DE59700582D1 - Kondensor-monochromator-anordnung für röntgenstrahlung - Google Patents

Kondensor-monochromator-anordnung für röntgenstrahlung

Info

Publication number
DE59700582D1
DE59700582D1 DE59700582T DE59700582T DE59700582D1 DE 59700582 D1 DE59700582 D1 DE 59700582D1 DE 59700582 T DE59700582 T DE 59700582T DE 59700582 T DE59700582 T DE 59700582T DE 59700582 D1 DE59700582 D1 DE 59700582D1
Authority
DE
Germany
Prior art keywords
condensor
ray radiation
monochromator arrangement
monochromator
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59700582T
Other languages
English (en)
Inventor
Bastian Niemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE59700582D1 publication Critical patent/DE59700582D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • X-Ray Techniques (AREA)
DE59700582T 1996-01-10 1997-01-10 Kondensor-monochromator-anordnung für röntgenstrahlung Expired - Fee Related DE59700582D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19600701 1996-01-10
DE19633047 1996-08-18
PCT/DE1997/000033 WO1997025722A2 (de) 1996-01-10 1997-01-10 Kondensor-monochromator-anordnung für röntgenstrahlung

Publications (1)

Publication Number Publication Date
DE59700582D1 true DE59700582D1 (de) 1999-11-25

Family

ID=26021979

Family Applications (2)

Application Number Title Priority Date Filing Date
DE59700582T Expired - Fee Related DE59700582D1 (de) 1996-01-10 1997-01-10 Kondensor-monochromator-anordnung für röntgenstrahlung
DE19700615A Withdrawn DE19700615A1 (de) 1996-01-10 1997-01-10 Kondensor-Monochromator-Anordnung für Röntgenstrahlung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19700615A Withdrawn DE19700615A1 (de) 1996-01-10 1997-01-10 Kondensor-Monochromator-Anordnung für Röntgenstrahlung

Country Status (5)

Country Link
US (1) US6128364A (de)
EP (1) EP0873565B1 (de)
JP (1) JP3069131B2 (de)
DE (2) DE59700582D1 (de)
WO (1) WO1997025722A2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5326428A (en) 1993-09-03 1994-07-05 Micron Semiconductor, Inc. Method for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability
US6327335B1 (en) * 1999-04-13 2001-12-04 Vanderbilt University Apparatus and method for three-dimensional imaging using a stationary monochromatic x-ray beam
US6259764B1 (en) * 1999-07-16 2001-07-10 Agere Systems Guardian Corp. Zone plates for X-rays
DE50014428D1 (de) * 1999-07-30 2007-08-02 Zeiss Carl Smt Ag Steuerung der Beleuchtungsverteilung in der Austrittspupille eines EUV-Beleuchtungssystems
DE19954520A1 (de) * 1999-11-12 2001-05-17 Helmut Fischer Gmbh & Co Vorrichtung zur Führung von Röntgenstrahlen
US20050122509A1 (en) * 2002-07-18 2005-06-09 Leica Microsystems Semiconductor Gmbh Apparatus for wafer inspection
DE10242431A1 (de) * 2002-09-11 2004-03-25 Lutz Dr. Kipp Element zur Fokussierung von elektromagnetischen Strahlen oder Strahlen von Elementarteilchen
US7268945B2 (en) * 2002-10-10 2007-09-11 Xradia, Inc. Short wavelength metrology imaging system
US7170969B1 (en) * 2003-11-07 2007-01-30 Xradia, Inc. X-ray microscope capillary condenser system
US7486984B2 (en) * 2004-05-19 2009-02-03 Mxisystems, Inc. System and method for monochromatic x-ray beam therapy
DE102005056404B4 (de) * 2005-11-23 2013-04-25 Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh Röntgenmikroskop mit Kondensor-Monochromator-Anordnung hoher spektraler Auflösung
GB2441557B (en) * 2006-09-11 2010-03-17 Medway Nhs Trust Radiation device or signal
EP2370807A4 (de) 2008-12-01 2015-11-11 Univ North Carolina Systeme und verfahren zur bilderfassung eines objekts mittels mehrstrahlbildgebung aus einem röntgenstrahl mit polychromatischer verteilung
JP5525523B2 (ja) * 2009-07-01 2014-06-18 株式会社リガク Ｘ線装置、その使用方法およびｘ線照射方法
US8294989B2 (en) * 2009-07-30 2012-10-23 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus and method for creating a photonic densely-accumulated ray-point
US10620118B2 (en) * 2012-02-27 2020-04-14 Steris Instrument Management Services, Inc. Systems and methods for identifying optical materials
DE102012013530B3 (de) * 2012-07-05 2013-08-29 Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh Vorrichtung zur Messung resonanter inelastischer Röntgenstreuung einer Probe
US10541102B2 (en) * 2016-09-14 2020-01-21 The Boeing Company X-ray back scattering for inspection of part
DE102017105275B4 (de) 2017-03-13 2019-02-14 Focus Gmbh Vorrichtung und Verfahren zur Generierung monochromatischer Strahlung einer Strahlungsquelle mit Linienspektrum
DE102020001448B3 (de) 2020-03-03 2021-04-22 Friedrich Grimm Hybridprisma als Bauelement für optische Systeme

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5199057A (en) * 1989-08-09 1993-03-30 Nikon Corporation Image formation-type soft X-ray microscopic apparatus
US5204887A (en) * 1990-06-01 1993-04-20 Canon Kabushiki Kaisha X-ray microscope
DE4027285A1 (de) * 1990-08-29 1992-03-05 Zeiss Carl Fa Roentgenmikroskop
JPH04353800A (ja) * 1991-05-31 1992-12-08 Olympus Optical Co Ltd 軟ｘ線顕微鏡
US5177774A (en) * 1991-08-23 1993-01-05 Trustees Of Princeton University Reflection soft X-ray microscope and method
US5361292A (en) * 1993-05-11 1994-11-01 The United States Of America As Represented By The Department Of Energy Condenser for illuminating a ring field
JP3167095B2 (ja) * 1995-07-04 2001-05-14 キヤノン株式会社 照明装置とこれを有する露光装置や顕微鏡装置、ならびにデバイス生産方法
US6023496A (en) * 1997-04-30 2000-02-08 Shimadzu Corporation X-ray fluorescence analyzing apparatus
US6028911A (en) * 1998-08-03 2000-02-22 Rigaku Industrial Corporation X-ray analyzing apparatus with enhanced radiation intensity

Also Published As

Publication number Publication date
WO1997025722A3 (de) 1997-09-04
JP3069131B2 (ja) 2000-07-24
JPH11508692A (ja) 1999-07-27
EP0873565B1 (de) 1999-10-20
DE19700615A1 (de) 1997-07-17
US6128364A (en) 2000-10-03
WO1997025722A2 (de) 1997-07-17
EP0873565A2 (de) 1998-10-28

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee