CN2906498Y - Hot air drying furnace for solar silicon chip - Google Patents
Hot air drying furnace for solar silicon chip Download PDFInfo
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- CN2906498Y CN2906498Y CN 200620041824 CN200620041824U CN2906498Y CN 2906498 Y CN2906498 Y CN 2906498Y CN 200620041824 CN200620041824 CN 200620041824 CN 200620041824 U CN200620041824 U CN 200620041824U CN 2906498 Y CN2906498 Y CN 2906498Y
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- burner hearth
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- blower fan
- hearth
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Abstract
The utility model discloses a heat air drying furnace for solar silicon wafer, comprising a hearth (10), a drying device and a conveyer. The drying device is composed of a drying fan (11) arranged at the bottom of the hearth, a heater (12) and an air outlet duct (13). The drying fan is provided with an air inlet pipe (111) and an air outlet pipe (112), wherein, the air inlet pipe is connected with the hearth by a plurality of air inlets (140); the air outlet pipe is connected with the heater. The air outlet duct is communicated with the heater, extending to the top wall of the hearth. A plurality of air outlets (130) are arranged on the duct section of the air outlet duct in the top wall of the hearth and a plurality of air inlets (101) are correspondingly arranged on the hearth top wall. The air inlets are connected with all air outlets by connecting pipes, causing hot air to enter the hearth. The conveyer is composed of a motor (15) and a mesh belt (16) drive joint with the motor while the mesh belt passes through the hearth horizontally. The drying damage rate of the silicon wafers is reduced to 0.5% by the heat air drying furnace, the production capacity is increased by 60% and the energy consumption is reduced by 30%.
Description
Technical field
The utility model relates to a kind of drying equipment that is used for dry solar energy original silicon chip, relates in particular to a kind of hot-air drying stove that utilizes the dry solar energy original silicon chip of hot blast.
Background technology
Solar cell is a kind of photoelectric effect of utilizing, and solar energy is converted to the TRT of direct current energy, the electric energy that utilizes solar cell to send, can offer various consumers uses, therefore all adopt solar cell on a lot of electronic equipments, for example electronic calculator, satellite, power station etc.In recent years, because the raising of the generating efficiency of solar cell, people begin solar cell is installed on buildings such as house, and the electric energy that utilizes solar cell to send provides part even whole electricity consumption electric energy.Compare with coal, oil, water energy, the nuclear energy energy, the cleaning of solar energy, to remarkable advantage such as ambient influnence is little and inexhaustible is developed rapidly solar cell industry at short notice, becomes vivifying rising industry.
Solar cell mainly is made of silicon chip, on the high-purity silicon chip, form semiconductor P-N knot, when these P-N knots are subjected to illumination, can form from the electric current of the P utmost point to the N utmost point, many P-N knots are utilized metal interconnected formation array, and the connection electrode, collect these electric currents and storage, just become available electric energy.
The processing technology of solar cell mainly comprises following flow process:
1, cleans: original high-purity silicon chip is carried out surface texture handle;
2, oven dry: remove the hydrone that material surface adheres to, guarantee the silicon chip surface drying;
3, diffusion: on silicon chip, make the P-N knot;
4, etching: trimming, avoid forming the loop and no current output;
5, spraying: make antireflective coating, reduce reflection of light;
6, printing: make electrode, be convenient to collected current;
7, sintering: make electrode and silicon chip form good Ohmic contact, be convenient to electric current output.
In the stoving process of original silicon chip,, be the primary problem that solves wherein because therefore the fragility of silicon chip guarantees that the material breakage rate of drying course is low as far as possible.
Existing drying technology is to adopt drier and two equipment of baking oven to finish oven dry, promptly utilize drier earlier, remove the water droplet of silicon chip surface by the centrifugal force of rotation generation, behind the water droplet that dries silicon chip surface, utilize the moisture of baking oven by high-temperature baking removal material surface, it is water stain to guarantee that material surface does not have.
Yet there is following defective in this drying technology:
1, drier will reach suitable rotating speed in the drying process, is easy to cause the material breakage, and breakage rate is greater than 1.5%;
2, baking oven direct baking because internal temperature is inhomogeneous, unstable, be difficult for accurately control, if overtemperature is serious, causes that easily the vessel of carrying silicon chip catch fire.And baking oven power consumption is big, and power consumption is 50kw/h;
3. two stations are intermittently finished this technology, can't produce continuously, and the manpower consumption amount is big, yield poorly station output 250pcs/h.
Summary of the invention
Technical problem to be solved in the utility model provides a kind of hot-air drying stove that utilizes the dry solar energy original silicon chip of hot blast.
The utility model is to solve the problems of the technologies described above the technical scheme that adopts to be:
A kind of hot-air drying stove of solar silicon wafers comprises burner hearth, drying unit and conveyer;
Described drying unit comprises oven dry blower fan and a heater and a wind pipe of being located at described burner hearth bottom, this oven dry blower fan has a blast pipe and a discharge pipe, this discharge pipe is connected with described heater, described wind pipe communicates with described heater, and extend to above the roof of described burner hearth, the pipeline section that wind pipe is positioned at burner hearth roof top is provided with a plurality of exhaust vents, and this burner hearth roof is corresponding to be provided with a plurality of fresh air inlets that communicate with burner hearth, is connected with each exhaust vent by pipeline section one by one;
Described conveyer comprises motor and the guipure that is in transmission connection with this motor, and this guipure level is passed described burner hearth.
The hot-air drying stove of described solar silicon wafers, wherein, described drying unit also comprises an intake stack, and this intake stack is located at described burner hearth below and is linked to each other with the blast pipe of described oven dry blower fan, and the top of this intake stack is provided with a plurality of air inlets that communicate with burner hearth.
The hot-air drying stove of described solar silicon wafers, also comprise the blow-dry device of being located at the burner hearth charging aperture, this blow-dry device comprises and dries up blower fan, air channel and a plurality of blowhole, this air channel links to each other with the discharge pipe that dries up blower fan, these a plurality of blowhole are positioned at the top of the guipure at burner hearth charging aperture place, and link to each other with this air channel.
The hot-air drying stove of described solar silicon wafers, wherein, the described blower fan that dries up is the blower fan that has air cleaner.
The hot-air drying stove of described solar silicon wafers, wherein, the transfer rate of described guipure is between 500～1000mm/min.
The hot-air drying stove of described solar silicon wafers, wherein, the temperature in the described burner hearth is between 100 ℃～150 ℃.
The drying process of hot-air drying stove of the present utility model is: silicon chip is earlier by blow-dry device, blows away the water droplet of silicon chip surface with cold wind, enters in the burner hearth again, utilizes the hot-air seasoning silicon chip of steady temperature, withdraws from burner hearth at last, finishes drying.
Compare with prior art, the advantage of the hot-air drying stove of the utility model solar silicon wafers is:
1, in whole dry run, the solar energy original silicon chip is done at the uniform velocity translation on the guipure that operates steadily, and compares with the drying of original drier high speed circular motion, and the process that greatly reduces material is damaged, and breakage rate is reduced to below 0.5%;
2, dry up and hot-air seasoning by cold wind, compare with the direct oven dry of baking oven with original drier drying, rate of drying is greatly improved, and very energy-conservation, and energy consumption is about 36kw/h;
3, because whole dry run is continuous production, to compare with original two stations intermittently, the manpower consumption amount is few, and the output height makes production capacity increase to 400pcs/h;
4, temperature-controlled precision height, safe and reliable, technological parameter is easy to adjust: temperature and the wind speed of accurately controlling hot blast by control heater and blower fan, and the even air inlet of multichannel air inlet, thereby make the hot blast temperature in the burner hearth accurate, stable and even, avoided because temperature is too high, inhomogeneous and unstable to solar energy original silicon chip Effect on Performance, and the vessel defective of catching fire of carrying silicon chip;
5, convenient operating maintenance is simple, and is non-maintaining substantially.
Description of drawings
Below in conjunction with the drawings and specific embodiments feature and advantage of the present utility model are described, wherein:
Fig. 1 is the structural representation of an embodiment of hot-air drying stove of the utility model solar silicon wafers.
Fig. 2 is a side view embodiment illustrated in fig. 1.
Fig. 3 is the structural representation of another embodiment of hot-air drying stove of the utility model solar silicon wafers.
Fig. 4 is the structured flowchart of safety monitoring system of the hot-air drying stove of the utility model solar silicon wafers.
The specific embodiment
See also Fig. 1,2, the hot-air drying stove of the utility model solar silicon wafers comprises burner hearth 10, the drying unit of hot blast is provided in burner hearth and is used to transmit the conveyer of solar silicon wafers by burner hearth 10.
This drying unit comprises the oven dry blower fan 11 of being located at burner hearth 10 bottoms, heater 12, and wind pipe 13, this oven dry blower fan 11 has a blast pipe 111 and a discharge pipe 112, this discharge pipe 112 links to each other with this heater 12, this wind pipe 13 also links to each other with heater 12, wind pipe 13 from burner hearth 10 bottoms through burner hearth outside, and extend to above burner hearth 10 roofs, it is positioned at burner hearth 10 outer pipeline sections and is coated with thermal insulation layer, the pipeline section that wind pipe 13 is positioned at burner hearth roof top is provided with a plurality of exhaust vents 130, and correspondingly on the roof of burner hearth 10 be provided with a plurality of fresh air inlets 101 that communicate with burner hearth 10, these fresh air inlets 101 are connected with each exhaust vent 130 one by one by tube connector, and wind pipe 13 is communicated with burner hearth 10.After the wind that oven dry blower fan 11 is discharged heats through heater 12, enter burner hearth 10 through wind pipe 13 from exhaust vent 130, make temperature maintenance in the burner hearth 10 at a certain design temperature, this design temperature scope is set according to the actual process needs between 100 ℃～150 ℃.The wind speed of oven dry blower fan 11 and the temperature of heater 12 all can be regulated as required, because regulative mode is not an emphasis of the present utility model, therefore no longer describe in detail.Though in the present embodiment, because the spatial constraints of burner hearth 10, wind pipe 13 from burner hearth 10 bottoms through outside the burner hearth, extend to burner hearth 10 roofs top, drawing pipeline section enters from roof, but the layout of wind pipe 13 is not as limit, but can be with any layout of evenly introducing from burner hearth 10 tops from the hot blast of heater 12 in the burner hearth 10.
This conveyer comprises motor 15 and the guipure 16 that is in transmission connection with motor 15, and these guipure 16 levels are passed burner hearth, and guipure 16 is positioned at a plurality of fresh air inlets 101 belows of burner hearth 10.Guipure 16 is driven and is rotated by motor 15, transmits in order to (direction of arrow of Fig. 1) after will placing silicon chip on the guipure 16 by forward direction, and the transfer rate of guipure 16 generally adopts 625mm/min between 500～1000mm/min.When guipure 16 transmissions, the hot blasts that utilize the hot blast hole 130 of wind pipe 13 to be blown in the burner hearth 10 downwards make silicon chip surface obtain drying.
Above-mentioned drying unit also can comprise an intake stack 14, this intake stack 14 is located at the below of burner hearth 10, and with the oven dry blower fan 11 blast pipe 111 link to each other, the top of this intake stack 14 is provided with a plurality of air inlets 140, be used to collect the hot blast in the burner hearth 10, reclaim use for oven dry blower fan 11, reach the purpose of recycling energy.But this intake stack 14 is not in order to qualification the utility model, and the blast pipe 111 of oven dry blower fan 11 is from burner hearth 10 interior recovery hot blasts or from other source air intakes, all in scope of the present utility model.
In another preferred embodiment shown in Figure 3, the hot-air drying stove of the utility model solar silicon wafers also comprises the blow-dry device of being located at the outer side of burner hearth, this blow-dry device comprises and dries up blower fan 17, air channel 18 and a plurality of blowing mouth 19, wherein air channel 18 links to each other with the discharge pipe 170 that dries up blower fan 17, and a plurality of blowing mouths 19 are positioned at guipure 16 tops at burner hearth charging aperture place, and link to each other with this air channel 18.When silicon chip entered the mouth through burner hearth, 19 pairs of silicon chip surfaces blowings of blowing mouth dried up surperficial water droplet.Before this blow-dry device was used for drying in silicon chip enters burner hearth 10, the water with silicon chip surface blew away earlier, and this can improve the speed of oven dry, and saved the spent energy of oven dry.
Above-mentioned blow-dry device dry up blower fan 17, adopt the blower fan that has air filter, the gas handling system of blower fan can filter out dust in air, in order to avoid dust adheres to silicon chip surface with the wind that blows out, pollutes silicon chip.
See also Fig. 4, the hot-air drying stove of the utility model solar silicon wafers also comprises a safety monitoring system 20, is used in time reacting when unusual condition occurring, avoids mistake and accident to take place.This safety monitoring system 20 comprises a control module 21 and connected torque sensor 22, photoelectric sensor 23, thermocouple 24 and alarm unit 25, and this control module 21 also is electrically connected with motor 15, is used to control the motor start and stop.Wherein torque sensor is located on 15 in the motor of conveyer, detects Motor torque, and when the torque overload of motor 15, control module 21 instruction alarm units 25 carry out overload warning; Photoelectric sensor 23 is located on the guipure of burner hearth discharging opening afterbody, be used for detecting and whether have silicon chip to arrive herein, generally speaking, the silicon chip of sending in the burner hearth 10 is operated personnel and takes out, but when silicon chip is not in time taken away arrival photoelectric sensor 23 positions, photoelectric sensor 23 sends the signal of telecommunication to control module 21, carry out blanking by control module instruction alarm unit 25 and report to the police, and control motor 15 stops to drive the guipure transmission; 24 of thermocouples are installed in the wind pipe 13, be used to detect the hot blast temperature that enters burner hearth, and be transferred to control module 21, when hot blast temperature surpasses design temperature, control module 21 indication alarm units 25 send overtemperature alarm, when thermocouple 24 damaged, control module 21 indication alarm units 25 sent disconnected idol and report to the police.
Claims (6)
1. the hot-air drying stove of a solar silicon wafers is characterized in that, comprises burner hearth, drying unit and conveyer;
Described drying unit comprises oven dry blower fan and a heater and a wind pipe of being located at described burner hearth bottom; This oven dry blower fan has a blast pipe and a discharge pipe, and this discharge pipe is connected with described heater; Described wind pipe communicates with described heater, and extends to the roof top of described burner hearth; The pipeline section that wind pipe is positioned at burner hearth roof top is provided with a plurality of exhaust vents, and this burner hearth roof is corresponding to be provided with a plurality of fresh air inlets that communicate with burner hearth, is connected with each exhaust vent by tube connector one by one;
Described conveyer comprises motor and the guipure that is in transmission connection with this motor, and this guipure level is passed described burner hearth.
2. the hot-air drying stove of solar silicon wafers as claimed in claim 1, it is characterized in that, described drying unit also comprises an intake stack, this intake stack is located at described burner hearth below and is linked to each other with the blast pipe of described oven dry blower fan, and the top of this intake stack is provided with a plurality of air inlets that communicate with burner hearth.
3. the hot-air drying stove of solar silicon wafers as claimed in claim 1, it is characterized in that, also comprise the blow-dry device of being located at the burner hearth charging aperture, this blow-dry device comprises and dries up blower fan, air channel and a plurality of blowhole, this air channel links to each other with the discharge pipe that dries up blower fan, these a plurality of blowhole are positioned at the top of the guipure at burner hearth charging aperture place, and link to each other with this air channel.
4. the hot-air drying stove of solar silicon wafers as claimed in claim 3 is characterized in that, the described blower fan that dries up is the blower fan that has air cleaner.
5. the hot-air drying stove of solar silicon wafers as claimed in claim 1 is characterized in that, the transfer rate of described guipure is between 500～1000mm/min.
6. the hot-air drying stove of solar silicon wafers as claimed in claim 1 is characterized in that, the temperature in the described burner hearth is between 100 ℃～150 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620041824 CN2906498Y (en) | 2006-05-17 | 2006-05-17 | Hot air drying furnace for solar silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620041824 CN2906498Y (en) | 2006-05-17 | 2006-05-17 | Hot air drying furnace for solar silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2906498Y true CN2906498Y (en) | 2007-05-30 |
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ID=38115135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620041824 Expired - Fee Related CN2906498Y (en) | 2006-05-17 | 2006-05-17 | Hot air drying furnace for solar silicon chip |
Country Status (1)
| Country | Link |
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| CN (1) | CN2906498Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102062524A (en) * | 2010-11-22 | 2011-05-18 | 烟台睿创微纳技术有限公司 | Automatic drying equipment for MEMS (micro electro mechanical system) device wafer |
| CN108332537A (en) * | 2018-01-17 | 2018-07-27 | 卡斯纳（苏州）医疗设备有限公司 | A kind of surgical instrument disinfection drying device |
| CN108807589A (en) * | 2017-05-05 | 2018-11-13 | 先进科技新加坡有限公司 | Solar cell dryer with double air inlets |
| CN109585604A (en) * | 2018-12-03 | 2019-04-05 | 江苏中宇光伏科技有限公司 | One kind too can cell piece drying unit and its processing technology |
| CN110314826A (en) * | 2019-07-08 | 2019-10-11 | 珠海格力智能装备有限公司 | Spraying and curing method and spraying and curing equipment for protecting heating core |
| CN111197917A (en) * | 2018-11-20 | 2020-05-26 | 新特能源股份有限公司 | Silicon material drying device |
| CN111664106A (en) * | 2019-03-08 | 2020-09-15 | 北京北方华创微电子装备有限公司 | Fan control method and fan control device |
-
2006
- 2006-05-17 CN CN 200620041824 patent/CN2906498Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102062524A (en) * | 2010-11-22 | 2011-05-18 | 烟台睿创微纳技术有限公司 | Automatic drying equipment for MEMS (micro electro mechanical system) device wafer |
| CN102062524B (en) * | 2010-11-22 | 2012-11-21 | 烟台睿创微纳技术有限公司 | Automatic drying equipment for MEMS (micro electro mechanical system) device wafer |
| CN108807589A (en) * | 2017-05-05 | 2018-11-13 | 先进科技新加坡有限公司 | Solar cell dryer with double air inlets |
| CN108332537A (en) * | 2018-01-17 | 2018-07-27 | 卡斯纳（苏州）医疗设备有限公司 | A kind of surgical instrument disinfection drying device |
| CN111197917A (en) * | 2018-11-20 | 2020-05-26 | 新特能源股份有限公司 | Silicon material drying device |
| CN109585604A (en) * | 2018-12-03 | 2019-04-05 | 江苏中宇光伏科技有限公司 | One kind too can cell piece drying unit and its processing technology |
| CN111664106A (en) * | 2019-03-08 | 2020-09-15 | 北京北方华创微电子装备有限公司 | Fan control method and fan control device |
| CN110314826A (en) * | 2019-07-08 | 2019-10-11 | 珠海格力智能装备有限公司 | Spraying and curing method and spraying and curing equipment for protecting heating core |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANDONG ZHANFENG ENERGY TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: PERFECT ENERGY TECHNOLOGY (SHANGHAI) CO., LTD. Effective date: 20120830 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201108 MINHANG, SHANGHAI TO: 277700 LINYI, SHANDONG PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20120830 Address after: Shun Road south western part of Shandong province 277700 County of Cangshan City Patentee after: Shandong exhibition Energy Technology Co., Ltd. Address before: 201108 Shanghai City, Minhang District Xhenzhuang Industrial Park, Shen Fu Road No. 679 block C Patentee before: Perfect Energy Technology (Shanghai) Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070530 Termination date: 20150517 |
|
| EXPY | Termination of patent right or utility model |