CN2832828Y - Vacuum coating system - Google Patents
Vacuum coating system Download PDFInfo
- Publication number
- CN2832828Y CN2832828Y CN 200520130173 CN200520130173U CN2832828Y CN 2832828 Y CN2832828 Y CN 2832828Y CN 200520130173 CN200520130173 CN 200520130173 CN 200520130173 U CN200520130173 U CN 200520130173U CN 2832828 Y CN2832828 Y CN 2832828Y
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- CN
- China
- Prior art keywords
- storehouse
- plated film
- coating system
- vacuum coating
- vacuum
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Abstract
The utility model discloses a vacuum filming system, which comprises a movable switching bin, two or more than two filming bins, high vacuum exhaust devices of the filming bins and a vacuum exhaust device of the switching bin, wherein the movable switching bin can be respectively and oppositely connected with each filming bin, the filming bins and the switching bin are respectively provided with opposite connecting openings which are matched mutually, and two service positions where work piece racks can be put are arranged in the switching bin and are connected by a moving transposition mechanism. The utility model has the advantages that the utility model is suitable for mass production and avoids exhaust burden and pollution brought the continuous circulation from atmospheric pressure to high vacuum; the utility model has increased production efficiency and low cost.
Description
Technical field
The utility model relates to a kind of vacuum coating system, especially a kind of automatic film coating system that is applicable to production in enormous quantities.
Background technology
Large batch of vacuum plating is used more and more general, in order to enhance productivity, the production unit of many continuous modes has appearred in coating system, but present this equipment is applicable to plate workpiece or banded workpiece more, disclose the vacuum plating unit in a kind of horizontal round tube type plated film storehouse as Chinese patent CN94219770.4, can be to matrix plated films such as sheet glass and stainless steels, but this vacuum plating unit is mainly used in a large amount of plate matrixes; And the plated film of a large amount of three-dimensional workpiece has mostly adopted unit operating mode and single plated film storehouse/cavity in the present prior art.Its technical process is: close the plated film storehouse behind the workpiece of packing into, be vented to rough vacuum so that start high-vacuum exhaust system and the paramount vacuum of exhaust, charge into working gas again and carry out plated film; After finishing, plated film in cavity, is inflated to the taking-up workpiece that opens the door again behind the normal atmosphere, so circulation.The open defect that this technical process exists is: the continuous circulation from atmosphere to high vacuum in the plated film warehouse brings heavy exhaust burden, time-consuming, effort and power consumption are big etc., and problem has been brought expensive and low work efficiency, and bring when charging into atmosphere and pollute and the problems such as oxidation of target, the workpiece film quality is descended, and significant discomfort should be produced needs in enormous quantities.
Summary of the invention
Technical problem to be solved in the utility model is to overcome above-mentioned prior art defective, provides a kind of and saves time, laborsaving, the coating system that reduces power consumption and topsoil.Another purpose of the present utility model is to provide a kind of vacuum coating system that keeps the continuous mode of certain vacuum degree.
The utility model provides a kind of vacuum coating system, one or more fixed plated films storehouse and the portable storehouse of switching wherein are set, switch the storehouse alternative and move to each top, plated film storehouse, and switch the storehouse and the plated film storehouse is provided with the docking port that is complementary, realize switching docking of storehouse and plated film storehouse.The plated film storehouse is preferably two or more, and is provided with the coupled high vacuum exhaustion device that vacuum plating requires that satisfies.Switch the storehouse and connect a vacuum pumping hardware, this vacuum pumping hardware can be in 0.1～20Pa scope with switching the storehouse and being vented to vacuum tightness with the plated film storehouse of its butt joint, also can be vented to more condition of high vacuum degree for special applications.
The number of switching the storehouse can be provided with according to actual needs, is generally one.But in switching the storehouse, be provided with the station I and the station II of two place work piece framves, and be provided with one and move inversion mechanism and realize that station I and station II replace mutually.
Annular or linear layout location are preferably adopted in described plated film storehouse.Be provided with upper cover plate in described plated film storehouse near the docking port place.
Utilize said apparatus of the present utility model, can realize coating process and workpiece put (shove charge) and (coming out of the stove) process of getting is separated, promptly by the portable storehouse of switching, can be during the plated film of plated film storehouse, break away from the plated film storehouse, finish transfer or the transfer from plated film storehouse to plated film finished product platform of workpiece in turn, and finish the storehouse high vacuum exhaustion necessary rough vacuum exhaust before of startup plated film or shift necessary inflation from the plated film storehouse to plated film finished product platform from work piece platform to be coated to the plated film storehouse.
Owing to adopt above-mentioned technical scheme, the utlity model has following beneficial effect: be suitable for producing in enormous quantities; Exhaust burden and the pollution of avoiding the plated film storehouse constantly to circulate from normal atmosphere to high vacuum and bring; Enhance productivity; Reduce cost.
Description of drawings
Fig. 1 is the utility model vacuum coating system agent structure synoptic diagram;
Fig. 2 is switching of the present utility model storehouse and plated film chamber structure synoptic diagram.
Wherein, the be installed work rest of workpiece of 1-, 2-switches the storehouse, 3-plated film storehouse, 4-switches station I in the storehouse, 5-docking mechanism, 6-rough vacuum gas barrier, 7-high vacuum exhaustion device, 8-switches the station II in the storehouse, 9-counterweight or tackle gear, 10-switches the mobile inversion mechanism in the cabin, 11-switches the docking port in storehouse, the docking port in 12-plated film storehouse, 13-upper cover plate.
Embodiment
Is example below in conjunction with accompanying drawing with solar energy heat collection pipe depositing Al N film, and enforcement of the present utility model is further specified:
As depicted in figs. 1 and 2, to be installed the earlier work rest 1 of workpiece of beginning at first places the station I (Roman number 1) 4 that switches in the storehouse 2, move and switch storehouse 2 and utilize docking mechanism 5 that the docking port 11 in mobile switching storehouse 2 and the docking port 12 in plated film storehouse 3 are connected, and the sealing upper cover plate 13 that work rest 1 and top thereof connect packed in the plated film storehouse 3, counterweight 9 is located at weight that the opposite side that switches storehouse 2 switches storehouse 2 with balance and makes and switch Cang Hui and change steadily, and counterweight 9 also can be set to the lifting maintenance that lifting appliance is used for equipment unit.The vacuum pumping hardware 6 that utilization is connected with switching storehouse 2 will switch the storehouse and be vented in vacuum 0.1Pa～20Pa scope together with plated film storehouse 3.Upper cover plate starts the high vacuum exhaustion device 7 in plated film storehouse 3, is vented to the required condition of high vacuum degree of coating process, and makes that the fixed workpiece carries out plated film on the work rest 1 in the plated film storehouse; Simultaneously, be inflated to normal atmosphere and throw off switching storehouse 2 with the docking port (being described docking port 11 and 12) in plated film storehouse 3, move to work rest then and pick and place the position, load onto new work rest and workpiece and upper cover plate 13 at station I again, to switch the top that Cang Hui goes to plated film storehouse 3 then, utilize the mobile inversion mechanism 10 that switches in the storehouse, station II is docked with plated film storehouse 3, and be vented to rough vacuum.
After plated film is finished in plated film storehouse 3, charge into argon gas (Ar) to 50Pa～100Pa scope, open the upper cover plate 13 in plated film storehouse 3, and utilize the station II that switches the storehouse that the work rest of having finished plated film in the plated film storehouse 3 is taken out, the station II that will be loaded with the work rest of having finished plated film then in switching storehouse 2 replaces mutually with the station I that is loaded with new work rest, and take turns with plated film storehouse 3 second and to dock, again new work rest 1 is packed in the plated film storehouse 3, utilize the rough vacuum gas barrier 6 that is connected with switching storehouse 2 will switch storehouse 2 and be vented to rough vacuum together with plated film storehouse 3; Start for the second time the high vacuum exhaustion device 7 in plated film storehouse 3, fasten upper cover plate, new workpiece carried out plated film etc. after being vented to high vacuum, repeat the operating process of the above-mentioned first round; Switching storehouse 2 is inflated to normal atmosphere once more and moves to work rest and takes, puts the position, take off workpiece and the work rest 1 thereof of having finished plated film for the second time, refill new work rest and workpiece thereof, can move to plated film storehouse B with switching storehouse 2, repeat the working process of above-mentioned plated film storehouse A, other plated film storehouse C, D, E, F etc. utilize the switching storehouse so to circulate, thereby can make each plated film storehouse can carry out plated film production in enormous quantities simultaneously seldom discontinuously.Utilize said apparatus of the present utility model, can realize that the putting of coating process and workpiece, the process of getting are separated, exhaust and gas replenishment process in finishing during the taking, putting and take, put of each whole workpiece in plated film storehouse between rough vacuum and the atmosphere carry out the plated film working hour thereby can increase a plurality of plated films storehouse significantly comprehensively simultaneously.
It should be noted that at last: above embodiment is in order to explanation the utility model and the described technical scheme of unrestricted the utility model; Therefore, although this specification sheets has been described in detail the utility model with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the utility model; And all do not break away from the technical scheme and the improvement thereof of spirit and scope of the present utility model, and it all should be encompassed in the claim scope of the present utility model.
Claims (9)
1, a kind of vacuum coating system, it is characterized in that: fixed plated film storehouse and the portable storehouse of switching are set in vacuum coating system, switch the storehouse and be movable to top, plated film storehouse, and switch the storehouse and the plated film storehouse is provided with the docking port that is complementary, realize switching docking of storehouse and plated film storehouse.
2, vacuum coating system according to claim 1 is characterized in that: but in switching the storehouse, be provided with the station I and the station II of two place work piece framves, and be provided with one and move inversion mechanism and realize that station I and station II replace mutually.
3, vacuum coating system according to claim 1 is characterized in that: described plated film storehouse is provided with coupled high vacuum exhaustion device.
4, vacuum coating system according to claim 1 is characterized in that: switch the storehouse and connect vacuum pumping hardware.
5, vacuum coating system according to claim 1 is characterized in that: described fixed plated film storehouse is two or more.
6, vacuum coating system according to claim 5 is characterized in that: annular or linear layout are adopted in described plated film storehouse.
7, vacuum coating system according to claim 1 is characterized in that: connect a seal cover board upper cover plate at the top of described film-coating workpiece frame.
8, vacuum coating system according to claim 1 is characterized in that: described switching storehouse is at least one.
9, vacuum coating system according to claim 1 is characterized in that: this system adopts PLC or computer controlled automatic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520130173 CN2832828Y (en) | 2005-10-27 | 2005-10-27 | Vacuum coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520130173 CN2832828Y (en) | 2005-10-27 | 2005-10-27 | Vacuum coating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2832828Y true CN2832828Y (en) | 2006-11-01 |
Family
ID=37197141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520130173 Expired - Lifetime CN2832828Y (en) | 2005-10-27 | 2005-10-27 | Vacuum coating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2832828Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061452A (en) * | 2009-11-13 | 2011-05-18 | 王殿儒 | Method for transferring rotation work rests between adjacent vacuum chambers |
| CN112760608A (en) * | 2020-12-14 | 2021-05-07 | 兰州空间技术物理研究所 | Method for preventing interlayer air bleeding in carbon fiber composite material surface film deposition process |
-
2005
- 2005-10-27 CN CN 200520130173 patent/CN2832828Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061452A (en) * | 2009-11-13 | 2011-05-18 | 王殿儒 | Method for transferring rotation work rests between adjacent vacuum chambers |
| CN112760608A (en) * | 2020-12-14 | 2021-05-07 | 兰州空间技术物理研究所 | Method for preventing interlayer air bleeding in carbon fiber composite material surface film deposition process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20061101 |
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| EXPY | Termination of patent right or utility model |