DE3689843T2 - Steuerschaltung einer Flüssigkristallanzeige. - Google Patents

Steuerschaltung einer Flüssigkristallanzeige.

Info

Publication number
DE3689843T2
DE3689843T2 DE3689843T DE3689843T DE3689843T2 DE 3689843 T2 DE3689843 T2 DE 3689843T2 DE 3689843 T DE3689843 T DE 3689843T DE 3689843 T DE3689843 T DE 3689843T DE 3689843 T2 DE3689843 T2 DE 3689843T2
Authority
DE
Germany
Prior art keywords
liquid crystal
control circuit
crystal display
display
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3689843T
Other languages
English (en)
Other versions
DE3689843D1 (de
Inventor
Masayuki C O Patent Divi Dohjo
Yasuhisa C O Patent Divis Oana
Mitsushi C O Patent Divi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61048910A external-priority patent/JPS62205656A/ja
Priority claimed from JP61141694A external-priority patent/JPS62297892A/ja
Priority claimed from JP20906686A external-priority patent/JPH07105486B2/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE3689843D1 publication Critical patent/DE3689843D1/de
Application granted granted Critical
Publication of DE3689843T2 publication Critical patent/DE3689843T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49866Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204Conductive materials
    • H01L23/53209Conductive materials based on metals, e.g. alloys, metal silicides
    • H01L23/53257Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being a refractory metal
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line
    • G02F1/13629Multilayer wirings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE3689843T 1986-03-06 1986-12-12 Steuerschaltung einer Flüssigkristallanzeige. Expired - Lifetime DE3689843T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61048910A JPS62205656A (ja) 1986-03-06 1986-03-06 半導体装置
JP61141694A JPS62297892A (ja) 1986-06-18 1986-06-18 表示装置用駆動回路基板
JP20906686A JPH07105486B2 (ja) 1986-09-05 1986-09-05 電極配線材料

Publications (2)

Publication Number Publication Date
DE3689843D1 DE3689843D1 (de) 1994-06-23
DE3689843T2 true DE3689843T2 (de) 1994-09-01

Family

ID=27293459

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3689843T Expired - Lifetime DE3689843T2 (de) 1986-03-06 1986-12-12 Steuerschaltung einer Flüssigkristallanzeige.

Country Status (4)

Country Link
US (2) US4975760A (de)
EP (1) EP0236629B1 (de)
KR (1) KR910001872B1 (de)
DE (1) DE3689843T2 (de)

Families Citing this family (54)

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US5170244A (en) * 1986-03-06 1992-12-08 Kabushiki Kaisha Toshiba Electrode interconnection material, semiconductor device using this material and driving circuit substrate for display device
JPS63166236A (ja) * 1986-12-26 1988-07-09 Toshiba Corp 電子装置
JPH01291467A (ja) * 1988-05-19 1989-11-24 Toshiba Corp 薄膜トランジスタ
US5225364A (en) * 1989-06-26 1993-07-06 Oki Electric Industry Co., Ltd. Method of fabricating a thin-film transistor matrix for an active matrix display panel
JP3009438B2 (ja) * 1989-08-14 2000-02-14 株式会社日立製作所 液晶表示装置
JP2508851B2 (ja) * 1989-08-23 1996-06-19 日本電気株式会社 液晶表示素子用アクティブマトリクス基板とその製造方法
US5498573A (en) * 1989-11-29 1996-03-12 General Electric Company Method of making multi-layer address lines for amorphous silicon liquid crystal display devices
DE69032893T2 (de) * 1989-11-30 1999-07-22 Toshiba Kawasaki Kk Werkstoff für elektrische Leiter, Elektronikagerät welches diesen verwendet und Flüssig-Kristall-Anzeige
JPH03173126A (ja) * 1989-11-30 1991-07-26 Mitsubishi Electric Corp 多層膜構造の半導体装置およびその製造方法
US5214416A (en) * 1989-12-01 1993-05-25 Ricoh Company, Ltd. Active matrix board
JPH03248568A (ja) * 1990-02-27 1991-11-06 Fuji Xerox Co Ltd 薄膜半導体装置
FR2659178B1 (fr) * 1990-03-02 1992-05-15 Ebauchesfabrik Eta Ag Ensemble de bobines d'excitation, procede de fabrication d'un tel ensemble et micromoteur electromagnetique equipe de celui-ci.
JP3226223B2 (ja) * 1990-07-12 2001-11-05 株式会社東芝 薄膜トランジスタアレイ装置および液晶表示装置
US5132745A (en) * 1990-10-05 1992-07-21 General Electric Company Thin film transistor having an improved gate structure and gate coverage by the gate dielectric
WO1992006490A1 (en) * 1990-10-05 1992-04-16 General Electric Company Device self-alignment by propagation of a reference structure's topography
US5198694A (en) * 1990-10-05 1993-03-30 General Electric Company Thin film transistor structure with improved source/drain contacts
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JP3537854B2 (ja) * 1992-12-29 2004-06-14 エルジー フィリップス エルシーディー カンパニー リミテッド 薄膜トランジスタの製造方法
JP3275314B2 (ja) * 1993-02-10 2002-04-15 セイコーエプソン株式会社 非線形抵抗素子およびその製造方法ならびに液晶表示装置
US5471330A (en) * 1993-07-29 1995-11-28 Honeywell Inc. Polysilicon pixel electrode
JP3030368B2 (ja) 1993-10-01 2000-04-10 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
US6777763B1 (en) * 1993-10-01 2004-08-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for fabricating the same
JP2778494B2 (ja) * 1994-12-26 1998-07-23 日本電気株式会社 電極薄膜およびその電極薄膜を用いた磁気抵抗効果型ヘッド
US6478263B1 (en) * 1997-01-17 2002-11-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
JP3645378B2 (ja) * 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3645380B2 (ja) * 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、ナビゲーションシステム、携帯電話、ビデオカメラ、投射型表示装置
JP3729955B2 (ja) 1996-01-19 2005-12-21 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3645379B2 (ja) 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
US7056381B1 (en) 1996-01-26 2006-06-06 Semiconductor Energy Laboratory Co., Ltd. Fabrication method of semiconductor device
US6100562A (en) 1996-03-17 2000-08-08 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
JP3424891B2 (ja) * 1996-12-27 2003-07-07 三洋電機株式会社 薄膜トランジスタの製造方法および表示装置
KR100255591B1 (ko) * 1997-03-06 2000-05-01 구본준 박막 트랜지스터 어레이의 배선 연결 구조 및 그 제조 방법
JP4187819B2 (ja) * 1997-03-14 2008-11-26 シャープ株式会社 薄膜装置の製造方法
US5943559A (en) * 1997-06-23 1999-08-24 Nec Corporation Method for manufacturing liquid crystal display apparatus with drain/source silicide electrodes made by sputtering process
KR100269518B1 (ko) * 1997-12-29 2000-10-16 구본준 박막트랜지스터 제조방법
US6165568A (en) 1998-02-09 2000-12-26 Micron Technology, Inc. Methods for forming field emission display devices
KR100301803B1 (ko) * 1998-06-05 2001-09-22 김영환 박막트랜지스터 및 그의 제조방법
JP3883706B2 (ja) * 1998-07-31 2007-02-21 シャープ株式会社 エッチング方法、及び薄膜トランジスタマトリックス基板の製造方法
JP2001053283A (ja) * 1999-08-12 2001-02-23 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
JP4118484B2 (ja) 2000-03-06 2008-07-16 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2001257350A (ja) 2000-03-08 2001-09-21 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JP4700160B2 (ja) * 2000-03-13 2011-06-15 株式会社半導体エネルギー研究所 半導体装置
JP4118485B2 (ja) 2000-03-13 2008-07-16 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4683688B2 (ja) 2000-03-16 2011-05-18 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
JP4393662B2 (ja) 2000-03-17 2010-01-06 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
US6900084B1 (en) * 2000-05-09 2005-05-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having a display device
US6403407B1 (en) * 2000-06-02 2002-06-11 International Business Machines Corporation Method of forming fully self-aligned TFT with improved process window
US7071037B2 (en) * 2001-03-06 2006-07-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
EP1624333B1 (de) * 2004-08-03 2017-05-03 Semiconductor Energy Laboratory Co., Ltd. Anzeigevorrichtung, Herstellungsverfahren derselben und Fernsehgerät
CN100592181C (zh) * 2007-05-30 2010-02-24 北京京东方光电科技有限公司 一种可修复的像素结构
KR101399608B1 (ko) * 2007-07-27 2014-05-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작방법
JP5740169B2 (ja) * 2010-02-19 2015-06-24 株式会社半導体エネルギー研究所 トランジスタの作製方法
KR20230155614A (ko) 2010-02-26 2023-11-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치

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JPS63263743A (ja) * 1987-04-22 1988-10-31 Alps Electric Co Ltd 薄膜トランジスタアレイおよびその製法

Also Published As

Publication number Publication date
KR910001872B1 (ko) 1991-03-28
EP0236629A3 (en) 1989-12-27
US5028551A (en) 1991-07-02
DE3689843D1 (de) 1994-06-23
EP0236629A2 (de) 1987-09-16
US4975760A (en) 1990-12-04
KR870009457A (ko) 1987-10-26
EP0236629B1 (de) 1994-05-18

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