CN2758530Y - Dry screw vacuum pump - Google Patents
Dry screw vacuum pump Download PDFInfo
- Publication number
- CN2758530Y CN2758530Y CN 200420108101 CN200420108101U CN2758530Y CN 2758530 Y CN2758530 Y CN 2758530Y CN 200420108101 CN200420108101 CN 200420108101 CN 200420108101 U CN200420108101 U CN 200420108101U CN 2758530 Y CN2758530 Y CN 2758530Y
- Authority
- CN
- China
- Prior art keywords
- screw
- screw rod
- pump
- tooth
- molded lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The utility model discloses a dry screw rod vacuum pump and three rotor molded lines. The dry screw rod vacuum pump comprises an electric motor, a shaft coupling, a gear wheel, a screw rod and a pump body, wherein the electric motor is connected with a speed increasing gear wheel of a gear pump cavity through the shaft coupling and a bearing. A driving gear wheel fixedly connected with a male screw rod is meshed with a gear wheel on a female screw rod (disclosed as figure). The electric motor directly drives the male screw rod through the shaft coupling, and drives the female screw rod through the driving gear wheel, and thus a speed increasing mechanism is saved. The screw rod comprises three molded lines which are respectively a circular-arc molded line with two symmetrically edges, constant-pitch single-start screw threads and changed-pitch single-start screw threads. The utility model has the advantages of simple structure and convenient production, repair and use. The utility model has the biggest advantage that the interior of a gas pumping cavity is provided without oil, which ensures the cleanness of the pumped space, satisfies the requirement on cleaning vacuum environments, and simultaneously reduces the pollution of oil steam exhaust on ambient environments. The reliability is high, the gas pumping pressure range is wide, and the gas containing coercible steam, tiny granules and powder dust can be pumped and removed.
Description
Technical field
The utility model relates to a kind of vacuum pump.
Background technique
Along with industrial development and requirement on environmental protection, traditional oil seal type vacuum pump has not satisfied current many-sided technical requirements, be mainly reflected in following two aspects: the one, be representative with the semicon industry, require the vacuum pump oil vapor that between being evacuated, do not backflow, in order to avoid workpiece is contaminated, usually using the oil seal type vacuum pump is at suction port cold-trap to be installed to catch oil vapor, is zero but also be difficult to accomplish to backflow; The 2nd, be representative with the petrochemical industry, require vacuum pump can extract coercibility steam in a large number, or poisonous, corrosive gas, or contain the gas of molecule, because pump oil plays effects such as lubricated, sealing, cooling in oil seal type mechanical pump operation process, above-mentioned gas makes pump oiliness energy deterioration, inefficacy with pump oil long term result.
Summary of the invention
For solving above problems, the purpose of this utility model provides a kind of dry screw vacuum pump, adopt gear pump body and the strictness of the screw rod pump housing to separate and adopt sealing configuration, prevent that the oil vapor in the gear pump body from entering the screw rod pump housing, utilize the grease lubricating bearing of with closure, to reach the vacuum pump oil vapor that between being evacuated, do not backflow, can not discharge the oil vapor befouling environment simultaneously yet, and improve working efficiency surrounding environment.
Structural design of the present utility model is achieved in that this screw pump includes motor, coupling, gear, screw rod and pump chamber, its structure is the following pump housing base plate that is, at base plate one end horizontal machine is housed, motor output is connected with a pair of overdrive gear in the intermediate gear chamber by coupling and joining shaft, and a pair of overdrive gear two output drive gears are all fixedlyed connected with the interior two screw rods of screw rod pump chamber; Also can be by motor by the direct transmission sun of coupling screw rod, drive female screw by driving gear again, save coupling shaft and speed increasing mechanism, two screw rods is female screw, positive screw rod, become parastate, the two screw rods counter-rotating forms spatial volume and changes and reach air-breathing, compression and exhaust, between the two screw rods, be not in contact with one another between screw rod and the pump housing, small gap is arranged.One of them driving gear that is contained on female screw axle or the positive screw axis adopts the swelling connecting sleeve to be connected with axle.Bearing has sealing case, adopt hermetically sealed grease lubrication, on the screw axis between two pump chambers, Sealing is housed, screw rod pump chamber and gear cavity adopt full casting formula and are cast with water jacket, have intakeport above the screw rod pump chamber, be cast with the relief opening (as shown in Figure 1) that the exhaust passage is connected to the pump chamber side in the gear cavity.
The negative and positive screw rod is housed in the pump chamber of dry type screw pump, and the screw-rod structure form includes following three kinds of molded lines, is respectively:
1, bilateral symmetry circular arc molded lines, screw rod end face molded lines (shown in Fig. 2,3), positive screw rod are the four-head screw rod of symmetry, and female screw is six screw rods of symmetry, and positive screw rod HI and LM section are circular arc, and the female screw molded lines that is meshed with it is AB and two sections circular arcs of EF; 2 of I, L are meshed with two sections cycloids of female screw BC, DE on the sun screw rod; 2 of C, D are meshed with two sections cycloids of positive screw rod IJ, KL on the female screw; JK section circular arc is meshed with female screw CD section circular arc on the sun screw rod; MN section circular arc is meshed end face molded lines equation formation spiral camber for the helical movement, (shown in Fig. 4,5) on the sun screw rod with female screw FG section circular arc.
2, variable pitch single screw thread, screw molded lines, the variation of helical pitch is controlled by the variable pitch coefficient, big helical pitch one end is corresponding to intakeport, gettering quantity is big when then beginning, and the sealed cavity volume that moves in the rotor rotation process is more and more littler, and pressurized gas reaches certain pressure and discharges.The position flute profile is made of addendum surface 16, Dedendum surface 17, Topland 18 and tooth flank 19, its axial section (shown in Fig. 8,9) flute profile has two kinds: one is a curved tooth surface, promptly a flank of tooth is a straight-tooth, another side is a curved tooth surface, the recessed flank of tooth that satisfies a screw rod is the be meshed conjugate surface of helix of another screw rod, the recessed flank of tooth of two screw rods forms the sealing curve relatively, 30 °～60 ° of the inclination angle scopes of straight-tooth; Another kind is the trapezoidal spiral shell tooth that tooth root is thick, tooth top is narrow, 8 °～45 ° of addendum surface inclination angle scopes, 0 °～15 ° of Dedendum surface inclination angle scopes (shown in Fig. 6,7,8,9).
3, uniform pitch single screw thread, in fact screw molded lines makes that the variable pitch coefficient is 0, and variable pitch molded lines equation just transforms into uniform pitch molded lines equation.The value at flute profile and flank of tooth inclination angle identical with variable pitch screw (shown in Figure 10,11).
The utility model has following advantage compared with the prior art: simple in structure, it is easy to use to produce maintenance, great advantage is that the parts of bleeding do not need oil lubrication, oil vapor does not backflow between being evacuated, can obtain the clean vacuum environment, reliability height in addition, the suction pressure scope is wide, can extract to contain molecule, dust, corrosivity and condensable gas.
Description of drawings
Fig. 1 is the dry screw vacuum pump structure principle chart;
Fig. 2,3 is a dry screw vacuum pump bilateral symmetry circular arc end face molded lines;
Fig. 4 is a dry screw vacuum pump sun screw rod curved surface design sketch;
Fig. 5 is a dry screw vacuum pump female screw curved surface design sketch;
Fig. 6,7 is dry screw vacuum pump decreasing worm-pitch negative and positive screw-rod structure figure;
Fig. 8 is a dry screw vacuum pump single head uniform pitch indent flute profile sun screw axial sectional drawing;
Fig. 9 is the trapezoidal spiral shell tooth sun of a dry screw vacuum pump single head decreasing worm-pitch screw axial sectional drawing;
Figure 10,11 is dry screw vacuum pump uniform pitch negative and positive screw-rod structure figure.
1 bearing, 2 screw rod pump chambers, 3 female screws, 4 Sealings, 5 gear cavities, 6 driving gears, 7 overdrive gears, 8 coupling, 9 motors, 10 base plates, 11 coupling shafts, 12 swelling connecting sleeves, 13 relief openings, 14 positive screw rods, 15 water jackets, 16 addendum surfaces, 17 Dedendum surfaces, 18 Toplands, 19 tooth flanks among the figure.
Embodiment
The utility model detailed structure and working principle are described in detail in conjunction with the accompanying drawings.
Its structure as shown in Figure 1, this pump passes through coupling 8 and coupling shaft 11 direct connection driven gears by motor 9, by the positive screw rod 14 of overdrive gear 7 transmissions active, drive female screw 3 by driving gear 6 again, also can be by motor 9 by coupling 8 direct transmission sun screw rods 14, drive female screw 3 by driving gear 6 again, save coupling shaft 11 and speed increasing mechanism.The two screw rods counter-rotating forms spatial volume and changes the purpose that reaches air-breathing, compression and exhaust.Between the two screw rods, be not in contact with one another between screw rod and the pump housing, small gap is arranged, need not to lubricate, the cleaning between this has just guaranteed to be evacuated can be to outside space drainage oil vapor and befouling environment yet.Driving gear is connected with axle, and one adopts swelling connecting sleeve 12, and another connects for key or the conical surface interference connects.Bearing 1 adopts hermetically sealed grease lubrication, need not spatter oil lubrication, enters in the pumping chamber for preventing the oil vapor in the gear cavity, and Sealing 4 is housed on the rotor shaft between two pump chambers.Screw rod pump chamber 2 adopts full casting formula and is cast with water jacket 15 water flowings cooling with gear cavity 5.Screw rod pump chamber 2, gear pump chamber 5 and motor 9 are installed on the base plate 10.Intakeport is positioned at screw rod pump chamber 2 tops, is cast with the relief opening 13 that the exhaust passage is connected to the pump chamber side in gear pump chamber 5.
The screw rod of dry screw vacuum pump comprises that by three kinds of molded lines bilateral symmetry circular arc molded lines, variable pitch single screw thread molded lines, uniform pitch single screw thread molded lines are arranged.The processing of bilateral symmetry circular arc molded lines is complicated, but applied range is applicable to big pumping speed vacuum pump; Variable pitch single screw thread, the processing of uniform pitch single screw thread molded lines are easier to, and are applicable to middle-size and small-size vacuum pump.
Claims (6)
1, a kind of dry screw vacuum pump, include motor, coupling, gear, screw rod and pump chamber, it is characterized in that being pump housing base plate (10) below this screw pump, at base plate one end horizontal machine (9) is housed, motor output is connected with the interior a pair of overdrive gear (7) in joining shaft (11) and intermediate gear chamber (5) by coupling (8), and a pair of overdrive gear (7) two output drive gears (6) are all fixedlyed connected with the interior two screw rods of screw rod pump chamber (2); Also can be by motor (9) by the direct transmission sun of coupling (8) screw rod (14), drive female screw (3) by driving gear (6) again, save coupling shaft (11) and speed increasing mechanism, two screw rods is female screw (3), sun screw rod (14), become parastate, the two screw rods counter-rotating forms the spatial volume variation and reaches air-breathing, compression and exhaust, between the two screw rods, be not in contact with one another between the screw rod and the pump housing, small gap is arranged, driving gear (6) the arbitrary employing swelling connecting sleeve (12) that is contained on female screw axle (3) and the positive screw axis (14) is connected with axle, bearing (1) has sealing case, adopt hermetically sealed grease lubrication, Sealing (4) is housed on the screw axis between two pump chambers, screw rod pump chamber (2) adopts full casting formula and is cast with water jacket (15) with gear cavity (5), the screw rod pump chamber has intakeport above (2), is cast with the relief opening (13) that the exhaust passage is connected to the pump chamber side in the gear cavity (5).
2, according to the described dry screw vacuum pump of claim 1, it is characterized in that in the pump chamber of dry type screw pump the negative and positive screw rod being housed, the screw-rod structure form includes following three kinds of molded lines: bilateral symmetry circular arc molded lines, variable pitch single screw thread molded lines, uniform pitch single screw thread molded lines.
3, according to the described dry screw vacuum pump of claim 2, it is characterized in that bilateral symmetry circular arc molded lines, positive screw rod is the four-head screw rod of symmetry, and female screw is six screw rods of symmetry, sun screw rod HI and LM section are circular arc, and the female screw molded lines that is meshed with it is AB and two sections circular arcs of EF; 2 of I, L are meshed with two sections cycloids of female screw BC, DE on the sun screw rod; 2 of C, D are meshed with two sections cycloids of positive screw rod IJ, KL on the female screw; JK section circular arc is meshed with female screw CD section circular arc on the sun screw rod; MN section circular arc is meshed end face molded lines equation formation spiral camber for the helical movement on the sun screw rod with female screw FG section circular arc.
4, according to the described dry screw vacuum pump of claim 2, it is characterized in that the variable pitch single screw thread, the variation of helical pitch is controlled by the variable pitch coefficient, big helical pitch one end is corresponding to intakeport, gettering quantity is big when then beginning, the sealed cavity volume that moves in the rotor rotation process is more and more littler, pressurized gas reaches certain pressure and discharges, the position flute profile is by addendum surface (16), Dedendum surface (17), Topland (18) and tooth flank (19) constitute, its axial section flute profile is that one side is straight-tooth, another side is a curved tooth surface, the recessed flank of tooth that satisfies a screw rod is the be meshed conjugate surface of helix of another screw rod, the recessed flank of tooth of two screw rods forms the sealing curve relatively, 30 °～60 ° of the inclination angle scopes of straight-tooth.
5, according to the described dry screw vacuum pump of claim 2, it is characterized in that the variable pitch single screw thread, its axial section flute profile also can be the trapezoidal spiral shell tooth that tooth root is thick, tooth top is narrow, 8 °～45 ° of addendum surface inclination angle scopes, 0 °～15 ° of Dedendum surface inclination angle scopes.
6, according to the described dry screw vacuum pump of claim 2, it is characterized in that the uniform pitch single screw thread, in fact make that the variable pitch coefficient is 0, variable pitch molded lines equation just transforms into uniform pitch molded lines equation, and the value at flute profile and flank of tooth inclination angle is identical with variable pitch screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420108101 CN2758530Y (en) | 2004-09-29 | 2004-09-29 | Dry screw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420108101 CN2758530Y (en) | 2004-09-29 | 2004-09-29 | Dry screw vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2758530Y true CN2758530Y (en) | 2006-02-15 |
Family
ID=36078671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420108101 Expired - Fee Related CN2758530Y (en) | 2004-09-29 | 2004-09-29 | Dry screw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2758530Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102256824A (en) * | 2008-12-19 | 2011-11-23 | 穆韦克斯公司 | Device for pressurising a fluid, to be directly mounted on a power takeoff |
| CN103047142A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Screw vacuum pump adopting dry gas seal |
| CN103104490A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Magnetic drive screw vacuum pump |
| CN108869295A (en) * | 2018-08-02 | 2018-11-23 | 中船重工重庆智能装备工程设计有限公司 | The cooling system of dry screw vacuum pump |
| CN110848133A (en) * | 2019-11-27 | 2020-02-28 | 海门市晶盛真空设备有限公司 | Screw assembly of dry screw vacuum pump |
| CN111425399A (en) * | 2020-03-10 | 2020-07-17 | 上海方彧新能源科技有限公司 | Low-noise vacuum pump |
| CN115013308A (en) * | 2022-06-08 | 2022-09-06 | 广东汉德精密机械股份有限公司 | Screw vacuum pump convenient to transmission protection |
-
2004
- 2004-09-29 CN CN 200420108101 patent/CN2758530Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102256824A (en) * | 2008-12-19 | 2011-11-23 | 穆韦克斯公司 | Device for pressurising a fluid, to be directly mounted on a power takeoff |
| CN102256824B (en) * | 2008-12-19 | 2015-04-22 | 穆韦克斯公司 | Device for pressurising a fluid, to be directly mounted on a power takeoff |
| CN103104490A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Magnetic drive screw vacuum pump |
| CN103047142A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Screw vacuum pump adopting dry gas seal |
| CN108869295A (en) * | 2018-08-02 | 2018-11-23 | 中船重工重庆智能装备工程设计有限公司 | The cooling system of dry screw vacuum pump |
| CN110848133A (en) * | 2019-11-27 | 2020-02-28 | 海门市晶盛真空设备有限公司 | Screw assembly of dry screw vacuum pump |
| CN110848133B (en) * | 2019-11-27 | 2021-06-08 | 海门市晶盛真空设备有限公司 | Screw assembly of dry screw vacuum pump |
| CN111425399A (en) * | 2020-03-10 | 2020-07-17 | 上海方彧新能源科技有限公司 | Low-noise vacuum pump |
| CN115013308A (en) * | 2022-06-08 | 2022-09-06 | 广东汉德精密机械股份有限公司 | Screw vacuum pump convenient to transmission protection |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |