DE3279079D1 - A method of fabricating a mos transistor on a substrate - Google Patents
A method of fabricating a mos transistor on a substrateInfo
- Publication number
- DE3279079D1 DE3279079D1 DE8282306614T DE3279079T DE3279079D1 DE 3279079 D1 DE3279079 D1 DE 3279079D1 DE 8282306614 T DE8282306614 T DE 8282306614T DE 3279079 T DE3279079 T DE 3279079T DE 3279079 D1 DE3279079 D1 DE 3279079D1
- Authority
- DE
- Germany
- Prior art keywords
- fabricating
- substrate
- mos transistor
- mos
- transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
- H01L21/2652—Through-implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- High Energy & Nuclear Physics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33147481A | 1981-12-16 | 1981-12-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3279079D1 true DE3279079D1 (en) | 1988-11-03 |
Family
ID=23294125
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8282306614T Expired DE3279079D1 (en) | 1981-12-16 | 1982-12-10 | A method of fabricating a mos transistor on a substrate |
DE8686108855T Expired - Lifetime DE3280420T2 (de) | 1981-12-16 | 1982-12-10 | Verfahren zum herstellen eines mos-transistors auf einem substrat. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686108855T Expired - Lifetime DE3280420T2 (de) | 1981-12-16 | 1982-12-10 | Verfahren zum herstellen eines mos-transistors auf einem substrat. |
Country Status (4)
Country | Link |
---|---|
EP (2) | EP0081999B1 (de) |
JP (1) | JPH0640549B2 (de) |
CA (1) | CA1197926A (de) |
DE (2) | DE3279079D1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4603472A (en) * | 1984-04-19 | 1986-08-05 | Siemens Aktiengesellschaft | Method of making MOS FETs using silicate glass layer as gate edge masking for ion implantation |
JPS61117868A (ja) * | 1984-11-14 | 1986-06-05 | Toshiba Corp | 半導体装置及びその製造方法 |
US5289030A (en) | 1991-03-06 | 1994-02-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide layer |
EP0549055A3 (en) * | 1991-12-23 | 1996-10-23 | Koninkl Philips Electronics Nv | Method of manufacturing a semiconductor device provided with a field effect transistor, and such a semiconductor device |
US6624450B1 (en) | 1992-03-27 | 2003-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for forming the same |
CN110223990B (zh) * | 2019-06-18 | 2022-03-08 | 京东方科技集团股份有限公司 | 顶栅结构及其制备方法、阵列基板、显示设备 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL161305C (nl) * | 1971-11-20 | 1980-01-15 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderin- richting. |
JPS5235983A (en) * | 1975-09-17 | 1977-03-18 | Hitachi Ltd | Manufacturing method of field effective transistor |
JPS52130567A (en) * | 1976-04-26 | 1977-11-01 | Toshiba Corp | Preparation of semiconductor device |
JPS5444482A (en) * | 1977-09-14 | 1979-04-07 | Matsushita Electric Ind Co Ltd | Mos type semiconductor device and its manufacture |
US4182023A (en) * | 1977-10-21 | 1980-01-08 | Ncr Corporation | Process for minimum overlap silicon gate devices |
JPS5476069A (en) * | 1977-11-30 | 1979-06-18 | Fujitsu Ltd | Manufacture of semiconductor device |
US4287661A (en) * | 1980-03-26 | 1981-09-08 | International Business Machines Corporation | Method for making an improved polysilicon conductor structure utilizing reactive-ion etching and thermal oxidation |
FR2481005A1 (fr) * | 1980-04-17 | 1981-10-23 | Western Electric Co | Procede de fabrication de transistors a effet de champ a canal court |
-
1982
- 1982-11-30 CA CA000416638A patent/CA1197926A/en not_active Expired
- 1982-12-10 EP EP82306614A patent/EP0081999B1/de not_active Expired
- 1982-12-10 DE DE8282306614T patent/DE3279079D1/de not_active Expired
- 1982-12-10 DE DE8686108855T patent/DE3280420T2/de not_active Expired - Lifetime
- 1982-12-10 EP EP86108855A patent/EP0225426B1/de not_active Expired - Lifetime
- 1982-12-16 JP JP57221086A patent/JPH0640549B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3280420D1 (de) | 1992-12-17 |
JPS58147071A (ja) | 1983-09-01 |
EP0081999B1 (de) | 1988-09-28 |
EP0225426B1 (de) | 1992-11-11 |
EP0225426A3 (en) | 1987-10-28 |
EP0081999A3 (en) | 1985-01-16 |
JPH0640549B2 (ja) | 1994-05-25 |
DE3280420T2 (de) | 1993-04-08 |
EP0225426A2 (de) | 1987-06-16 |
CA1197926A (en) | 1985-12-10 |
EP0081999A2 (de) | 1983-06-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |