DE60107917D1 - Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat - Google Patents

Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat

Info

Publication number
DE60107917D1
DE60107917D1 DE60107917T DE60107917T DE60107917D1 DE 60107917 D1 DE60107917 D1 DE 60107917D1 DE 60107917 T DE60107917 T DE 60107917T DE 60107917 T DE60107917 T DE 60107917T DE 60107917 D1 DE60107917 D1 DE 60107917D1
Authority
DE
Germany
Prior art keywords
piezoelectric
jet recording
active portion
ink jet
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60107917T
Other languages
English (en)
Other versions
DE60107917T2 (de
Inventor
Masato Shimada
Yoshinao Miyata
Hiroyuki Kamei
Tetsushi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE60107917D1 publication Critical patent/DE60107917D1/de
Application granted granted Critical
Publication of DE60107917T2 publication Critical patent/DE60107917T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
DE60107917T 2000-10-16 2001-10-16 Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat Expired - Lifetime DE60107917T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000315607A JP3491688B2 (ja) 2000-10-16 2000-10-16 インクジェット式記録ヘッド
JP2000315607 2000-10-16

Publications (2)

Publication Number Publication Date
DE60107917D1 true DE60107917D1 (de) 2005-01-27
DE60107917T2 DE60107917T2 (de) 2005-12-08

Family

ID=18794687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60107917T Expired - Lifetime DE60107917T2 (de) 2000-10-16 2001-10-16 Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat

Country Status (5)

Country Link
US (2) US20020051040A1 (de)
EP (1) EP1199172B1 (de)
JP (1) JP3491688B2 (de)
AT (1) ATE285331T1 (de)
DE (1) DE60107917T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002248765A (ja) * 2000-12-19 2002-09-03 Fuji Xerox Co Ltd インクジェット式記録ヘッドおよびインクジェット式記録装置
JP2002331663A (ja) * 2001-03-08 2002-11-19 Seiko Epson Corp インクジェット式記録ヘッド及びインクジェット式記録装置
US7497962B2 (en) * 2004-08-06 2009-03-03 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head
JP4442689B2 (ja) * 2005-02-21 2010-03-31 株式会社村田製作所 圧電薄膜共振子
JP2006231678A (ja) * 2005-02-24 2006-09-07 Seiko Epson Corp 液体噴射ヘッドユニット及び液体噴射装置
JP4553130B2 (ja) * 2005-03-04 2010-09-29 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2006321059A (ja) * 2005-05-17 2006-11-30 Fuji Xerox Co Ltd 液滴吐出ヘッド、インクジェットプリントヘッド及びインクジェットプリンタ
US7625073B2 (en) * 2005-06-16 2009-12-01 Canon Kabushiki Kaisha Liquid discharge head and recording device
JP4321552B2 (ja) 2006-06-07 2009-08-26 セイコーエプソン株式会社 アクチュエータ装置及び液体噴射ヘッド
JP5522346B2 (ja) * 2009-03-09 2014-06-18 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置
WO2011086645A1 (ja) * 2010-01-12 2011-07-21 コニカミノルタホールディングス株式会社 圧電素子の製造方法及びその製造方法により製造された圧電素子
JP5413598B2 (ja) 2010-03-11 2014-02-12 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5626512B2 (ja) 2010-04-27 2014-11-19 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置および圧電素子
WO2011142256A1 (ja) 2010-05-14 2011-11-17 コニカミノルタホールディングス株式会社 電気機械変換素子
JP2012016900A (ja) * 2010-07-08 2012-01-26 Seiko Epson Corp 液滴吐出ヘッド及び液滴吐出装置
JP5641207B2 (ja) * 2010-08-04 2014-12-17 セイコーエプソン株式会社 圧電素子の製造方法および液滴噴射ヘッドの製造方法
JP5724432B2 (ja) * 2011-02-17 2015-05-27 セイコーエプソン株式会社 圧電アクチュエーター、液体噴射ヘッド、および液体噴射装置
CN104708906B (zh) * 2013-12-17 2017-02-08 珠海赛纳打印科技股份有限公司 液体喷射装置和打印机
JP5874799B2 (ja) * 2014-10-01 2016-03-02 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置および圧電素子
JP6414434B2 (ja) * 2014-10-08 2018-10-31 ローム株式会社 インクジェット装置
JP6981000B2 (ja) 2016-12-02 2021-12-15 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び圧電デバイス
JP6961976B2 (ja) * 2017-03-29 2021-11-05 ブラザー工業株式会社 液体噴射ヘッド

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05286131A (ja) 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JP3890634B2 (ja) 1995-09-19 2007-03-07 セイコーエプソン株式会社 圧電体薄膜素子及びインクジェット式記録ヘッド
WO1999004976A1 (fr) 1997-07-25 1999-02-04 Seiko Epson Corporation Tete d'ecriture et imprimante a jet d'encre
JP3374900B2 (ja) 1997-11-26 2003-02-10 セイコーエプソン株式会社 インクジェット式記録ヘッド
DE69810215T2 (de) * 1997-09-01 2003-08-14 Seiko Epson Corp Tintenstrahldrucker
US6209994B1 (en) 1997-09-17 2001-04-03 Seiko Epson Corporation Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device
JP2000272125A (ja) 1999-03-24 2000-10-03 Seiko Epson Corp アクチュエータ装置及びその製造方法並びにインクジェット式記録ヘッド及びインクジェット式記録装置
ATE303250T1 (de) * 1998-06-08 2005-09-15 Seiko Epson Corp Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsvorrichtung
US6502928B1 (en) * 1998-07-29 2003-01-07 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same

Also Published As

Publication number Publication date
US20030214561A1 (en) 2003-11-20
US6764167B2 (en) 2004-07-20
EP1199172A3 (de) 2003-04-09
JP2002120369A (ja) 2002-04-23
ATE285331T1 (de) 2005-01-15
EP1199172A2 (de) 2002-04-24
EP1199172B1 (de) 2004-12-22
JP3491688B2 (ja) 2004-01-26
US20020051040A1 (en) 2002-05-02
DE60107917T2 (de) 2005-12-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition