CN2643297Y - High-precision spectral radiance luminance meter - Google Patents
High-precision spectral radiance luminance meter Download PDFInfo
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- CN2643297Y CN2643297Y CN 03220050 CN03220050U CN2643297Y CN 2643297 Y CN2643297 Y CN 2643297Y CN 03220050 CN03220050 CN 03220050 CN 03220050 U CN03220050 U CN 03220050U CN 2643297 Y CN2643297 Y CN 2643297Y
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- silicon photoelectric
- photoelectric diode
- spectral radiance
- high precision
- diode array
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- 230000003595 spectral effect Effects 0.000 title claims abstract description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 36
- 239000010703 silicon Substances 0.000 claims abstract description 36
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 238000003491 array Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000002310 reflectometry Methods 0.000 abstract description 6
- 230000005855 radiation Effects 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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Abstract
The utility model discloses a high accuracy spectral radiance luminance meter. The high-precision field stop consists of a field stop, an aperture stop, an optical filter, a trap detector and a high-precision I/V converter. Especially the trap detector uses three silicon photodiodes to arrange with certain structure, makes incident light energy wherein carry out multiple reflection and absorption in order to reduce the influence of monolithic silicon photodiode surface reflectivity to measurement accuracy, and this three formula structures also can reduce the polarization sensitivity of single device to the radiation simultaneously to furthest reduces the radiometric uncertainty that arouses from this, the utility model discloses can realize the high accuracy detection of uncertainty to the light source below 1%.
Description
Technical field
The utility model relates to a kind of spectral radiance measurement device based on light trapping.
Background technology
Up to the present, the measurement of spectral radiance all is to carry out calibrated spectral radiometer by spectral radiant emittance one-level or secondary standard transmission to realize usually.Since the limitation of its transmission method, its uncertainty of measurement.Be generally: 2.5%-6%.
Usually, spectral radiometer, all be to adopt a unit photoelectric detector or array formula photoelectric detector to add that preposition light path constitutes, because single piece of silicon photodiode or the intrinsic character of surface of array formula photoelectric detector make so (in light beam normal incidence between the miter angle incident, its surface reflectivity has the variation of 1-5%), if the beam incident angle of measuring can not be consistent with the incident angle of calibration, will the energy loss that cause be also different because of the difference of reflection, thus make the precise decreasing of measurement and do not reach modern high precision ray radiation Testing requirement.
The low temperature absolute radiometer can provide the highest accuracy at present, add that preposition light path can realize the measurement of high-precision spectral radiance, but its fancy price (more than 100,000 dollars) and complicated operational process and high operating cost, its widespread use is greatly limited, and usually just the first grade standard as a radiant quantity is used.
The utility model content
The purpose of this utility model is to use the ordinary silicon photoelectric device to constitute high precision spectral radiance meter in conjunction with the preposition optical system of high definition.
High precision spectral radiance meter mainly is made of the preposition optical system of high precision and silicon photoelectric diode trap detector and high precision I/V translation circuit.Its concrete structure is:
A kind of high precision spectral radiance meter comprises field stop, aperture diaphragm, and optical filter, the I/V transducer is characterized in that behind the optical filter light trapping detector being installed, and described light trapping detector is made of the multi-disc photo sensitive device.
The light trapping detector is made of three silicon photoelectric diode arrays, perpendicular to the 3rd silicon photoelectric diode array, and becomes miter angle with second silicon photoelectric diode array towards first silicon photoelectric diode array of incident light; Second silicon photoelectric diode array becomes miter angle with the 3rd silicon photoelectric diode array.
The I/V transducer is made of high precision operating amplifier and resistance-capacitance network, and the input end of I/V transducer (3) and the output terminal of light trapping detector are electrically connected.
Light trapping detector of the present utility model uses three plate plane type silicon photoelectric diodes, make according to the mirror reflection principle and to incide first reflected light on the silicon photoelectric diode and get to second silicon photoelectric diode, reflected light on second silicon photoelectric diode is got on the 3rd silicon photoelectric diode again, and the reflected light on the 3rd silicon photoelectric diode follows Yuan Lu again and turns back on second silicon photoelectric diode and follow Yuan Lu again at the reflected light that produces on second silicon photoelectric diode thus and turn back on second silicon photoelectric diode and get on first silicon photoelectric diode at the reflected light that produces on second silicon photoelectric diode thus again.Like this, on every silicon photoelectric diode,, reflection will be received by its next piece silicon photoelectric diode because of losing part light, and the like.Principle is as follows.
In single diode, have:
I
f=η(1-ρ)(λe/hc)·P
So in this structure, have:
I
f=[η
1(1-ρ
1)+η
2ρ
2(1-ρ
1)+η
3ρ
1ρ
2(1-ρ
3)+η
2ρ
1ρ
2ρ
3(1-ρ
2)
+η
1?ρ
1?ρ
2?ρ
2?ρ
3(1-ρ
1)]·(λe/hc)·P
Wherein: I
fBe photogenerated current; P is an incident optical power; λ is a lambda1-wavelength; The h:Plank constant; C: vacuum light speed;
η
1, η
2, η
3Be respectively 1
#, 2
#, 3
#Internal quantum efficiency;
ρ
1, ρ
2Be that incident angle is when being 45 ° 1
#, 2
#Reflectivity, ρ
3During for vertical incidence 3
#Reflectivity.
In order to see (being the diode of same kind in fact) η easily clearly owing to what use
1, η
2, η
3Basic identical, can think approx that they equate, for ρ
1, ρ
2, ρ
3Think that also they equate that then following formula can be reduced to:
I
f=η(1-ρ°)(λe/hc)·P
So just formed a light trapping, consequently be equivalent to greatly reduce the surface reflectivity of monolithic silicon photoelectric diode, simultaneously, this three-chip type structure also can reduce the polarization sensitivity of single device to radiation, thereby reduces the radiometric uncertainty that causes therefrom to greatest extent.
According to definition, radiance is meant and leaves, arrives or pass the radiation flux on a certain surface unit solid angle, the unit projected area.
L=d./dA.cos..d.
Spectral radiance then is meant the radiance that specific wavelength position (certain bandwidth) is located.
Symbol: L., unit are w/m2.sr.
Therefore, accurately measure the radiance that arrives radiometer entrance pupil place, the transmitance of then necessary micrometric measurement circular aperture diaphragm (entrance pupil) area, field stop area and narrow band pass filter.Aperture diaphragm and field stop acting in conjunction have determined to accept solid angle, and narrow band pass filter has then been determined wavelength location and the bandwidth measured.With present technical merit, more than every detection all can reach 0.1% following error.
Description of drawings
Fig. 1 is the utility model light trapping panel detector structure synoptic diagram.
Fig. 2 is the utility model structure principle chart.
Embodiment
Referring to Fig. 1, Fig. 2.
High precision spectral radiance meter is by preposition light path system 1, trap detector 2, and I/V converter 3 constitutes, and preposition light path system 1 is by field stop 4, aperture diaphragm 5, optical filter 6 constitutes.
The area of field stop 4 and aperture diaphragm 5 has determined to accept the solid angle of light.Optical filter 6 is in order to determine specific wavelength position in the spectrum, trap detector 2 is made of three silicon photoelectric diodes, its geometry is as shown in Figure 1: first silicon photoelectric diode is vertical with the plane at the 3rd silicon photoelectric diode place, and with angle at 45, plane, second place, second with angle at 45, the 3rd plane, place.Three silicone tubes are special Hamatsu S1337-11 type is not had the window silicon photoelectric diode, effectively photosensitive area 10 * 10mm2.
The photocurrent of trap detector 2 is fed to the input end of high precision I/V transducer 3, converts correspondent voltage output to.
High precision spectral radiance meter is demarcated its spectral responsivity by the low temperature absolute radiometer.
Through Performance Detection, the reflectivity when trap detector is accepted normal incidence is less than 2/1000ths, than single piece of silicon photodiode (20 ~ 30%) two orders of magnitude that descended; Polarization sensitivity is 0.00142%, and trap detector carries out the spectral power absolute Calibration by the low temperature absolute radiometer, can be less than 0.03% uncertainty.Be equipped with accurate preposition optical system, may ultimately reach the spoke brightness of brightness source below 1% is detected uncertainty.
Claims (3)
1. a high precision spectral radiance meter comprises field stop, aperture diaphragm, and optical filter, the I/V transducer is characterized in that behind the optical filter light trapping detector being installed, and described light trapping detector is made of the multi-disc photo sensitive device.
2. the described high precision spectral radiance of claim 1 meter, it is characterized in that the light trapping detector is made of three silicon photoelectric diode arrays, perpendicular to the 3rd silicon photoelectric diode array, and become miter angle towards first silicon photoelectric diode array of incident light with second silicon photoelectric diode array; Second silicon photoelectric diode array becomes miter angle with the 3rd silicon photoelectric diode array.
3. the described high precision spectral radiance of claim 1 meter is characterized in that the I/V transducer is made of high precision operating amplifier and resistance-capacitance network, and the input end of I/V transducer (3) and the output terminal of light trapping detector are electrically connected.
Priority Applications (1)
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CN 03220050 CN2643297Y (en) | 2003-02-22 | 2003-02-22 | High-precision spectral radiance luminance meter |
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CN 03220050 CN2643297Y (en) | 2003-02-22 | 2003-02-22 | High-precision spectral radiance luminance meter |
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CN2643297Y true CN2643297Y (en) | 2004-09-22 |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100414270C (en) * | 2004-12-25 | 2008-08-27 | 中国科学院安徽光学精密机械研究所 | Satellite full optical-path radiation beaconing method |
CN100416237C (en) * | 2005-01-08 | 2008-09-03 | 中国科学院安徽光学精密机械研究所 | Realizing method and device of high precision radiation brightness standard based on standard detector |
WO2010003362A1 (en) * | 2008-07-07 | 2010-01-14 | Mou Tongsheng | Brighness measurement device |
CN100582742C (en) * | 2006-12-19 | 2010-01-20 | 中国科学院安徽光学精密机械研究所 | High-accuracy multifunctional wide-spectrum radiation comparison system |
CN101922967A (en) * | 2010-07-26 | 2010-12-22 | 杭州远方光电信息有限公司 | Zoom luminance meter |
CN101685034B (en) * | 2008-09-23 | 2012-02-01 | 中茂电子(深圳)有限公司 | Method, device and detecting station for detecting luminance brightness of luminous element |
CN105424320A (en) * | 2015-11-04 | 2016-03-23 | 中国电子科技集团公司第四十一研究所 | Device for high-precision testing of output power stability of wide-spectrum light source |
CN106768317A (en) * | 2016-11-14 | 2017-05-31 | 中国电子科技集团公司第四十研究所 | The caliberating device and method of a kind of single-photon detector detection efficient |
CN107543609A (en) * | 2010-07-01 | 2018-01-05 | 新港公司 | Optical demultiplexing system |
CN110470385A (en) * | 2018-05-09 | 2019-11-19 | 北京振兴计量测试研究所 | Diaphragm formula vacuum ultraviolet luminance meter |
CN113418600A (en) * | 2021-06-21 | 2021-09-21 | 中国电子科技集团公司第四十一研究所 | Optical fiber type short wave infrared light trap detector and detection method |
-
2003
- 2003-02-22 CN CN 03220050 patent/CN2643297Y/en not_active Expired - Fee Related
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100414270C (en) * | 2004-12-25 | 2008-08-27 | 中国科学院安徽光学精密机械研究所 | Satellite full optical-path radiation beaconing method |
CN100416237C (en) * | 2005-01-08 | 2008-09-03 | 中国科学院安徽光学精密机械研究所 | Realizing method and device of high precision radiation brightness standard based on standard detector |
CN100582742C (en) * | 2006-12-19 | 2010-01-20 | 中国科学院安徽光学精密机械研究所 | High-accuracy multifunctional wide-spectrum radiation comparison system |
WO2010003362A1 (en) * | 2008-07-07 | 2010-01-14 | Mou Tongsheng | Brighness measurement device |
CN101685034B (en) * | 2008-09-23 | 2012-02-01 | 中茂电子(深圳)有限公司 | Method, device and detecting station for detecting luminance brightness of luminous element |
CN107543609A (en) * | 2010-07-01 | 2018-01-05 | 新港公司 | Optical demultiplexing system |
CN101922967A (en) * | 2010-07-26 | 2010-12-22 | 杭州远方光电信息有限公司 | Zoom luminance meter |
CN105424320A (en) * | 2015-11-04 | 2016-03-23 | 中国电子科技集团公司第四十一研究所 | Device for high-precision testing of output power stability of wide-spectrum light source |
CN106768317A (en) * | 2016-11-14 | 2017-05-31 | 中国电子科技集团公司第四十研究所 | The caliberating device and method of a kind of single-photon detector detection efficient |
CN110470385A (en) * | 2018-05-09 | 2019-11-19 | 北京振兴计量测试研究所 | Diaphragm formula vacuum ultraviolet luminance meter |
CN113418600A (en) * | 2021-06-21 | 2021-09-21 | 中国电子科技集团公司第四十一研究所 | Optical fiber type short wave infrared light trap detector and detection method |
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