DE3778976D1 - Verfahren zum kalibrieren von reflexions-messgeraeten. - Google Patents
Verfahren zum kalibrieren von reflexions-messgeraeten.Info
- Publication number
- DE3778976D1 DE3778976D1 DE8787108370T DE3778976T DE3778976D1 DE 3778976 D1 DE3778976 D1 DE 3778976D1 DE 8787108370 T DE8787108370 T DE 8787108370T DE 3778976 T DE3778976 T DE 3778976T DE 3778976 D1 DE3778976 D1 DE 3778976D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring devices
- reflection measuring
- calibrating
- calibrating reflection
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4785—Standardising light scatter apparatus; Standards therefor
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/877,169 US4729657A (en) | 1986-06-23 | 1986-06-23 | Method of calibrating reflectance measuring devices |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3778976D1 true DE3778976D1 (de) | 1992-06-17 |
Family
ID=25369402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787108370T Expired - Fee Related DE3778976D1 (de) | 1986-06-23 | 1987-06-10 | Verfahren zum kalibrieren von reflexions-messgeraeten. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4729657A (de) |
EP (1) | EP0250959B1 (de) |
JP (1) | JPS635240A (de) |
AU (1) | AU574287B2 (de) |
CA (1) | CA1297700C (de) |
DE (1) | DE3778976D1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1237628B (it) * | 1989-10-03 | 1993-06-12 | Michele Gennaro De | Metodo per misurare l'efficienza di una combustione e apparecchio per attuare il metodo. |
US5162874A (en) * | 1990-12-24 | 1992-11-10 | Xerox Corporation | Electrophotographic machine having a method and apparatus for measuring toner density by using diffuse electromagnetic energy |
US5357336A (en) * | 1991-08-08 | 1994-10-18 | The Dow Chemical Company | Method and apparatus for multivariate characterization of optical instrument response |
JP3212779B2 (ja) * | 1993-11-12 | 2001-09-25 | 富士写真フイルム株式会社 | 光学式分析装置の分光器の機差補正方法 |
FI935180A0 (fi) * | 1993-11-22 | 1993-11-22 | Rautaruukki Oy | Konstruktion hos ett kalibreringsstycke, foerfarande foer utforming av den samma och kalibreringsfoerfarande |
US5597532A (en) * | 1994-10-20 | 1997-01-28 | Connolly; James | Apparatus for determining substances contained in a body fluid |
US5695949A (en) * | 1995-04-07 | 1997-12-09 | Lxn Corp. | Combined assay for current glucose level and intermediate or long-term glycemic control |
US6061128A (en) * | 1997-09-04 | 2000-05-09 | Avocet Medical, Inc. | Verification device for optical clinical assay systems |
US8564780B2 (en) * | 2003-01-16 | 2013-10-22 | Jordan Valley Semiconductors Ltd. | Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces |
US7126131B2 (en) * | 2003-01-16 | 2006-10-24 | Metrosol, Inc. | Broad band referencing reflectometer |
US20080246951A1 (en) * | 2007-04-09 | 2008-10-09 | Phillip Walsh | Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces |
US7399975B2 (en) * | 2004-08-11 | 2008-07-15 | Metrosol, Inc. | Method and apparatus for performing highly accurate thin film measurements |
US7282703B2 (en) * | 2004-08-11 | 2007-10-16 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
US7511265B2 (en) * | 2004-08-11 | 2009-03-31 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
US7804059B2 (en) * | 2004-08-11 | 2010-09-28 | Jordan Valley Semiconductors Ltd. | Method and apparatus for accurate calibration of VUV reflectometer |
US7663097B2 (en) * | 2004-08-11 | 2010-02-16 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
CA2584529C (en) * | 2004-11-24 | 2017-09-12 | Garland Christian Misener | Reflectometer and associated light source for use in a chemical analyzer |
US7663757B2 (en) * | 2006-09-27 | 2010-02-16 | Alberta Research Council Inc. | Apparatus and method for obtaining a reflectance property indication of a sample |
US20080129986A1 (en) * | 2006-11-30 | 2008-06-05 | Phillip Walsh | Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations |
JP5020219B2 (ja) * | 2008-11-28 | 2012-09-05 | パナソニック株式会社 | 分析方法および分析装置 |
JP5274031B2 (ja) * | 2008-01-25 | 2013-08-28 | パナソニック株式会社 | 分析方法および分析装置 |
US8310678B2 (en) * | 2008-01-25 | 2012-11-13 | Panasonic Corporation | Analyzing device and analyzing method |
JP2009192336A (ja) * | 2008-02-14 | 2009-08-27 | Panasonic Corp | 分析装置 |
US20090219537A1 (en) * | 2008-02-28 | 2009-09-03 | Phillip Walsh | Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths |
US8153987B2 (en) * | 2009-05-22 | 2012-04-10 | Jordan Valley Semiconductors Ltd. | Automated calibration methodology for VUV metrology system |
JP5540354B2 (ja) * | 2010-04-30 | 2014-07-02 | 独立行政法人 宇宙航空研究開発機構 | 校正機能を備えた反射率及び反射濃度の計測方法及びそれを実施するシステム |
US8867041B2 (en) | 2011-01-18 | 2014-10-21 | Jordan Valley Semiconductor Ltd | Optical vacuum ultra-violet wavelength nanoimprint metrology |
US8565379B2 (en) | 2011-03-14 | 2013-10-22 | Jordan Valley Semiconductors Ltd. | Combining X-ray and VUV analysis of thin film layers |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3646331A (en) * | 1970-09-03 | 1972-02-29 | Kollmorgen Corp | Automatic 100{11 line adjustment of spectrophotometers |
US3828173A (en) * | 1972-08-01 | 1974-08-06 | Dickey John Corp | Grain analysis computer circuit |
US3874799A (en) * | 1973-06-01 | 1975-04-01 | Color Control Inc | Method and apparatus for color spectrophotometry |
US4029419A (en) * | 1975-10-10 | 1977-06-14 | International Business Machines Corporation | Textile color analyzer calibration |
JPS591977B2 (ja) * | 1978-01-25 | 1984-01-14 | 株式会社京都第一科学 | 呈色試験紙を用いた分析方法 |
US4526470A (en) * | 1982-03-05 | 1985-07-02 | Beckman Instruments, Inc. | Stray light measurement and compensation |
CA1201300A (en) * | 1982-11-01 | 1986-03-04 | Albert Brunsting | Optical readhead |
CA1201299A (en) * | 1982-11-29 | 1986-03-04 | Albert Brunsting | Optical readhead |
US4725147A (en) * | 1984-09-17 | 1988-02-16 | Somanetics Corporation | Calibration method and apparatus for optical-response tissue-examination instrument |
US4659229A (en) * | 1984-10-10 | 1987-04-21 | Miles Laboratories, Inc. | Readhead with reduced height sensitivity |
-
1986
- 1986-06-23 US US06/877,169 patent/US4729657A/en not_active Expired - Lifetime
-
1987
- 1987-06-03 CA CA000538704A patent/CA1297700C/en not_active Expired - Lifetime
- 1987-06-05 AU AU73890/87A patent/AU574287B2/en not_active Ceased
- 1987-06-10 EP EP87108370A patent/EP0250959B1/de not_active Expired
- 1987-06-10 DE DE8787108370T patent/DE3778976D1/de not_active Expired - Fee Related
- 1987-06-22 JP JP62153591A patent/JPS635240A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0250959B1 (de) | 1992-05-13 |
JPS635240A (ja) | 1988-01-11 |
AU7389087A (en) | 1987-12-24 |
EP0250959A2 (de) | 1988-01-07 |
AU574287B2 (en) | 1988-06-30 |
CA1297700C (en) | 1992-03-24 |
US4729657A (en) | 1988-03-08 |
EP0250959A3 (en) | 1989-09-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3778976D1 (de) | Verfahren zum kalibrieren von reflexions-messgeraeten. | |
DE3851951D1 (de) | Amperometrische Messmethode Amperometrische Messmethode. | |
DE69002828D1 (de) | Verfahren zum nachweis von elektrischen leitern. | |
DE3789060D1 (de) | Vorrichtung zum messen von biologischen signalen. | |
DE3750219D1 (de) | Verfahren und Einrichtung zum Messen von Ketonen. | |
DE3687834D1 (de) | Verfahren zum schnellen aufloesen von polymergelen. | |
DE69001386D1 (de) | Hochempfindliches positionsmess-verfahren. | |
FI881782A0 (fi) | Menetelmä mittavirheiden havaitsemiseksi | |
DE69101053D1 (de) | Verfahren zum messen von winkelverdrehungen. | |
DE69013428D1 (de) | Verfahren zum Feststellen von Lageabweichungen. | |
DE3887325D1 (de) | Positionsmessverfahren und -apparat. | |
DE3767747D1 (de) | Verfahren zum bestimmen von abmessungen. | |
DE3871706D1 (de) | Konturenmessmethode. | |
DE3771670D1 (de) | Verfahren zum entschleimen von triglyceridoelen. | |
DE59100475D1 (de) | Verfahren zum Ermitteln von Registerfehlern. | |
DE58904087D1 (de) | Verfahren zum interpolieren von positionsmesssignalen. | |
FI850047A0 (fi) | Hushaolls- eller koeksapparat. | |
DE68902652D1 (de) | Chemisches verfahren. | |
DE3878077D1 (de) | Immunologische messmethode. | |
DE3669050D1 (de) | Verfahren zum kalibrieren eines auswuchtgeraets. | |
DE58901598D1 (de) | Verfahren zur gewinnung von rohargon. | |
DE3667781D1 (de) | Verfahren zum verbinden von keramischen gegenstaenden. | |
NO164432C (no) | Broenntestemetode. | |
DE58901845D1 (de) | Verfahren zum festlegen. | |
DE3778101D1 (de) | Verfahren zum kolorieren. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |