DE10311855B4 - Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels - Google Patents
Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels Download PDFInfo
- Publication number
- DE10311855B4 DE10311855B4 DE10311855A DE10311855A DE10311855B4 DE 10311855 B4 DE10311855 B4 DE 10311855B4 DE 10311855 A DE10311855 A DE 10311855A DE 10311855 A DE10311855 A DE 10311855A DE 10311855 B4 DE10311855 B4 DE 10311855B4
- Authority
- DE
- Germany
- Prior art keywords
- stamp
- wafers
- structures
- arrangement
- transferring information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/009—Manufacturing the stamps or the moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Crystallography & Structural Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10311855A DE10311855B4 (de) | 2003-03-17 | 2003-03-17 | Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels |
US10/802,618 US7401549B2 (en) | 2003-03-17 | 2004-03-17 | Arrangement for transferring information/structures to wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10311855A DE10311855B4 (de) | 2003-03-17 | 2003-03-17 | Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels |
Publications (2)
Publication Number | Publication Date |
---|---|
DE10311855A1 DE10311855A1 (de) | 2004-10-14 |
DE10311855B4 true DE10311855B4 (de) | 2005-04-28 |
Family
ID=32980612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10311855A Expired - Fee Related DE10311855B4 (de) | 2003-03-17 | 2003-03-17 | Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels |
Country Status (2)
Country | Link |
---|---|
US (1) | US7401549B2 (de) |
DE (1) | DE10311855B4 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006019962A1 (de) * | 2006-04-28 | 2007-11-08 | Infineon Technologies Ag | Imprint-Maske und Verfahren zum Ausrichten der Imprint-Maske |
DE102008033903A1 (de) | 2008-07-18 | 2010-01-21 | Suss Microtec Test Systems Gmbh | Vorrichtung und Verfahren zur Montage mehrerer Halbleiterbauelemente auf einem Zielsubstrat |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7162810B2 (en) * | 2004-08-11 | 2007-01-16 | Intel Corporation | Micro tool alignment apparatus and method |
KR100647314B1 (ko) * | 2005-01-31 | 2006-11-23 | 삼성전자주식회사 | 나노 임프린트 리소그래피용 정렬시스템 및 이를 채용한임프린트 리소그래피 방법 |
JP4290177B2 (ja) | 2005-06-08 | 2009-07-01 | キヤノン株式会社 | モールド、アライメント方法、パターン形成装置、パターン転写装置、及びチップの製造方法 |
ATE549294T1 (de) * | 2005-12-09 | 2012-03-15 | Obducat Ab | Vorrichtung und verfahren zum transfer von mustern mit zwischenstempel |
JP5002523B2 (ja) * | 2008-04-25 | 2012-08-15 | 日立オートモティブシステムズ株式会社 | 燃料の圧力脈動低減機構、及びそれを備えた内燃機関の高圧燃料供給ポンプ |
US20100092599A1 (en) * | 2008-10-10 | 2010-04-15 | Molecular Imprints, Inc. | Complementary Alignment Marks for Imprint Lithography |
EP2199855B1 (de) * | 2008-12-19 | 2016-07-20 | Obducat | Verfahren und Prozesse zur Modifizierung von Polymermaterialoberflächeninteraktionen |
EP2199854B1 (de) * | 2008-12-19 | 2015-12-16 | Obducat AB | Hybridpolymerform für nanoimprintverfahren und verfahren zu seiner herstellung |
JP2010251360A (ja) * | 2009-04-10 | 2010-11-04 | Sony Corp | 表示装置の製造方法および表示装置 |
TWI630374B (zh) * | 2009-04-27 | 2018-07-21 | 美商品譜公司 | 快速驗證精密元件之公差之裝置 |
US20110151114A1 (en) * | 2009-12-18 | 2011-06-23 | Cooledge Lighting, Inc. | Composite patterning device and method for removing elements from host substrate by establishing conformal contact between device and a contact surface |
CN103513836A (zh) * | 2012-06-28 | 2014-01-15 | 北儒精密股份有限公司 | 低色差触控面板的对位辨识方法 |
US20150037915A1 (en) * | 2013-07-31 | 2015-02-05 | Wei-Sheng Lei | Method and system for laser focus plane determination in a laser scribing process |
CN107077065B (zh) * | 2014-09-22 | 2020-10-30 | 皇家飞利浦有限公司 | 传递方法和装置以及计算机程序产品 |
US20170084490A1 (en) * | 2015-09-18 | 2017-03-23 | Stmicroelectronics, Inc. | Method for making ic with stepped sidewall and related ic devices |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020115002A1 (en) * | 2000-10-12 | 2002-08-22 | Todd Bailey | Template for room temperature, low pressure micro-and nano-imprint lithography |
US20020170880A1 (en) * | 2001-03-22 | 2002-11-21 | Yong Chen | Scanning probe based lithographic alignment |
WO2004013693A2 (en) * | 2002-08-01 | 2004-02-12 | Molecular Imprints, Inc. | Scatterometry alignment for imprint lithography |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2890882B2 (ja) * | 1990-04-06 | 1999-05-17 | キヤノン株式会社 | 位置付け方法、半導体デバイスの製造方法及びそれを用いた投影露光装置 |
NL9100215A (nl) * | 1991-02-07 | 1992-09-01 | Asm Lithography Bv | Inrichting voor het repeterend afbeelden van een maskerpatroon op een substraat. |
US5243195A (en) * | 1991-04-25 | 1993-09-07 | Nikon Corporation | Projection exposure apparatus having an off-axis alignment system and method of alignment therefor |
US5414514A (en) * | 1993-06-01 | 1995-05-09 | Massachusetts Institute Of Technology | On-axis interferometric alignment of plates using the spatial phase of interference patterns |
JPH08243880A (ja) * | 1994-12-07 | 1996-09-24 | Us Amada Ltd | 刻印装置を備えた工作機械 |
US6342941B1 (en) * | 1996-03-11 | 2002-01-29 | Nikon Corporation | Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and method |
US5866281A (en) * | 1996-11-27 | 1999-02-02 | Wisconsin Alumni Research Foundation | Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts |
US6707545B1 (en) * | 1999-09-07 | 2004-03-16 | Applied Materials, Inc. | Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems |
JP3802309B2 (ja) * | 2000-03-28 | 2006-07-26 | 株式会社アドテックエンジニアリング | 多層回路基板製造における位置合わせ装置及び露光装置 |
JP2001274080A (ja) * | 2000-03-28 | 2001-10-05 | Canon Inc | 走査型投影露光装置及びその位置合わせ方法 |
JP3631956B2 (ja) * | 2000-05-12 | 2005-03-23 | 富士通株式会社 | 半導体チップの実装方法 |
JP2002050560A (ja) * | 2000-08-02 | 2002-02-15 | Nikon Corp | ステージ装置、計測装置及び計測方法、露光装置及び露光方法 |
US7196782B2 (en) * | 2000-09-20 | 2007-03-27 | Kla-Tencor Technologies Corp. | Methods and systems for determining a thin film characteristic and an electrical property of a specimen |
JP4618859B2 (ja) * | 2000-10-10 | 2011-01-26 | 東レエンジニアリング株式会社 | 積層ウエハーのアライメント方法 |
US6579738B2 (en) * | 2000-12-15 | 2003-06-17 | Micron Technology, Inc. | Method of alignment for buried structures formed by surface transformation of empty spaces in solid state materials |
US6635941B2 (en) * | 2001-03-21 | 2003-10-21 | Canon Kabushiki Kaisha | Structure of semiconductor device with improved reliability |
US7027156B2 (en) | 2002-08-01 | 2006-04-11 | Molecular Imprints, Inc. | Scatterometry alignment for imprint lithography |
US7070405B2 (en) | 2002-08-01 | 2006-07-04 | Molecular Imprints, Inc. | Alignment systems for imprint lithography |
US6916584B2 (en) | 2002-08-01 | 2005-07-12 | Molecular Imprints, Inc. | Alignment methods for imprint lithography |
US6811938B2 (en) * | 2002-08-29 | 2004-11-02 | Eastman Kodak Company | Using fiducial marks on a substrate for laser transfer of organic material from a donor to a substrate |
US6975040B2 (en) * | 2003-10-28 | 2005-12-13 | Agere Systems Inc | Fabricating semiconductor chips |
-
2003
- 2003-03-17 DE DE10311855A patent/DE10311855B4/de not_active Expired - Fee Related
-
2004
- 2004-03-17 US US10/802,618 patent/US7401549B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020115002A1 (en) * | 2000-10-12 | 2002-08-22 | Todd Bailey | Template for room temperature, low pressure micro-and nano-imprint lithography |
WO2002067055A2 (en) * | 2000-10-12 | 2002-08-29 | Board Of Regents, The University Of Texas System | Template for room temperature, low pressure micro- and nano-imprint lithography |
US20020170880A1 (en) * | 2001-03-22 | 2002-11-21 | Yong Chen | Scanning probe based lithographic alignment |
WO2004013693A2 (en) * | 2002-08-01 | 2004-02-12 | Molecular Imprints, Inc. | Scatterometry alignment for imprint lithography |
Non-Patent Citations (2)
Title |
---|
DENG, Y., NEUREUTHER A.R.: Simulation of exposure and alignment for nano-imprint lithography, in: Proceedings of the SPIE, The International Societyfor Optical Engineering, USA, 2002, Vol. 4688, No. 1-2, S. 842-849 * |
WHITE D.L., WOOD O.R.: Novel alignment system for imprint lithography, in: J. Vac. Sci. Technol. B, 2000, Vol. 18, No. 6, S. 3552-3556 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006019962A1 (de) * | 2006-04-28 | 2007-11-08 | Infineon Technologies Ag | Imprint-Maske und Verfahren zum Ausrichten der Imprint-Maske |
DE102008033903A1 (de) | 2008-07-18 | 2010-01-21 | Suss Microtec Test Systems Gmbh | Vorrichtung und Verfahren zur Montage mehrerer Halbleiterbauelemente auf einem Zielsubstrat |
Also Published As
Publication number | Publication date |
---|---|
US20040219803A1 (en) | 2004-11-04 |
DE10311855A1 (de) | 2004-10-14 |
US7401549B2 (en) | 2008-07-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: QIMONDA AG, 81739 MUENCHEN, DE |
|
R081 | Change of applicant/patentee |
Owner name: INFINEON TECHNOLOGIES AG, DE Free format text: FORMER OWNER: QIMONDA AG, 81739 MUENCHEN, DE Owner name: POLARIS INNOVATIONS LTD., IE Free format text: FORMER OWNER: QIMONDA AG, 81739 MUENCHEN, DE |
|
R081 | Change of applicant/patentee |
Owner name: POLARIS INNOVATIONS LTD., IE Free format text: FORMER OWNER: INFINEON TECHNOLOGIES AG, 85579 NEUBIBERG, DE |
|
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |