DE59402980D1 - Lubricant-free vacuum pump device - Google Patents

Lubricant-free vacuum pump device

Info

Publication number
DE59402980D1
DE59402980D1 DE59402980T DE59402980T DE59402980D1 DE 59402980 D1 DE59402980 D1 DE 59402980D1 DE 59402980 T DE59402980 T DE 59402980T DE 59402980 T DE59402980 T DE 59402980T DE 59402980 D1 DE59402980 D1 DE 59402980D1
Authority
DE
Germany
Prior art keywords
lubricant
vacuum pump
pump device
free vacuum
free
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59402980T
Other languages
German (de)
Inventor
Erich Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNF Neuberger GmbH
Original Assignee
KNF Neuberger GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KNF Neuberger GmbH filed Critical KNF Neuberger GmbH
Application granted granted Critical
Publication of DE59402980D1 publication Critical patent/DE59402980D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/04—Measures to avoid lubricant contaminating the pumped fluid
    • F04B39/041—Measures to avoid lubricant contaminating the pumped fluid sealing for a reciprocating rod
    • F04B39/048—Sealing between piston and carter being provided by a diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE59402980T 1993-04-15 1994-03-10 Lubricant-free vacuum pump device Expired - Lifetime DE59402980D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE9305554U DE9305554U1 (en) 1993-04-15 1993-04-15
DE4320963A DE4320963C2 (en) 1993-04-15 1993-06-24 Lubricant-free vacuum pump device

Publications (1)

Publication Number Publication Date
DE59402980D1 true DE59402980D1 (en) 1997-07-10

Family

ID=6891959

Family Applications (3)

Application Number Title Priority Date Filing Date
DE9305554U Expired - Lifetime DE9305554U1 (en) 1993-04-15 1993-04-15
DE4320963A Expired - Lifetime DE4320963C2 (en) 1993-04-15 1993-06-24 Lubricant-free vacuum pump device
DE59402980T Expired - Lifetime DE59402980D1 (en) 1993-04-15 1994-03-10 Lubricant-free vacuum pump device

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE9305554U Expired - Lifetime DE9305554U1 (en) 1993-04-15 1993-04-15
DE4320963A Expired - Lifetime DE4320963C2 (en) 1993-04-15 1993-06-24 Lubricant-free vacuum pump device

Country Status (1)

Country Link
DE (3) DE9305554U1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442174A1 (en) * 1994-11-26 1996-05-30 Leybold Ag Leak detector with vacuum pumps and operating procedures
IT1297347B1 (en) * 1997-12-24 1999-09-01 Varian Spa VACUUM PUMP.
DE19940498A1 (en) 1999-08-26 2001-03-22 Knf Neuberger Gmbh Diaphragm pump
DE102013213257A1 (en) * 2013-07-05 2015-01-08 Pfeiffer Vacuum Gmbh Diaphragm vacuum pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU168667B (en) * 1975-02-25 1976-06-28
US4505647A (en) * 1978-01-26 1985-03-19 Grumman Allied Industries, Inc. Vacuum pumping system
ES233729Y (en) * 1978-02-03 1978-08-01 PERFECTED VACUUM PUMP.
DE3710782A1 (en) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media
DE8808819U1 (en) * 1988-07-08 1988-09-01 Hayn, Otto, 8000 Muenchen, De

Also Published As

Publication number Publication date
DE9305554U1 (en) 1993-06-17
DE4320963C2 (en) 1996-11-28
DE4320963A1 (en) 1994-10-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition