CN2906907Y - Non-uniform magnetic field edge characteristic corrector for ion implantation machine - Google Patents
Non-uniform magnetic field edge characteristic corrector for ion implantation machine Download PDFInfo
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- CN2906907Y CN2906907Y CNU2005201425043U CN200520142504U CN2906907Y CN 2906907 Y CN2906907 Y CN 2906907Y CN U2005201425043 U CNU2005201425043 U CN U2005201425043U CN 200520142504 U CN200520142504 U CN 200520142504U CN 2906907 Y CN2906907 Y CN 2906907Y
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- magnetic pole
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Abstract
The utility model discloses a non-uniform magnetic field edge characteristics corrector for ion implanter, which comprises an upper correction magnetic pole of non-uniform magnetic field inlet, a lower correction magnetic pole of non-uniform magnetic field inlet, a lower correction magnetic pole of non-uniform magnetic field outlet, an upper correction magnetic pole of non-uniform magnetic field outlet, an upper/a lower magnetic pole of non-uniform magnetic field, an upper exciting coil, a magnetic yoke and a lower exciting coil of non-uniform magnetic field. The external layer of edge magnetic field for non-uniform magnetic field generates the other non-uniform magnetic field, with a contrary non-uniform distribution principle and direction, but not with similar magnetic characteristics. Thus, the edge magnetic field has an improved edge distribution.
Description
Technical field
The utility model relates to a kind of magnetic field local edge calibration equipment, relates in particular to a kind of ion implantor non-uniform magnetic-field local edge adjuster.
Background technology
Along with constantly dwindling of characteristic of semiconductor live width, in the ion implantation technology in semiconductor processes, the requirement of the every injection parameter when injection is mixed is also more and more higher, wherein the bundle depth of parallelism to the scanning beam of electrostatic scanning generation has proposed very high request, carry out timing in the angle that adopts the non-uniform magnetic-field halved tie, because the influence of fringe magnetic field can reduce the effect of restrainting angle correct.
Summary of the invention
The present invention is novel to be in order to reduce the influence of fringe magnetic field, to have adopted a kind of non-uniform magnetic-field marginal correction technology, guaranteed the calibration result of bundle angle corrector as far as possible.The present invention mainly is at the fringe magnetic field of non-uniform magnetic-field skin, another non-uniform magnetic-field of generation of having a mind to, the rule of its non-uniform Distribution is opposite with former non-uniform magnetic-field, magnetic direction is opposite, and its fringe magnetic field characteristic close, therefore the more former non-uniform magnetic-field in fringe magnetic field after both stacks just has greatly improved, more near the edge distribution of ideal design.
The utility model is achieved through the following technical solutions: ion implantor non-uniform magnetic-field local edge adjuster comprises non-uniform magnetic-field inlet colonel positive magnetic pole, the non-uniform magnetic-field inlet is proofreaied and correct magnetic pole down, magnetic pole is proofreaied and correct in the non-uniform magnetic-field outlet down, non-uniform magnetic-field outlet colonel positive magnetic pole, magnetic pole on the non-uniform magnetic-field, non-uniform magnetic-field lower magnetic pole, magnet exciting coil on the non-uniform magnetic-field, the non-uniform magnetic-field yoke, magnet exciting coil under the non-uniform magnetic-field.
Wherein non-uniform magnetic-field yoke screwing is connected with magnetic pole and non-uniform magnetic-field lower magnetic pole on the non-uniform magnetic-field, and the distance at vertical direction between two magnetic poles is increased outward gradually by the lining, produces required angle correct non-uniform magnetic-field; Magnetic pole upside screw connects magnet exciting coil on the non-uniform magnetic-field on the non-uniform magnetic-field, and non-uniform magnetic-field lower magnetic pole downside screw connects magnet exciting coil under the non-uniform magnetic-field; Non-uniform magnetic-field inlet colonel positive magnetic pole screw is connected non-uniform magnetic-field inlet upside, the non-uniform magnetic-field inlet is proofreaied and correct the magnetic pole screw down and is connected non-uniform magnetic-field inlet downside, between two magnetic poles the distance of vertical direction by outside increase gradually inward, produce the magnetic field for correcting in ingress edge magnetic field at inlet; Non-uniform magnetic-field outlet colonel positive magnetic pole screw is connected non-uniform magnetic-field outlet upside, the non-uniform magnetic-field outlet is proofreaied and correct the magnetic pole screw down and is connected non-uniform magnetic-field outlet downside, between two magnetic poles the distance of vertical direction by outside increase gradually inward, produce the magnetic field for correcting of outlet fringe magnetic field in outlet.
The utlity model has following distinguishing feature:
1. proofreading and correct required non-uniform magnetic-field is produced by the yoke loop that adds;
2. proofread and correct required non-uniform magnetic-field and need not to add excitation component, directly take from former non-uniform magnetic-field.
Description of drawings
Fig. 1 is a principle assumption diagram of the present utility model.
Wherein
1-non-uniform magnetic-field inlet colonel positive magnetic pole
2-non-uniform magnetic-field inlet is proofreaied and correct magnetic pole down
Magnetic pole is proofreaied and correct in the outlet of 3-non-uniform magnetic-field down
4-non-uniform magnetic-field outlet colonel positive magnetic pole
The last magnetic pole of 5-non-uniform magnetic-field
The lower magnetic pole of 6-non-uniform magnetic-field
The last magnet exciting coil of 7-non-uniform magnetic-field
The yoke of the former non-uniform magnetic-field of 8-
The following magnet exciting coil of 9-non-uniform magnetic-field.
10-non-uniform magnetic-field inlet
The outlet of 11-non-uniform magnetic-field
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described further, but not as to qualification of the present utility model.
As shown in Figure 1, ion implantor non-uniform magnetic-field local edge adjuster comprises non-uniform magnetic-field inlet colonel positive magnetic pole 1, the non-uniform magnetic-field inlet is proofreaied and correct magnetic pole 2 down, magnetic pole 3 is proofreaied and correct in the non-uniform magnetic-field outlet down, non-uniform magnetic-field outlet colonel positive magnetic pole 4, and magnetic pole 5 on the non-uniform magnetic-field, non-uniform magnetic-field lower magnetic pole 6, magnet exciting coil 7 on the non-uniform magnetic-field, non-uniform magnetic-field yoke 8, and magnet exciting coil 9 under the non-uniform magnetic-field.
Wherein non-uniform magnetic-field yoke 8 screwings be connected with magnetic pole 5 and non-uniform magnetic-field lower magnetic pole 6, two magnetic poles on the non-uniform magnetic-field between increase gradually outward by the lining in the distance of vertical direction, produce required angle correct non-uniform magnetic-field; Magnetic pole 5 upside screws connect magnet exciting coil 7 on the non-uniform magnetic-field on the non-uniform magnetic-field, and non-uniform magnetic-field lower magnetic pole 6 downside screws connect magnet exciting coil 9 under the non-uniform magnetic-field; Non-uniform magnetic-field inlet colonel positive magnetic pole 1 screw is connected non-uniform magnetic-field 10 upsides that enter the mouth, non-uniform magnetic-field inlet is proofreaied and correct magnetic pole 2 screws down and is connected non-uniform magnetic-field 10 downsides that enter the mouth, between two magnetic poles the distance of vertical direction by outside increase gradually inward, produce the magnetic field for correcting in ingress edge magnetic field at inlet; Non-uniform magnetic-field outlet colonel positive magnetic pole 3 screws are connected non-uniform magnetic-field and export 11 upsides, correction magnetic pole 4 screws are connected non-uniform magnetic-field and export 11 downsides under the non-uniform magnetic-field outlet, between two magnetic poles the distance of vertical direction by outside increase gradually inward, produce the magnetic field for correcting of outlet fringe magnetic field in outlet.
The novel specific embodiment of the present invention elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes the infringement to the novel patent of the present invention, with corresponding legal responsibilities.
Claims (1)
1, a kind of ion implantor non-uniform magnetic-field local edge adjuster, comprise magnetic pole on the non-uniform magnetic-field, the non-uniform magnetic-field lower magnetic pole, magnet exciting coil on the non-uniform magnetic-field, the non-uniform magnetic-field yoke, magnet exciting coil under the non-uniform magnetic-field, it is characterized in that: also comprise non-uniform magnetic-field inlet colonel positive magnetic pole, the non-uniform magnetic-field inlet is proofreaied and correct magnetic pole down, magnetic pole is proofreaied and correct in the non-uniform magnetic-field outlet down, non-uniform magnetic-field outlet colonel positive magnetic pole, wherein non-uniform magnetic-field yoke screwing is connected with magnetic pole and non-uniform magnetic-field lower magnetic pole on the non-uniform magnetic-field, and the distance at vertical direction between two magnetic poles is increased outward gradually by the lining; Magnetic pole upside screw connects magnet exciting coil on the non-uniform magnetic-field on the non-uniform magnetic-field, and non-uniform magnetic-field lower magnetic pole downside screw connects magnet exciting coil under the non-uniform magnetic-field; Non-uniform magnetic-field inlet colonel positive magnetic pole screw is connected non-uniform magnetic-field inlet upside, and the non-uniform magnetic-field inlet is proofreaied and correct the magnetic pole screw down and is connected non-uniform magnetic-field inlet downside, between two magnetic poles the distance of vertical direction by outside increase gradually inward; Non-uniform magnetic-field outlet colonel positive magnetic pole screw is connected non-uniform magnetic-field outlet upside, and the non-uniform magnetic-field outlet is proofreaied and correct the magnetic pole screw down and is connected non-uniform magnetic-field outlet downside, between two magnetic poles the distance of vertical direction by outside increase gradually inward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201425043U CN2906907Y (en) | 2005-12-05 | 2005-12-05 | Non-uniform magnetic field edge characteristic corrector for ion implantation machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201425043U CN2906907Y (en) | 2005-12-05 | 2005-12-05 | Non-uniform magnetic field edge characteristic corrector for ion implantation machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2906907Y true CN2906907Y (en) | 2007-05-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2005201425043U Expired - Fee Related CN2906907Y (en) | 2005-12-05 | 2005-12-05 | Non-uniform magnetic field edge characteristic corrector for ion implantation machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN2906907Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103794452A (en) * | 2012-11-08 | 2014-05-14 | 北京中科信电子装备有限公司 | Method for controlling ion implantation uniform distribution |
-
2005
- 2005-12-05 CN CNU2005201425043U patent/CN2906907Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103794452A (en) * | 2012-11-08 | 2014-05-14 | 北京中科信电子装备有限公司 | Method for controlling ion implantation uniform distribution |
| CN103794452B (en) * | 2012-11-08 | 2016-03-02 | 北京中科信电子装备有限公司 | System for accurately controlling ion implantation distribution uniformity |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |