CN2727700Y - Multiple freedom degree precision optical measurement objective platform - Google Patents
Multiple freedom degree precision optical measurement objective platform Download PDFInfo
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- CN2727700Y CN2727700Y CN 200420090585 CN200420090585U CN2727700Y CN 2727700 Y CN2727700 Y CN 2727700Y CN 200420090585 CN200420090585 CN 200420090585 CN 200420090585 U CN200420090585 U CN 200420090585U CN 2727700 Y CN2727700 Y CN 2727700Y
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Abstract
The utility model relates to a multiple freedom degree precision optical measurement objective platform. The utility model is formed by arranging a vertical direction slippage mechanism on a horizontal direction translation mechanism, and arranging a rotary working table on the vertical direction slippage mechanism. A working piece arranging table whose gradient can be bidirectionally adjusted is arranged on the rotary workingtable. The utility model improves the adjustable freedom of measured working piece and the measurement accuracy. The utility model is suitable for the measurement of the working piece with large area and great weight.
Description
Technical field
The utility model relates to a kind of optical measurement platform, and particularly a kind of multiple degrees of freedom precision optics is measured article carrying platform.
Background technology
In optical measurement, for the measured value of the diverse location that obtains workpiece, a kind of mode is that mobile optical is measured the mirror group, and a kind of mode is mobile measured workpiece.Preceding a kind of mode tends to increase the complexity of optical measuring system, influences final measuring accuracy, generally is applied to the measurement of small size workpiece; A kind of mode in back moves article carrying platform and is independent of optical measuring system, can effectively reduce the complexity of optical system, but article carrying platform all can directly influence measuring accuracy in any change of motion, generally is applied to the measurement of large tracts of land workpiece.It is by settling a vertical direction slipping mechanism on the horizontal direction translation mechanism, constituting and a rotary table is installed on the vertical direction slipping mechanism again that mobile article carrying platform of the prior art has a kind of comparatively complete structure.But position and orientation (X, Y, Z direction and the position angle) of workpiece are put in order in this platform transposition, but can not adjust the attitude (degree of tilt) of workpiece.
The utility model content
The purpose of this utility model is to overcome problems of the prior art, provides a kind of multiple degrees of freedom precision optics to measure article carrying platform, in measuring process, can adjust position, orientation and the attitude of workpiece, is convenient to measure and improve measuring accuracy.
For achieving the above object, the utility model adopts following technical proposals:
A kind of multiple degrees of freedom precision optics is measured article carrying platform, by settling a vertical direction slipping mechanism on the horizontal direction translation mechanism, constitute and a rotary table is installed on the vertical direction slipping mechanism again, it is characterized in that on described rotary table, installing the workpiece arrangement platform of a two-way adjustable inclination.
Above-mentioned workpiece settles the structure of platform to be: on an installation base plate that is placed on the rotary table, bearing panel of stacked installation, realize resiliency supported at the middle part by the extension spring of 1-4 root between this two boards, at an edge, realize that by the sphere shape pit on a steel ball and the two boards coupling bidirectional swinging supports, each is revolved by a positioning screw and screw on bearing panel and joins and the lower end is supported on the installation base plate at all the other 3 edges.
The structure of above-mentioned horizontal direction translation mechanism is: one two line slideways of secured in parallel on the base plate are installed, two ends, the base plate left and right sides are installed fix left and right installing plate respectively, accurate screw mandrel is installed in by the supporting of the bearing in left and right two bearing seats between two line slideways and is parallel with it, and the left end of accurate screw mandrel stretches out a left side and installs and connect a microdrum; The both sides of a panel and two line slideway cunnings are joined, the fixedly connected nut in middle part, and nut and accurate screw mandrel revolve joins.
Revolving of accurate screw mandrel in the above-mentioned horizontal direction translation mechanism and nut is equipped with anti-backlash mechanism, its structure is: nut be about two relative nuts and accurate screw mandrel revolve and join, the opposite face of this two nut is the inclined-plane, the inclined-plane cunning that has a block gap adjustment to carve piece and two nuts is therebetween joined, two nuts with carve piece and all be connected with panel by screw, piece is carved in the gap adjustment has mounting hole that accurate screw mandrel is passed.
The structure of above-mentioned vertical direction sliding platform is: the vertical fixedly connected respectively lower installation board of going up of upper and lower side that base plate is installed, will vertically install on the panel that the base plate vertical fixing is installed in the horizontal direction translation mechanism by lower installation board; Two vertical line guide rails of secured in parallel on the vertical installation base plate, vertical accurate screw mandrel is installed in by the supporting of the bearing in upper and lower two bearing seats between two vertical line guide rails and is parallel with it, and the upper end of vertical accurate screw mandrel is stretched out upper mounting plate and connected a microdrum; The both sides of a vertical panel and two vertical line guide rail cunnings are joined, and the fixedly connected nut in middle part, nut revolve with vertical accurate screw mandrel joins.
Revolving of vertical accurate screw mandrel in the above-mentioned vertical direction slipping mechanism and nut is equipped with anti-backlash mechanism, its structure is: nut is joined for two relative nuts up and down revolve with vertical accurate screw mandrel, the opposite face of this two nut is the inclined-plane, the inclined-plane cunning that has a block gap adjustment to carve piece and two nuts is therebetween joined, two nuts with carve piece and all be connected with vertical panel by screw, piece is carved in the gap adjustment has mounting hole that vertical accurate screw mandrel is passed.
The structure of above-mentioned rotary table is: one with pedestal that the vertical panel of vertical direction sliding platform is fixedlyed connected in, by worm gear of two circle carrying ball bearings up and down, the fixedly connected plummer of settling workpiece to settle platform in worm-wheel shaft upper end; Worm gear and a worm mesh, worm screw is supported in pedestal one side by the front and back spring bearing, and the one end stretches out from pedestal.
The utility model has following conspicuous characteristics and advantage compared with prior art.Adopted the workpiece of a two-way adjustable inclination to settle platform to combine with the platform in original position adjustable and orientation in the utility model, reaching is position adjustable and orientation, adjustable again workpiece attitude (degree of tilt).All adopt anti-backlash mechanism in translation mechanism and the vertical direction slipping mechanism in the horizontal direction, adjust precision, improve measuring accuracy thereby improve to move.The utility model compactness rational in infrastructure has five adjustable degree of freedom, and maximum load-carrying capacity can reach 25kg, and minimum resolution is 0.01mm, is applicable to the measurement of the workpiece of large tracts of land Heavy Weight.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the utility model.
Fig. 2 is the structural representation that workpiece is settled platform in Fig. 1 example.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 is the cut-open view at A-A place among Fig. 3.
Fig. 5 is the cut-open view at B-B place among Fig. 3.
Fig. 6 is the structural representation of horizontal direction translation mechanism in Fig. 1 example.
Fig. 7 is the vertical view of Fig. 6.
Fig. 8 is the cut-open view at C-C place among Fig. 7.
Fig. 9 is the structural representation of vertical direction slipping mechanism in Fig. 1 example.
Figure 10 is the right view of Fig. 9.
Figure 11 is the cut-open view at D-D place among Figure 10.
Figure 12 is the structural representation of the rotary table in Fig. 1 example.
Figure 13 is the cut-open view at E-E place among Figure 12.
Embodiment
A preferred embodiment of the present utility model is described in detail as follows:
Referring to Fig. 1, this multiple degrees of freedom precision optics is measured article carrying platform and is comprised 4 ingredients, i.e. (1) horizontal direction translation mechanism 1, and (2) vertical direction translation mechanism 2, (3) rotary table 4, the workpiece of (4) two-way adjustable inclination is settled platform 5.
Referring to Fig. 2, Fig. 3, Fig. 4 and Fig. 5, the workpiece of two-way adjustable inclination settles platform 5 to comprise: base plate 37, support steel ball 38, bearing panel 39, fine setting screw thread pair 40 are installed, are connected spring 41.These parts are installed on the plummer 29 of rotary table parts 4 by bolt.
The screw rod of manual rotary fine adjustment screw thread pair 40, change the extension elongation of screw rod, thereby change the distance of installing between base plate 37 and the bearing panel 39, because the synergy of spring 41 and support steel ball 38, make bearing panel 39 and realize the inclination of minute angle with respect to base plate is installed, regulate respectively three screw thread pairs that are installed on the bearing panel 39 can realize bearing panel with respect to the x that base plate is installed to and y to the inclination of minute angle.Be the load-bearing capacity of high dip platform, finally also bear certain gravity with the fine setting screw thread pair 40 that supports steel ball 38 diagonal angles, i.e. the screw rod of this screw thread pair was pressing closer base plate is being installed after fine setting was good.
Referring to Fig. 6, Fig. 7, Fig. 8, horizontal direction translation mechanism 1 comprises: piece 14, left nut 15, bearing seat 16 are carved in microdrum 7, left and right installation board 8, panel 9, line slideway 10, installation base plate 11, precision lead screw 12, right nut 13, gap adjustment.This mechanism is the basis of whole article carrying platform and supports.
The turning axle of microdrum 7 is connected by key and precision lead screw 12, and the index dial of microdrum 7 is by being bolted on the left and right installation board 8, and the turning axle of manual drives microdrum 7 just can drive precision lead screw 12; Left and right installation board 8 is installed on the base plate 11 by being bolted to; Panel 9 links to each other by the slide of bolt with line slideway 10; Line slideway 10 is installed on the base plate 11 by being bolted to, precision lead screw 12 is supported on the bearing seat 16, respectively there is a bearing seat at two ends, the left and right sides, precision lead screw 12 can be done rotatablely moving with respect to bearing seat, be engaged with left and right sides nut 13,15 on the precision lead screw 12, left and right sides nut 13,15 is connected by bolt and panel 9; The gap adjustment is carved piece 14 skies and is enclosed within on the leading screw 12, between left and right sides nut 13,15, is connected by bolt and panel 9; Bearing seat 16 is installed on the base plate 11 by being bolted to, and is used to support precision lead screw 12.
Manually rotation microdrum handle rotates precision lead screw, changes the rectilinear motion of nut into by rotatablely moving of feed screw nut adjutant leading screw, thereby makes the panel that is connected with nut do rectilinear motion on line slideway.Carve gap between piece and the panel by the adjusting play adjustment, utilize the effect of tiltedly carving of carving piece to eliminate back lash between left and right sides nut and the leading screw, thus the idle motion that the panel motion occurs when eliminating forward and reverse rotating threaded shaft.
Referring to Fig. 1, Fig. 9, Figure 10 and Figure 11, vertical direction slipping mechanism 2 comprises: microdrum 17, go up lower installation board 18, vertical panel 19, vertical line guide rail 20, vertically base plate 21, vertical precision lead screw 22, top nut 23, gap adjustment be installed and are carved piece 24, lower nut 25, bearing seat 26, guide rail and hold piece 27, set lever 28 tightly.This mechanism 2 in the horizontal direction on the panel 9 of translation mechanism 1, realizes the motion of measured workpiece in vertical direction by bolt by fagging 6.
The turning axle of microdrum 17 is connected with vertical precision lead screw 22 by key, and the index dial of microdrum 17 is by being bolted on the lower installation board 18, and the turning axle of manual drives microdrum 17 just can drive vertical precision lead screw 22; Last lower installation board 18 is by being bolted on the vertical installation base plate 21; Vertical panel 19 links to each other by the slide of bolt with vertical line guide rail 20; Vertical line guide rail 20 by be bolted on the vertical installation base plate 21, vertical precision lead screw 22 is supported on the bearing seat 26, respectively there is a bearing seat at two ends up and down, vertical precision lead screw 22 can be done rotatablely moving with respect to bearing seat, be engaged with lower nut 23,25 on the vertical precision lead screw 22, last lower nut 23,25 is connected by bolt and vertical panel 19; The gap adjustment is carved piece 24 skies and is enclosed within on the vertical precision lead screw 22, between last lower nut 23,25, is connected by bolt and vertical panel 19; Bearing seat 26 is used to support vertical precision lead screw 22 by being bolted on the vertical installation base plate 21; Guide rail is held piece 27 tightly and is fixed on vertical panel 19 by bolt, utilizes its notch to be buckled in mutually on the vertical line guide rail 20, and leaves certain clearance; Set lever 28 is held piece 27 tightly by being bolted to guide rail, can unclamp or hand-tight guide rail is held the notch of piece 27 tightly by rotary handle, thereby realize the function of locking vertical panel 19.
Manually rotation microdrum handle rotates precision lead screw, changes the rectilinear motion of nut into by rotatablely moving of feed screw nut adjutant leading screw, thereby makes the panel that is connected with nut do rectilinear motion on line slideway.Carve gap between piece and the panel by the adjusting play adjustment, the effect of tiltedly the carving elimination left and right sides nut of piece and the back lash between the leading screw are carved in utilization, thereby the idle motion that the panel motion occurs when eliminating forward and reverse rotating threaded shaft, workpiece motion s screws set lever and prevents from because of the action of gravity of workpiece and this life of body vertical panel 19 to be glided behind correct position.
Referring to Fig. 1, connect support 3 and be fixed on by bolt on the vertical panel 19 of vertical direction slipping mechanism 2, in order to rotary table 4 to be installed.
Referring to Figure 12 and Figure 13, rotary table 4 comprises: plummer 29, on carry ball 30, worm gear 31, pedestal 32, carry ball 33, worm screw 34, preceding spring bearing 35, back spring bearing 36 down.These parts are installed in by bolt and connect on the support 3.
Plummer 29 is connected with worm gear 31 mutually by bolt, can rotate with worm gear; Worm gear 31 is supported on the pedestal 32 by carrying ball 30,33 up and down, directly utilize accurate ball to bear to act on the worm gear axially and radial force, greatly reduced installing space; Worm screw 34 is supported by front and back spring bearing 35,36, bear axial force and the radial force that acts on the worm screw by angular contact bearing in the spring bearing 35 before back-to-back being installed in and the bearing shells that are installed in the back spring bearing 36, worm screw can be cooked with respect to rotatablely moving of supporting; Front and back spring bearing 35,36 is connected with pedestal 32 mutually by bolt.
Manually rotary worm by the engagement worm couple, passes motion to worm gear, rotates thereby drive plummer 29.The gear ratio of worm gear and worm screw is 136: 1, so can obtain very high resolution.
Claims (7)
1. a multiple degrees of freedom precision optics is measured article carrying platform, go up an arrangement vertical direction slipping mechanism (2) by a horizontal direction translation mechanism (1), constitute and a rotary table (4) is installed on the vertical direction slipping mechanism again, it is characterized in that going up the workpiece that a two-way adjustable inclination is installed at described rotary table (4) settles platform (5).
2. multiple degrees of freedom precision optics according to claim 1 is measured article carrying platform, the structure that it is characterized in that workpiece arrangement platform (5) is: on an installation base plate (37) that is placed on the rotary table (4), a bearing panel of stacked installation (39), this two boards (37,39) between, realize resiliency supported at the middle part by 1-4 root extension spring (41), at an edge, by a steel ball (38) and two boards (37,39) sphere shape pit on coupling realizes that bidirectional swinging supports, and each is revolved by a positioning screw (40) and screw on bearing panel (39) and joins and the lower end is supported in and installs on the base plate (37) at all the other 3 edges.
3. multiple degrees of freedom precision measurement article carrying platform according to claim 1, the structure that it is characterized in that horizontal direction translation mechanism (1) is: one base plate (11) is installed and is gone up two line slideways of secured in parallel (10), base plate (11) two ends, the left and right sides are installed fix left and right installing plate (8) respectively, an accurate screw mandrel (12) is installed between two line slideways (10) also parallel with it by the supporting of the bearing in left and right two bearing seats (16), the left end of accurate screw mandrel (12) stretches out left installing plate (8) and connects a microdrum (7); The both sides of a panel (9) and two line slideways (10) are sliding joins, the fixedly connected nut in middle part, and nut and accurate screw mandrel (12) revolve joins.
4. multiple degrees of freedom precision optics according to claim 3 is measured article carrying platform, it is characterized in that the accurate screw mandrel (12) in the horizontal direction translation mechanism (1) is equipped with anti-backlash mechanism with revolving of nut, its structure is: nut be about two relative nuts (15,13) revolve and join with accurate screw mandrel (12), this two nut (15,13) opposite face is the inclined-plane, there is a block gap adjustment to carve piece (14) and two nuts (15 therebetween, 13) inclined-plane cunning is joined, two nuts (15,13) with carve piece (14) and all be connected with panel (9) by screw, piece (14) is carved in the gap adjustment has mounting hole that accurate screw mandrel (12) is passed.
5. multiple degrees of freedom precision optics according to claim 1 is measured article carrying platform, the structure that it is characterized in that vertical direction sliding platform (2) is: the vertical fixedly connected respectively lower installation board (18) of going up of upper and lower side that base plate (21) is installed, will vertically install on the panel (9) that base plate (21) vertical fixing is installed in horizontal direction translation mechanism (1) by lower installation board (18); The vertical base plate (21) of installing is gone up two vertical line guide rails of secured in parallel (20), a vertical accurate screw mandrel (22) is installed between two vertical line guide rails (20) also parallel with it by the supporting of the bearing in upper and lower two bearing seats (26), the upper end of vertical accurate screw mandrel (22) is stretched out upper mounting plate (18) and connected a microdrum (17); The both sides of a vertical panel (19) and two vertical line guide rails (20) are sliding joins, and the fixedly connected nut in middle part, nut revolve with vertical accurate screw mandrel (22) joins.
6. multiple degrees of freedom precision optics according to claim 5 is measured article carrying platform, it is characterized in that the vertical accurate screw mandrel (22) in the vertical direction slipping mechanism (2) is equipped with anti-backlash mechanism with revolving of nut, its structure is: nut is two relative nuts (25 up and down, 23) revolve with vertical accurate screw mandrel (22) and join, this two nut (25,23) opposite face is the inclined-plane, there is a block gap adjustment to carve piece (24) and two nuts (25 therebetween, 23) inclined-plane cunning is joined, two nuts (25,23) with carve piece (24) and all be connected with vertical panel (19) by screw, piece (24) is carved in the gap adjustment has mounting hole that vertical accurate screw mandrel (22) is passed.
7. multiple degrees of freedom precision optics according to claim 1 is measured article carrying platform, the structure that it is characterized in that rotary table is: one with pedestal (32) that the vertical panel (19) of vertical direction sliding platform (2) is fixedlyed connected in, by two enclosing carrying balls (30,33) supporting worm gears (31) up and down, the fixedly connected arrangement workpiece in worm gear (31) axle upper end is settled the plummer (29) of platform (5); Worm gear (31) and a worm screw (34) engagement, worm screw (34) is supported in pedestal (32) one sides by front and back spring bearing (35,36), and the one end stretches out from pedestal (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420090585 CN2727700Y (en) | 2004-09-28 | 2004-09-28 | Multiple freedom degree precision optical measurement objective platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420090585 CN2727700Y (en) | 2004-09-28 | 2004-09-28 | Multiple freedom degree precision optical measurement objective platform |
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| Publication Number | Publication Date |
|---|---|
| CN2727700Y true CN2727700Y (en) | 2005-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200420090585 Expired - Fee Related CN2727700Y (en) | 2004-09-28 | 2004-09-28 | Multiple freedom degree precision optical measurement objective platform |
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| CN (1) | CN2727700Y (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011044741A1 (en) * | 2009-10-16 | 2011-04-21 | 南通蛟龙重工发展有限公司 | Measuring and assembling workbench |
| CN102156340A (en) * | 2011-03-31 | 2011-08-17 | 哈尔滨工业大学 | High-precision pose adjusting device for spliced grating |
| CN103759639A (en) * | 2014-01-10 | 2014-04-30 | 中国矿业大学 | Precision positioning platform position detection method based on area array CCD |
| CN104019964A (en) * | 2014-06-10 | 2014-09-03 | 上海大学 | Device and method for detecting quality of focused light spot of mini-type self-focusing lens |
| CN105014345A (en) * | 2015-08-06 | 2015-11-04 | 歌尔声学股份有限公司 | Spatial position adjusting device |
| CN105737760A (en) * | 2016-02-25 | 2016-07-06 | 上海大学 | Horizontal cylindricity error interference splicing measurement device and adjustment method thereof |
| CN106002765A (en) * | 2016-07-20 | 2016-10-12 | 西安工程大学 | Hybrid bearing clamping and adjusting integrated mechanism in obliquely-entering laser interferometry |
| CN106441752A (en) * | 2016-11-09 | 2017-02-22 | 中国工程物理研究院机械制造工艺研究所 | Loading mechanism for testing rigidity of hydrostatic guide rail |
| CN108983382A (en) * | 2018-08-27 | 2018-12-11 | 中山大学 | A kind of multiple degrees of freedom optics zeroing device and adjust dress method |
| CN109029947A (en) * | 2018-07-05 | 2018-12-18 | 武汉海王机电工程技术有限公司 | Small-sized heavy duty multiple degrees of freedom regulating device |
| CN110887788A (en) * | 2019-12-19 | 2020-03-17 | 中国科学院长春光学精密机械与物理研究所 | Spectrometer lifting device for vacuum test |
-
2004
- 2004-09-28 CN CN 200420090585 patent/CN2727700Y/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011044741A1 (en) * | 2009-10-16 | 2011-04-21 | 南通蛟龙重工发展有限公司 | Measuring and assembling workbench |
| CN102156340A (en) * | 2011-03-31 | 2011-08-17 | 哈尔滨工业大学 | High-precision pose adjusting device for spliced grating |
| CN102156340B (en) * | 2011-03-31 | 2012-05-30 | 哈尔滨工业大学 | High-precision pose adjusting device for spliced grating |
| CN103759639B (en) * | 2014-01-10 | 2016-04-13 | 中国矿业大学 | A kind of precisely locating platform method for detecting position based on area array CCD |
| CN103759639A (en) * | 2014-01-10 | 2014-04-30 | 中国矿业大学 | Precision positioning platform position detection method based on area array CCD |
| CN104019964A (en) * | 2014-06-10 | 2014-09-03 | 上海大学 | Device and method for detecting quality of focused light spot of mini-type self-focusing lens |
| CN105014345A (en) * | 2015-08-06 | 2015-11-04 | 歌尔声学股份有限公司 | Spatial position adjusting device |
| CN105737760A (en) * | 2016-02-25 | 2016-07-06 | 上海大学 | Horizontal cylindricity error interference splicing measurement device and adjustment method thereof |
| CN106002765A (en) * | 2016-07-20 | 2016-10-12 | 西安工程大学 | Hybrid bearing clamping and adjusting integrated mechanism in obliquely-entering laser interferometry |
| CN106002765B (en) * | 2016-07-20 | 2018-02-27 | 西安工程大学 | Dynamic and hydrostatic bearing clamping and adjustment integrated mechanism in inclined in type laser interferometry |
| CN106441752A (en) * | 2016-11-09 | 2017-02-22 | 中国工程物理研究院机械制造工艺研究所 | Loading mechanism for testing rigidity of hydrostatic guide rail |
| CN109029947A (en) * | 2018-07-05 | 2018-12-18 | 武汉海王机电工程技术有限公司 | Small-sized heavy duty multiple degrees of freedom regulating device |
| CN109029947B (en) * | 2018-07-05 | 2020-10-16 | 武汉海王机电工程技术有限公司 | Small-sized heavy-load multi-degree-of-freedom adjusting device |
| CN108983382A (en) * | 2018-08-27 | 2018-12-11 | 中山大学 | A kind of multiple degrees of freedom optics zeroing device and adjust dress method |
| CN110887788A (en) * | 2019-12-19 | 2020-03-17 | 中国科学院长春光学精密机械与物理研究所 | Spectrometer lifting device for vacuum test |
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| CF01 | Termination of patent right due to non-payment of annual fee |