DE19681494T1 - Roboter mit Direktantrieb - Google Patents

Roboter mit Direktantrieb

Info

Publication number
DE19681494T1
DE19681494T1 DE19681494T DE19681494T DE19681494T1 DE 19681494 T1 DE19681494 T1 DE 19681494T1 DE 19681494 T DE19681494 T DE 19681494T DE 19681494 T DE19681494 T DE 19681494T DE 19681494 T1 DE19681494 T1 DE 19681494T1
Authority
DE
Germany
Prior art keywords
direct drive
drive robot
robot
direct
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19681494T
Other languages
English (en)
Other versions
DE19681494B4 (de
Inventor
Todd R Solomon
Donald J Thomas
Gerard J Labonville
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Smart Machines Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/546,728 external-priority patent/US5794487A/en
Application filed by Smart Machines Inc filed Critical Smart Machines Inc
Publication of DE19681494T1 publication Critical patent/DE19681494T1/de
Application granted granted Critical
Publication of DE19681494B4 publication Critical patent/DE19681494B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H37/00—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
    • F16H37/12—Gearings comprising primarily toothed or friction gearing, links or levers, and cams, or members of at least two of these types
    • F16H2037/128—Generating reciprocating motion by a planetary gear (ratio 2:1) using endless flexible members
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20311—Robotic arm including power cable or connector
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20317—Robotic arm including electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20323—Robotic arm including flaccid drive element

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
DE19681494T 1995-07-10 1996-07-10 Roboter mit Direktantrieb Expired - Lifetime DE19681494B4 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US50042895A 1995-07-10 1995-07-10
US08/500,428 1995-07-10
US08/546,728 1995-10-23
US08/546,728 US5794487A (en) 1995-07-10 1995-10-23 Drive system for a robotic arm
US08/677,402 1996-07-09
US08/677,402 US6428266B1 (en) 1995-07-10 1996-07-09 Direct driven robot
PCT/US1996/011549 WO1997003395A1 (en) 1995-07-10 1996-07-10 Direct driven robot

Publications (2)

Publication Number Publication Date
DE19681494T1 true DE19681494T1 (de) 1998-06-18
DE19681494B4 DE19681494B4 (de) 2008-08-28

Family

ID=27414148

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681494T Expired - Lifetime DE19681494B4 (de) 1995-07-10 1996-07-10 Roboter mit Direktantrieb

Country Status (3)

Country Link
US (1) US6428266B1 (de)
DE (1) DE19681494B4 (de)
WO (1) WO1997003395A1 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5993142A (en) * 1997-07-10 1999-11-30 Genmark Automation, Inc. Robot having multiple degrees of freedom in an isolated environment
US7594912B2 (en) 2004-09-30 2009-09-29 Intuitive Surgical, Inc. Offset remote center manipulator for robotic surgery
US7077619B2 (en) * 2001-07-13 2006-07-18 3M Innovative Properties Company Continuous motion robotic manipulator
US7152456B2 (en) * 2004-01-14 2006-12-26 Romer Incorporated Automated robotic measuring system
US7112808B2 (en) * 2004-02-25 2006-09-26 Axcelis Technologies, Inc. Wafer 2D scan mechanism
US7323695B2 (en) * 2004-04-05 2008-01-29 Axcelis Technologies, Inc. Reciprocating drive for scanning a workpiece
JP4840607B2 (ja) * 2004-04-09 2011-12-21 アクセリス テクノロジーズ インコーポレーテッド ばねと釣合重りを用いて往復回転運動を行うウエハ走査システム
US7119343B2 (en) * 2004-05-06 2006-10-10 Axcelis Technologies, Inc. Mechanical oscillator for wafer scan with spot beam
US10646292B2 (en) * 2004-09-30 2020-05-12 Intuitive Surgical Operations, Inc. Electro-mechanical strap stack in robotic arms
US9261172B2 (en) 2004-09-30 2016-02-16 Intuitive Surgical Operations, Inc. Multi-ply strap drive trains for surgical robotic arms
US20060097196A1 (en) * 2004-11-08 2006-05-11 Axcelis Technologies Inc. Dose uniformity during scanned ion implantation
US20060219042A1 (en) * 2005-04-04 2006-10-05 Wen-Chang Tu Blade assembly for transmission of semiconductor chip
WO2007033273A2 (en) * 2005-09-13 2007-03-22 Romer Incorporated Vehicle comprising an articulator of a coordinate measuring machine
DE102005046604A1 (de) * 2005-09-29 2007-04-05 Robert Bosch Gmbh Vorrichtung zur Handhabung von Blisterstreifen
US7654348B2 (en) * 2006-10-06 2010-02-02 Irobot Corporation Maneuvering robotic vehicles having a positionable sensor head
JP4979530B2 (ja) * 2007-09-28 2012-07-18 日本電産サンキョー株式会社 産業用ロボット
US8276959B2 (en) * 2008-08-08 2012-10-02 Applied Materials, Inc. Magnetic pad for end-effectors
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
DE102009008966B4 (de) * 2009-02-13 2011-02-17 Asys Automatic Systems Gmbh & Co. Kg Drehverbindung zwischen Bauteilen in Reinraumbearbeitungsanlagen
JP5480562B2 (ja) * 2009-08-26 2014-04-23 日本電産サンキョー株式会社 産業用ロボット
US8079459B2 (en) * 2009-11-19 2011-12-20 The Unites States Of America As Represented By The Secretary Of The Army Transport apparatus
US20120063874A1 (en) * 2010-09-15 2012-03-15 Applied Materials, Inc. Low profile dual arm vacuum robot
KR101917335B1 (ko) 2010-10-08 2018-11-09 브룩스 오토메이션 인코퍼레이티드 동일축 구동 진공 로봇
US9522595B2 (en) 2011-01-27 2016-12-20 Irobot Defense Holdings, Inc. Small unmanned ground vehicle
US9346499B2 (en) 2011-01-27 2016-05-24 Irobot Corporation Resilient wheel assemblies
KR101829397B1 (ko) 2011-09-16 2018-02-19 퍼시몬 테크놀로지스 코포레이션 낮은 가변성을 가진 로봇
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
WO2015031380A1 (en) * 2013-08-26 2015-03-05 Brooks Automation, Inc. Substrate transport apparatus
TWI803777B (zh) * 2013-08-26 2023-06-01 美商布魯克斯自動機械美國公司 基板搬運裝置
WO2015112538A1 (en) 2014-01-21 2015-07-30 Persimmon Technologies, Corp. Substrate transport vacuum platform
JP6474971B2 (ja) * 2014-07-03 2019-02-27 株式会社ダイヘン ワーク搬送装置
US9486919B1 (en) 2014-08-13 2016-11-08 Google Inc. Dual-axis robotic joint
US9358684B1 (en) * 2015-02-18 2016-06-07 Merry Electronics Co., Ltd. Wireless transmission device and robot arm using the same
US9827668B2 (en) * 2016-04-15 2017-11-28 Fetch Robotics, Inc. Robotic joint
US10252420B2 (en) * 2017-06-09 2019-04-09 Precise Automation, Inc. Collaborative robot
US10173323B2 (en) * 2017-06-09 2019-01-08 Precise Automation, Inc. Collaborative robot
CN107160379B (zh) * 2017-06-30 2023-08-15 安徽理工大学 一种螺钉装配专用scara机器人
TW202404753A (zh) * 2018-10-05 2024-02-01 美商布魯克斯自動機械美國公司 基板處理裝置及在基板處理裝置中處理基板之方法
US11192239B2 (en) * 2018-10-05 2021-12-07 Brooks Automation, Inc. Substrate processing apparatus
TW202138143A (zh) * 2020-01-23 2021-10-16 美商布魯克斯自動機械公司 基板運送設備
US11413744B2 (en) * 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof
CN112754663A (zh) * 2021-01-06 2021-05-07 深圳康诺思腾科技有限公司 机械臂及具有其的机器人
US11826910B2 (en) 2021-05-20 2023-11-28 Carnegie Mellon University Direct drive end-effectors with parallel kinematics

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3247978A (en) * 1962-12-12 1966-04-26 Programmed & Remote Syst Corp Manipulator hand
FR2406503A1 (fr) * 1977-10-19 1979-05-18 Renault Circuit de transfert d'energie et de signaux electriques sans contact au niveau des articulations d'un robot
JPS5950275A (ja) 1982-09-16 1984-03-23 Rigaku Keisoku Kk 磁性流体軸封装置
US4499341A (en) 1982-09-22 1985-02-12 Amp Incorporated Extensible electrical cable assembly
USRE34311E (en) * 1984-08-30 1993-07-13 Texas Instruments Incorporated Semiconductor slice cassette transport unit
US4702668A (en) * 1985-01-24 1987-10-27 Adept Technology, Inc. Direct drive robotic system
US4728252A (en) 1986-08-22 1988-03-01 Lam Research Corporation Wafer transport mechanism
DE3704505A1 (de) * 1987-02-13 1988-08-25 Leybold Ag Einlegegeraet fuer vakuumanlagen
US4897015A (en) 1987-05-15 1990-01-30 Ade Corporation Rotary to linear motion robot arm
US4881863A (en) * 1987-12-17 1989-11-21 Primary Systems Corporation Apparatus for inspecting wafers
JPH01240291A (ja) * 1988-03-22 1989-09-25 Texas Instr Japan Ltd ロボット
JPH0756879B2 (ja) * 1988-03-31 1995-06-14 日鉄セミコンダクター株式会社 半導体の無塵化製造装置
US5007784A (en) * 1989-01-20 1991-04-16 Genmark Automation Dual end effector robotic arm
JPH03154791A (ja) * 1989-11-14 1991-07-02 Sumitomo Eaton Noba Kk ロボット用多関節アーム
US5513946A (en) 1991-08-27 1996-05-07 Canon Kabushiki Kaisha Clean robot
US5451135A (en) 1993-04-02 1995-09-19 Carnegie Mellon University Collapsible mobile vehicle
DE4314628C1 (de) * 1993-05-04 1994-06-23 Schunk Fritz Gmbh Elektrische Dreh- und Schwenkeinheit

Also Published As

Publication number Publication date
DE19681494B4 (de) 2008-08-28
US6428266B1 (en) 2002-08-06
WO1997003395A1 (en) 1997-01-30

Similar Documents

Publication Publication Date Title
DE19681494T1 (de) Roboter mit Direktantrieb
DE69717680D1 (de) Roboter
BR9407009A (pt) Unidadede acionamento
DE69618647D1 (de) Hybridantrieb
DE69636230D1 (de) Robotersteuerung
DE69623827T2 (de) Antriebseinheit
FI931757A (fi) Sähköohjauslaite
DE69317574D1 (de) Gelenkroboter
DE69414089D1 (de) Gelenkroboter
DE69604281T2 (de) Linearer antrieb
DE59401918D1 (de) Gleiskettenlaufwerk
DE69421112T2 (de) Roboter
DE69308770D1 (de) Ultraschallantrieb
DE59301464D1 (de) Antriebsaggregat
DE69606113T2 (de) Roboter
DE69406624D1 (de) Gelenkartiger roboter
DE59400633D1 (de) Nebenaggregateantrieb
DE69316315T2 (de) Ultraschalantrieb
DE59404051D1 (de) Antriebseinheit
DE59400887D1 (de) Antriebsaggregat
DE59405466D1 (de) Antriebskombination
ATA43294A (de) Antriebsanordnung
DE69434252D1 (de) Antriebseinrichtung
NO952814D0 (no) Drivanordning
KR960037394U (ko) 갠트리로봇 구동장치

Legal Events

Date Code Title Description
8141 Disposal/no request for examination
8110 Request for examination paragraph 44
8170 Reinstatement of the former position
8127 New person/name/address of the applicant

Owner name: BROOKS AUTOMATION, INC., CHELMSFORD, MASS., US

8364 No opposition during term of opposition
R071 Expiry of right