DE3877191D1 - Verfahren und vorrichtung zum messen einer dreidimensionalen gekruemmten oberflaeche. - Google Patents

Verfahren und vorrichtung zum messen einer dreidimensionalen gekruemmten oberflaeche.

Info

Publication number: DE3877191D1
Authority: DE; Germany
Prior art keywords: measuring; curved surface; dimensional curved; dimensional; curved
Prior art date: 1988-05-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE8888309658T

Other languages

English (en)

Other versions

DE3877191T2 (de

Inventor

Mitsuaki Uesugi

Masaichi Inomata

Isamu Komine

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

JFE Engineering Corp

Original Assignee

NKK Corp

Nippon Kokan Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-05-17

Filing date

1988-10-14

Publication date

1993-02-11

1988-10-14 Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp

1993-02-11 Publication of DE3877191D1 publication Critical patent/DE3877191D1/de

1993-05-19 Application granted granted Critical

1993-05-19 Publication of DE3877191T2 publication Critical patent/DE3877191T2/de

2008-10-15 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)

DE8888309658T 1988-05-17 1988-10-14 Verfahren und vorrichtung zum messen einer dreidimensionalen gekruemmten oberflaeche. Expired - Fee Related DE3877191T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP63118201A JPH061167B2 (ja)	1988-05-17	1988-05-17	３次元曲面形状の測定方法及び装置

Publications (2)

Publication Number	Publication Date
DE3877191D1 true DE3877191D1 (de)	1993-02-11
DE3877191T2 DE3877191T2 (de)	1993-05-19

Family

ID=14730688

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8888309658T Expired - Fee Related DE3877191T2 (de)	1988-05-17	1988-10-14	Verfahren und vorrichtung zum messen einer dreidimensionalen gekruemmten oberflaeche.

Country Status (6)

Country	Link
US (1)	US4874955A (de)
EP (1)	EP0342289B1 (de)
JP (1)	JPH061167B2 (de)
KR (1)	KR920010550B1 (de)
CA (1)	CA1294426C (de)
DE (1)	DE3877191T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CA1313040C (en) *	1988-03-31	1993-01-26	Mitsuaki Uesugi	Method and apparatus for measuring a three-dimensional curved surface shape
US5175601A (en) *	1991-10-15	1992-12-29	Electro-Optical Information Systems	High-speed 3-D surface measurement surface inspection and reverse-CAD system
US5361308A (en) *	1992-01-10	1994-11-01	General Motors Corporation	3-D measurement of cutting tool wear
US5319445A (en) *	1992-09-08	1994-06-07	Fitts John M	Hidden change distribution grating and use in 3D moire measurement sensors and CMM applications
US5543918A (en) *	1995-01-06	1996-08-06	International Business Machines Corporation	Through-the-lens confocal height measurement
US5627363A (en) *	1995-02-16	1997-05-06	Environmental Research Institute Of Michigan	System and method for three-dimensional imaging of opaque objects using frequency diversity and an opacity constraint
US6215269B1 (en) *	1996-05-21	2001-04-10	Kent Gregg	Method of exposing a path on a curved, or otherwise irregularly shaped, surface
DE19721884C1 (de)	1997-05-26	1998-06-04	Bosch Gmbh Robert	Interferometrische Meßvorrichtung
AUPO810997A0 (en) *	1997-07-18	1997-08-14	Lions Eye Institute Of Western Australia Incorporated, The	Method and apparatus for calibration of ablation lasers
JP3695188B2 (ja) *	1998-12-21	2005-09-14	富士ゼロックス株式会社	形状計測装置および形状計測方法
US6888640B2 (en)	2000-02-04	2005-05-03	Mario J. Spina	Body spatial dimension mapper
DE10040323C2 (de) *	2000-08-17	2002-11-14	Polytec Gesellschaft Fuer Analysen-, Mes- Und Regeltechnik Mbh & Co Kg	Vorrichtung und Verfahren zum optischen Vermessen des Höhenprofils einer Oberfläche
US7147338B2 (en)	2001-04-09	2006-12-12	Kent Gregg	Circuit on a curved, or otherwise irregularly shaped, surface, such as on a helmet to be worn on the head, including a fiber optic conductive path
EP1805480B1 (de) *	2004-10-29	2009-01-14	DeguDent GmbH	Verfahren und vorrichtung zur erfassung von konturdaten und/oder optischen eigenschaften eines dreidimensionalen semitransparenten objekts
JP4197339B2 (ja) *	2006-01-16	2008-12-17	アンリツ株式会社	三次元形状測定装置
JP5086655B2 (ja) *	2007-02-06	2012-11-28	株式会社トプコン	三次元形状測定装置及び三次元形状測定方法
JP5342178B2 (ja) *	2008-06-10	2013-11-13	株式会社ニコンインステック	形状測定装置およびその形状測定方法
KR101458997B1 (ko)	2014-06-09	2014-11-07	김호환	리닉 간섭계의 기준미러 변환장치
CN113251943A (zh) *	2020-02-12	2021-08-13	三营超精密光电(晋城)有限公司	基于光干涉的测量***及方法
CN112388159A (zh) *	2020-10-29	2021-02-23	青岛理工大学	分数傅里叶全息飞秒激光三维并行加工、监测***及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59202006A (ja) *	1983-04-30	1984-11-15	Nippon Kokan Kk <Nkk>	溶接位置形状測定装置
JPS6011106A (ja) *	1983-06-30	1985-01-21	Matsushita Electric Ind Co Ltd	形状検出装置
JPH061164B2 (ja) *	1985-01-31	1994-01-05	伍良松本	立体形状測定装置
JPH0654221B2 (ja) *	1985-04-12	1994-07-20	株式会社日立製作所	段差測定装置およびその方法
US4818110A (en) *	1986-05-06	1989-04-04	Kla Instruments Corporation	Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like
US4794550A (en) *	1986-10-15	1988-12-27	Eastman Kodak Company	Extended-range moire contouring
JPH0611106A (ja) *	1992-06-25	1994-01-21	Nippon Steel Corp	加熱炉の燃焼方法

1988
- 1988-05-17 JP JP63118201A patent/JPH061167B2/ja not_active Expired - Lifetime
- 1988-09-30 KR KR1019880012739A patent/KR920010550B1/ko not_active IP Right Cessation
- 1988-10-07 CA CA000579657A patent/CA1294426C/en not_active Expired - Lifetime
- 1988-10-14 EP EP88309658A patent/EP0342289B1/de not_active Expired - Lifetime
- 1988-10-14 DE DE8888309658T patent/DE3877191T2/de not_active Expired - Fee Related
- 1988-10-17 US US07/258,603 patent/US4874955A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0342289A3 (en)	1990-02-07
CA1294426C (en)	1992-01-21
EP0342289A2 (de)	1989-11-23
EP0342289B1 (de)	1992-12-30
KR920010550B1 (ko)	1992-12-05
DE3877191T2 (de)	1993-05-19
US4874955A (en)	1989-10-17
JPH061167B2 (ja)	1994-01-05
JPH01288702A (ja)	1989-11-21
KR890017521A (ko)	1989-12-16

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Legal Events

Date	Code	Title	Description
1994-02-03	8364	No opposition during term of opposition
1999-12-09	8339	Ceased/non-payment of the annual fee