DE19828701C1 - Object geometric structure measuring device, e.g. co-ordinate measuring system for miniature workpiece - Google Patents

Object geometric structure measuring device, e.g. co-ordinate measuring system for miniature workpiece

Info

Publication number
DE19828701C1
DE19828701C1 DE1998128701 DE19828701A DE19828701C1 DE 19828701 C1 DE19828701 C1 DE 19828701C1 DE 1998128701 DE1998128701 DE 1998128701 DE 19828701 A DE19828701 A DE 19828701A DE 19828701 C1 DE19828701 C1 DE 19828701C1
Authority
DE
Germany
Prior art keywords
geometric structure
measuring device
sensor
ordinate
miniature workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE1998128701
Other languages
German (de)
Inventor
Frank Brossette
Mario Schroeder
Stefan Hombach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Original Assignee
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mycrona Gesellschaft fuer Innovative Messtechnik mbH filed Critical Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Priority to DE1998128701 priority Critical patent/DE19828701C1/en
Priority to DE29824806U priority patent/DE29824806U1/en
Priority to EP99111646A priority patent/EP0965816A3/en
Priority to US09/335,211 priority patent/US6240651B1/en
Application granted granted Critical
Publication of DE19828701C1 publication Critical patent/DE19828701C1/en
Priority to US09/841,514 priority patent/US6477784B2/en
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The geometric structure measuring device has an optical device (5), e.g. a camera, co-operating with a tactile sensor (1) having a sensor element (3) at the end of a shaft (2), which is deflected by contact with the object surface. The position variations of the sensor element or the shaft are detected by the optical device, which can move independently of the sensor. Also included are Independent claims for the following: (a) a method of releasing an adhered tactile sensor from a workpiece surface; (b) a method of cleaning a tactile sensor (c) miniature fiber-measuring calipers for use with the device

Description

Bereits auf Fachmessen (z. B. CONTROL Mai 98 Sinsheim, MICROTECNIC April 98 Zürich) wurden mechanisch antastende Meßtaster kleiner Bauart für Mehrkoordinaten-Meßmaschinen vorgestellt, welche optisch mittels einer Kamera ausgewertet werden. Diese Meßtaster bestehen aus einer Glasfaser, an deren einem Ende eine Kugel mit kleinem Durchmesser angebracht ist. An dem anderen Ende wird Licht in die Faser eingespeist, welches zur Beleuchtung der Kugel benötigt wird.Already at trade fairs (e.g. CONTROL May 98 Sinsheim, MICROTECNIC April 98 Zurich) were mechanical small touch probes for Multi-coordinate measuring machines presented which be optically evaluated by means of a camera. These probes consist of a glass fiber, on the a small diameter ball at one end is appropriate. At the other end there is light in the Fiber fed, which is used to illuminate the ball is needed.

Die beleuchtete Kugel ist in der Fokusebene vor der Kamera der Mehrkoordinaten-Meßmaschine angebracht, so daß diese Kugel im Kamerabild scharf abgebildet wird. Mittels dieser Kugel können zu vermessende Gegenstände angetastet werden.The illuminated sphere is in the focus plane in front of the Camera of the multi-coordinate measuring machine attached, see above that this sphere is shown sharply in the camera image. Objects can be measured using this sphere be touched.

Ein Auslenken der Kugel bei einer Antastung wird mittels des Kamerabildes, welches die Kugel scharf abbildet, erkannt und ausgewertet.A deflection of the ball during a probing will by means of the camera image, which makes the sphere sharp maps, recognized and evaluated.

Diese Faser-Meßtaster sind - bedingt durch ihre kugelförmige Tastfläche - nicht in der Lage, bestimmte Unebenheitsformen an Oberflächen genau antasten zu können. Es ist Aufgabe der vorliegenden Erfindung, in solchen Fällen eine verbesserte Antastmöglichkeit zu schaffen. These fiber probes are - due to their spherical button - unable to certain Precisely feel unevenness on surfaces can. It is an object of the present invention in in such cases an improved possibility of probing create.  

Die nachfolgend beschriebene Erfindung kann eine deutliche Verbesserung gegenüber der Antastgenauigkeit bereits bekannter Faser-Meßtaster kleinster Bauart bringen:The invention described below can be one significant improvement over the probing accuracy already known fiber probe of the smallest design bring:

Zur Verbesserung der Antastgenauigkeit ist das antastende Element nicht kugelförmig, sondern als flache Scheibe ausgebildet.This is to improve the probing accuracy probing element not spherical, but as flat disc.

Claims (1)

Faser-Meßtaster kleiner Bauart, welcher auf einer Mehrkoordinaten Meßmaschine anzubringen ist und dort mittels einer Kamera erfasst werden kann, dadurch gekennzeichnet, daß das antastende Element am Ende der Faser eine Tastscheibe ist.Fiber probe of small design, which is to be attached to a multi-coordinate measuring machine and can be detected there by means of a camera, characterized in that the probing element at the end of the fiber is a probe disk.
DE1998128701 1998-06-17 1998-06-26 Object geometric structure measuring device, e.g. co-ordinate measuring system for miniature workpiece Revoked DE19828701C1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE1998128701 DE19828701C1 (en) 1998-06-26 1998-06-26 Object geometric structure measuring device, e.g. co-ordinate measuring system for miniature workpiece
DE29824806U DE29824806U1 (en) 1998-06-26 1998-06-26 Fiber probe of small design
EP99111646A EP0965816A3 (en) 1998-06-17 1999-06-16 Device to measure the geometrical contour of an object
US09/335,211 US6240651B1 (en) 1998-06-17 1999-06-17 Coordinate measuring machine having a non-sensing probe
US09/841,514 US6477784B2 (en) 1998-06-17 2001-04-24 Coordinate measuring machine having a non-sensing probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1998128701 DE19828701C1 (en) 1998-06-26 1998-06-26 Object geometric structure measuring device, e.g. co-ordinate measuring system for miniature workpiece

Publications (1)

Publication Number Publication Date
DE19828701C1 true DE19828701C1 (en) 2000-03-16

Family

ID=7872212

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1998128701 Revoked DE19828701C1 (en) 1998-06-17 1998-06-26 Object geometric structure measuring device, e.g. co-ordinate measuring system for miniature workpiece

Country Status (1)

Country Link
DE (1) DE19828701C1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4243284C2 (en) * 1992-12-21 1996-09-12 Zeiss Carl Jena Gmbh Probe element for coordinate measuring systems
DE29710242U1 (en) * 1997-06-12 1997-08-07 Trapet, Eugen, Dr., 38176 Wendeburg Probe for measuring geometric structures

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4243284C2 (en) * 1992-12-21 1996-09-12 Zeiss Carl Jena Gmbh Probe element for coordinate measuring systems
DE29710242U1 (en) * 1997-06-12 1997-08-07 Trapet, Eugen, Dr., 38176 Wendeburg Probe for measuring geometric structures

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Legal Events

Date Code Title Description
8100 Publication of the examined application without publication of unexamined application
D1 Grant (no unexamined application published) patent law 81
8322 Nonbinding interest in granting licenses declared
8363 Opposition against the patent
8331 Complete revocation