CN2814869Y - Planar radiating heater - Google Patents
Planar radiating heater Download PDFInfo
- Publication number
- CN2814869Y CN2814869Y CN 200520115041 CN200520115041U CN2814869Y CN 2814869 Y CN2814869 Y CN 2814869Y CN 200520115041 CN200520115041 CN 200520115041 CN 200520115041 U CN200520115041 U CN 200520115041U CN 2814869 Y CN2814869 Y CN 2814869Y
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- CN
- China
- Prior art keywords
- heater
- supporting bracket
- heater strip
- heating wires
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a novel plane radiation heater. The utility model comprises a base sheet holding tray, a heating wire supporting plate and a plurality of heating wires, wherein the supporting plate is positioned above the base sheet holding tray, each of the heating wires forms a straight line shape, the heating wires which are mutually parallel are positioned on the same face and are evenly distributed on the supporting plate according to certain density, both ends of each of the heating wires respectively pass through a metallic connecting member and are connected in parallel, and meanwhile, current is led in through the metallic connecting member. The heating wires of the utility model do not have bending positions, a heating body can be ensured to be even maximumly, the heating wire supporting plate has the function of a heat insulating plate simultaneously, the connecting sites of heating wires are positioned on the outer part of a high-temperature zone, thereby, the temperature uniformity and the service life of the heater can be improved. The surface temperature of a base sheet can reach 1000 DGE, and the temperature difference of the surface of a 6 inch silicon base sheet is less than 20 DGE. Compared with traditional heaters, the service life of the utility model is extended more than 20 times.
Description
Technical field
The utility model relate to a kind of in the vacuum film growth process employed heater.
Background technology
In the vacuum film growth process, for improve be adsorbed in the matrix surface atom mobility to improve the growth quality of crystal, in film deposition process, need substrate is heated.Particularly for depositing of thin film such as oxide, nitride, because the fusing point of thin-film material is very high, require the cohesion atom to have higher energy, just require the required substrate temperature of well-crystallized's film very high.Therefore how designing suitable substrate heater is to press for the solution key issue for the deposition function film.
When the heater of design vacuum film deposition system, must consider following factor: 1) can satisfy the requirement of thin film deposition, promptly can reach required growth temperature to temperature; 2) temperature homogeneity of heater is good; 3) long enough in useful life of heater.
The heater strip of the heater of conventional method design is to be wound on the strutting piece, the resistance increase of heater strip sweep owing to mechanical deformation, the electric current that flows through heater strip when heater is worked is identical, the crooked position caloric value big at resistance is big, cause this position temperature to raise, temperature raises and causes resistance to raise again, so forms vicious circle and finally causes the heater strip lost of life.Therefore, conventional method has following tangible drawback: 1, the poor temperature uniformity of institute's heated substrate; 2, the life-span of heater is very short; 3, metal is deposited on heater surfaces after at high temperature volatilizing, and not only can cause the heater short circuit, and can form pollution to the film that is deposited.
The utility model content
At the problem of above-mentioned existence, the purpose of this utility model is to provide a kind of temperature homogeneity good, the novel plane radiation heater that the life-span is long.
For achieving the above object, a kind of novel plane radiation heater of the utility model comprises: substrate pallet, heater strip supporting bracket and some heater strips, supporting bracket is positioned at substrate pallet top, heater strip is a linear, be parallel to each other between the described heater strip, be distributed on the described supporting bracket according to certain density, and its two ends all pass described supporting bracket, the two ends that described heater strip passes described supporting bracket are respectively by the metal connecting piece connection of contacting mutually.
Further, above the described supporting bracket baffle plate is installed also.
Further, described baffle plate top also is equipped with thermal insulation board, and this thermal insulation board is inverted U-shaped.
Further, between described heater strip and the described supporting bracket insulating ceramics pearl is installed.
Further, described heater strip is tungsten, molybdenum, platinum, siderochrome aluminium or nickel filament.
Further, below with described heater strip vertical direction on the described supporting bracket also is equipped with another group heater strip, be parallel to each other between this group heater strip, be distributed on the described supporting bracket according to certain density, and described supporting bracket is all passed at its two ends, and the two ends that described heater strip passes described supporting bracket are respectively by the metal connecting piece connection of contacting mutually.
Further, described heater strip is positioned on same plane or the same periphery.
The beneficial effects of the utility model are: heater strip does not have crooked position, can guarantee to greatest extent that heater is even; The heater strip supporting bracket has the effect of thermal insulation board simultaneously, and the connecting portion of heater strip is placed outside the high-temperature region, thereby has improved greatly the temperature homogeneity and the life-span of heater.Not only can make the substrate surface temperature can reach 1000 ℃, and the substrate surface temperature is when being 900 ℃, silicon chip surface temperature difference was less than 20 ℃ in 6 o'clock; Compare with conventional heater, the utility model life-span prolongs greater than 20 times.
Description of drawings
Fig. 1 is the structural profile schematic diagram of the utility model embodiment 1.
Fig. 2 is the structure enlarged diagram of heating part among Fig. 1.
Fig. 3 is the upward view of Fig. 2.
Fig. 4 is the structural representation of the utility model embodiment 2.
Embodiment:
Embodiment 1
As Fig. 1,2, shown in 3, the utility model comprises: substrate pallet 1, heater strip supporting bracket 2 and some heater strips 3, supporting bracket 2 is made of metal, be positioned at substrate pallet 1 top, heater strip 3 is rectilinear molybdenum filament, be parallel to each other between the heater strip 3, be distributed on the supporting bracket 2 according to certain density, and supporting bracket 2 is all passed at the two ends of heater strip 3, the two ends that heater strip 3 passes supporting bracket 2 connect by metal connecting piece 6 phases and polyphone respectively, metal connecting piece 6 is arranged on temperature homogeneity and the life-span that to improve heater outside the high-temperature region greatly, supporting bracket 2 tops also are equipped with baffle plate 4, baffle plate 4 and supporting bracket 2 common formation heat shields, play and both guarantee that the heat loss is few, thereby make the heating-up temperature of the substrate 7 that is placed on the substrate pallet 1 enough high, guarantee that heater strip 3 is low with the binding site temperature of supporting bracket 2, avoids the chamber wall temperature of vacuum chamber too high simultaneously again; Baffle plate 4 tops also are equipped with thermal insulation board 8, and this thermal insulation board 8 is inverted U-shaped, can prevent further that heat runs off; Between heater strip 3 and the supporting bracket 2 insulating ceramics pearl 5 is installed also, both can reaches the insulation purpose, can make heater strip 3 that deformation space is arranged when expanding with heat and contract with cold again, make things convenient for simultaneously heater strip 3 replacing and arrange by required mode.According to the design needs, heater strip 3 can be in the same plane, and at this moment substrate 7 is positioned at the below on this plane, as shown in Figure 1, also can be on the same periphery, and this is that substrate 7 is positioned in this circumference, and certainly, heater strip 3 also can adopt other forms.In addition, if supporting bracket 2 usefulness potteries are processed into, then can save insulating ceramics pearl 5; Heater strip 3 also can be tungsten, platinum, siderochrome aluminium or nickel filament as required.
As shown in Figure 4, below with heater strip 3 vertical direction on the supporting bracket 2 also is equipped with another group heater strip 9, also be parallel to each other between this group heater strip 9, be distributed on the supporting bracket 2 according to certain density, and supporting bracket 2 is all passed at its two ends, and the two ends that heater strip 9 passes supporting bracket 2 are respectively by metal connecting piece 6 connection of contacting mutually.All the other execution modes are with embodiment 1.Can further improve heating-up temperature and uniformity like this.
Claims (7)
1, a kind of novel plane radiation heater, it is characterized in that, comprise: substrate pallet, heater strip supporting bracket and some heater strips, supporting bracket is positioned at substrate pallet top, heater strip is a linear, is parallel to each other between the described heater strip, is distributed on the described supporting bracket according to certain density, and described supporting bracket is all passed at its two ends, and the two ends that described heater strip passes described supporting bracket are respectively by the metal connecting piece connection of contacting mutually.
2, a kind of novel plane radiation heater according to claim 1 is characterized in that, described supporting bracket top also is equipped with baffle plate.
3, a kind of novel plane radiation heater according to claim 2 is characterized in that, described baffle plate top also is equipped with thermal insulation board, and this thermal insulation board is inverted U-shaped.
4, according to the arbitrary described a kind of novel plane radiation heater of claim 1 to 3, it is characterized in that, between described heater strip and the described supporting bracket insulating ceramics pearl is installed.
5, a kind of novel plane radiation heater according to claim 4 is characterized in that, described heater strip is tungsten, molybdenum, platinum, siderochrome aluminium or nickel filament.
6, a kind of novel plane radiation heater according to claim 5, it is characterized in that, below with described heater strip vertical direction on the described supporting bracket also is equipped with another group heater strip, this group heater strip also is parallel to each other, be positioned at on the one side, and be distributed on the described supporting bracket according to certain density.
7, a kind of novel plane radiation heater according to claim 5 is characterized in that, described heater strip is positioned on same plane or the same periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520115041 CN2814869Y (en) | 2005-08-02 | 2005-08-02 | Planar radiating heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520115041 CN2814869Y (en) | 2005-08-02 | 2005-08-02 | Planar radiating heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2814869Y true CN2814869Y (en) | 2006-09-06 |
Family
ID=36949955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520115041 Expired - Lifetime CN2814869Y (en) | 2005-08-02 | 2005-08-02 | Planar radiating heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2814869Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103898477A (en) * | 2012-12-26 | 2014-07-02 | 光达光电设备科技（嘉兴）有限公司 | Substrate supporting seat |
| CN104501592A (en) * | 2014-12-30 | 2015-04-08 | 淄博宏泰防腐有限公司 | Low-energy consumption resistance furnace for magnesium alloy smelting |
| CN104988463A (en) * | 2015-06-24 | 2015-10-21 | 深圳市华星光电技术有限公司 | Heating source and organic light emitting diode evaporator |
-
2005
- 2005-08-02 CN CN 200520115041 patent/CN2814869Y/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103898477A (en) * | 2012-12-26 | 2014-07-02 | 光达光电设备科技（嘉兴）有限公司 | Substrate supporting seat |
| CN104501592A (en) * | 2014-12-30 | 2015-04-08 | 淄博宏泰防腐有限公司 | Low-energy consumption resistance furnace for magnesium alloy smelting |
| CN104501592B (en) * | 2014-12-30 | 2016-06-15 | 山东宏泰科技有限公司 | Low energy consumption resistance furnace for magnesium alloy smelting |
| CN104988463A (en) * | 2015-06-24 | 2015-10-21 | 深圳市华星光电技术有限公司 | Heating source and organic light emitting diode evaporator |
| US10014493B2 (en) | 2015-06-24 | 2018-07-03 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Heating source and evaporator of organic light emitting diode |
| CN104988463B (en) * | 2015-06-24 | 2018-11-06 | 深圳市华星光电技术有限公司 | A kind of evaporator of heating source and Organic Light Emitting Diode |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20150802 Granted publication date: 20060906 |
|
| EXPY | Termination of patent right or utility model |