DE3750808D1 - Verfahren und Vorrichtung zur Ionenätzung. - Google Patents

Verfahren und Vorrichtung zur Ionenätzung.

Info

Publication number
DE3750808D1
DE3750808D1 DE3750808T DE3750808T DE3750808D1 DE 3750808 D1 DE3750808 D1 DE 3750808D1 DE 3750808 T DE3750808 T DE 3750808T DE 3750808 T DE3750808 T DE 3750808T DE 3750808 D1 DE3750808 D1 DE 3750808D1
Authority
DE
Germany
Prior art keywords
ion etching
etching
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE3750808T
Other languages
English (en)
Other versions
DE3750808T2 (de
Inventor
Frank Keeble
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DOBSON CHRISTOPHER DAVID LITTLETON-UPON-SEVERN BRISTOL GB
Original Assignee
DOBSON CHRISTOPHER DAVID LITTLETON-UPON-SEVERN BRISTOL GB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10608847&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3750808(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by DOBSON CHRISTOPHER DAVID LITTLETON-UPON-SEVERN BRISTOL GB filed Critical DOBSON CHRISTOPHER DAVID LITTLETON-UPON-SEVERN BRISTOL GB
Publication of DE3750808D1 publication Critical patent/DE3750808D1/de
Application granted granted Critical
Publication of DE3750808T2 publication Critical patent/DE3750808T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
DE3750808T 1986-12-11 1987-12-10 Verfahren und Vorrichtung zur Ionenätzung. Revoked DE3750808T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868629634A GB8629634D0 (en) 1986-12-11 1986-12-11 Reactive ion & sputter etching

Publications (2)

Publication Number Publication Date
DE3750808D1 true DE3750808D1 (de) 1995-01-12
DE3750808T2 DE3750808T2 (de) 1995-06-08

Family

ID=10608847

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3750808T Revoked DE3750808T2 (de) 1986-12-11 1987-12-10 Verfahren und Vorrichtung zur Ionenätzung.

Country Status (5)

Country Link
US (1) US4844775A (de)
EP (1) EP0271341B1 (de)
JP (1) JPS63174321A (de)
DE (1) DE3750808T2 (de)
GB (1) GB8629634D0 (de)

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Also Published As

Publication number Publication date
JPS63174321A (ja) 1988-07-18
GB8629634D0 (en) 1987-01-21
EP0271341A2 (de) 1988-06-15
DE3750808T2 (de) 1995-06-08
EP0271341A3 (en) 1989-04-19
EP0271341B1 (de) 1994-11-30
US4844775A (en) 1989-07-04

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation