DE3867317D1 - Einrichtung, um geringe fluessigkeitsmengen zu transportieren. - Google Patents

Einrichtung, um geringe fluessigkeitsmengen zu transportieren.

Info

Publication number
DE3867317D1
DE3867317D1 DE8888108514T DE3867317T DE3867317D1 DE 3867317 D1 DE3867317 D1 DE 3867317D1 DE 8888108514 T DE8888108514 T DE 8888108514T DE 3867317 T DE3867317 T DE 3867317T DE 3867317 D1 DE3867317 D1 DE 3867317D1
Authority
DE
Germany
Prior art keywords
liquid
low quantities
transporting low
transporting
quantities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888108514T
Other languages
English (en)
Inventor
Kuniyoshi Tsubouchi
Shohei Narusawa Apartm Yoshida
Kiyoshi Namura
Tsutomu Okusawa
Akira Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3867317D1 publication Critical patent/DE3867317D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE8888108514T 1987-05-29 1988-05-27 Einrichtung, um geringe fluessigkeitsmengen zu transportieren. Expired - Lifetime DE3867317D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13140687A JPS63297779A (ja) 1987-05-29 1987-05-29 微量流体移送装置

Publications (1)

Publication Number Publication Date
DE3867317D1 true DE3867317D1 (de) 1992-02-13

Family

ID=15057228

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888108514T Expired - Lifetime DE3867317D1 (de) 1987-05-29 1988-05-27 Einrichtung, um geringe fluessigkeitsmengen zu transportieren.

Country Status (3)

Country Link
EP (1) EP0292994B1 (de)
JP (1) JPS63297779A (de)
DE (1) DE3867317D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3844059A1 (de) * 1988-12-28 1990-08-30 Allweiler Ag Vorrichtung und verfahren zum bewegen von stroemungsmedien
WO2011065356A1 (ja) * 2009-11-25 2011-06-03 学校法人 東海大学 機能細管装置およびその駆動方法
DE102010039943A1 (de) * 2010-08-30 2012-03-01 Robert Bosch Gmbh Verfahren zur Ansteuerung einer Druckversorgungseinheit für ein Fluidaggregat und korrespondierendes Fluidaggregat
US10354763B2 (en) 2015-12-07 2019-07-16 Ge-Hitachi Nuclear Energy Americas Llc Piping enhancement for backflow prevention in a multiple loop, metal cooled nuclear reactor system
JP7219722B2 (ja) * 2017-12-26 2023-02-08 株式会社村田製作所 ポンプ装置
DE112020000997B4 (de) 2019-04-25 2024-01-11 Murata Manufacturing Co., Ltd. Pumpvorrichtung mit einer ersten und zweiten piezoelektrischen Pumpe mit unterschiedlichen Eingangsleistungen

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107630A (en) * 1955-01-31 1963-10-22 Textron Inc Non-magnetic electro-hydraulic pump
US3289594A (en) * 1963-07-11 1966-12-06 Thiele Ernst Valveless pump for liquids
US3657930A (en) * 1969-06-24 1972-04-25 Bendix Corp Piezoelectric crystal operated pump to supply fluid pressure to hydrostatically support inner bearings of a gyroscope
JPS5142539B2 (de) * 1971-09-14 1976-11-16
GB1530662A (en) * 1976-03-01 1978-11-01 Mullard Ltd Peristaltic pump
JPS57137671A (en) * 1981-02-19 1982-08-25 Natl Aerospace Lab Laminated bimolf vibrator pump
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor
JPH0783064B2 (ja) * 1985-01-18 1995-09-06 株式会社日立製作所 半導体記憶装置

Also Published As

Publication number Publication date
JPS63297779A (ja) 1988-12-05
EP0292994A3 (en) 1989-10-25
EP0292994B1 (de) 1992-01-02
EP0292994A2 (de) 1988-11-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee