DE2039726A1 - Screen printing metal mask - Google Patents

Screen printing metal mask

Info

Publication number
DE2039726A1
DE2039726A1 DE19702039726 DE2039726A DE2039726A1 DE 2039726 A1 DE2039726 A1 DE 2039726A1 DE 19702039726 DE19702039726 DE 19702039726 DE 2039726 A DE2039726 A DE 2039726A DE 2039726 A1 DE2039726 A1 DE 2039726A1
Authority
DE
Germany
Prior art keywords
screen printing
metal mask
mask
printing metal
printing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19702039726
Other languages
German (de)
Other versions
DE2039726B2 (en
DE2039726C (en
Inventor
Zisler Gerhard C
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19702039726 priority Critical patent/DE2039726C/en
Priority claimed from DE19702039726 external-priority patent/DE2039726C/en
Publication of DE2039726A1 publication Critical patent/DE2039726A1/en
Publication of DE2039726B2 publication Critical patent/DE2039726B2/en
Application granted granted Critical
Publication of DE2039726C publication Critical patent/DE2039726C/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/702Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
    • H01L21/705Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thick-film circuits or parts thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41CPROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00Forme preparation
    • B41C1/14Forme preparation for stencil-printing or silk-screen printing
    • B41C1/142Forme preparation for stencil-printing or silk-screen printing using a galvanic or electroless metal deposition processing step
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
    • H05K3/1225Screens or stencils; Holders therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Printing Plates And Materials Therefor (AREA)

Description

Siebdruckmetallmaske Die Erfindung betrifft eine Siebdruckmetallmaske zum Bedrucken von abgesetzten Substraten für die Herstellung von elektrischen Schaltkreisen.Screen Printing Metal Mask The invention relates to a screen printing metal mask for printing on remote substrates for the production of electrical circuits.

In der Dickfilmtechnik ergeben sich z.B. bei der Herstellung von Leitungikreuzungen Schwierigkeiten dadurch, daß die Uberkreuzenden Leitungen von der Ebene des Substrats über die ebene des Dielektrikums geführt werden müssen. Je größer der Niveauunterschied zwischen den beiden Ebenen ist, desto größer ist die Verzerrung der Struktur der Uberkreuzenden Leitung, da die Druckfarbe in den sich zwangläufig bildenden Spalt zwischen Substratoberfläche und Naskenunterseite hineingepreßt wird.In thick-film technology, for example, they arise in the production of line crossings Difficulties in that the crossing lines from the plane of the substrate must be guided over the level of the dielectric. The greater the difference in level between the two levels, the greater the distortion in the structure of the Crossing line, because the printing ink in the inevitably forming gap is pressed in between the substrate surface and the underside of the nose.

Aufgabe der vorliegenden Erfindung ist es, eine Siebdruckmetallmaske anzugeben, die im Gegensatz zu den bekannten Siebdruckmasken ein praktisch verzerrungsfreies Drucken von z.B.The object of the present invention is to provide a screen printing metal mask indicate which, in contrast to the well-known screen printing masks, is a practically distortion-free Printing of e.g.

überkreuzenden Leitungen ermöglicht.Crossing lines allows.

Diese Aufgabe wird dadurch gelöst, daß die Siebdruckmetallmaske an den Stellen, an denen die zu bedruckende Substratoberfläche Erhöhungen aufweist, Vertiefungen besitzt und umgekehrt.This object is achieved in that the screen printing metal mask the places where the substrate surface to be printed has bumps, Has depressions and vice versa.

Damit ergeben sich die Vorteile, daß sich die Maske den bereits aufgedruckten Strukturen anpaßt, so daß die oberen Schichten von iehrschichtig bedruckten Substraten wesentlich geringere Verzerrungen aufweisen und daß dadurch der Abstand zweier nebeneinanderliegender Leitungen verringert werden kann.This results in the advantages that the mask is the one that has already been printed on Structures adapts so that the top layers of layered printed substrates have significantly lower distortions and that thereby the distance between two adjacent Lines can be reduced.

Vorzugsweise sind die Vertiefungen in der Maskenoberfläche eingeätzt und die Erhöhungen galvanoplastisch aufgebaut. Es ist jedoch auch möglich, nur mit galvanoplastiychcn Verf,ahr¢<n zu arbeiten. Auf diese Weise läßt sich die bei der Herstellung der Siebdruckmaske unbedingt erforderliche Genauigkeit der Konturen leicht erreichen.The depressions are preferably in the mask surface etched in and the elevations built up by electroforming. However, it is also possible with just galvanoplastiychcn Verf, ahr ¢ <n to work. In this way, the The accuracy of the contours is essential for the production of the screen printing mask easy to get to.

An Hand der Zeichnungen soll die Erfindung näher erlutert werden.The invention will be explained in more detail with reference to the drawings.

Figur 1 zeigt in perspektivischer Darstellung eine elektrisches Dickfilmschaltung mit sich überkreuzenden Leitungen.Figure 1 shows a perspective view of an electrical thick film circuit with crossing lines.

Figur 2 zeigt eine Draufsicht auf die Unterseite einer erfindungsgemäßen Siebdruckmetallmaske, die zum Drucken der Leitungsüberkreuzungen wie sie in Fig. 1 dargestellt sind, geeignet ist.Figure 2 shows a plan view of the underside of an inventive Screen printing metal mask used for printing the line crossings as shown in Fig. 1 shown is suitable.

Figur 3 zeigt einen Schnitt durch die erfindungsgemäße Siebdruckmaske entsprechend der Trennlinie III - III in Figur 2.FIG. 3 shows a section through the screen printing mask according to the invention corresponding to the dividing line III - III in Figure 2.

In Figur 1 ist auf einem Keramikeubstrat 1 zunächst eine Leitung 2 aufgedruckt und eingebrannt worden. Uber einem Teil der Leitung 2 befindet sich eine Dielektrikumsschicht 3. Auf die Dielektrikumeschieht 3 sind Uberkreuzende Leitungen 4 und 5 aufgedruckt. Dabei wiirde zum Aufdrucken der Leitung 4 ein herkömmliches Drucksieb verwendet, wodurch sich an der Niveaustufe zwischen der Substratciberfläche und dem Dielektrikum ein verschmiertes Leitugsbild 41 ergibt. Beim Drucken der Leitung 5 wurde dagegen eine erfindungagemäße Siebdruckmaske verwendet, wodurch die geometrische Verzerrungen der Leitungsbahn an der Niveaustufe 51 auf ein Minimum reduziert wurde.In FIG. 1, there is initially a line 2 on a ceramic substrate 1 printed and branded. Over part of the line 2 is located a dielectric layer 3. On the dielectric layer 3 are crossing lines 4 and 5 printed. In this case, a conventional one would be used for printing the line 4 Pressure screen is used, which means that it is at the level between the substrate surface and a smeared conductive pattern 41 results in the dielectric. When printing the line 5, however, a screen printing mask according to the invention was used, whereby the geometric Distortion of the line path at level 51 has been reduced to a minimum.

Figur 2 zeigt einen Blick auf die Unterseite einer erfindungsgemäßen Siebdruckmaske. In ein Grundbiech 6 wurde eine rechteckige Vertiefung 7 eingeätzt, die in Form und Abmessung genau den Abmessungen der Dielektrikumsschicht 3 entspricht, so daß die Druckmaske beim Auflegen auf das Substrat 1 überall satt anliegt. Ebenfalls auf der Maskenunterseite eingeätzt sind Öffnungen 8, die den zu druckenden überkreuzenden Leiterbahnen 4, 5 entsprechen. Auf der Maskenrückseite befinden sich die Sieböffnungen 9.Figure 2 shows a view of the underside of an inventive Screen printing mask. A rectangular recess 7 was etched into a base area 6, which exactly corresponds in shape and dimensions to the dimensions of the dielectric layer 3, so that the print mask when placed on the substrate 1 is fed up everywhere is present. Also etched into the underside of the mask are openings 8, which the to be printed crossing conductor tracks 4, 5 correspond. On the back of the mask are the sieve openings 9.

In dem in Figur 3 dargestellten Schnitt durch die erfindungsgemäße Druckmaske erkennt man die eingeätzte Vertiefung 7, die der auf der Substratoberfläche aufgebrachten Dielektrikumsschicht 3 entspricht und die Drukkonfiguration 8. Auf der Maskenoberseite befinden. sich die Sieböffnungen 9, durch die die Druckfarbe während des Druckvorgangs hidurchgepreß wird.In the section shown in Figure 3 through the inventive In the printing mask, one can see the etched recess 7 on the substrate surface Applied dielectric layer 3 corresponds and the Drukconfiguration 8. Auf the top of the mask. the screen openings 9 through which the printing ink is pressed through during the printing process.

Die Hergestellung der T)ruckmaske selbst erfolgt nach bekannten Verfahren.The T) ruck mask itself is produced according to known methods.

um hlu? sei darauf hingewiesen, daß die in den Zeichnungen dargestellten Grössenverhältnisse zur besseren Verdeutlichung übertrieben dargestellt sind und nicht Wirklichkeit entsprechen. Auch können mit der erfindungsgemäßen I)ruckmaske nicht nur schon bedruckte Substrate weiter bedruckt werden, sondern auch solch, deren Oberfläche aus anderen Gründen Erhöhungen oder Vertiefungen aufweist.um hlu? it should be noted that those shown in the drawings Size relationships are exaggerated for better clarity and do not correspond to reality. With the I) according to the invention, you can also use the jerk mask not only substrates that have already been printed are further printed, but also those, the surface of which has elevations or depressions for other reasons.

s Patentansprüche 2 Figurens claims 2 figures

Claims (3)

P a t e n t a n s p r t c h e 1- I-1. Siebdruckmetallmaske zum Bedrucken von abgesetzter Substraten für die Herstellung von elektrischen Schaltkreisen, d a d u r c h g e k e n n z e i c h n e t, daß sie an den Stellen, an denen die zu bedruckende Substratobetfläche Erhöhungen (3) aufweist, Vertiefungen (7) besitzt und umgekehrt. P a t e n t a n s p r t c h e 1- I-1. Screen printing metal mask for printing of remote substrates for the manufacture of electrical circuits, d a d u r c h e k e k e n n n z e i n e i n e t that they are in the places where the to The printing substrate surface has elevations (3) and depressions (7) and vice versa. 2. Siebdruckmetallmaske nach Anspruch 1, d a d u r c h g e -k e n n z e i c h n e t, daß die Vertiefungen eingeätzt sind.2. Screen printing metal mask according to claim 1, d a d u r c h g e -k e n n e i c h e t that the recesses are etched. 3. Siebdruckmetallmaske nach Anspruch 1 und/oder 2, d a d u r c h g e k e n n z e i c h n e t, daß die Erhöhungen galvanoplastisch aufgebaut sind.3. Screen printing metal mask according to claim 1 and / or 2, d a d u r c h it is not noted that the elevations are built up by electroplating.
DE19702039726 1970-08-10 Screen printing metal mask Expired DE2039726C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19702039726 DE2039726C (en) 1970-08-10 Screen printing metal mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702039726 DE2039726C (en) 1970-08-10 Screen printing metal mask

Publications (3)

Publication Number Publication Date
DE2039726A1 true DE2039726A1 (en) 1972-03-30
DE2039726B2 DE2039726B2 (en) 1972-11-09
DE2039726C DE2039726C (en) 1973-05-30

Family

ID=

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0241192A2 (en) * 1986-04-01 1987-10-14 Dowty Seals Limited A method of manufacturing a seal
US5704286A (en) * 1996-08-02 1998-01-06 Kabushik Kaisha Toshiba Screen printing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0241192A2 (en) * 1986-04-01 1987-10-14 Dowty Seals Limited A method of manufacturing a seal
EP0241192A3 (en) * 1986-04-01 1988-12-14 Dowty Seals Limited A method of manufacturing a seal
US5704286A (en) * 1996-08-02 1998-01-06 Kabushik Kaisha Toshiba Screen printing apparatus

Also Published As

Publication number Publication date
DE2039726B2 (en) 1972-11-09

Similar Documents

Publication Publication Date Title
DE1217153B (en) Method of making seals
DE3939432A1 (en) PRINTING STORM CONSISTING OF AT LEAST TWO SATELITE PRINTING PLANTS
WO2009124535A1 (en) Screen printing mold
DE3013667C2 (en) Printed circuit board and process for their manufacture
DE2350026A1 (en) METHOD OF MANUFACTURING A MULTIPLE ELECTRODE ARRANGEMENT FOR RECORDING DEVICES
DE2613408A1 (en) SCREEN PRINTING TEMPLATE
EP0555669A1 (en) Screen printing apparatus
DE2039726A1 (en) Screen printing metal mask
DE3133549A1 (en) LOW PRESSURE GRID AND METHOD FOR THE PRODUCTION THEREOF
DE2039726C (en) Screen printing metal mask
DE1640515B1 (en) Printing process for electrical circuits
DE1160955B (en) Cathode ray tube with electron-permeable window for registering characters
DE860511C (en) Device for carrying out the process for printing circuits
DE1242098B (en) Process for the production of printing forms for doctor blade gravure printing
DE563673C (en) Type with lines as print image
DE2543674A1 (en) METHOD FOR TINNING CIRCUIT BOARDS
DE2748271C3 (en) Printed circuit board and method of making the same
DE1267738B (en) Process for making electrical connections between the circuits of multilayer printed electrical circuits
DE3232651C1 (en) Drawing board with drawing rail
DE1222133B (en) Electrical functional unit consisting of electrical components with connecting wires and a method for producing the functional unit
DE2204522B2 (en) Pressure switch assembly with flexible support - has metallic islands at pressure points on support elements formed of conductive track material
DE1141295B (en) Method of making stencils
DE646441C (en) Process for the production of four-color prints
DE503966C (en) Process for the production of perforation patterns on metal plates by etching on both sides
DE579757C (en) Device for producing electrical connections and connections on insulating substrates by spraying metal

Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)