CN221201133U - A change matrix formula and inhale claw for transporting base plate - Google Patents
A change matrix formula and inhale claw for transporting base plate Download PDFInfo
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- CN221201133U CN221201133U CN202322935730.8U CN202322935730U CN221201133U CN 221201133 U CN221201133 U CN 221201133U CN 202322935730 U CN202322935730 U CN 202322935730U CN 221201133 U CN221201133 U CN 221201133U
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- adsorption
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- suction
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- 239000011159 matrix material Substances 0.000 title claims abstract description 21
- 210000000078 claw Anatomy 0.000 title claims abstract description 18
- 230000008859 change Effects 0.000 title claims description 6
- 238000001179 sorption measurement Methods 0.000 claims abstract description 39
- 238000006243 chemical reaction Methods 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 230000000712 assembly Effects 0.000 claims description 4
- 238000000429 assembly Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 8
- 230000009471 action Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a conversion matrix type suction claw for transferring a substrate, which comprises a carrier plate, a plurality of adsorption components, a push-pull rod connected with adjacent adsorption components and an automatic conversion component for driving at least one adsorption component to slide, wherein the carrier plate is provided with a sliding chute which is convenient for the adsorption components to slide, the adsorption components comprise a suction nozzle, a sliding rod, a sliding disc and an air suction joint communicated with an air suction pipe, the automatic conversion component comprises a rotating motor and a rotating arm, the adsorption components capable of freely converting and adjusting positions are arranged in a linear or square array mode, and the adsorption and the grabbing of strip-shaped or round or square substrate materials can be realized, so that one mechanical arm clamping component is omitted, the automatic occupied space is reduced, the equipment cost is saved, the programming difficulty is reduced, the equipment failure rate is reduced, and the suction claw is fully applicable to the self-adaptive adsorption requirements of various planar shapes.
Description
Technical Field
The utility model relates to the technical field of automation equipment, in particular to a conversion matrix type suction claw for transferring a substrate.
Background
In the preparation process of the semiconductor element, a supporting substrate is often needed, the substrate is thinner, square and round and also has a strip shape, when the substrate is matched with an automatic production line to transport, the substrate needs to be leveled, adsorbed and grabbed, so that the stability of the transfer process of the semiconductor element on the substrate is ensured, as the automatic production line needs to mix and feed materials, the square substrate and the strip-shaped substrate can be alternately fed, the previous automatic equipment adopts two groups of mechanical arm clamping jaws, and the grabbing and transferring actions are carried out aiming at the distribution of the square substrate and the strip-shaped substrate, but in view of the limited transfer space of the automatic equipment, the space for arranging the mechanical arm is limited, and the adsorption grabbing and transferring mechanism suitable for the substrate with various shapes and specifications is necessary to design, so that the stability of the substrate supporting material is maintained, and the self-adaptive adsorption and transferring capacity to various plane shapes is improved.
Disclosure of utility model
The purpose of the utility model is that: in view of the technical requirements of adsorption, grabbing and transferring of substrates in different shapes in the background art, the problem that the number of clamping jaws of a mechanical arm is large and the space of automatic equipment is occupied is reduced, a conversion matrix type suction claw for transferring substrates is designed, only one suction nozzle structure is needed, the positions of the suction nozzles are adjusted through matrix conversion, a plurality of suction nozzles in linear arrangement can be arranged into square array type suction nozzles in a conversion mode, strip-shaped substrate materials can be adsorbed, round and square substrate materials can be adsorbed, and the self-adaptive adsorption requirement of various plane shapes is fully met.
The technical scheme adopted for solving the problems is as follows:
A conversion matrix type suction claw for transferring a substrate comprises a carrier plate, a plurality of adsorption components, a push-pull rod connected with adjacent adsorption components, and an automatic conversion component for driving at least one adsorption component to slide,
The carrier plate is provided with a sliding chute which is convenient for the adsorption component to slide, the adsorption component comprises a suction nozzle, a sliding rod, a sliding disc and an air suction joint communicated with the air suction pipe, the sliding disc is sleeved at the middle part of the sliding rod, the center of the sliding rod is communicated with the suction nozzle and the air suction joint, the sliding disc slides in a matched manner with the sliding chute, so that the sliding rod keeps sliding motion perpendicular to the posture of the carrier plate, the suction nozzle is driven to adjust the conversion position,
An automatic conversion component is also matched between the air extraction joint and the slide bar,
The automatic change subassembly includes rotating electrical machines and swinging boom, the rotating electrical machines passes through the support frame to be fixed on the support plate, and the main shaft and the swinging boom of rotating electrical machines are connected, and the swinging boom is provided with waist shape hole, waist shape hole and slide bar cooperation, drives the slide bar and slides the action in the spout.
Further, the sliding groove is a stepped countersunk groove, and is covered by the limiting plate after being matched with the sliding plate, so that displacement variation of the sliding plate in the normal direction of the carrier plate is limited.
Further, all the adsorption components are arranged in a straight line by sliding adjustment of the automatic conversion components.
Further, all the adsorption components are arranged in a square shape by sliding adjustment of the automatic conversion components.
Further, a push-pull rod is arranged between two adjacent groups of adsorption assemblies, and drives the adjacent adsorption assemblies to slide in the sliding groove according to a set track.
The beneficial effects of the utility model are as follows:
This a change matrix formula is inhaled claw for transporting base plate is through several absorption subassembly that can freely change adjustment position to the mode of straight line or square matrix shape are arranged can be aimed at the absorption of rectangular shape or circular, or square base plate material and snatch, saves a arm clamping assembly, reduces automatic occupation space, saves equipment cost, reduces the programming degree of difficulty, reduces the equipment fault rate, fully is applicable to multiple plane shape self-adaptation and adsorbs the demand.
Drawings
Fig. 1 is a side bottom view of a conversion matrix type suction claw for transferring a substrate according to the present embodiment;
FIG. 2 is a side bottom view of all the suction members of the present embodiment arranged in a square matrix;
FIG. 3 is a top view of the adsorption module of the present embodiment in a straight line arrangement;
FIG. 4 is a plan view showing all the adsorption modules of the present embodiment arranged in a square matrix;
FIG. 5 is a cross-sectional view of the adsorption module according to the present embodiment;
The device comprises a 1-support plate, a 2-first suction nozzle, a 3-first straight line chute, a 4-second suction nozzle, a 5-third suction nozzle, a 6-second straight line chute, a 7-fourth suction nozzle, an 8-rotating motor, a 9-air extraction joint, a 10-second inclined chute, a 11-first push-pull rod, a 12-first inclined chute, a 13-support column, a 14-support plate, a 15-second push-pull rod, a 16-rotating arm, a 17-kidney-shaped hole, a 18-slide disc, a 19-main shaft, a 20-limiting plate and a 21-air suction pipe.
Detailed Description
The technical solution of the present utility model will be clearly and completely described by way of example with reference to the accompanying drawings.
Referring to fig. 1-5, the present embodiment provides a conversion matrix type suction claw for transferring a substrate, which includes a carrier plate 1, four suction components, a push-pull rod connecting left or right adjacent suction components, and an automatic conversion component disposed in the middle.
Referring to fig. 1 and 5, the carrier plate 1 is provided with a sliding groove convenient for sliding an adsorption component, which comprises a first straight sliding groove 3, a second straight sliding groove 6, a first inclined sliding groove 12 and a second inclined sliding groove 10, the adsorption component comprises a suction nozzle, a sliding rod, a sliding disc 18 and an air suction joint 9 communicated with an air suction pipe 21, the four adsorption components are respectively provided with a first suction nozzle 2, a second suction nozzle 4, a third suction nozzle 5 and a fourth suction nozzle 7, the sliding disc 18 is sleeved in the middle of the sliding rod, the center of the sliding rod is connected with the suction nozzle and the air suction joint 9 in a penetrating manner, the sliding disc 18 slides in a matching manner with the sliding groove, so that the sliding rod keeps sliding in a posture perpendicular to the carrier plate 1, the suction nozzle is driven to adjust a conversion position, the sliding rod slides in the first straight sliding groove 3 and the first inclined sliding groove 12, or the second straight sliding groove 6 and the second inclined sliding groove 10, the left two sliding rods are connected through a second sliding rod 15, the right two sliding rods are connected through a first sliding rod 11, and the two sliding rods on the outer sides are driven by the sliding rods to slide in the corresponding sliding grooves.
An automatic conversion component is also matched between the air extraction joint 9 and the sliding rod.
Referring to fig. 4, the automatic changing assembly includes a rotating motor 8 and a rotating arm 16, the rotating motor 8 is fixed on the carrier plate 1 through a supporting plate 14 and a supporting column 13, a main shaft 19 of the rotating motor 8 is connected with the rotating arm 16, the rotating arm 16 is provided with a kidney-shaped hole 17, the kidney-shaped hole 17 is matched with a sliding rod, and the sliding rod is driven to slide in the sliding groove.
Referring to fig. 5, the sliding groove is a stepped countersunk groove, and is pressed by the limiting plate 20 after being matched with the sliding plate 18, and is screwed and fixed by a screw, so as to limit displacement variation of the sliding plate 18 in the normal direction of the carrier plate 1.
Referring to fig. 3, all the adsorption components can be slidingly adjusted by the automatic conversion component to be in linear arrangement, so that the adsorption grabbing action on the strip-shaped substrate material is convenient.
Referring to fig. 4, all the adsorption components can be slidingly adjusted to be square arrangement by the automatic conversion component, so that adsorption grabbing actions can be conveniently implemented on square or round substrate materials.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the embodiments described above, and various changes, modifications, substitutions and alterations can be made therein by those having ordinary skill in the art without departing from the spirit of the present utility model, the scope of which is defined by the appended claims and their equivalents.
Claims (8)
1. A change matrix type and inhale claw for transporting base plate, its characterized in that: the automatic conversion assembly comprises a carrier plate, a plurality of adsorption assemblies, a push-pull rod connected with the adjacent adsorption assemblies and an automatic conversion assembly for driving at least one adsorption assembly to slide, wherein the automatic conversion assembly comprises a rotating motor and a rotating arm.
2. The conversion matrix suction claw for transferring a substrate according to claim 1, wherein: the adsorption component comprises a suction nozzle, a sliding rod, a sliding disc and an air suction connector communicated with the air suction pipe, wherein the sliding groove is formed in the support plate and is convenient for the adsorption component to slide, and the sliding disc slides in cooperation with the sliding groove.
3. The conversion matrix suction claw for transferring a substrate according to claim 2, wherein: the sliding plate is sleeved in the middle of the sliding rod, the center of the sliding rod is connected with the suction nozzle and the air suction connector in a penetrating mode, and an automatic conversion assembly is matched between the air suction connector and the sliding rod.
4. The conversion matrix suction claw for transferring a substrate according to claim 2, wherein: the rotary motor is fixed on the carrier plate through the support frame, a main shaft of the rotary motor is connected with the rotary arm, the rotary arm is provided with a kidney-shaped hole, and the kidney-shaped hole is matched with the slide bar to drive the slide bar to slide in the slide groove.
5. The conversion matrix suction claw for transferring a substrate according to claim 2, wherein: the sliding groove is a stepped countersunk groove, and is covered by the limiting plate after being matched with the sliding plate.
6. The conversion matrix suction claw for transferring a substrate according to claim 1, wherein: all the adsorption components are arranged in a straight line by sliding adjustment of the automatic conversion components.
7. The conversion matrix suction claw for transferring a substrate according to claim 1, wherein: all the adsorption components are arranged in a square shape by sliding adjustment of the automatic conversion components.
8. The conversion matrix suction claw for transferring a substrate according to claim 1, wherein: a push-pull rod is arranged between two adjacent groups of adsorption components.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322935730.8U CN221201133U (en) | 2023-10-31 | 2023-10-31 | A change matrix formula and inhale claw for transporting base plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322935730.8U CN221201133U (en) | 2023-10-31 | 2023-10-31 | A change matrix formula and inhale claw for transporting base plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221201133U true CN221201133U (en) | 2024-06-21 |
Family
ID=91489058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322935730.8U Active CN221201133U (en) | 2023-10-31 | 2023-10-31 | A change matrix formula and inhale claw for transporting base plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221201133U (en) |
-
2023
- 2023-10-31 CN CN202322935730.8U patent/CN221201133U/en active Active
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