DE3869301D1 - Methode zum reinigen von giftige komponenten enthaltendem gas. - Google Patents

Methode zum reinigen von giftige komponenten enthaltendem gas.

Info

Publication number
DE3869301D1
DE3869301D1 DE8888307918T DE3869301T DE3869301D1 DE 3869301 D1 DE3869301 D1 DE 3869301D1 DE 8888307918 T DE8888307918 T DE 8888307918T DE 3869301 T DE3869301 T DE 3869301T DE 3869301 D1 DE3869301 D1 DE 3869301D1
Authority
DE
Germany
Prior art keywords
gas containing
toxic components
purifying gas
containing toxic
purifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888307918T
Other languages
English (en)
Inventor
Koichi Kitahara
Takashi Shimada
Noboru Akita
Tadashi Hiramoto
Kohhei Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63120645A external-priority patent/JPH07100128B2/ja
Priority claimed from JP63144643A external-priority patent/JPH07100130B2/ja
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Application granted granted Critical
Publication of DE3869301D1 publication Critical patent/DE3869301D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Catalysts (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Detergent Compositions (AREA)
  • Treating Waste Gases (AREA)
DE8888307918T 1987-08-31 1988-08-26 Methode zum reinigen von giftige komponenten enthaltendem gas. Expired - Lifetime DE3869301D1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP21500087 1987-08-31
JP32556587 1987-12-24
JP32556687 1987-12-24
JP63120645A JPH07100128B2 (ja) 1987-08-31 1988-05-19 ガスの浄化方法
JP63144643A JPH07100130B2 (ja) 1988-06-14 1988-06-14 ガスの浄化方法

Publications (1)

Publication Number Publication Date
DE3869301D1 true DE3869301D1 (de) 1992-04-23

Family

ID=27526882

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888307918T Expired - Lifetime DE3869301D1 (de) 1987-08-31 1988-08-26 Methode zum reinigen von giftige komponenten enthaltendem gas.

Country Status (4)

Country Link
US (1) US4910001A (de)
EP (1) EP0309099B1 (de)
KR (1) KR960004610B1 (de)
DE (1) DE3869301D1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3822777A1 (de) * 1988-07-06 1990-01-11 Hoechst Ag Verfahren zur entfernung von phosphorwasserstoff aus abluft
JP2732262B2 (ja) * 1988-09-26 1998-03-25 日本パイオニクス株式会社 アルシンの精製方法
FR2652280B1 (fr) * 1989-09-22 1991-11-29 Air Liquide Procede d'elimination d'hydrures gazeux sur support solide a base d'oxydes metalliques.
US4933159A (en) * 1989-11-02 1990-06-12 Phillips Petroleum Company Sorption of trialkyl arsines
DE4005695A1 (de) * 1990-02-20 1991-08-29 Hydrid Wasserstofftech Chemiesorptionsfaehige metallegierung und verfahren zur gasreinigung
US5182088A (en) * 1990-09-07 1993-01-26 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Removal of gaseous hydrides
EP0624392B1 (de) * 1993-05-11 1998-08-12 Japan Pionics Co., Ltd. Verfahren zur Reinigung von Schadgas
JP3340510B2 (ja) * 1993-05-19 2002-11-05 日本パイオニクス株式会社 有害ガスの浄化方法
US5414199A (en) * 1993-09-28 1995-05-09 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for two-stage oxidation of wastes
JP3347478B2 (ja) * 1994-06-13 2002-11-20 日本パイオニクス株式会社 排ガスの浄化方法
US5858065A (en) * 1995-07-17 1999-01-12 American Air Liquide Process and system for separation and recovery of perfluorocompound gases
JPH0929002A (ja) 1995-07-17 1997-02-04 Teisan Kk ガス回収装置
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
JP3716030B2 (ja) * 1996-02-29 2005-11-16 日本パイオニクス株式会社 有害ガスの浄化方法
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
IE80909B1 (en) * 1996-06-14 1999-06-16 Air Liquide An improved process and system for separation and recovery of perfluorocompound gases
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
JPH10235185A (ja) * 1997-02-26 1998-09-08 Japan Pionics Co Ltd 有害ガスの浄化剤および浄化方法
US6491884B1 (en) 1999-11-26 2002-12-10 Advanced Technology Materials, Inc. In-situ air oxidation treatment of MOCVD process effluent
DE60123547T2 (de) 2000-11-14 2007-08-09 Japan Pionics Co. Ltd. Verfahren zur Wiedergewinnung einer Kupfer- und/oder Manganverbindung aus Gasreinigungspartikeln
US6805728B2 (en) * 2002-12-09 2004-10-19 Advanced Technology Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
US7364603B2 (en) 2002-12-09 2008-04-29 Applied Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
US6843830B2 (en) * 2003-04-15 2005-01-18 Advanced Technology Materials, Inc. Abatement system targeting a by-pass effluent stream of a semiconductor process tool
CN103121663A (zh) * 2011-11-18 2013-05-29 扬光绿能股份有限公司 氢气产生设备
CN106111050A (zh) * 2016-07-08 2016-11-16 常州天兴环保科技有限公司 一种tx‑gf‑jh‑3型废气净化吸附剂

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB328592A (en) * 1929-01-18 1930-04-22 Ig Farbenindustrie Ag Improvements in the purification of gases
DE1131512B (de) * 1954-12-30 1962-06-14 Dr Hugo Stoltzenberg Absorptionsmassen für transparente Atemfilter und Verfahren zu deren Herstellung
GB1315374A (en) * 1970-04-20 1973-05-02 British American Tobacco Co Catalytic oxidation of carbon monoxide
JPS5617137B2 (de) * 1974-05-29 1981-04-21
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法
JPS6071040A (ja) * 1983-09-27 1985-04-22 Takeda Chem Ind Ltd 有害ガス吸着剤
JPS6190726A (ja) * 1984-10-12 1986-05-08 Nippon Paionikusu Kk 除去剤
JPS61118117A (ja) * 1984-11-14 1986-06-05 Taiyo Sanso Kk 有毒ガス成分を含むガスの処理方法
JPS6295119A (ja) * 1985-10-21 1987-05-01 Nippon Chem Ind Co Ltd:The 水素化ガスの除去方法

Also Published As

Publication number Publication date
KR960004610B1 (ko) 1996-04-09
US4910001A (en) 1990-03-20
EP0309099A1 (de) 1989-03-29
EP0309099B1 (de) 1992-03-18
KR890003438A (ko) 1989-04-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee