CN2697611Y - Carbon nano tube pressure resistance heat sensitive infrared detector - Google Patents
Carbon nano tube pressure resistance heat sensitive infrared detector Download PDFInfo
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- CN2697611Y CN2697611Y CN 200320109976 CN200320109976U CN2697611Y CN 2697611 Y CN2697611 Y CN 2697611Y CN 200320109976 CN200320109976 CN 200320109976 CN 200320109976 U CN200320109976 U CN 200320109976U CN 2697611 Y CN2697611 Y CN 2697611Y
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Abstract
The utility model discloses a carbon nano tube pressure resistance heat sensitive infrared detector comprising a frame rang by a base. The utility model is characterized in that: the central of the base is provided with a base material on which a carbon nano tube thin film is agglutinated. Both ends of the carbon nano tube thin film are respectively provided with an outcoming signal connecting line, and one deck of plated film metallic aluminium is provided below the base material. The signal pickup process of the carbon nano tube pressure resistance heat sensitive infrared detector is either a static pickup or a dynamic pickup. The static pickup is generally the static heat flexure using of the double deck micro-machine; the carbon nano tube has piezoresistive effect and piezoresistive coefficient waxes with elevation of temperature, and therefore the emanating intensity of light is measured by measuring the static resistance of the nano tube. The dynamic pickup makes use of the resonance frequency of the resonance device of the micro-machine drifting with the change of temperature, and the emanating light intensity is measured through the drifting of the nano tube resistance change sensing the temperature distribution. Simultaneously, the carbon nano tube strongly absorbs the infrared radiation, improving detectability of detectors.
Description
Technical field
The present invention relates to a kind of infrared eye, particularly a kind ofly in the substrate of certain material, make micromechanics, and the pressure drag heat-sensitive type infrared thermal detector of bonded carbon nano-tube film thereon.
Background technology
Infrared detection technique application and extensively in modern society.Militarily be used for scouting, communication, guidance, range finding and orientation etc.; Be used for metering, production run monitoring, control etc. industrial; Medically utilizing heat picture to diagnose the illness; On agricultural, forecast disease and pest, the investigation forest reserves, forest fire detecting etc.; In addition, the problem that all can run into infrared acquisition in all trades and professions such as astronomy, geography, scientific experiments.
Infrared eye is broadly divided into light quantum detector and thermal detector two big classes according to the difference of surveying mechanism.Light quantum detector commonly used has following three kinds: photoemissive detector, photoconductive detector, photovoltaic detector.Common thermal detector has: pyroelectric detector, thermistor bolometer and thermopair, pneumatic detector and superconducting bolometer etc.This two classes infrared eye is compared, and characteristics are respectively arranged, and the response wave length of light quantum detector is selective, and each light quantum detector all has specific response wave band, and the light quantum detector will not have response outside this wave band; Thermal detector is to the response wave length non-selectivity, and the radiation from visible light to far various wavelength all has same sensitivity.Secondly, the response time of light quantum detector is short, and the response time of thermal detector is long.
Pyroelectric detector is the infrared thermal detector novel according to a class of thermoelectric effect work, compare with other thermal detector its response fast, have frequency of operation and can reach frequency response characteristic more than the hundreds of kilohertz, considerably beyond other thermal detector.Even can make the quick pyroelectric detector of response time less than the microsecond level.Pyroelectric detector is a kind of device of high impedance, must adopt high input impedance, low noise, the suitable field effect transistor of mutual conductance to make the first order of prime amplifier.The device of full version generally has two kinds: a kind of is to finish impedance conversion, and its circuit as shown in Figure 1a.Wherein 101 is detector, and 102 is field effect transistor, and 103 is source resistance, and output signal is drawn by source resistance 103 two ends.104 is the input resistance of field effect transistor, and 105 is power supply.Another kind has amplifier, and its electric contact parts are shown in Fig. 1 b.Wherein 201 is detector, and 202 is amplifier, and 203 is power supply, and 204 and 205 is output terminal.
The shortcoming of pyroelectric detector is: 1, serviceability temperature must be below the Curie temperature of device.2, pyroelectric detector belongs to the interchange device, and constant radiation is not had response.So incident radiation must or be used pulsed-light radiation through ovennodulation.3, owing to be subjected to materials limitations sensitivity lower.4, under upper frequency, because rising with frequency, dielectric loss increases, far can not reach perfect performance.5, volume is bigger, and cost is higher.
Summary of the invention
The defective and the deficiency that partly exist according to above-mentioned prior art, the purpose of this invention is to provide a kind of simple in structurely, have high resolution and wide spectral response range, highly sensitive, cost is low, the simple micro mechanical Nano tube pressure drag of technology heat-sensitive type infrared thermal detector.
To achieve these goals, Design Mechanism of the present invention is based on piezoresistive effect and the thermal sensitive effect and the infrared absorption characteristic of carbon nano-tube.Bonded carbon nano-tube film on double-deck micromechanics, the drift of thermal flexibility and resonance frequency appears in double-deck micro mechanical device when being subjected to optical radiation, thereby make the carbon nano-tube that is bonded on the micromechanics produce piezoresistive effect, in addition, the pressure drag factor of carbon nano-tube becomes big with the rising of temperature, the resistance that has further increased carbon nano-tube changes, and has improved detection sensitivity, realizes detection to the radiation light intensity by the measurement to the carbon nano-tube change in resistance.
The technical scheme that is adopted is: a kind of carbon nano-tube pressure drag heat-sensitive type infrared eye, it comprises a framework that is surrounded by pedestal, it is characterized in that, central authorities at pedestal are provided with a base material, on base material, be bonded with carbon nano-tube film, there are output signal line and output signal line in the two ends of carbon nano-tube film, one deck plated film metallic aluminium are arranged below the base material.
Some other characteristics of the present utility model are, described carbon nano-tube film is with after the framework of pedestal is connected, and the surface forms radiation window.
Described base material is the double-deck micromechanical resonator structure of micro-cantilever or microbridge or mocromembrane.
Described carbon nano-tube film also can be by electrophoresis or coating or the shaping of printing grafting both by catalytic pyrolysis method or CVD method direct growth.
Described base material is selected silicon or silicon dioxide or silicon nitride for use.
Described plated film metallic aluminium also can be other plated film metals.
Picking up signal method of the present utility model can be a static picking, also can be dynamically to pick up, static picking generally is the static heating deflection that utilizes double-deck micromechanics, because carbon nano-tube has piezoresistive effect, and piezoresistance coefficient raises with temperature and becomes big, thereby come the measuring radiation light intensity by the static resistance of measuring carbon nano-tube, dynamically picking up is to utilize the characteristics of the resonance frequency of micromechanical resonance device with temperature generation drift, and the drift sense temperature by carbon nano-tube change in resistance frequency distributes the measuring radiation light intensity.
Carbon nano-tube pressure drag heat-sensitive type infrared eye of the present utility model, bonding one deck carbon nano-tube film on micromechanical resonator, as thermo-sensitive material, carbon nano-tube is again strong absorption to infrared radiation simultaneously, thereby make it have high sensitivity and little noise equivalent power, improve the detectivity of such detector.
Description of drawings
Fig. 1 is the pyroelectric detector external circuits; Wherein Fig. 1 a is for finishing impedance conversion formula circuit; Fig. 1 b is the circuit diagram that has amplifier;
Carbon nano-tube side's film resonator structure vertical view of an embodiment of Fig. 2 the utility model;
Carbon nano-tube side's film infrared detector structure side view of an embodiment of Fig. 3 the utility model;
Fig. 4 is base material among Fig. 2 and bonding carbon nano-tube film and plated film metallic aluminium synoptic diagram thereof;
Fig. 5 is the vertical view of Fig. 4.
Embodiment
The utility model is described in further detail according to the embodiment that technique scheme provides below in conjunction with accompanying drawing and inventor, but is not limited to this embodiment.
Embodiment: referring to Fig. 2～Fig. 5, carbon nano-tube pressure drag heat-sensitive type infrared eye, it comprises a framework that is surrounded by pedestal 4, central authorities at pedestal 4 are provided with a base material 1, on base material 1, be bonded with carbon nano-tube film 2, there are output signal line 6 and output signal line 7 in the two ends of carbon nano-tube film 2, one deck plated film metallic aluminium 3 are arranged below the base material 1.
Carbon nano-tube film 2 is with after the framework of pedestal 4 is connected, and the surface forms radiation window 5.
The carbon nano-tube pressure drag heat-sensitive type infrared eye of present embodiment prepares according to following common process:
1. the making of double-deck side's film
Bilayer side's film is that semiconductor material such as silicon, silicon dioxide, silicon nitride etc. are base material, at its back side evaporation of aluminum or gold, be processed into double-deck side's membrane structure, base material is selected silicon nitride for use in the present embodiment, plated film metal aluminium, certainly, silicon dioxide, silicon etc. can both be as base materials, and the plated film metal also can be selected double-deck micro-cantilever of formation or micro-bridge structures such as gold for use.
2. the preparation of carbon nano-tube film 2
Carbon nano-tube both can be passed through catalytic pyrolysis method, CVD method direct growth, also can pass through graftings such as electrophoresis, coating, printing and be shaped.Used backing material can be selected silicon or silicon dioxide or silicon nitride etc. for use.The generation diameter is the multi-walled carbon nano-tubes between the 20nm-60nm.Carbon nano-tube is taken off from substrate with acetone soln, handle with ultrasound wave then, make its dispersion, carbon nano-tube and small amount of fibers cellulose fiber are mixed, ultrasonic again 10 minutes with acetone, make its drying, form a black thin film,, peel film at last firmly the film compacting, the firm front that is bonded at double-deck side's film of the mixed film of carbon nano-tube and fiber, on square film, draw the aluminium line with epoxy resin.
3. instrument assembling
After finishing above-mentioned steps, just obtained carbon nano-tube pressure drag heat-sensitive type infrared eye, be fixed on the pedestal, and can carry out infrared acquisition.
Carbon nano-tube pressure drag heat-sensitive type infrared eye of the present utility model, the pick-up method of its signal can be a static picking, also can be dynamically to pick up, static picking generally is the static heating deflection that utilizes double-deck micromechanics, because carbon nano-tube has piezoresistive effect, and piezoresistance coefficient raises with temperature and becomes big, thereby comes the measuring radiation light intensity by the static resistance of measuring carbon nano-tube; Pick up dynamically that to be the resonance frequency of utilizing the micromechanical resonance device with temperature the characteristics of drift take place, the drift sense temperature by carbon nano-tube change in resistance frequency distributes the measuring radiation light intensity.
Claims (6)
1. carbon nano-tube pressure drag heat-sensitive type infrared eye, it comprises a framework that is surrounded by pedestal [4], it is characterized in that, central authorities at pedestal [4] are provided with a base material [1], on base material [1], be bonded with carbon nano-tube film [2], there are output signal line [6] and output signal line [7] in the two ends of carbon nano-tube film [2], one deck plated film metallic aluminium [3] are arranged below the base material [1].
2. carbon nano-tube pressure drag heat-sensitive type infrared eye as claimed in claim 1 is characterized in that, described carbon nano-tube film [2] is with after the framework of pedestal [4] is connected, and the surface forms radiation window [5].
3. carbon nano-tube film infrared eye as claimed in claim 1 is characterized in that, described base material [1] is the double-deck micromechanical resonator structure of micro-cantilever or microbridge or mocromembrane.
4. carbon nano-tube pressure drag heat-sensitive type infrared eye as claimed in claim 1 is characterized in that, described carbon nano-tube film [2] also can be by electrophoresis or coating or the shaping of printing grafting both by catalytic pyrolysis method or CVD method direct growth.
5. carbon nano-tube pressure drag heat-sensitive type infrared eye as claimed in claim 1 is characterized in that described base material [1] is selected silicon or silicon dioxide or silicon nitride for use.
6. carbon nano-tube pressure drag heat-sensitive type infrared eye as claimed in claim 1 is characterized in that, described plated film metallic aluminium [3] also can be gold or other plated film metals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320109976 CN2697611Y (en) | 2003-12-23 | 2003-12-23 | Carbon nano tube pressure resistance heat sensitive infrared detector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320109976 CN2697611Y (en) | 2003-12-23 | 2003-12-23 | Carbon nano tube pressure resistance heat sensitive infrared detector |
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| Publication Number | Publication Date |
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| CN2697611Y true CN2697611Y (en) | 2005-05-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200320109976 Expired - Fee Related CN2697611Y (en) | 2003-12-23 | 2003-12-23 | Carbon nano tube pressure resistance heat sensitive infrared detector |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557944A (en) * | 2013-10-24 | 2014-02-05 | 北京航空航天大学 | CNT infrared sensor with low power consumption and high sensitivity |
| CN104071742A (en) * | 2014-06-12 | 2014-10-01 | 南方科技大学 | Single-walled carbon nanotube based double-cantilever-beam infrared detector and forming method thereof |
| CN107505281A (en) * | 2017-07-25 | 2017-12-22 | 西安交通大学 | A kind of THz wave detector based on silicon micro-resonator |
| CN113007310A (en) * | 2021-01-21 | 2021-06-22 | 南京航空航天大学 | Compound gear based on intelligent composite material |
-
2003
- 2003-12-23 CN CN 200320109976 patent/CN2697611Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557944A (en) * | 2013-10-24 | 2014-02-05 | 北京航空航天大学 | CNT infrared sensor with low power consumption and high sensitivity |
| CN104071742A (en) * | 2014-06-12 | 2014-10-01 | 南方科技大学 | Single-walled carbon nanotube based double-cantilever-beam infrared detector and forming method thereof |
| CN107505281A (en) * | 2017-07-25 | 2017-12-22 | 西安交通大学 | A kind of THz wave detector based on silicon micro-resonator |
| CN113007310A (en) * | 2021-01-21 | 2021-06-22 | 南京航空航天大学 | Compound gear based on intelligent composite material |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |