传感器及其制造方法
WO2017093814A1 (en) * 2015-12-04 2017-06-08 Uti Limited Partnership Wearable inertial electronic device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19808549B4 (de) * 1998-02-28 2008-07-10 Robert Bosch Gmbh Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur
US6539101B1 (en) * 1998-04-07 2003-03-25 Gerald R. Black Method for identity verification
US6816274B1 (en) * 1999-05-25 2004-11-09 Silverbrook Research Pty Ltd Method and system for composition and delivery of electronic mail
WO2001022351A1 (en) 1999-09-17 2001-03-29 Black Gerald R Identity authentication system and method
WO2001022651A2 (en) * 1999-09-20 2001-03-29 Ethentica, Inc. Cryptographic server with provisions for interoperability between cryptographic systems
US6504385B2 (en) * 2001-05-31 2003-01-07 Hewlett-Pakcard Company Three-axis motion sensor
US7514283B2 (en) * 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere

Also Published As

Publication number Publication date
JP2008523466A (ja) 2008-07-03
US8735198B2 (en) 2014-05-27
CN101115675B (zh) 2011-08-17
KR20070093990A (ko) 2007-09-19
WO2006061781A1 (en) 2006-06-15
US20090211359A1 (en) 2009-08-27
EP1828048A1 (de) 2007-09-05
EP1828048B1 (de) 2010-06-09
CN101115675A (zh) 2008-01-30
ATE470646T1 (de) 2010-06-15

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