CN2580470Y - 三自由度超精密定位平台 - Google Patents
三自由度超精密定位平台 Download PDFInfo
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- CN2580470Y CN2580470Y CN 02281264 CN02281264U CN2580470Y CN 2580470 Y CN2580470 Y CN 2580470Y CN 02281264 CN02281264 CN 02281264 CN 02281264 U CN02281264 U CN 02281264U CN 2580470 Y CN2580470 Y CN 2580470Y
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Application Number | Priority Date | Filing Date | Title |
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CN 02281264 CN2580470Y (zh) | 2002-11-18 | 2002-11-18 | 三自由度超精密定位平台 |
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CN 02281264 CN2580470Y (zh) | 2002-11-18 | 2002-11-18 | 三自由度超精密定位平台 |
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CN2580470Y true CN2580470Y (zh) | 2003-10-15 |
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CN 02281264 Expired - Lifetime CN2580470Y (zh) | 2002-11-18 | 2002-11-18 | 三自由度超精密定位平台 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1332785C (zh) * | 2004-07-07 | 2007-08-22 | 哈尔滨工业大学 | 钢带解耦纯平动平面并联机器人 |
CN100573340C (zh) * | 2008-08-07 | 2009-12-23 | 上海微电子装备有限公司 | 二自由度电机执行机构及相应的六自由度微动台 |
CN102506785A (zh) * | 2011-09-23 | 2012-06-20 | 哈尔滨工业大学 | 三自由度一体化粘滑式直线定位装置 |
CN102881337A (zh) * | 2012-09-10 | 2013-01-16 | 中国科学院光电技术研究所 | Z-θx-θy三自由度高同轴度抗弯扭矩纳米级精度工作台 |
CN103000231A (zh) * | 2012-09-10 | 2013-03-27 | 中国科学院光电技术研究所 | 一种Z-θx-θy三自由度抗弯矩高精度工作台 |
CN103604390A (zh) * | 2013-11-21 | 2014-02-26 | 苏州大学 | 干涉物镜驱动装置 |
CN103615990A (zh) * | 2013-11-21 | 2014-03-05 | 苏州大学 | 干涉物镜驱动装置 |
CN104385261A (zh) * | 2014-09-30 | 2015-03-04 | 西安电子科技大学 | 具有空间三自由度的平动装置及方法 |
US9190938B2 (en) | 2012-03-05 | 2015-11-17 | Academia Sinica | Piezoelectric actuating device |
CN110246537A (zh) * | 2019-04-03 | 2019-09-17 | 浙江工业大学 | 用于空间三自由度纳米定位平台的传动机构 |
-
2002
- 2002-11-18 CN CN 02281264 patent/CN2580470Y/zh not_active Expired - Lifetime
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1332785C (zh) * | 2004-07-07 | 2007-08-22 | 哈尔滨工业大学 | 钢带解耦纯平动平面并联机器人 |
CN100573340C (zh) * | 2008-08-07 | 2009-12-23 | 上海微电子装备有限公司 | 二自由度电机执行机构及相应的六自由度微动台 |
CN102506785A (zh) * | 2011-09-23 | 2012-06-20 | 哈尔滨工业大学 | 三自由度一体化粘滑式直线定位装置 |
CN102506785B (zh) * | 2011-09-23 | 2013-11-06 | 哈尔滨工业大学 | 三自由度一体化粘滑式直线定位装置 |
US9190938B2 (en) | 2012-03-05 | 2015-11-17 | Academia Sinica | Piezoelectric actuating device |
CN102881337B (zh) * | 2012-09-10 | 2014-09-17 | 中国科学院光电技术研究所 | Z-θx-θy三自由度高同轴度抗弯扭矩纳米级精度工作台 |
CN102881337A (zh) * | 2012-09-10 | 2013-01-16 | 中国科学院光电技术研究所 | Z-θx-θy三自由度高同轴度抗弯扭矩纳米级精度工作台 |
CN103000231A (zh) * | 2012-09-10 | 2013-03-27 | 中国科学院光电技术研究所 | 一种Z-θx-θy三自由度抗弯矩高精度工作台 |
CN103604390A (zh) * | 2013-11-21 | 2014-02-26 | 苏州大学 | 干涉物镜驱动装置 |
CN103615990A (zh) * | 2013-11-21 | 2014-03-05 | 苏州大学 | 干涉物镜驱动装置 |
CN103604390B (zh) * | 2013-11-21 | 2017-01-04 | 苏州大学 | 干涉物镜驱动装置 |
CN104385261A (zh) * | 2014-09-30 | 2015-03-04 | 西安电子科技大学 | 具有空间三自由度的平动装置及方法 |
CN104385261B (zh) * | 2014-09-30 | 2016-04-27 | 西安电子科技大学 | 具有空间三自由度的平动装置及方法 |
CN110246537A (zh) * | 2019-04-03 | 2019-09-17 | 浙江工业大学 | 用于空间三自由度纳米定位平台的传动机构 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SUZHOU BOSHI ROBOT TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: HIT BOSHI PRECISION MEASURE + CONTROL CO., LTD. Effective date: 20100513 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 150006 ROOM 0906, SCIENCE PARK, HARBIN INSTITUTE OF TECHNOLOGY, NO.434, YOUZHENG STREET, NANGANG DISTRICT, HARBIN CITY, HEILONGJIANG PROVINCE TO: 215121 1/F, 2A, ZHONGXIN SCIENCE AND TECHNOLOGY CITY, NO.8, ZHANYE ROAD, WEITING TOWN, SUZHOU INDUSTRY PARK, SUZHOU CITY, JIANGSU PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20100513 Address after: 215121, Jiangsu, Suzhou Industrial Park, Suzhou Town Pavilion Road, No. 8, China Science and Technology City, 2A layer Patentee after: Suzhou BoShi Robotics Technology Co., Ltd. Address before: 0906, room 150006, hit Tech Park, 434 postal street, Nangang District, Heilongjiang, Harbin Patentee before: Boshi Accurate Test Control Co., Ltd., Harbin pllytechnical Univ |
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DD01 | Delivery of document by public notice |
Addressee: Boshi Accurate Test Control Co., Ltd., Harbin pllytechnical Univ Document name: Notification of Passing Examination on Formalities |
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C17 | Cessation of patent right | ||
CX01 | Expiry of patent term |
Expiration termination date: 20121118 Granted publication date: 20031015 |