DE602005006694D1 - Mehrstufige trockenverdichtende Vakuumpumpe mit einem Roots-rotor und einem Schraubenrotor - Google Patents
Mehrstufige trockenverdichtende Vakuumpumpe mit einem Roots-rotor und einem SchraubenrotorInfo
- Publication number
- DE602005006694D1 DE602005006694D1 DE602005006694T DE602005006694T DE602005006694D1 DE 602005006694 D1 DE602005006694 D1 DE 602005006694D1 DE 602005006694 T DE602005006694 T DE 602005006694T DE 602005006694 T DE602005006694 T DE 602005006694T DE 602005006694 D1 DE602005006694 D1 DE 602005006694D1
- Authority
- DE
- Germany
- Prior art keywords
- rotor
- vacuum pump
- roots
- stage dry
- screw rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/02—Arrangements of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/10—Stators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
- F04C2240/52—Bearings for assemblies with supports on both sides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040078422A KR100497982B1 (ko) | 2004-10-01 | 2004-10-01 | 루츠형 로터와 스크루형 로터를 지닌 복합 드라이 진공펌프 |
KR1020040078431A KR100591079B1 (ko) | 2004-10-01 | 2004-10-01 | 루츠로터와 스크류로터 복합건식 진공펌프 |
KR1020040078423A KR100624982B1 (ko) | 2004-10-01 | 2004-10-01 | 복수 단의 루츠형 로터와 스크루형 로터를 지닌 복합드라이 진공 펌프 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005006694D1 true DE602005006694D1 (de) | 2008-06-26 |
Family
ID=36180969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005006694T Active DE602005006694D1 (de) | 2004-10-01 | 2005-09-30 | Mehrstufige trockenverdichtende Vakuumpumpe mit einem Roots-rotor und einem Schraubenrotor |
Country Status (5)
Country | Link |
---|---|
US (1) | US7722332B2 (de) |
EP (1) | EP1643129B1 (de) |
AT (1) | ATE395515T1 (de) |
DE (1) | DE602005006694D1 (de) |
TW (1) | TWI407015B (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI438342B (zh) * | 2006-07-28 | 2014-05-21 | Lot Vacuum Co Ltd | 具有魯式與螺旋轉子之複合型乾式真空幫浦 |
GB0705971D0 (en) * | 2007-03-28 | 2007-05-09 | Boc Group Plc | Vacuum pump |
GB0707753D0 (en) * | 2007-04-23 | 2007-05-30 | Boc Group Plc | Vacuum pump |
EP2180188B1 (de) * | 2008-10-24 | 2016-09-07 | Edwards Limited | Verbesserungen bei und in Zusammenhang mit Drehkolbenpumpen |
DE102010014884A1 (de) * | 2010-04-14 | 2011-10-20 | Baratti Engineering Gmbh | Vakuumpumpe |
CN101985938A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种具有螺杆和罗茨转子的三轴复合干泵 |
EP2532895B1 (de) * | 2011-06-06 | 2014-02-26 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren |
KR101926658B1 (ko) * | 2017-03-15 | 2018-12-07 | 이인철 | 반도체 챔버용 펌프 시스템 |
CA3056753C (en) | 2017-04-07 | 2021-04-27 | Stackpole International Engineered Products, Ltd. | Epitrochoidal vacuum pump |
CN106949074A (zh) * | 2017-04-20 | 2017-07-14 | 中山联速集成电路有限公司 | 一种静音空压机 |
CN112780563A (zh) * | 2019-11-07 | 2021-05-11 | 中国石油化工股份有限公司 | 双级干式真空泵 |
CN114607609A (zh) * | 2020-12-04 | 2022-06-10 | 中国科学院沈阳科学仪器股份有限公司 | 一种新组合形式的干式真空泵 |
CN114607600B (zh) * | 2020-12-09 | 2023-03-21 | 东北大学 | 一种新型多级罗茨真空泵 |
CN114909292A (zh) * | 2022-06-13 | 2022-08-16 | 济南黎明风机制造有限公司 | 一种罗茨风机消除噪音和粉尘装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3146723A (en) * | 1959-04-13 | 1964-09-01 | Wildhaber Ernest | Screw pump unit |
US3108739A (en) * | 1960-06-17 | 1963-10-29 | Svenska Rotor Maskiner Ab | Regulating means for rotary piston compressor |
US4762469A (en) * | 1986-03-03 | 1988-08-09 | American Standard Inc. | Rotor anti-reverse rotation arrangement in a screw compressor |
JPH0757297B2 (ja) * | 1987-04-22 | 1995-06-21 | 日本真空技術株式会社 | 真空排気系用微粒子トラツプ |
JP3593365B2 (ja) * | 1994-08-19 | 2004-11-24 | 大亜真空株式会社 | ねじれ角可変型歯車 |
JP3497661B2 (ja) | 1995-04-19 | 2004-02-16 | 株式会社荏原製作所 | 多段容積式真空ポンプ |
JP2922181B1 (ja) * | 1998-01-26 | 1999-07-19 | 株式会社宇野澤組鐵工所 | 粉体捕集機能を有する真空ポンプ装置 |
JP2003343469A (ja) * | 2002-03-20 | 2003-12-03 | Toyota Industries Corp | 真空ポンプ |
JP4218756B2 (ja) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | 真空排気装置 |
-
2005
- 2005-09-30 AT AT05109115T patent/ATE395515T1/de not_active IP Right Cessation
- 2005-09-30 EP EP05109115A patent/EP1643129B1/de active Active
- 2005-09-30 DE DE602005006694T patent/DE602005006694D1/de active Active
- 2005-09-30 US US11/239,722 patent/US7722332B2/en active Active
- 2005-10-03 TW TW094134438A patent/TWI407015B/zh active
Also Published As
Publication number | Publication date |
---|---|
US20060083651A1 (en) | 2006-04-20 |
EP1643129A1 (de) | 2006-04-05 |
EP1643129B1 (de) | 2008-05-14 |
TWI407015B (zh) | 2013-09-01 |
US7722332B2 (en) | 2010-05-25 |
ATE395515T1 (de) | 2008-05-15 |
TW200628700A (en) | 2006-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |