DE1621347A1 - Mehrlagige Schichtanordnung,insbesondere aus Aufdampfschichten bestehend - Google Patents
Mehrlagige Schichtanordnung,insbesondere aus Aufdampfschichten bestehendInfo
- Publication number
- DE1621347A1 DE1621347A1 DE19671621347 DE1621347A DE1621347A1 DE 1621347 A1 DE1621347 A1 DE 1621347A1 DE 19671621347 DE19671621347 DE 19671621347 DE 1621347 A DE1621347 A DE 1621347A DE 1621347 A1 DE1621347 A1 DE 1621347A1
- Authority
- DE
- Germany
- Prior art keywords
- layers
- layer
- vapor
- layer arrangement
- particular consisting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3605—Coatings of the type glass/metal/inorganic compound
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3615—Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3694—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer having a composition gradient through its thickness
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Description
- Mehrlagige Schichtanordnung, insbesondere aus Aufdampfschichten: bestehend.
Vorliegende Erfindung-, bezieht sich auf eine mehrlagig,e Schicht- anordnung, insbesondere aus Aufdampfschichteri bestehend, auf einer Unterlage, bei der dLe einzelnen Schichten aus Stoffen mit verschiedenen Wirmeausdehn ingskoeffzienten bestehen. für 7iel==,ti@@ren drln@s@@.°rc:c>1:, z. .(3s durch IIerstellung eines klei-- rua@ ft:ir@:;.-Lr@:*@3ei.ders.@=incl@@.=@ °@cm mlrr.;@eZe@it@°oxi.i;@schexi -@ä:@h@lrungen, itr# FIeraUe1.Luxisc3-Lner gen K"zp?zL-tät oder Ton rntztrri@@,ir@ @r»:n Schichtopetchern :tot es crwünsciit, zdB. schr groß- aui' nie La:-L1Lejtdhf:eri Schichten herzuste1-
Claims (1)
- P@a@t@e n-t@a n'sip_r@ü_e@h-e 1. -_. liehrlagige Schichtanordnung, insbesondere aus Aufdamgfschichten bestehend, auf einer Unterlage, bei der die einzelnen Schichten aus Stoffen mit verschiedenen ,.liäxmeausdehnungskoeffzienten bestehen, dadurch gekennzeichnet, daß innerhalb eines Grenzbereiches (3) zwischen zwei benachbarten' Schichten 2 und ein kontinuierlicher Itbergang der beiden Schichtstoffe besteht.,
2. Verfahren zur Herstellung einer mehrlagigen Schichtanordnung, bei dem Schichten aus verschiedenen Stoffen übereinander auf- gedampft werden, nach Anspruch 1, dadurch gekennzeichnet, daß noch wahrend des Aufdampfens der vorhergehenden Schicht' der Stoff der, darauffolgenden Schicht mtaufgedampft wird.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0112559 | 1967-10-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1621347A1 true DE1621347A1 (de) | 1971-06-03 |
Family
ID=7531864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19671621347 Pending DE1621347A1 (de) | 1967-10-25 | 1967-10-25 | Mehrlagige Schichtanordnung,insbesondere aus Aufdampfschichten bestehend |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE1621347A1 (de) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2491956A1 (de) * | 1980-09-09 | 1982-04-16 | Westinghouse Electric Corp | |
EP0221492A2 (de) * | 1985-11-04 | 1987-05-13 | Asulab S.A. | Gegenstand mit Verschleissschutzschicht aus Edelmetall |
WO1999008972A1 (en) * | 1997-08-13 | 1999-02-25 | Glaverbel | Glass-based copper-mirrors |
EP1174397A3 (de) * | 2000-07-10 | 2002-03-13 | Guardian Industries Corp. | Wärmebehandelbare beschichtete Gegenstände mit niedriger Emissivität und Verfahren zu deren Herstellung |
US6445503B1 (en) | 2000-07-10 | 2002-09-03 | Guardian Industries Corp. | High durable, low-E, heat treatable layer coating system |
US7005190B2 (en) | 2002-12-20 | 2006-02-28 | Guardian Industries Corp. | Heat treatable coated article with reduced color shift at high viewing angles |
EP1787965A3 (de) * | 2000-07-10 | 2007-07-04 | Guardian, Industries Corp. | Wärmebehandelbare low-e-beschichtete Gegenstände und Herstellungsverfahren dafür |
-
1967
- 1967-10-25 DE DE19671621347 patent/DE1621347A1/de active Pending
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2491956A1 (de) * | 1980-09-09 | 1982-04-16 | Westinghouse Electric Corp | |
CH657954GA3 (de) * | 1980-09-09 | 1986-10-15 | ||
EP0221492A2 (de) * | 1985-11-04 | 1987-05-13 | Asulab S.A. | Gegenstand mit Verschleissschutzschicht aus Edelmetall |
EP0221492A3 (en) * | 1985-11-04 | 1988-04-13 | Asulab S.A. | Article coated with a wear-resistant film of a precious metal |
WO1999008972A1 (en) * | 1997-08-13 | 1999-02-25 | Glaverbel | Glass-based copper-mirrors |
US6576349B2 (en) | 2000-07-10 | 2003-06-10 | Guardian Industries Corp. | Heat treatable low-E coated articles and methods of making same |
WO2002004375A3 (en) * | 2000-07-10 | 2002-04-25 | Guardian Industries | Heat treatable low-E coated articles and methods of making same |
US6445503B1 (en) | 2000-07-10 | 2002-09-03 | Guardian Industries Corp. | High durable, low-E, heat treatable layer coating system |
EP1174397A3 (de) * | 2000-07-10 | 2002-03-13 | Guardian Industries Corp. | Wärmebehandelbare beschichtete Gegenstände mit niedriger Emissivität und Verfahren zu deren Herstellung |
US6686050B2 (en) | 2000-07-10 | 2004-02-03 | Guardian Industries Corp. | Heat treatable low-E coated articles and methods of making same |
US6723211B2 (en) | 2000-07-10 | 2004-04-20 | Guardian Industries Corp | Method of making coated articles with contact layer that is more oxidized further from IR reflecting layer |
EP1787965A3 (de) * | 2000-07-10 | 2007-07-04 | Guardian, Industries Corp. | Wärmebehandelbare low-e-beschichtete Gegenstände und Herstellungsverfahren dafür |
US7300701B2 (en) | 2000-07-10 | 2007-11-27 | Guardian Industries Corp. | High durable, low-e, heat treatable layer coating system |
US7314668B2 (en) | 2000-07-10 | 2008-01-01 | Guardian Industries Corp. | Low-E coated articles having zirconium inclusive dielectric layer |
US8173263B2 (en) | 2000-07-10 | 2012-05-08 | Guardian Industries Corp. | Heat treatable low-E coated articles and methods of making same |
US7005190B2 (en) | 2002-12-20 | 2006-02-28 | Guardian Industries Corp. | Heat treatable coated article with reduced color shift at high viewing angles |
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