DE3476699D1 - Isfet-based measuring device and method for fabricating the isfet used therein - Google Patents

Isfet-based measuring device and method for fabricating the isfet used therein

Info

Publication number
DE3476699D1
DE3476699D1 DE8484201586T DE3476699T DE3476699D1 DE 3476699 D1 DE3476699 D1 DE 3476699D1 DE 8484201586 T DE8484201586 T DE 8484201586T DE 3476699 T DE3476699 T DE 3476699T DE 3476699 D1 DE3476699 D1 DE 3476699D1
Authority
DE
Germany
Prior art keywords
isfet
fabricating
measuring device
based measuring
isfet used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484201586T
Other languages
English (en)
Inventor
Hendrikus Cornelis Ligtenberg
Jozef Gerhardus Maria Leuveld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sentron Vof
Original Assignee
Sentron Vof
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sentron Vof filed Critical Sentron Vof
Application granted granted Critical
Publication of DE3476699D1 publication Critical patent/DE3476699D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
DE8484201586T 1983-11-03 1984-11-02 Isfet-based measuring device and method for fabricating the isfet used therein Expired DE3476699D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8303792A NL8303792A (nl) 1983-11-03 1983-11-03 Inrichting voorzien van een op een isfet gebaseerd meetcircuit; voor toepassing in het meetcircuit geschikte isfet en werkwijze ter vervaardiging van een in het meetcircuit toe te passen isfet.

Publications (1)

Publication Number Publication Date
DE3476699D1 true DE3476699D1 (en) 1989-03-16

Family

ID=19842655

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484201586T Expired DE3476699D1 (en) 1983-11-03 1984-11-02 Isfet-based measuring device and method for fabricating the isfet used therein

Country Status (6)

Country Link
US (1) US4701253A (de)
EP (1) EP0140460B1 (de)
JP (1) JPH0765984B2 (de)
CA (1) CA1237770A (de)
DE (1) DE3476699D1 (de)
NL (1) NL8303792A (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4879517A (en) * 1988-07-25 1989-11-07 General Signal Corporation Temperature compensation for potentiometrically operated ISFETS
DE59005386D1 (de) * 1990-12-21 1994-05-19 Knick Elektronische Mesgeraete Ausgangsschaltung zur analogen Ausgabe eines in Bezug auf Steilheit und Nullpunkt kompensierten Messsignals und Verfahren zum Ausgeben des Messsignals.
US5317275A (en) * 1992-01-13 1994-05-31 Orbital Sciences Corporation Conductance measurement circuit with wide dynamic range
JP2541081B2 (ja) * 1992-08-28 1996-10-09 日本電気株式会社 バイオセンサ及びバイオセンサの製造・使用方法
WO1994026029A1 (en) * 1993-04-26 1994-11-10 Unifet Incorporated Method and apparatus for multiplexing devices having long thermal time constants
US5911873A (en) * 1997-05-02 1999-06-15 Rosemount Analytical Inc. Apparatus and method for operating an ISFET at multiple drain currents and gate-source voltages allowing for diagnostics and control of isopotential points
SE9703957D0 (sv) 1997-10-29 1997-10-29 Pacesetter Ab Method and device for sensing
SE9703958D0 (sv) * 1997-10-29 1997-10-29 Pacesetter Ab Method and device for determination of concentration
DE19857953C2 (de) * 1998-12-16 2001-02-15 Conducta Endress & Hauser Vorrichtung zum Messen der Konzentration von Ionen in einer Meßflüssigkeit
DE10151020A1 (de) * 2001-10-16 2003-04-30 Infineon Technologies Ag Schaltkreis-Anordnung, Sensor-Array und Biosensor-Array
US7232512B2 (en) * 2004-08-25 2007-06-19 Honeywell International, Inc. System and method of sensitivity adjustment for an electrochemical sensor
CN100446417C (zh) * 2004-12-23 2008-12-24 中国科学院电子学研究所 基于双模式的集成isfet传感器信号差分读出电路
TWI296709B (en) * 2005-10-21 2008-05-11 Univ Chung Yuan Christian Ion sensing circuit with body effect reduction technique
US7581390B2 (en) * 2006-04-26 2009-09-01 Cummins Inc. Method and system for improving sensor accuracy
CN101101272B (zh) * 2006-07-07 2010-10-13 中国科学院电子学研究所 一种生化微传感集成芯片、制作及模具制备方法
US8349167B2 (en) 2006-12-14 2013-01-08 Life Technologies Corporation Methods and apparatus for detecting molecular interactions using FET arrays
ES2923759T3 (es) 2006-12-14 2022-09-30 Life Technologies Corp Aparato para medir analitos utilizando matrices de FET
US11339430B2 (en) 2007-07-10 2022-05-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US8262900B2 (en) 2006-12-14 2012-09-11 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
CN101573612B (zh) * 2007-01-04 2013-02-13 皇家飞利浦电子股份有限公司 用于测量样品浓度的方法、检测器和***
JP5056398B2 (ja) * 2007-12-19 2012-10-24 株式会社豊田中央研究所 センサの使用方法及びセンサ装置
US8470164B2 (en) 2008-06-25 2013-06-25 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US20100301398A1 (en) 2009-05-29 2010-12-02 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
US20100137143A1 (en) 2008-10-22 2010-06-03 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
US20120261274A1 (en) 2009-05-29 2012-10-18 Life Technologies Corporation Methods and apparatus for measuring analytes
US8776573B2 (en) 2009-05-29 2014-07-15 Life Technologies Corporation Methods and apparatus for measuring analytes
US8455927B2 (en) 2010-06-30 2013-06-04 Life Technologies Corporation One-transistor pixel array with cascoded column circuit
AU2011226767B1 (en) 2010-06-30 2011-11-10 Life Technologies Corporation Ion-sensing charge-accumulation circuits and methods
US11307166B2 (en) 2010-07-01 2022-04-19 Life Technologies Corporation Column ADC
US8653567B2 (en) 2010-07-03 2014-02-18 Life Technologies Corporation Chemically sensitive sensor with lightly doped drains
DE102010040264A1 (de) * 2010-09-03 2012-03-08 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Verfahren zur Bestimmung der Ionenkonzentration oder zur Bestimmung einer Stoffkonzentration in einer Lösung
EP2617061B1 (de) 2010-09-15 2021-06-30 Life Technologies Corporation Verfahren und vorrichtung zur analytmessung
US8685324B2 (en) 2010-09-24 2014-04-01 Life Technologies Corporation Matched pair transistor circuits
US9970984B2 (en) 2011-12-01 2018-05-15 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
US8747748B2 (en) 2012-01-19 2014-06-10 Life Technologies Corporation Chemical sensor with conductive cup-shaped sensor surface
US8821798B2 (en) 2012-01-19 2014-09-02 Life Technologies Corporation Titanium nitride as sensing layer for microwell structure
US8786331B2 (en) 2012-05-29 2014-07-22 Life Technologies Corporation System for reducing noise in a chemical sensor array
US9080968B2 (en) 2013-01-04 2015-07-14 Life Technologies Corporation Methods and systems for point of use removal of sacrificial material
US9841398B2 (en) 2013-01-08 2017-12-12 Life Technologies Corporation Methods for manufacturing well structures for low-noise chemical sensors
US8962366B2 (en) 2013-01-28 2015-02-24 Life Technologies Corporation Self-aligned well structures for low-noise chemical sensors
US8963216B2 (en) 2013-03-13 2015-02-24 Life Technologies Corporation Chemical sensor with sidewall spacer sensor surface
US8841217B1 (en) 2013-03-13 2014-09-23 Life Technologies Corporation Chemical sensor with protruded sensor surface
EP2972280B1 (de) 2013-03-15 2021-09-29 Life Technologies Corporation Chemischer sensor mit stetigen sensoroberflächen
US9835585B2 (en) 2013-03-15 2017-12-05 Life Technologies Corporation Chemical sensor with protruded sensor surface
US9116117B2 (en) 2013-03-15 2015-08-25 Life Technologies Corporation Chemical sensor with sidewall sensor surface
WO2014149779A1 (en) 2013-03-15 2014-09-25 Life Technologies Corporation Chemical device with thin conductive element
JP6581074B2 (ja) 2013-03-15 2019-09-25 ライフ テクノロジーズ コーポレーション 一貫性のあるセンサ表面積を有する化学センサ
US20140336063A1 (en) 2013-05-09 2014-11-13 Life Technologies Corporation Windowed Sequencing
US10458942B2 (en) 2013-06-10 2019-10-29 Life Technologies Corporation Chemical sensor array having multiple sensors per well
CN110988085B (zh) 2013-09-18 2023-07-04 克莱米特有限责任公司 基于分子受体的化学场效应晶体管
WO2016100521A1 (en) 2014-12-18 2016-06-23 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale fet arrays
EP3234576B1 (de) 2014-12-18 2023-11-22 Life Technologies Corporation Integrierte schaltung mit hoher datenrate und mit transmitterkonfiguration
US10077472B2 (en) 2014-12-18 2018-09-18 Life Technologies Corporation High data rate integrated circuit with power management
JP7088541B2 (ja) * 2018-05-24 2022-06-21 ラピスセミコンダクタ株式会社 測定装置及び測定方法
AU2019345325A1 (en) 2018-09-21 2021-04-15 Teralytic Holdings Inc. Extensible, multimodal sensor fusion platform for remote, proximal terrain sensing
DE102021133958A1 (de) 2021-12-21 2023-06-22 Endress+Hauser Conducta Gmbh+Co. Kg Verfahren zum Kalibrieren einer Messschaltung, Messschaltung für einen elektrochemischen Sensor
DE102023000854A1 (de) * 2022-03-02 2023-09-07 Technische Universität Ilmenau, Körperschaft des öffentlichen Rechts Verfahren zur störungsreduzierten Messung und/oder Überwachung des pH-Wertes eines Mediums und dazugehörige Vorrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1919406C3 (de) * 1968-04-23 1981-11-05 Naamloze Vennootschap Philips' Gloeilampenfabrieken, Eindhoven Feldeffekttransistor und seine Verwendung in einer Schaltungsanordnung für einen Miller-Integrator
US4020830A (en) * 1975-03-12 1977-05-03 The University Of Utah Selective chemical sensitive FET transducers
US4207146A (en) * 1977-01-12 1980-06-10 Dragerwerk Aktiengesellschaft Process for testing gases in body fluids for partial pressure and to a testing device therefor
US4273636A (en) * 1977-05-26 1981-06-16 Kiyoo Shimada Selective chemical sensitive field effect transistor transducers
JPS5459199A (en) * 1977-10-20 1979-05-12 Olympus Optical Co Ltd Ion concentration measuring apparatus
FR2410275A1 (fr) * 1977-11-28 1979-06-22 Claude Bernard Dispositif de calibration automatique d'appareils tels que phmetres, ionometres, appareils de mesure de potentiels d'electrodes
DE2917714C2 (de) * 1979-05-02 1983-12-22 Degussa Ag, 6000 Frankfurt Verfahren zur Messung mit Redox- oder ionensensitiven Elektroden
US4269684A (en) * 1979-10-01 1981-05-26 Cordis Corporation Apparatus for oxygen partial pressure measurement
US4384925A (en) * 1980-10-24 1983-05-24 Becton Dickinson And Company Gas sensing unit with automatic calibration method
DE3047782A1 (de) * 1980-12-18 1982-07-08 Drägerwerk AG, 2400 Lübeck Schaltungsanordnung zur korrektur der sensorausgangsgroesse
EP0074498B1 (de) * 1981-09-04 1985-12-04 F. HOFFMANN-LA ROCHE & CO. Aktiengesellschaft Verfahren und Vorrichtung zum Eichen von Messfühlern
US4411741A (en) * 1982-01-12 1983-10-25 University Of Utah Apparatus and method for measuring the concentration of components in fluids
US4488556A (en) * 1982-06-03 1984-12-18 Critikon, Inc. AC Mode operation of chemfet devices

Also Published As

Publication number Publication date
CA1237770A (en) 1988-06-07
EP0140460A1 (de) 1985-05-08
JPS60113143A (ja) 1985-06-19
JPH0765984B2 (ja) 1995-07-19
NL8303792A (nl) 1985-06-03
US4701253A (en) 1987-10-20
EP0140460B1 (de) 1989-02-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee