DE602005014250D1 - Mehrlagenschaltung mit variablem Induktor sowie Verfahren zu ihrer Herstellung - Google Patents

Mehrlagenschaltung mit variablem Induktor sowie Verfahren zu ihrer Herstellung

Info

Publication number
DE602005014250D1
DE602005014250D1 DE602005014250T DE602005014250T DE602005014250D1 DE 602005014250 D1 DE602005014250 D1 DE 602005014250D1 DE 602005014250 T DE602005014250 T DE 602005014250T DE 602005014250 T DE602005014250 T DE 602005014250T DE 602005014250 D1 DE602005014250 D1 DE 602005014250D1
Authority
DE
Germany
Prior art keywords
production
layer circuit
variable inductor
inductor
variable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005014250T
Other languages
English (en)
Inventor
Molins Josep Ignasi Epso Cairo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE602005014250D1 publication Critical patent/DE602005014250D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F21/00—Variable inductances or transformers of the signal type
    • H01F21/12—Variable inductances or transformers of the signal type discontinuously variable, e.g. tapped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64—Impedance arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Coils Or Transformers For Communication (AREA)
DE602005014250T 2005-11-17 2005-11-17 Mehrlagenschaltung mit variablem Induktor sowie Verfahren zu ihrer Herstellung Active DE602005014250D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05025101A EP1788626B1 (de) 2005-11-17 2005-11-17 Mehrlagenschaltung mit variablem Induktor sowie Verfahren zu ihrer Herstellung

Publications (1)

Publication Number Publication Date
DE602005014250D1 true DE602005014250D1 (de) 2009-06-10

Family

ID=35953950

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005014250T Active DE602005014250D1 (de) 2005-11-17 2005-11-17 Mehrlagenschaltung mit variablem Induktor sowie Verfahren zu ihrer Herstellung

Country Status (5)

Country Link
US (1) US20070115086A1 (de)
EP (1) EP1788626B1 (de)
JP (1) JP2007142418A (de)
KR (1) KR20070052674A (de)
DE (1) DE602005014250D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100579136B1 (ko) * 2004-12-16 2006-05-12 한국전자통신연구원 가변 인덕턴스를 갖는 트랜스포머
US8350657B2 (en) * 2005-06-30 2013-01-08 Derochemont L Pierre Power management module and method of manufacture
US7414478B2 (en) * 2006-03-31 2008-08-19 Intel Corporation Integrated parallel power amplifier
US20100327406A1 (en) * 2009-06-26 2010-12-30 Stats Chippac, Ltd. Semiconductor Device and Method of Forming Inductor Over Insulating Material Filled Trench In Substrate
US8716900B2 (en) 2010-03-30 2014-05-06 Panasonic Corporation Wireless power transmission system
US8922315B2 (en) * 2011-05-17 2014-12-30 Bae Systems Information And Electronic Systems Integration Inc. Flexible ultracapacitor cloth for feeding portable electronic device
WO2013043957A2 (en) * 2011-09-23 2013-03-28 Tensorcom, Inc. Method and apparatus of minimizing extrinsic parasitic resistance in 60ghz power amplifier circuits
US8487695B2 (en) 2011-09-23 2013-07-16 Tensorcom, Inc. Differential source follower having 6dB gain with applications to WiGig baseband filters
US8680899B2 (en) 2011-09-23 2014-03-25 Tensorcom, Inc. High performance divider using feed forward, clock amplification and series peaking inductors
US8406710B1 (en) 2011-09-23 2013-03-26 Tensorcom, Inc. Method and apparatus of minimizing extrinsic parasitic resistance in 60 GHz power amplifier circuits
KR102176283B1 (ko) * 2013-11-25 2020-11-09 삼성전기주식회사 인쇄회로기판
US9344140B2 (en) * 2014-02-25 2016-05-17 Skyworks Solutions, Inc. Systems, devices and methods related to improved radio-frequency modules
JP6421484B2 (ja) * 2014-07-28 2018-11-14 Tdk株式会社 コイル部品、コイル部品複合体およびトランス、ならびに電源装置
US9653204B2 (en) 2015-01-22 2017-05-16 Globalfoundries Inc. Symmetric multi-port inductor for differential multi-band RF circuits
CN105244345B (zh) * 2015-09-21 2018-04-03 温州大学 一种电感值可调的片上集成差分电感
CA3005740A1 (en) 2015-11-17 2017-05-26 Tensorcom, Inc. High linearly wigig baseband amplifier with channel select filter
JP2017225070A (ja) 2016-06-17 2017-12-21 株式会社村田製作所 増幅器
US20190189342A1 (en) * 2017-12-20 2019-06-20 National Chung Shan Institute Of Science And Technology Variable inductor and integrated circuit using the variable inductor
CN110112835A (zh) * 2019-05-16 2019-08-09 中南大学 频率可重构四线圈结构磁耦合谐振式无线能量传输***
JP7433176B2 (ja) 2020-09-15 2024-02-19 三菱電機株式会社 回転電機ステータの結線板、回転電機のステータ、および回転電機

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461256A (ja) * 1990-06-28 1992-02-27 Mitsubishi Electric Corp 半導体集積回路
US5629553A (en) * 1993-11-17 1997-05-13 Takeshi Ikeda Variable inductance element using an inductor conductor
JP3318086B2 (ja) * 1993-11-17 2002-08-26 新潟精密株式会社 インダクタンス可変素子
JPH08162331A (ja) * 1994-12-05 1996-06-21 Hitachi Ltd 可変インダクタ及びそれを用いた半導体集積回路
JPH11260646A (ja) * 1998-03-10 1999-09-24 Oki Electric Ind Co Ltd インダクタンス制御構造
US6225182B1 (en) * 1999-08-30 2001-05-01 Agere Systems Guardian Corp. Simplified high Q inductor substrate
JP2003178919A (ja) * 2001-12-11 2003-06-27 Sony Corp 半導体装置及びその製造方法
DE10162263A1 (de) * 2001-12-18 2003-07-10 Infineon Technologies Ag Induktives Bauteil
KR100466542B1 (ko) * 2002-11-13 2005-01-15 한국전자통신연구원 적층형 가변 인덕터
JP2004221317A (ja) * 2003-01-15 2004-08-05 Renesas Technology Corp 半導体装置
JP4458754B2 (ja) * 2003-03-04 2010-04-28 株式会社ルネサステクノロジ Ｌ負荷差動回路
JP4217106B2 (ja) * 2003-05-23 2009-01-28 パナソニック株式会社 モノリシックマイクロ波集積回路
JP2005057270A (ja) * 2003-08-01 2005-03-03 Stmicroelectronics Sa 切換え可能なインダクタンス
JP2005191217A (ja) * 2003-12-25 2005-07-14 Sharp Corp スパイラルインダクタおよびそれを備えた回路装置または差動回路
US7251466B2 (en) * 2004-08-20 2007-07-31 Xceive Corporation Television receiver including an integrated band selection filter

Also Published As

Publication number Publication date
KR20070052674A (ko) 2007-05-22
US20070115086A1 (en) 2007-05-24
JP2007142418A (ja) 2007-06-07
EP1788626A1 (de) 2007-05-23
EP1788626B1 (de) 2009-04-29

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