CN221239179U - Vacuum mask gluing device - Google Patents
Vacuum mask gluing device Download PDFInfo
- Publication number
- CN221239179U CN221239179U CN202323056724.1U CN202323056724U CN221239179U CN 221239179 U CN221239179 U CN 221239179U CN 202323056724 U CN202323056724 U CN 202323056724U CN 221239179 U CN221239179 U CN 221239179U
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- CN
- China
- Prior art keywords
- vacuum
- mask
- machine body
- glue
- top cover
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004026 adhesive bonding Methods 0.000 title abstract description 7
- 239000003292 glue Substances 0.000 claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- 238000003860 storage Methods 0.000 claims abstract description 13
- 238000003825 pressing Methods 0.000 claims abstract description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 238000010073 coating (rubber) Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 13
- 239000011248 coating agent Substances 0.000 abstract description 11
- 238000000576 coating method Methods 0.000 abstract description 11
- 238000007650 screen-printing Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Abstract
The utility model discloses a vacuum mask gluing device which comprises a glue dropping mechanism, a rotating mechanism, a vacuum mechanism and a mask assembly, wherein the glue dropping mechanism is arranged on the vacuum mechanism; the vacuum mechanism comprises a machine body, a top cover and a first vacuum pump, wherein the top cover is detachably arranged at the top of the machine body, and the vacuum pump is communicated to the interior of the machine body through a vacuum tube; the glue dropping mechanism comprises a storage cavity arranged above the top cover and a glue dropping needle head communicated with the storage cavity and the inside of the machine body; the rotation system mechanism comprises a rotation motor; the mask assembly includes a mask plate and a mask plate support for pressing the product against the output end of the rotary motor. Compared with the conventional glue coating exposure developing process, the utility model can omit the subsequent exposure developing process and other processes, simplifies the production process, and has higher precision and thinner glue thickness compared with the screen printing process.
Description
Technical Field
The utility model relates to the field of gluing masks, in particular to a vacuum mask gluing device.
Background
In order to obtain a pair of photoresist patterns, there are generally two ways, a semiconductor lithography process and a screen printing process.
The conventional semiconductor photoetching process is to glue at normal pressure, and the photoresist pattern can be obtained by exposing and developing with a mask after glue spreading; the screen printing process directly makes mask patterns on the screen and directly prints the mask patterns on the surface of a product by using printing glue, and the process has the advantages of simple operation, short flow, high speed, low precision, thick thickness of the applied glue, and incapability of achieving um-level pattern precision and glue thickness
Disclosure of utility model
The utility model aims to provide a vacuum mask gluing device so as to solve the technical problems.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a vacuum mask rubber coating device, its characterized in that: comprises a glue dropping mechanism, a rotating mechanism, a vacuum mechanism and a mask assembly;
The vacuum mechanism comprises a machine body, a top cover and a first vacuum pump, wherein the top cover is detachably arranged at the top of the machine body, and the vacuum pump is communicated to the interior of the machine body through a vacuum tube;
The glue dropping mechanism comprises a storage cavity arranged above the top cover and a glue dropping needle head communicated with the storage cavity and the inside of the machine body;
the rotation system mechanism comprises a rotation motor;
the mask assembly includes a mask plate and a mask plate support for pressing the product against the output end of the rotary motor.
Preferably, the output end of the rotary motor is fixed with a motor fixing bracket, the top of the motor fixing bracket is fixed with a sucker for placing products, and the vacuum mechanism further comprises a second vacuum pump which is communicated with the sucker through a vacuum pipeline.
Preferably, the top of the vacuum chuck is provided with groove lines, and the center of the vacuum chuck is provided with a through hole for communicating with a vacuum pipeline.
Preferably, the through hole of the vacuum chuck is arranged in the middle, and the glue dropping needle head is opposite to the through hole when the top cover is fixed on the machine body.
Preferably, the mask is a steel mesh provided with the required mask pattern.
Compared with the prior art, the utility model has the beneficial effects that:
Compared with the conventional glue coating exposure developing process, the utility model can omit the subsequent exposure developing process and other processes, simplifies the production process, and has higher precision and thinner glue thickness compared with the screen printing process.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of the overall structure of the present embodiment;
FIG. 2 is a schematic top view of the embodiment highlighting masking system and glue chuck;
Fig. 3 is a schematic top view of the saliency mask system of this embodiment.
In the drawings, the list of components represented by the various numbers is as follows:
1. A storage chamber; 2. a dropping needle; 3. a pressure valve; 4. a top cover; 5. a body; 6. a first vacuum pump; 7. a vacuum tube; 8. a suction cup; 9. a motor fixing bracket; 10. a rotary motor; 11. a vacuum pipe; 12. a second vacuum pump; 13. a mask; 14. a reticle support; 15. and (5) a product.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-3, the present utility model provides a technical solution: a vacuum mask gluing device comprises a glue dripping mechanism, a rotating mechanism, a vacuum mechanism and a mask assembly;
The vacuum mechanism comprises a machine body 5, a top cover 4 and a first vacuum pump 6, wherein the top cover 4 is detachably arranged at the top of the machine body 5, the vacuum pump is communicated to the inside of the machine body 5 through a vacuum tube 7, the top cover 4 can be sealed at the top of the machine body 5 through a sealing structure, sealing rings are arranged in the machine body 5 to form a sealed space, and the inside of the machine body 5 can be vacuumized through the first vacuum pump 6;
The glue dripping mechanism comprises a storage cavity 1 arranged above the top cover 4 and a glue dripping needle head which is communicated with the storage cavity 1 and the inside of the machine body 5, and when the glue is coated on the product 15, the storage cavity 1 is injected with a required amount at a time;
The rotating system mechanism comprises a rotating motor 10 for driving a product 15 to rotate to form release force and dispersing photoresist dropped on a mask 13;
the mask assembly comprises a mask 13 and a mask support 14 for pressing a product 15 on the output end of the rotary motor 10, wherein the mask 13 is supported by the support to a certain height, the product 15 is placed on the rotary motor 10 and under the mask 13, and the mask 13 is fixed with the rotary motor 10, so that the product 15 is pressed.
Specifically, the output end of the rotary motor 10 is fixed with a motor fixing support 9, the top of the motor fixing support 9 is fixed with a sucker 8 for placing a product 15, the vacuum mechanism further comprises a second vacuum pump 12, the second vacuum pump 12 is communicated with the sucker 8 through a vacuum pipeline 11, the top of the product 15 is tightly pressed through a mask 13, the bottom of the product 15 is fixed in a vacuum pumping mode through the sucker 8, the product 15 is fixed more firmly, screw holes are formed in the peripheral side of the mask 13 and the top end face of the motor fixing support 9, and after the mask 13 is placed on the product 15, the mask 13 can be locked on the sucker 8 through bolts, so that the product 15 is fixed.
Specifically, the top of the vacuum chuck 8 is provided with groove lines, the center of the vacuum chuck is provided with a through hole for being communicated with the vacuum pipeline 11, and in this way, the product 15 can be fixed at the top of the chuck 8 first and then is pressed and fixed through the mask 13.
Specifically, the through hole of the vacuum chuck 8 is arranged in the middle, and the photoresist dripping needle head is opposite to the through hole when the top cover 4 is fixed on the machine body 5, so that photoresist can be dripped in the middle of the product 15 in the mode, positioning is convenient, and the photoresist can achieve better dispersing effect after the product 15 rotates through the rotary motor 10.
Specifically, the mask plate is a steel mesh provided with a required mask pattern.
One specific application embodiment of this embodiment is:
When the device is used, photoresist to be coated is injected into the glue storage cavity 1, a piece of required quantity is injected once, the top cover 4 is opened, the glue coating sucker 8 is clamped on the rotary motor 10, a sample to be coated is placed on the top of the sucker 8, the second vacuum pump 12 is started, at the moment, the glue coating sample is adsorbed on the glue coating sucker 8, the mask 13 is placed on the mask support 14 to form a mask assembly, the mask assembly is placed above the glue coating sample, the mask assembly and the glue coating sucker 8 are respectively provided with four corresponding screw holes, the mask assembly is locked on the glue coating sucker 8 by using screws, at the moment, the glue coating sample is clamped in the middle, the top cover 4 is closed, the second vacuum pump 12 is started, when the vacuum cavity reaches the specified vacuum degree, the pressure valve 3 in the glue storage cavity 1 is opened, the photoresist is dripped into the surface of the mask 13 and the glue coating sample from the glue dripping needle, after the glue in the glue storage cavity 1 is injected, the rotary motor 10 is started to run at a high speed, the photoresist is uniformly spun, after the motor is stopped, the vacuum is broken, the screw of the system is opened, the second vacuum pump 12 is closed, and the pattern is removed after the glue coating system is turned off.
In the description of the present utility model, it should be understood that the terms "coaxial," "bottom," "one end," "top," "middle," "another end," "upper," "one side," "top," "inner," "front," "center," "two ends," etc. indicate orientations or positional relationships based on the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "configured," "connected," "secured," "screwed," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in communication with each other or in interaction with each other, unless explicitly defined otherwise, the meaning of the terms described above in this application will be understood by those of ordinary skill in the art in view of the specific circumstances.
Although embodiments of the present utility model have been shown and described, it would be appreciated by those skilled in the art that changes may be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the claims and their equivalents.
Claims (5)
1. A vacuum mask rubber coating device, its characterized in that: comprises a glue dropping mechanism, a rotating mechanism, a vacuum mechanism and a mask assembly;
the vacuum mechanism comprises a machine body (5), a top cover (4) and a first vacuum pump (6), wherein the top cover (4) is detachably arranged at the top of the machine body (5), and the vacuum pump is communicated to the inside of the machine body (5) through a vacuum tube (7);
the glue dripping mechanism comprises a storage cavity (1) arranged above the top cover (4) and a glue dripping needle head which is communicated with the storage cavity (1) and the inside of the machine body (5);
The rotation system mechanism comprises a rotation motor (10);
The mask assembly comprises a mask (13) and a mask support (14) for pressing a product (15) to the output end of the rotary motor (10).
2. A vacuum mask gumming device according to claim 1, wherein: the vacuum mechanism is characterized in that a motor fixing support (9) is fixed at the output end of the rotary motor (10), a sucking disc (8) for placing a product (15) is fixed at the top of the motor fixing support (9), and the vacuum mechanism further comprises a second vacuum pump (12), and the second vacuum pump (12) is communicated with the sucking disc (8) through a vacuum pipeline (11).
3. A vacuum mask gumming device as set forth in claim 2, wherein: the top of the vacuum sucker (8) is provided with groove lines, and the center of the vacuum sucker is provided with a through hole for being communicated with the vacuum pipeline (11).
4. A vacuum mask gumming device according to claim 3, wherein: the through hole of the vacuum sucker (8) is arranged in the middle, and the glue dropping needle head is opposite to the through hole when the top cover (4) is fixed on the machine body (5).
5. A vacuum mask gumming device according to claim 1, wherein: the mask plate (13) is a steel mesh provided with a required mask pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323056724.1U CN221239179U (en) | 2023-11-13 | 2023-11-13 | Vacuum mask gluing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323056724.1U CN221239179U (en) | 2023-11-13 | 2023-11-13 | Vacuum mask gluing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221239179U true CN221239179U (en) | 2024-06-28 |
Family
ID=91596272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323056724.1U Active CN221239179U (en) | 2023-11-13 | 2023-11-13 | Vacuum mask gluing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221239179U (en) |
-
2023
- 2023-11-13 CN CN202323056724.1U patent/CN221239179U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |