CN220820362U - Observing device for deposition spreading quantity of quartz lump produced by cvd process - Google Patents

Abstract

The utility model provides an observation device for deposition spreading quantity of quartz lump materials produced by a cvd process, and relates to the technical field of observation. The observation device is installed on a lifting system of a deposition furnace, and comprises: the observation cylinder is arranged on the lifting system, the acquisition end of the observation cylinder is parallel to the axis of the supporting column of the lifting system, the output end of the observation cylinder is arranged at the bottom of the lifting table of the lifting system and is perpendicular to the acquisition end, and a heat exchange chamber is arranged in the side wall of the observation cylinder; the dustproof assembly is arranged in the acquisition end of the observation cylinder; the temperature control assembly is communicated with the heat exchange chamber; the camera is arranged at the bottom of the lifting table of the lifting system, and the acquisition end of the camera faces the output end of the observation cylinder; and the reflecting mirror is arranged at the corner of the acquisition end of the observation cylinder and the output end of the observation cylinder. According to the utility model, the multi-section observation barrel is arranged to observe and monitor lump materials, and meanwhile, as the camera is arranged at the bottom of the lifting system of the deposition furnace, the influence of heat radiation on the camera is reduced.

Description

Observing device for deposition spreading quantity of quartz lump produced by cvd process

Technical Field

The utility model relates to the technical field of observation, in particular to an observation device for the deposition spreading amount of quartz lump materials produced by a cvd process.

Background

In the process of producing quartz wool lump materials by using a cvd deposition process, mao Tuo materials slowly spread along with deposition growth; in order to accurately control the spreading amount through temperature regulation, the spreading amount of Mao Tuo materials needs to be observed in real time to be used as a node basis for temperature regulation. The environment temperature of the observation point is up to above 800 ℃, and strong light interference and dust exist, so that the common electronic detection equipment cannot directly observe. Meanwhile, the visual space of the observation point is narrow, and an observer cannot observe the observation point in a long distance through other observation tools.

Disclosure of utility model

The utility model aims to solve the technical problems, and provides an observation device for the deposition spreading amount of quartz lump materials produced by a cvd process, wherein a multi-section observation cylinder is arranged to observe and monitor the lump materials, and meanwhile, as a camera is arranged at the bottom of a lifting system of a deposition furnace, the influence of heat radiation on the camera is reduced.

The technical scheme adopted by the utility model is as follows:

An observation device for deposition spreading amount of quartz lump material produced by a cvd process, the observation device being mounted on a lifting system of a deposition furnace, the observation device comprising:

The observation cylinder is arranged on the lifting system, the acquisition end of the observation cylinder is parallel to the axis of the supporting column of the lifting system, the output end of the observation cylinder is arranged at the bottom of the lifting table of the lifting system and is perpendicular to the acquisition end, and a heat exchange chamber is arranged in the side wall of the observation cylinder;

the dustproof assembly is arranged in the acquisition end of the observation cylinder;

The temperature control assembly is communicated with the heat exchange chamber;

the camera is arranged at the bottom of the lifting table of the lifting system, and the acquisition end of the camera faces to the output end of the observation cylinder;

And the reflecting mirror is arranged at the corner of the acquisition end of the observation cylinder and the output end of the observation cylinder and is obliquely arranged at an angle of 45 degrees, and the mirror surface of the reflecting mirror faces towards the camera.

Optionally, the observation tube comprises:

the output cylinder is arranged at the bottom of the lifting table of the lifting system, the axis of the output cylinder is vertical to the axis of the supporting column of the lifting system, and the camera is arranged at one end of the output cylinder;

one end of the first transfer cylinder is vertically connected with the other end of the output cylinder, and the other end of the first transfer cylinder is arranged towards the top of the deposition furnace;

one end of the second transfer cylinder is vertically connected with the other end of the first transfer cylinder, and the other end of the second transfer cylinder is arranged towards the support column of the lifting system;

One end of the third transfer cylinder is vertically connected with the other end of the second transfer cylinder, and the other end of the third transfer cylinder is arranged towards the top of the deposition furnace;

One end of the fourth transfer cylinder is vertically connected with the other end of the third transfer cylinder, and the other end of the fourth transfer cylinder is arranged towards the support column of the lifting system;

The dust-proof assembly is arranged in the collection cylinder and is positioned at one end far away from the fourth transfer cylinder;

The output cylinder is provided with a first transmission cylinder, a second transmission cylinder, a third transmission cylinder, a fourth transmission cylinder, a collection cylinder, a reflector, and two adjacent reflectors, wherein the reflectors are arranged at the corners of the output cylinder and the first transmission cylinder, the corners of the first transmission cylinder and the second transmission cylinder, the corners of the second transmission cylinder and the third transmission cylinder, the corners of the third transmission cylinder and the fourth transmission cylinder, and the corners of the fourth transmission cylinder and the collection cylinder, and the reflectors of the two adjacent reflectors are arranged oppositely.

Optionally, the dust-proof assembly includes:

The two annular air pipes are sleeved outside the observation cylinder, a plurality of air outlet cylinders are arranged on the air pipes along the circumferential direction of the air pipes, and the air outlet ends of the air outlet cylinders extend into the observation cylinder;

The quartz lens is arranged in the acquisition end of the observation cylinder and is positioned between the two air pipes;

The two ends of the three-way air inlet pipe are respectively connected with the two air pipes, and the other end of the three-way air inlet pipe is connected with an external air supply device.

Optionally, the temperature control assembly includes:

The water inlet pipe is arranged at the bottom of the lifting table of the lifting system, one end of the water inlet pipe is communicated with the heat exchange cavity, and the other end of the water inlet pipe is connected with the medium providing device;

The water outlet pipe is arranged at the end part of the acquisition end of the observation cylinder, one end of the water outlet pipe is communicated with the heat exchange cavity, and the other end of the water outlet pipe is connected with the medium providing device.

Optionally, the medium circulated in the heat exchange chamber is water or oil.

Optionally, the observation device further comprises:

And the concentric ring standard ruler is detachably arranged at the top of the supporting column.

Optionally, the spacing between two adjacent rings of the concentric ring gauge is 10mm.

Compared with the prior art, the utility model has the beneficial effects that:

1. The camera is arranged at the bottom of the lifting system, so that heat radiation of the deposition furnace to the camera in the sintering process is reduced.

2. The heat exchange chamber is arranged on the inner side wall of the observation tube, and heat transferred to the observation tube is taken away through the heat exchange medium.

Drawings

In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of the overall structure of the observation device.

Fig. 2 is a schematic view of a partial structure of the observation device.

FIG. 3 is a schematic view of the installation structure of the observation device in the deposition furnace.

Fig. 4 is a schematic view of a partial top view of the observation device.

Reference numerals:

1. An observation tube; 11. an output cylinder; 12. a first transfer drum; 13. a second transfer drum; 14. a third transfer drum; 15. a fourth transfer drum; 16. a collection cylinder;

2. A heat exchange chamber;

3. a dust-proof assembly; 31. an air pipe; 32. an air outlet tube; 33. quartz lens; 34. an air inlet pipe;

4. A camera;

5. A reflecting mirror;

6. A water inlet pipe;

7. A water outlet pipe;

8. Concentric ring gauge;

9. A deposition furnace; 91. a lifting system; 92. a support column; 93. and a lifting platform.

Detailed Description

Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in various different ways without departing from the spirit or scope of the present utility model. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.

In the description of the present utility model, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", "axial", etc. indicate orientations or positional relationships based on those shown in the drawings, or those conventionally put in place when the product of the present utility model is used, or those conventionally understood by those skilled in the art, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element to be referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is less level than the second feature.

The following disclosure provides many different embodiments, or examples, for implementing different features of the utility model. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the utility model. Furthermore, the present utility model may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present utility model provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.

Embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.

As shown in fig. 1,2 and 3, an embodiment of the present utility model provides an observation device for deposition spreading amount of a lump of quartz produced by a cvd process, the observation device being installed on a lifting system 91 of a deposition furnace 9, the observation device comprising:

The device comprises an observation barrel 1, a dustproof assembly 3, a temperature control assembly, a camera 4 and a reflecting mirror 5; the observation tube 1 is installed on the lifting system 91, the acquisition end of the observation tube 1 is parallel to the axis of the support column 92 of the lifting system 91, the output end of the observation tube 1 is arranged at the bottom of the lifting table 93 of the lifting system 91 and is perpendicular to the acquisition end, and a heat exchange chamber 2 is arranged in the side wall of the observation tube 1. The dustproof assembly 3 is arranged in the acquisition end of the observation tube 1. And the temperature control assembly is communicated with the heat exchange chamber 2. The camera 4 is installed in the elevating platform 93 bottom of elevating system 91, the collection end of camera 4 is towards the output of observing section of thick bamboo 1. The reflector 5 is installed the collection end of observing the section of thick bamboo 1 and the corner of the output of observing the section of thick bamboo 1, and be 45 degrees angle slope settings, the mirror surface of reflector 5 orientation camera 4 sets up.

When the quartz lump deposition furnace is used, the situation of the spreading quantity of the quartz lump material in the deposition furnace 9 is collected through the observation cylinder 1. In order to reduce the influence of heat radiation on the observation device, a heat exchange chamber 2 is provided in the side wall of an observation tube 1 of the observation device, and the heat radiation is reduced by circulating a cooling medium by pouring the cooling medium into the heat exchange chamber 2. Meanwhile, the camera 4 is arranged at the bottom of the lifting table 93 of the lifting system 91, so that the camera 4 is located at one end far away from a high-temperature environment, and the normal work of the camera 4 is prevented from being influenced by high temperature. The reflector 5 with the angle of 45 degrees is arranged to facilitate the reflector 5 to feed back the spreading condition of lump materials to the camera 4 in real time, and the condition of lump materials is observed through a display device connected with the camera 4.

The dust-proof component 3 is arranged in the observation barrel 1 to prevent dust in the furnace from shielding the observation port, so that light cannot clearly pass through the camera 4.

In another embodiment, as shown in fig. 1, the observation tube 1 includes: an output cylinder 11, a first transfer cylinder 12, a second transfer cylinder 13, a third transfer cylinder 14, a fourth transfer cylinder 15, and a collection cylinder 16; the output cylinder 11 is arranged at the bottom of the lifting platform 93 of the lifting system 91, the axis of the output cylinder is perpendicular to the axis of the supporting column 92 of the lifting system 91, and the camera 4 is arranged at one end of the output cylinder 11. One end of the first transfer cylinder 12 is vertically connected with the other end of the output cylinder 11, and the other end thereof is disposed toward the top of the deposition furnace 9. One end of the second transfer cylinder 13 is vertically connected with the other end of the first transfer cylinder 12, and the other end of the second transfer cylinder 13 is disposed toward the support column 92 of the lifting system 91. One end of the third transfer cylinder 14 is vertically connected with the other end of the second transfer cylinder 13, and the other end of the third transfer cylinder 14 is arranged towards the top of the deposition furnace 9. One end of the fourth transfer cylinder 15 is vertically connected to the other end of the third transfer cylinder 14, and the other end of the fourth transfer cylinder 15 is disposed toward the support column 92 of the lifting system 91. One end of the collection cylinder 16 is vertically connected with the other end of the fourth transfer cylinder 15, the other end of the collection cylinder 16 faces the top of the deposition furnace 9, and the dust-proof assembly 3 is arranged in the collection cylinder 16 and is located at one end far away from the fourth transfer cylinder 15.

The mirrors 5 are disposed at the corners of the output cylinder 11 and the first transfer cylinder 12, the corners of the first transfer cylinder 12 and the second transfer cylinder 13, the corners of the second transfer cylinder 13 and the third transfer cylinder 14, the corners of the third transfer cylinder 14 and the fourth transfer cylinder 15, and the corners of the fourth transfer cylinder 15 and the collection cylinder 16, and the mirror surfaces of two adjacent mirrors 5 are disposed opposite to each other.

Through setting up observation section of thick bamboo 1 into the multistage structure, and set up perpendicularly between the two adjacent sections of structures, further avoided the steam to transmit for camera 4 through observation section of thick bamboo 1, improve the life of camera 4. In order to avoid the effect of the angle of the corner of the observation tube 1 affecting the acquisition, the corner between two adjacent structures is provided with a reflecting mirror 5, and image information is transmitted to the camera 4 through the reflecting mirrors 5 which are oppositely arranged on the two mirror surfaces.

In another embodiment, as shown in fig. 1, 2 and 4, the dust-proof assembly 3 includes: two annular air pipes 31, a plurality of air outlet cylinders 32, quartz lenses 33 and a three-way air inlet pipe 34; two air pipes 31 are sleeved outside the observation cylinder 1, a plurality of air outlet cylinders 32 are arranged on the air pipes 31 along the circumferential direction of the air pipes, and the air outlet ends of the air outlet cylinders 32 extend into the observation cylinder 1. A quartz lens 33 is mounted in the collecting end of the observation tube 1 and is located between the two air tubes 31. The air intake pipe 34 has both ends connected to the two air pipes 31, respectively, and the other end connected to an external air supply device.

The quartz lens 33 is arranged at one end of the collecting cylinder 16, which is close to the quartz lump material, and is used as a grid baffle, so that hot air in the deposition furnace 9 is prevented from being guided to the camera 4 through the observation cylinder 1, and the influence on the internal elements of the camera 4 is avoided. Meanwhile, in order to prevent dust in the deposition furnace 9 from falling to the upper surface of the quartz lens 33 and adhering to the bottom of the quartz lens 33, light cannot clearly pass through the camera 4, and the definition of images acquired by the camera 4 is affected.

In order to improve the definition of the image, an air outlet tube 32 is arranged on the air tube 31, and the other end of the air outlet tube 32 extends into the observation tube 1 and is positioned at two sides of the quartz lens 33. The air inlet pipe 34 supplies air to the air pipe 31, and the air is blown out through the air outlet cylinder 32 arranged on the air pipe 31, so that dust is prevented from adhering to the two side walls of the quartz lens 33. Quartz lens 33 is chosen because of its high temperature resistance.

In another embodiment, as shown in fig. 1 and 2, the temperature control assembly includes: a water inlet pipe 6 and a water outlet pipe 7; the water inlet pipe 6 is arranged at the bottom of the lifting platform 93 of the lifting system 91, one end of the water inlet pipe is communicated with the heat exchange chamber 2, and the other end of the water inlet pipe is connected with a medium supply device. The water outlet pipe 7 is arranged at the end part of the acquisition end of the observation tube 1, one end of the water outlet pipe is communicated with the heat exchange chamber 2, and the other end of the water outlet pipe is connected with the medium providing device.

When in use, the medium supply device supplies heat exchange medium to the water inlet pipe 6, the heat exchange medium flows in the heat exchange cavity, and then flows back to the medium supply device for recycling through the water outlet pipe 7. The temperature of the observation tube 1 is lowered by the flow of the cooling medium.

In another embodiment, the medium circulated in the heat exchange chamber 2 is water or oil.

In another embodiment, as shown in fig. 3, the observation device further includes: concentric ring gauges 8 are removably mounted on top of the support columns 92. The spacing between adjacent rings of the concentric ring gauge 8 is 10mm.

A concentric ring standard ruler 8 is placed at the upper end of the support column 92, and the distance between the concentric rings is 10mm; the image of the standard ruler is transmitted to the camera 4 through the observation barrel 1, the camera 4 is connected with the central control computer, the image signal is transmitted into the computer, and then the corresponding proportional scale program is programmed in the computer through the image of the concentric ring standard ruler 8.

The concentric ring gauge 8 is required to be taken out when the wool lump deposition is carried out, and then the wool lump spreading is carried out. The spread state image is transmitted to the camera 4 through the observation barrel 1, the camera 4 is connected with the central control computer, the image is input into the computer, and finally, the spread amount of Mao Tuo materials is observed in real time and monitored and measured by using a proportional scale program corresponding to the concentric ring standard scale 8 compiled by the computer.

Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (7)

1. An observation device for deposition spreading quantity of quartz lump material produced by a cvd process, the observation device being mounted on a lifting system of a deposition furnace, the observation device being characterized by comprising:

The observation cylinder is arranged on the lifting system, the acquisition end of the observation cylinder is parallel to the axis of the supporting column of the lifting system, the output end of the observation cylinder is arranged at the bottom of the lifting table of the lifting system and is perpendicular to the acquisition end, and a heat exchange chamber is arranged in the side wall of the observation cylinder;

the dustproof assembly is arranged in the acquisition end of the observation cylinder;

The temperature control assembly is communicated with the heat exchange chamber;

the camera is arranged at the bottom of the lifting table of the lifting system, and the acquisition end of the camera faces to the output end of the observation cylinder;

And the reflecting mirror is arranged at the corner of the acquisition end of the observation cylinder and the output end of the observation cylinder and is obliquely arranged at an angle of 45 degrees, and the mirror surface of the reflecting mirror faces towards the camera.

2. The observation device for the deposition spreading amount of a quartz lump material produced by a cvd process according to claim 1, wherein the observation tube comprises:

the output cylinder is arranged at the bottom of the lifting table of the lifting system, the axis of the output cylinder is vertical to the axis of the supporting column of the lifting system, and the camera is arranged at one end of the output cylinder;

one end of the first transfer cylinder is vertically connected with the other end of the output cylinder, and the other end of the first transfer cylinder is arranged towards the top of the deposition furnace;

one end of the second transfer cylinder is vertically connected with the other end of the first transfer cylinder, and the other end of the second transfer cylinder is arranged towards the support column of the lifting system;

One end of the third transfer cylinder is vertically connected with the other end of the second transfer cylinder, and the other end of the third transfer cylinder is arranged towards the top of the deposition furnace;

One end of the fourth transfer cylinder is vertically connected with the other end of the third transfer cylinder, and the other end of the fourth transfer cylinder is arranged towards the support column of the lifting system;

The dust-proof assembly is arranged in the collection cylinder and is positioned at one end far away from the fourth transfer cylinder;

The output cylinder is provided with a first transmission cylinder, a second transmission cylinder, a third transmission cylinder, a fourth transmission cylinder, a collection cylinder, a reflector, and two adjacent reflectors, wherein the reflectors are arranged at the corners of the output cylinder and the first transmission cylinder, the corners of the first transmission cylinder and the second transmission cylinder, the corners of the second transmission cylinder and the third transmission cylinder, the corners of the third transmission cylinder and the fourth transmission cylinder, and the corners of the fourth transmission cylinder and the collection cylinder, and the reflectors of the two adjacent reflectors are arranged oppositely.

3. The observation device for the deposition spreading amount of a lump of quartz produced by a cvd process according to claim 1 or 2, wherein the dust-proof assembly comprises:

The two annular air pipes are sleeved outside the observation cylinder, a plurality of air outlet cylinders are arranged on the air pipes along the circumferential direction of the air pipes, and the air outlet ends of the air outlet cylinders extend into the observation cylinder;

The quartz lens is arranged in the acquisition end of the observation cylinder and is positioned between the two air pipes;

The two ends of the three-way air inlet pipe are respectively connected with the two air pipes, and the other end of the three-way air inlet pipe is connected with an external air supply device.

4. The observation device for the deposition spreading amount of a lump of quartz produced by a cvd process according to claim 1 or 2, wherein the temperature control assembly comprises:

The water inlet pipe is arranged at the bottom of the lifting table of the lifting system, one end of the water inlet pipe is communicated with the heat exchange cavity, and the other end of the water inlet pipe is connected with the medium providing device;

The water outlet pipe is arranged at the end part of the acquisition end of the observation cylinder, one end of the water outlet pipe is communicated with the heat exchange cavity, and the other end of the water outlet pipe is connected with the medium providing device.

5. The observation device for the deposition spreading amount of a lump of quartz produced by a cvd process according to claim 1 or 2 wherein the medium circulated in the heat exchange chamber is water or oil.

6. The observation device for the deposition spread amount of a quartz lump material produced by a cvd process according to claim 1, wherein the observation device further comprises:

And the concentric ring standard ruler is detachably arranged at the top of the supporting column.

7. The observation device for the deposition spread of a lump of quartz produced in a cvd process according to claim 6 where the spacing between two adjacent rings of concentric ring gauge is 10mm.