DE60105899D1 - Schaltvorrichtung, insbesondere zum optischen schalten - Google Patents
Schaltvorrichtung, insbesondere zum optischen schaltenInfo
- Publication number
- DE60105899D1 DE60105899D1 DE60105899T DE60105899T DE60105899D1 DE 60105899 D1 DE60105899 D1 DE 60105899D1 DE 60105899 T DE60105899 T DE 60105899T DE 60105899 T DE60105899 T DE 60105899T DE 60105899 D1 DE60105899 D1 DE 60105899D1
- Authority
- DE
- Germany
- Prior art keywords
- switching
- optical
- switching device
- optical switching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/3552—1x1 switch, e.g. on/off switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00810162A EP1128201A1 (de) | 2000-02-25 | 2000-02-25 | Schaltvorrichtung, insbesondere zum optischen Schalten |
EP00810162 | 2000-02-25 | ||
PCT/CH2001/000118 WO2001063337A1 (en) | 2000-02-25 | 2001-02-23 | Switching device, particularly for optical switching |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60105899D1 true DE60105899D1 (de) | 2004-11-04 |
DE60105899T2 DE60105899T2 (de) | 2005-10-20 |
Family
ID=8174570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60105899T Expired - Lifetime DE60105899T2 (de) | 2000-02-25 | 2001-02-23 | Schaltvorrichtung, insbesondere zum optischen schalten |
Country Status (5)
Country | Link |
---|---|
US (1) | US6798935B2 (de) |
EP (2) | EP1128201A1 (de) |
DE (1) | DE60105899T2 (de) |
DK (1) | DK1171792T3 (de) |
WO (1) | WO2001063337A1 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003057569A (ja) * | 2001-06-07 | 2003-02-26 | Sumitomo Electric Ind Ltd | 光スイッチ及び光スイッチアレイ |
US6993218B2 (en) | 2001-09-21 | 2006-01-31 | Sumitomo Electric Industries, Ltd. | Optical switch and optical switch array |
JP2003266391A (ja) * | 2002-03-19 | 2003-09-24 | Japan Aviation Electronics Industry Ltd | 静電駆動デバイス |
US7417782B2 (en) * | 2005-02-23 | 2008-08-26 | Pixtronix, Incorporated | Methods and apparatus for spatial light modulation |
US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
US7755582B2 (en) | 2005-02-23 | 2010-07-13 | Pixtronix, Incorporated | Display methods and apparatus |
US7502159B2 (en) * | 2005-02-23 | 2009-03-10 | Pixtronix, Inc. | Methods and apparatus for actuating displays |
US7742016B2 (en) | 2005-02-23 | 2010-06-22 | Pixtronix, Incorporated | Display methods and apparatus |
US8482496B2 (en) | 2006-01-06 | 2013-07-09 | Pixtronix, Inc. | Circuits for controlling MEMS display apparatus on a transparent substrate |
US8159428B2 (en) | 2005-02-23 | 2012-04-17 | Pixtronix, Inc. | Display methods and apparatus |
US7304785B2 (en) * | 2005-02-23 | 2007-12-04 | Pixtronix, Inc. | Display methods and apparatus |
US20070205969A1 (en) | 2005-02-23 | 2007-09-06 | Pixtronix, Incorporated | Direct-view MEMS display devices and methods for generating images thereon |
US9229222B2 (en) | 2005-02-23 | 2016-01-05 | Pixtronix, Inc. | Alignment methods in fluid-filled MEMS displays |
US8310442B2 (en) * | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
US7746529B2 (en) | 2005-02-23 | 2010-06-29 | Pixtronix, Inc. | MEMS display apparatus |
US7271945B2 (en) * | 2005-02-23 | 2007-09-18 | Pixtronix, Inc. | Methods and apparatus for actuating displays |
US9261694B2 (en) | 2005-02-23 | 2016-02-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US9082353B2 (en) | 2010-01-05 | 2015-07-14 | Pixtronix, Inc. | Circuits for controlling display apparatus |
US7675665B2 (en) | 2005-02-23 | 2010-03-09 | Pixtronix, Incorporated | Methods and apparatus for actuating displays |
US7999994B2 (en) * | 2005-02-23 | 2011-08-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US20080158635A1 (en) * | 2005-02-23 | 2008-07-03 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US8519945B2 (en) | 2006-01-06 | 2013-08-27 | Pixtronix, Inc. | Circuits for controlling display apparatus |
US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
US7876489B2 (en) | 2006-06-05 | 2011-01-25 | Pixtronix, Inc. | Display apparatus with optical cavities |
US20080094853A1 (en) * | 2006-10-20 | 2008-04-24 | Pixtronix, Inc. | Light guides and backlight systems incorporating light redirectors at varying densities |
US9176318B2 (en) | 2007-05-18 | 2015-11-03 | Pixtronix, Inc. | Methods for manufacturing fluid-filled MEMS displays |
US7852546B2 (en) | 2007-10-19 | 2010-12-14 | Pixtronix, Inc. | Spacers for maintaining display apparatus alignment |
DE102008006570A1 (de) * | 2008-01-29 | 2009-07-30 | Robert Bosch Gmbh | Festkörpergelenk und mikromechanisches Bauelement |
US8248560B2 (en) | 2008-04-18 | 2012-08-21 | Pixtronix, Inc. | Light guides and backlight systems incorporating prismatic structures and light redirectors |
US7920317B2 (en) | 2008-08-04 | 2011-04-05 | Pixtronix, Inc. | Display with controlled formation of bubbles |
US8520285B2 (en) | 2008-08-04 | 2013-08-27 | Pixtronix, Inc. | Methods for manufacturing cold seal fluid-filled display apparatus |
US8169679B2 (en) * | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
BR112012019383A2 (pt) | 2010-02-02 | 2017-09-12 | Pixtronix Inc | Circuitos para controlar aparelho de exibição |
JP5960066B2 (ja) | 2010-03-11 | 2016-08-02 | ピクストロニクス,インコーポレイテッド | ディスプレイ装置のための反射および半透過動作モード |
CN103380394B (zh) | 2010-12-20 | 2017-03-22 | 追踪有限公司 | 用于带有减少的声发射的mems光调制器阵列的***和方法 |
US8749538B2 (en) | 2011-10-21 | 2014-06-10 | Qualcomm Mems Technologies, Inc. | Device and method of controlling brightness of a display based on ambient lighting conditions |
US8633551B1 (en) * | 2012-06-29 | 2014-01-21 | Intel Corporation | Semiconductor package with mechanical fuse |
US9183812B2 (en) | 2013-01-29 | 2015-11-10 | Pixtronix, Inc. | Ambient light aware display apparatus |
US9170421B2 (en) | 2013-02-05 | 2015-10-27 | Pixtronix, Inc. | Display apparatus incorporating multi-level shutters |
US9134552B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus with narrow gap electrostatic actuators |
US20150279282A1 (en) * | 2014-03-28 | 2015-10-01 | Pixtronix, Inc. | Distributed electrostatic actuator for mems devices |
CN105091737B (zh) * | 2015-08-24 | 2018-09-14 | 扬州大学 | 一种悬臂梁偏转位移测量装置 |
US10794701B2 (en) | 2018-05-01 | 2020-10-06 | Nxp Usa, Inc. | Inertial sensor with single proof mass and multiple sense axis capability |
US10712359B2 (en) * | 2018-05-01 | 2020-07-14 | Nxp Usa, Inc. | Flexure with enhanced torsional stiffness and MEMS device incorporating same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8707854D0 (en) * | 1987-04-02 | 1987-05-07 | British Telecomm | Radiation deflector assembly |
US5226099A (en) * | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
FR2726135B1 (fr) * | 1994-10-25 | 1997-01-17 | Suisse Electronique Microtech | Dispositif de commutation |
FR2729232A1 (fr) * | 1995-01-10 | 1996-07-12 | Commissariat Energie Atomique | Dispositif optique pour application optomecanique |
JP3787983B2 (ja) * | 1997-06-18 | 2006-06-21 | セイコーエプソン株式会社 | 光スイッチング素子、画像表示装置及び投射装置 |
US6154590A (en) * | 1998-09-28 | 2000-11-28 | Lucent Technologies Inc. | Wavelength-tunable devices and systems comprising flexed optical gratings |
US6535663B1 (en) * | 1999-07-20 | 2003-03-18 | Memlink Ltd. | Microelectromechanical device with moving element |
US6463189B1 (en) * | 2000-02-24 | 2002-10-08 | Avanex Corporation | Method and apparatus for optical switching devices utilizing a bi-morphic piezoelectric apparatus |
-
2000
- 2000-02-25 EP EP00810162A patent/EP1128201A1/de not_active Withdrawn
-
2001
- 2001-02-23 DK DK01905561T patent/DK1171792T3/da active
- 2001-02-23 WO PCT/CH2001/000118 patent/WO2001063337A1/en active IP Right Grant
- 2001-02-23 DE DE60105899T patent/DE60105899T2/de not_active Expired - Lifetime
- 2001-02-23 US US10/048,126 patent/US6798935B2/en not_active Expired - Lifetime
- 2001-02-23 EP EP01905561A patent/EP1171792B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1171792A1 (de) | 2002-01-16 |
DK1171792T3 (da) | 2004-11-29 |
US6798935B2 (en) | 2004-09-28 |
EP1128201A1 (de) | 2001-08-29 |
US20020118911A1 (en) | 2002-08-29 |
EP1171792B1 (de) | 2004-09-29 |
WO2001063337A1 (en) | 2001-08-30 |
DE60105899T2 (de) | 2005-10-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |