DE3584204D1 - Freitragendes schlitzdiffusionsrohrsystem und verfahren und vorrichtung zum laden. - Google Patents
Freitragendes schlitzdiffusionsrohrsystem und verfahren und vorrichtung zum laden.Info
- Publication number
- DE3584204D1 DE3584204D1 DE8585305138T DE3584204T DE3584204D1 DE 3584204 D1 DE3584204 D1 DE 3584204D1 DE 8585305138 T DE8585305138 T DE 8585305138T DE 3584204 T DE3584204 T DE 3584204T DE 3584204 D1 DE3584204 D1 DE 3584204D1
- Authority
- DE
- Germany
- Prior art keywords
- charging
- tube system
- diffusion tube
- supporting slot
- slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/02—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated of multiple-chamber type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/631,929 US4543059A (en) | 1984-07-18 | 1984-07-18 | Slotted cantilever diffusion tube system and method and apparatus for loading |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3584204D1 true DE3584204D1 (de) | 1991-10-31 |
Family
ID=24533358
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585305138T Expired - Fee Related DE3584204D1 (de) | 1984-07-18 | 1985-07-18 | Freitragendes schlitzdiffusionsrohrsystem und verfahren und vorrichtung zum laden. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4543059A (de) |
EP (1) | EP0172653B1 (de) |
JP (1) | JPS6153721A (de) |
DE (1) | DE3584204D1 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4752219A (en) * | 1984-10-04 | 1988-06-21 | Btu Engineering Corporation | Wafer softlanding system and cooperative door assembly |
US4872799A (en) * | 1985-05-16 | 1989-10-10 | Btu Engineering Corporation | Boat transfer and queuing furnace elevator and method |
US4767251A (en) * | 1986-05-06 | 1988-08-30 | Amtech Systems, Inc. | Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes |
US4699555A (en) * | 1986-05-08 | 1987-10-13 | Micrion Limited Partnership | Module positioning apparatus |
US4728246A (en) * | 1986-05-16 | 1988-03-01 | Thermco Systems, Inc. | Wafer boat transfer tool |
IL79109A (en) * | 1986-06-12 | 1992-08-18 | Baruch Indig | Porcelain furnace |
US4876225A (en) * | 1987-05-18 | 1989-10-24 | Berkeley Quartz Lab, Inc. | Cantilevered diffusion chamber atmospheric loading system and method |
JPH0631718Y2 (ja) * | 1987-06-22 | 1994-08-22 | 東京エレクトロン東北株式会社 | ボ−ト搬送装置 |
KR960001161B1 (ko) * | 1987-09-29 | 1996-01-19 | 도오교오 에레구토론 사가미 가부시끼가이샤 | 열처리장치 |
JP2686456B2 (ja) * | 1988-01-21 | 1997-12-08 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
JP2590352B2 (ja) * | 1987-12-18 | 1997-03-12 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
JP2683580B2 (ja) * | 1988-01-18 | 1997-12-03 | 東京エレクトロン株式会社 | 熱処理炉に対する被処理体の搬送装置及び熱処理方法 |
US4955808A (en) * | 1988-03-09 | 1990-09-11 | Tel Sagami Limited | Method of heat-processing objects and device and boat for the same |
JP2733681B2 (ja) * | 1988-03-09 | 1998-03-30 | 東京エレクトロン株式会社 | 熱処理装置 |
US4976610A (en) * | 1988-12-05 | 1990-12-11 | Cryco Twenty-Two, Inc. | Purge cantilevered wafer loading system for LP CVD processes |
US5354198A (en) * | 1988-12-05 | 1994-10-11 | Cyrco Twenty-Two, Inc. | Movable cantilevered purge system |
US5178534A (en) * | 1989-05-18 | 1993-01-12 | Bayne Christopher J | Controlled diffusion environment capsule and system |
US5061044A (en) * | 1989-05-23 | 1991-10-29 | Citizen Watch Co., Ltd. | Ferroelectric liquid crystal display having opposingly inclined alignment films wherein the liquid crystal has one twisted and two aligned states which coexist and a driving method to produce gray scale |
US4976612A (en) * | 1989-06-20 | 1990-12-11 | Automated Wafer Systems | Purge tube with floating end cap for loading silicon wafers into a furnace |
US5064367A (en) * | 1989-06-28 | 1991-11-12 | Digital Equipment Corporation | Conical gas inlet for thermal processing furnace |
US4992044A (en) * | 1989-06-28 | 1991-02-12 | Digital Equipment Corporation | Reactant exhaust system for a thermal processing furnace |
US4950156A (en) * | 1989-06-28 | 1990-08-21 | Digital Equipment Corporation | Inert gas curtain for a thermal processing furnace |
US4963090A (en) * | 1989-11-03 | 1990-10-16 | United Technologies Corporation | Reverse flow furnace/retort system |
KR940000499B1 (ko) * | 1990-12-03 | 1994-01-21 | 삼성전자 주식회사 | 불순물 확산로의 압력 조절방법 및 그 장치 |
JPH04243126A (ja) * | 1991-01-17 | 1992-08-31 | Mitsubishi Electric Corp | 半導体製造装置及びその制御方法 |
US5248253A (en) * | 1992-01-28 | 1993-09-28 | Digital Equipment Corporation | Thermal processing furnace with improved plug flow |
US5256060A (en) * | 1992-01-28 | 1993-10-26 | Digital Equipment Corporation | Reducing gas recirculation in thermal processing furnace |
US5208961A (en) * | 1992-02-28 | 1993-05-11 | National Semiconductor Corporation | Semiconductor processing furnace door alignment apparatus and method |
JPH05315272A (ja) * | 1992-05-13 | 1993-11-26 | Nippon Telegr & Teleph Corp <Ntt> | 石英ボート |
US5461214A (en) * | 1992-06-15 | 1995-10-24 | Thermtec, Inc. | High performance horizontal diffusion furnace system |
US5409539A (en) * | 1993-05-14 | 1995-04-25 | Micron Technology, Inc. | Slotted cantilever diffusion tube system with a temperature insulating baffle system and a distributed gas injector system |
US5471033A (en) * | 1994-04-15 | 1995-11-28 | International Business Machines Corporation | Process and apparatus for contamination-free processing of semiconductor parts |
US5765982A (en) * | 1995-07-10 | 1998-06-16 | Amtech Systems, Inc. | Automatic wafer boat loading system and method |
US5997588A (en) * | 1995-10-13 | 1999-12-07 | Advanced Semiconductor Materials America, Inc. | Semiconductor processing system with gas curtain |
US5839870A (en) * | 1996-03-13 | 1998-11-24 | Novus Corporation | Transfer system for use with a horizontal furnace |
US6030167A (en) * | 1997-08-12 | 2000-02-29 | United Microeletronics Corp. | Apparatus for loading wafers into a horizontal quartz tube |
US5997963A (en) * | 1998-05-05 | 1999-12-07 | Ultratech Stepper, Inc. | Microchamber |
US6418945B1 (en) | 2000-07-07 | 2002-07-16 | Semitool, Inc. | Dual cassette centrifugal processor |
KR100833057B1 (ko) * | 2005-11-23 | 2008-05-27 | 주식회사 엘지화학 | 관형 고정층 촉매 반응기에서 온도를 측정하는 도구 및방법 |
US7677885B2 (en) * | 2007-01-18 | 2010-03-16 | Lite-On Semiconductor Corporation | Material supply device for diffusion furnaces |
US8662886B2 (en) * | 2007-11-12 | 2014-03-04 | Micrel, Inc. | System for improved pressure control in horizontal diffusion furnace scavenger system for controlling oxide growth |
JP4778546B2 (ja) * | 2007-11-30 | 2011-09-21 | 東京エレクトロン株式会社 | 半導体製造装置における地震被害拡散低減方法及び地震被害拡散低減システム |
WO2009105635A2 (en) * | 2008-02-21 | 2009-08-27 | Saint-Gobain Ceramics & Plastics, Inc. | Ceramic paddle |
US8053274B2 (en) * | 2008-09-30 | 2011-11-08 | Stion Corporation | Self cleaning large scale method and furnace system for selenization of thin film photovoltaic materials |
CN102945796B (zh) * | 2012-11-29 | 2015-06-03 | 西安电力电子技术研究所 | 弥漫式恒压气体携带杂质源扩散工艺管 |
CH708881B1 (de) * | 2013-11-20 | 2017-06-15 | Besi Switzerland Ag | Durchlaufofen für Substrate, die mit Bauteilen bestückt werden, und Die Bonder. |
AT515531B1 (de) * | 2014-09-19 | 2015-10-15 | Siconnex Customized Solutions Gmbh | Halterungssystem und Beschickungsverfahren für scheibenförmige Objekte |
US11802340B2 (en) * | 2016-12-12 | 2023-10-31 | Applied Materials, Inc. | UHV in-situ cryo-cool chamber |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5862489A (ja) * | 1981-10-07 | 1983-04-13 | 株式会社日立製作所 | ソフトランデイング装置 |
US4440538A (en) * | 1981-12-30 | 1984-04-03 | Atomel Products Corporation | Apparatus for loading and unloading a furnace |
US4459104A (en) * | 1983-06-01 | 1984-07-10 | Quartz Engineering & Materials, Inc. | Cantilever diffusion tube apparatus and method |
-
1984
- 1984-07-18 US US06/631,929 patent/US4543059A/en not_active Expired - Lifetime
-
1985
- 1985-07-18 EP EP85305138A patent/EP0172653B1/de not_active Expired - Lifetime
- 1985-07-18 DE DE8585305138T patent/DE3584204D1/de not_active Expired - Fee Related
- 1985-07-18 JP JP60159224A patent/JPS6153721A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6153721A (ja) | 1986-03-17 |
EP0172653A3 (en) | 1988-02-17 |
EP0172653B1 (de) | 1991-09-25 |
JPH0263290B2 (de) | 1990-12-27 |
US4543059A (en) | 1985-09-24 |
EP0172653A2 (de) | 1986-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |