CN102061452A - Method for transferring rotation work rests between adjacent vacuum chambers - Google Patents
Method for transferring rotation work rests between adjacent vacuum chambers Download PDFInfo
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- CN102061452A CN102061452A CN 201010138860 CN201010138860A CN102061452A CN 102061452 A CN102061452 A CN 102061452A CN 201010138860 CN201010138860 CN 201010138860 CN 201010138860 A CN201010138860 A CN 201010138860A CN 102061452 A CN102061452 A CN 102061452A
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- vacuum chamber
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- work rest
- rotation work
- rotary table
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Abstract
The invention relates to a method for transferring rotation work rests between adjacent vacuum chambers. The method provided by the invention adopts a driving gear-rack push rod manipulator system, and makes a creative improvement on the basis of a traditional physical vapor deposition (PVD) single coating chamber gear planetary type revolution-rotation work rest. The basic transfer principle is as follows: when a certain notch of a revolution disk and a circular ring together hold a certain work rest to run to the unique notch of the circular ring, the notch leads to a certain notch of the previously waiting revolution disk of the other vacuum chamber; at this time, a driving gear pushes a rack push rod manipulator system, the rotation work rest is pushed to the notch of the waiting revolution disk of the other vacuum chamber, the push rod manipulator system retracts, and another revolution disk takes the work rest away; and by analogy, all the rotation work rests are transferred. The number of the notches in the revolution disk is equal to that of the rotation work rests. The whole operating procedure can be controlled by a programmable logic control (PLC) or full automatic computer.
Description
Technical field:
The present invention relates to a kind of method of between adjacent vacuum chamber, transmitting the rotation work rest, belong to the work rest design and the manufacturing field of many vacuum film coating chambers that continuous production in enormous quantities is used in the physical vapor deposition (PVD) technology.
Background technology:
In the physical vapor deposition (PVD) technology, known traditional work rest has two kinds, a kind of is the revolution-rotation work rest that adopts in the round shape vacuum film coating chamber, purpose is to make the workpiece plating even, the workpiece amount of plating is the loading capacity that depends on every stove, fill a stove, close the vacuum film coating chamber door, carry out plating by the time-program(me) of coating process.One stove plating is finished, and the workpiece that plating is good takes out, and reinstalls the not workpiece of plating, repeats next stove plating.
Another kind is the work rest that adopts in the tunnel like vacuum film coating chamber---sheet glass or sheet metal are laid the frame on it, by chain or rack drives mechanism, work rest is transferred to second from a vacuum chamber, the 3rd ... individual vacuum chamber, finish the required plated film program of finishing of technology in the vacuum chamber that is delivered to one by one again, the TCO production line of the precious plated film of the visible German Lay of this class tunnel like transmission company (is seen network address: www.leyboldoptics.com).
In order to implement the plating of workpiece in enormous quantities, with the different time sections of same technology, in a plurality of vacuum chambers, finish, make workpiece stays in each vacuum chamber time decreased to a required time period of a certain function of the plating in the processing sequence.
Set up a plurality of vacuum chambers to be still common way, do not have novelty, and, have nothing in common with each other, possess originality from the method for a vacuum chamber to adjacent next vacuum chamber transmission rotation work rest.
Through inquiry, domestic patent has following several patents of having authorized.But have significantly different with patent of the present invention:
200620160574.6 1 kinds of flexible conveying devices of Δ
This utility model discloses a kind of flexible conveying device, realizes that by guide rail and conveying belt the batch workpiece continous way is delivered to next vacuum chamber, and obviously this patent is to bring realization with flexible delivery, has significantly different on carrying method with patent of the present invention.
200820011373.9 1 kinds of production line for coating solar heat-collecting pipe of Δ
This utility model discloses a kind of production line for coating solar heat-collecting pipe, forms by chain work rest chain and work rest are housed, and the work rest chain is by both can be around the running of outer shroud rail, interior ring rail, but the work rest of rotation connects to form again.The outer shroud rail works mouthful effect of switching the rails by fork, ring rail running in carrying out the transition to.Obvious this chain-type transmission is significantly different with the transmission of the independent follow procedure motion of rotation work rest order of patent of the present invention.
Δ 200610049197.3 electronic ceramic continuous sputtering coating equipments
This invention relates to friction-type transmission ceramic plate, finishes transmission to coating chamber to relief chamber from the load chamber to the transition chamber, obviously transmits very light little sheet-like workpiece, and is obviously different with the present invention.
The Δ network address is:
Www.leyboldoptics.comThe plating TCO system of the Germany precious optical coating company of Lay (Leybold optics) all is flexible delivery bands, transmits between a plurality of vacuum chamber coating chambers, also all is to produce coating system in enormous quantities, and drive method of the present invention is significantly different with it.
Above-described Chinese CN patent and web material, transmission data such as the workpiece of enumerating though all belong to same technical object, have a long way to go.
Summary of the invention:
In order to overcome the deficiencies in the prior art, it is successive that weak point mainly shows as the flexible delivery band actual ' chain---sprocket wheel ' system, realize that beat-type transmits the rotation work rest, physical presence stops, breaking off relations, starts, transmission flexibly, realize the contradiction in the rotation, realize that revolution can, realization rotation difficulty just can be finished rotation because need add supplementary unit in addition.
And the technical scheme that patent of the present invention adopts is to adopt big circumference fluted disc and the axis of rotation toothing that is fixed on the top cover, realize normal revolution---rotation planetary motion, both kept the gear-driven superiority of conventional P VD coating chamber pivoted frame, can make the rotation work rest break away from rotary table again, and the gear and the reciprocating mechanical arm tooth bar push rod mechanical manipulator that adopt driving device arm tooth bar, realize that whole rotation work rest is steady, beat-type is delivered to another vacuum chamber, this method is reliable, stable, stepping program is reasonable, has unprecedented novelty.
One of purpose of the present invention is that this technical scheme can practice in very heavy workpiece and transmits between vacuum chamber, overcomes the shortcoming such as instability, heavy burden moving difficulty of flexible delivery band ' chain ' transmission.
On the passage between the adjacent vacuum chamber, the door for vacuum chamber of automatic control is arranged, removable this passage that opens and closes.When this mobile vacuum chamber door is removed, two vacuum chambers are connected, the rotary table circumference along on have and the same number of breach of rotation work rest, this indentation, there with seize the rotation work rest jointly on both sides by the arms with the annulus that is fixed on the top cover of a breach, seize the position on both sides by the arms on the axle that the rotation work rest is seized on both sides by the arms, wringing fit is with spot contact bearing, to realize time rotational rolling resistance mode.
The rotation work rest has axis of rotation gear on the top, and it can do planetary rotation on the gear of big circumference toothed disc outer, and existing revolution has the rotation action again.
Some two vacuum chamber position mouths that run in the small planetary gear on these rotation work rest tops, when being the unique breach corresponding position of annulus, by being fixed on the coating chamber, and the gear of driving device arm tooth bar that can be reciprocating---mechanical arm tooth bar push rod mechanical manipulator, come program to realize the rotary table of each rotation work rest from a vacuum chamber, through this unique breach, push on the corresponding breach of rotary table of another vacuum chamber, hang the rotation work rest to realize hanging, and realize planetary rotation operation at another vacuum chamber.
In order to make above-mentioned passing rotation work rest stable, be provided with the slidably clamp device that clamp is simultaneously lived the axis of rotation, live rotation work rest top neck in order to clamp stably.
Again by realizing driving gear---tooth bar push rod mechanical manipulator power realizes that by the outer power of vacuum chamber its transmission shaft must adopt the dynamic sealing device that passes vacuum chamber.
Again because a large amount of turning of work piece frame of prior art is geartransmission, so at design calculation and manufacturing device of the present invention, being easy to do on original technical foundation reliable technique promotes, because as long as between adjacent vacuum chamber, opening is arranged, annulus is jagged, and conventional rotation work rest is convenient to beat-type transmission piecemeal.
In the above-mentioned method of the present invention, for realizing that beat-type transmits each rotation revolution frame without any confusion, every program behavior function all pass through control realization automatically.
Description of drawings:
The name of accompanying drawing is called:
Fig. 1 is transfer principle figure between the adjacent vacuum chamber of rotation work rest
Among the figure: 1, be fixed on fluted disc on the top cover.
2, hang the axis of rotation of rotation work rest.
3, be suspended on rotary table on the top cover by the axle dynamic seal.
4, hollow shaft.
5, sliding mechanical clamp device.
6, the gear of driving device arm tooth bar.
7, reciprocating mechanical arm tooth bar push rod mechanical manipulator.
8, the notched annulus that is fixed on the top cover.
9, the annulus breach of removable open and close blocks door.
10, drive the gear that blocks door.
11, be fixed on bearing on the axis of rotation.
12, be fixed on mechanical arm guide rail on the top cover.
13, the isolating door between two vacuum chambers.
Figure 1A is a rotation work rest 0-A sectional view
Among the figure: 14, hollow shaft dynamic seal.
15, be fixed on bearing on the axis of rotation.
16, rotation work rest gear.
Figure 1B is a rotation work rest 0-B sectional view
Among the figure: 17, tooth bar push rod arm-and-hand system.
18, the workpiece of hanging on the rotation work rest.
Fig. 1 C is a key part partial enlarged drawing between the vacuum chamber
Among the figure: the 1-13 component names is as corresponding title among Fig. 1
Embodiment:
Related a kind of of this explanation transmits the method for rotation work rest between adjacent vacuum chamber, brought in the turret system design in many vacuum chambers PVD coating equipment of my novel continuous plating in enormous quantities of company.
Be transfer principle figure between the adjacent vacuum chamber of rotation work rest below in conjunction with description of drawings embodiment: Fig. 1, present method is given the rotation work rest four functions: 1, pass propagation function 2, revolution and extension hang function 3, rotation function 4, hang the workpiece function, show the 1st function status, during unique breach on the expression rotary table 3 on a certain notch alignment annulus 8, represented axle journal place, rotation work rest top among Fig. 1, slidably mechanical clamp device 5 clamps are arranged, and settle at Figure 1B O-B sectional view upper edge diameter, by mechanical arm tooth bar push rod mechanical manipulator 7, waited on a certain breach on the rotary table 3 of aiming at the breach left on another annulus 8 in another vacuum chamber with the rotation work rest of clamp promoting left, the rotary table of another vacuum chamber rotates then, then drives the revolution of rotation work rest and the rotation of transmitting.After transmission finishes, but reciprocating push rod mechanical manipulator 7 return to the right, groove 12 is stoppers of reciprocating stroke.
Figure 1A is a work rest 0-A sectional view, realize that revolution and extension hang function: the rotation work rest has the planetary operation function of revolution-rotation concurrently, the common clamping of breach and annulus on the rotary table, hold and hang the rotation work rest, hollow shaft is by dynamic seal 14, and by vacuum outdoor motor-speed reduction unit driving, the axis of rotation wringing fit of common clamping is inserted in spot contact bearing 15, makes clamping by the rolling resistance mode, during the rotary table revolution, dial band rotation work rest and realize revolution.
Rotation function:, and be subjected to rotary table to drive revolution together because the gear 16 on the axis of rotation is made spinning motion on fluted disc.
Figure 1B is a work rest O-B sectional view, passes the function except finishing, and the workpiece of extension function is still arranged: rotation work rest bottom 18 is to hang the part of hanging workpiece.
Fig. 1 C is that the key part partial enlarged drawing will be paid close attention to especially between the vacuum chamber be two between the vacuum chamber isolating door 13 and the breach of the axis of rotation spacing collar of removable open and close block door.
Stating in conjunction with the accompanying drawings to sum up, expressed method of the present invention manufacture and design continous way PVD coating equipment be stablize, reliable embodiment, in order to finish different technology at different vacuum chambers, and operation plated film production continuously in enormous quantities, the vacuum chamber number often adopts more than 3 and 3.
In above-mentioned a whole set of beat-type type of drive, all can adopt programmable logic controller PLC or industrial control computer full automatic control.
Claims (9)
1. method of between adjacent vacuum chamber, transmitting the rotation work rest, it is characterized in that: in vacuum plating unit, traditional planetary on the basis of system of revolving round the sun at the single-chamber vacuum coating equipment, the hole of the rotary table and the axis of rotation and the mode of connection of axle are changed system into breach shape mode of connection, the axis of rotation there is leave the possibility of hollow shaft, with an annulus that can open and close breach that has that is fixed on the vacuum chamber, the axis of rotation is limited in the breach of rotary table, makes it still can realize planetary from revolving round the sun function.Adopt one and make the reciprocating mechanical manipulator of beat-type by setup program, order is taken rotation work rest annulus indentation, there in vacuum chamber from adjacent vacuum chamber away, corresponding indentation, there by corresponding annulus in another vacuum chamber moves into, and the rotary table of delivering to another vacuum chamber gets on.
2. method according to claim 1, it is characterized in that in order to make the rotation work rest can break away from rotary table, be pushed into the rotary table in another vacuum chamber, rotary table circumference in two vacuum chambers along on have number and equal the breach that the clamping rotation work rest of the rotation number of axle is used, this indentation, there with have an annulus that can open and close breach and clamp the rotation work rest jointly, position at common clamping rotation work rest axle, close-fitting cover upper ball bearing, to realize the rolling resistance between the axis of rotation and the rotary table, it is revolved round the sun with rotary table.
3. method according to claim 1 is characterized in that axis of rotation gear and the big circumference fluted disc outer toothing that is fixed on the vacuum chamber, realizes having concurrently the planetary motion of revolution, rotation.
4. method according to claim 1, it is characterized in that the rotation work rest can be by the gear and the reciprocating mechanical arm tooth bar push rod mechanical manipulator of driving device arm tooth bar, clamp work rest top is pushed the revolution transmission of another vacuum chamber to promote the rotation work rest from the rotary table of a vacuum chamber.
5. method according to claim 1 is characterized in that mechanical arm tooth bar push rod mechanical manipulator front end, is provided with sliding mechanical clamp device, in order to stablize clamp rotation work rest neck.
6. method according to claim 1 is characterized in that being fixed on the annulus that can open and close breach that has on the vacuum chamber.
7. method according to claim 1 is characterized in that driving device arm gear and the used power of mechanical arm tooth bar push rod mechanical manipulator are to be realized by the power of axle outside vacuum chamber by dynamic seal.
8. method according to claim 1 is characterized in that the hollow shaft of rotary table is connected by the outer power set of dynamic sealing assembly and vacuum chamber, realizes that rotary table drives.
9. method according to claim 1 is characterized in that in the described method, for realizing each rotation work rest of ruly transmission, realizes every program behavior function by auto-control mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010138860 CN102061452A (en) | 2009-11-13 | 2010-04-06 | Method for transferring rotation work rests between adjacent vacuum chambers |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910210946.X | 2009-11-13 | ||
| CN200910210946 | 2009-11-13 | ||
| CN 201010138860 CN102061452A (en) | 2009-11-13 | 2010-04-06 | Method for transferring rotation work rests between adjacent vacuum chambers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102061452A true CN102061452A (en) | 2011-05-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010138860 Pending CN102061452A (en) | 2009-11-13 | 2010-04-06 | Method for transferring rotation work rests between adjacent vacuum chambers |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104630719A (en) * | 2013-11-13 | 2015-05-20 | 中国科学院沈阳科学仪器股份有限公司 | Full automatic electronic deposition system |
| CN108677160A (en) * | 2018-08-13 | 2018-10-19 | 武汉科瑞达真空科技有限公司 | A kind of new type of continuous coating film production line based on public rotation loading pallet |
| CN114277371A (en) * | 2021-12-06 | 2022-04-05 | 广东捷威家居发展有限公司 | Automatic spraying equipment for enamel |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2832828Y (en) * | 2005-10-27 | 2006-11-01 | 北京实力源科技开发有限责任公司 | Vacuum coating system |
| WO2007058702A1 (en) * | 2005-11-18 | 2007-05-24 | Daystar Technologies, Inc. | Methods and apparatus for treating a work piece with a vaporous element |
| CN100359041C (en) * | 2006-01-20 | 2008-01-02 | 浙江大学 | Electronic ceramic continuous sputtering coating equipment |
-
2010
- 2010-04-06 CN CN 201010138860 patent/CN102061452A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2832828Y (en) * | 2005-10-27 | 2006-11-01 | 北京实力源科技开发有限责任公司 | Vacuum coating system |
| WO2007058702A1 (en) * | 2005-11-18 | 2007-05-24 | Daystar Technologies, Inc. | Methods and apparatus for treating a work piece with a vaporous element |
| CN100359041C (en) * | 2006-01-20 | 2008-01-02 | 浙江大学 | Electronic ceramic continuous sputtering coating equipment |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104630719A (en) * | 2013-11-13 | 2015-05-20 | 中国科学院沈阳科学仪器股份有限公司 | Full automatic electronic deposition system |
| CN108677160A (en) * | 2018-08-13 | 2018-10-19 | 武汉科瑞达真空科技有限公司 | A kind of new type of continuous coating film production line based on public rotation loading pallet |
| CN108677160B (en) * | 2018-08-13 | 2020-12-29 | 武汉科瑞达真空科技有限公司 | Continuous coating production line based on revolution and rotation loading tray |
| CN114277371A (en) * | 2021-12-06 | 2022-04-05 | 广东捷威家居发展有限公司 | Automatic spraying equipment for enamel |
| CN114277371B (en) * | 2021-12-06 | 2024-05-14 | 广东捷威家居发展有限公司 | Automatic enamel spraying equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: ZHENTAO INTERNATIONAL TITANIUM COATING TECH. CO., Free format text: FORMER OWNER: WANG DIANRU Effective date: 20110909 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100086 HAIDIAN, BEIJING TO: 100094 HAIDIAN, BEIJING |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20110909 Address after: 100094, room 623, building B, new material building, No. 7 Feng Hui Road, Beijing, Haidian District Applicant after: Zhentao International Titanium Coating Tech. Co., Ltd., Beijing Address before: 100086, 3-3B, 48 West Third Ring Road, Beijing, Haidian District Applicant before: Wang Dianru |
|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110518 |