DE59602809D1 - METHOD FOR PRODUCING A MICROMEMBRANE VALVE - Google Patents

METHOD FOR PRODUCING A MICROMEMBRANE VALVE

Info

Publication number
DE59602809D1
DE59602809D1 DE59602809T DE59602809T DE59602809D1 DE 59602809 D1 DE59602809 D1 DE 59602809D1 DE 59602809 T DE59602809 T DE 59602809T DE 59602809 T DE59602809 T DE 59602809T DE 59602809 D1 DE59602809 D1 DE 59602809D1
Authority
DE
Germany
Prior art keywords
micromembrane
valve
producing
micromembrane valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59602809T
Other languages
German (de)
Inventor
Claudia Goll
Burkhard Buestgens
Werner Schomburg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe GmbH filed Critical Forschungszentrum Karlsruhe GmbH
Application granted granted Critical
Publication of DE59602809D1 publication Critical patent/DE59602809D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
DE59602809T 1995-06-23 1996-05-24 METHOD FOR PRODUCING A MICROMEMBRANE VALVE Expired - Fee Related DE59602809D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19522806A DE19522806C2 (en) 1995-06-23 1995-06-23 Method of manufacturing a micro diaphragm valve
PCT/EP1996/002243 WO1997001054A1 (en) 1995-06-23 1996-05-24 Menbrane-type microvalve and method of manufacturing it

Publications (1)

Publication Number Publication Date
DE59602809D1 true DE59602809D1 (en) 1999-09-23

Family

ID=7765066

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19522806A Expired - Fee Related DE19522806C2 (en) 1995-06-23 1995-06-23 Method of manufacturing a micro diaphragm valve
DE59602809T Expired - Fee Related DE59602809D1 (en) 1995-06-23 1996-05-24 METHOD FOR PRODUCING A MICROMEMBRANE VALVE

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19522806A Expired - Fee Related DE19522806C2 (en) 1995-06-23 1995-06-23 Method of manufacturing a micro diaphragm valve

Country Status (3)

Country Link
EP (1) EP0834031B1 (en)
DE (2) DE19522806C2 (en)
WO (1) WO1997001054A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
DE19752028C2 (en) * 1997-11-24 1999-09-30 Siemens Ag Method for adjusting the valve needle stroke in metering valves and metering valve with valve needle stroke adjusted according to this method
DE19816283A1 (en) * 1998-04-11 1999-10-14 Festo Ag & Co Quantity amplifier device for fluid flows
DE19821638C2 (en) * 1998-05-14 2000-07-06 Festo Ag & Co Microvalve
JP2008507673A (en) 2004-07-23 2008-03-13 エイエフエイ・コントロールズ，リミテッド・ライアビリティ・カンパニー Method of operating microvalve assembly and related structure and related device
DE102005062554A1 (en) * 2005-12-27 2007-07-05 Robert Bosch Gmbh Micro-mechanical component used in the semiconductor industry comprises a cap having a membrane for closing an access opening
DE102007023286B4 (en) 2007-05-18 2010-11-04 Karlsruher Institut für Technologie Process for producing a membrane in a frame
DE102008054220A1 (en) * 2008-10-31 2010-05-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micro valve for adjusting microburners, microgenerators, microreformers, microreactors, microfuel cells, and cooling or heating systems, and for use in micro-process engineering, micro-power engineering and microanalytics, has valve chamber
DE102010051743B4 (en) 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmable hydrocephalus valve
DE102013209866B4 (en) * 2013-05-28 2021-11-04 Robert Bosch Gmbh Device with a predetermined fluid displacement
DE102018124467A1 (en) * 2018-10-04 2020-04-09 Mst Innovation Gmbh Hydraulic micro valve
DE102020115510A1 (en) 2020-06-10 2021-12-16 Bürkert Werke GmbH & Co. KG Valve and assembly with one valve

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH606878A5 (en) * 1975-11-18 1978-11-15 Sulzer Ag
US4824073A (en) * 1986-09-24 1989-04-25 Stanford University Integrated, microminiature electric to fluidic valve
US4858883A (en) * 1987-12-11 1989-08-22 Integrated Fluidics, Inc. Valve with flexible sheet member
DD281444A5 (en) * 1987-12-30 1990-08-08 Dresden Komplette Chemieanlag COMPRESSED MEMBRANE VALVE
DE3814150A1 (en) * 1988-04-27 1989-11-09 Draegerwerk Ag VALVE ARRANGEMENT MADE FROM MICROSTRUCTURED COMPONENTS
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
DE4139668A1 (en) * 1991-12-02 1993-06-03 Kernforschungsz Karlsruhe MICROVALVE AND METHOD FOR THE PRODUCTION THEREOF
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
JP3418741B2 (en) * 1993-05-27 2003-06-23 フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ． Micro valve

Also Published As

Publication number Publication date
DE19522806C2 (en) 1997-06-12
EP0834031B1 (en) 1999-08-18
EP0834031A1 (en) 1998-04-08
DE19522806A1 (en) 1997-01-30
WO1997001054A1 (en) 1997-01-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KARLSRUHER INSTITUT FUER TECHNOLOGIE, 76131 KA, DE

8339 Ceased/non-payment of the annual fee