DE59103890D1 - Process for the production of self-supporting microstructures. - Google Patents

Process for the production of self-supporting microstructures.

Info

Publication number
DE59103890D1
DE59103890D1 DE59103890T DE59103890T DE59103890D1 DE 59103890 D1 DE59103890 D1 DE 59103890D1 DE 59103890 T DE59103890 T DE 59103890T DE 59103890 T DE59103890 T DE 59103890T DE 59103890 D1 DE59103890 D1 DE 59103890D1
Authority
DE
Germany
Prior art keywords
self
production
microstructures
supporting microstructures
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59103890T
Other languages
German (de)
Inventor
Werner Karl Dr Schomburg
Robert Ruprecht
Gerhard Stern
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Application granted granted Critical
Publication of DE59103890D1 publication Critical patent/DE59103890D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/08—Perforated or foraminous objects, e.g. sieves

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
DE59103890T 1990-10-29 1991-10-24 Process for the production of self-supporting microstructures. Expired - Fee Related DE59103890D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4034365A DE4034365A1 (en) 1990-10-29 1990-10-29 METHOD FOR PRODUCING SUPPORTING MICROSTRUCTURES

Publications (1)

Publication Number Publication Date
DE59103890D1 true DE59103890D1 (en) 1995-01-26

Family

ID=6417255

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4034365A Granted DE4034365A1 (en) 1990-10-29 1990-10-29 METHOD FOR PRODUCING SUPPORTING MICROSTRUCTURES
DE59103890T Expired - Fee Related DE59103890D1 (en) 1990-10-29 1991-10-24 Process for the production of self-supporting microstructures.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4034365A Granted DE4034365A1 (en) 1990-10-29 1990-10-29 METHOD FOR PRODUCING SUPPORTING MICROSTRUCTURES

Country Status (2)

Country Link
EP (1) EP0483662B1 (en)
DE (2) DE4034365A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4406600C1 (en) * 1994-03-01 1995-04-27 Kernforschungsz Karlsruhe Process for the production of a filter for electromagnetic radiation
EP1181239A1 (en) * 1999-03-31 2002-02-27 Siemens Aktiengesellschaft Method for producing self-supporting micro-structures, consisting of thin, flat sections or membranes, and use of micro-structures produced by said method as a resistance grid in a device for measuring weak gas flows
DE10239551A1 (en) * 2002-08-23 2004-03-04 Daimlerchrysler Ag Filter body for soot filter

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1160258B (en) * 1961-06-13 1963-12-27 Richard Steding Process for the production of metal foils by electroforming
DE1303000B (en) * 1966-07-06 1971-01-28
DE2512086C3 (en) * 1975-03-19 1978-11-30 Siemens Ag, 1000 Berlin Und 8000 Muenchen Process for the production of self-supporting, thin metal structures
DE2832408A1 (en) * 1978-07-24 1980-02-14 Siemens Ag METHOD FOR PRODUCING PRECISION FLAT PARTS, ESPECIALLY WITH MICRO-OPENINGS
DE3232499A1 (en) * 1982-09-01 1984-03-01 Philips Patentverwaltung Gmbh, 2000 Hamburg MASK FOR PATTERN PRODUCTION IN LACQUER LAYERS BY MEANS OF X-RAY RAY LITHOGRAPHY AND METHOD FOR THEIR PRODUCTION

Also Published As

Publication number Publication date
EP0483662A2 (en) 1992-05-06
EP0483662A3 (en) 1993-03-03
EP0483662B1 (en) 1994-12-14
DE4034365A1 (en) 1992-04-30
DE4034365C2 (en) 1993-03-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee