CN220690992U - Probe station and high accuracy heavy load probe elevating system thereof - Google Patents

Abstract

The utility model relates to the technical field of wafer detection probes, in particular to a probe station and a high-precision heavy-load probe lifting mechanism thereof, wherein the high-precision heavy-load probe lifting mechanism comprises a base, a movable block and a guide mechanism, the movable block is arranged on the base in a lifting manner, and the movable block is used for mounting a probe; the guide mechanism is used for guiding the lifting of the movable block; the guide mechanism comprises a needle guide post so as to guide the lifting of the movable block through the needle guide post. According to the technical scheme, the needle roller guide post is adopted as the lifting guide of the movable block, so that compared with the point contact of the ball guide post in the prior art, the needle roller guide post is in line contact, the needle roller guide post can better exert the rigidity advantage of the guide post, and the deformation of the needle roller guide post is ensured to be small under heavy load, so that the guide precision is higher; the vertical lifting high-precision motion control in the field of probe stations under the environments of high rigidity, heavy load and high response can be realized.

Description

Probe station and high accuracy heavy load probe elevating system thereof

Technical Field

The utility model relates to the technical field of wafer detection probes, in particular to a probe table and a high-precision heavy-load probe lifting mechanism thereof.

Background

The high-precision and high-rigidity vertical lifting mechanism is used as an important moving part of the probe station, and influences the stability of wafer detection and the capability of detecting the size of a chip.

In the traditional vertical lifting structure design, due to the requirements of high load and high rigidity, the requirements on the precision and the clearance of the guide mechanism and the flatness, the parallelism and the verticality of the processed parts are extremely high, and the final installation precision of each guide part can greatly influence the positioning precision and the service life of the mechanism. The linear guide rail conventionally used is of a ball structure, the contact surface is of a point contact structure, and the problem of gaps is inevitably caused when heavy load, particularly unbalanced load, is born, and finally, the walking precision is poor, so that the problem is solved continuously.

Disclosure of Invention

In view of the above, the present utility model provides a probe station and a high-precision heavy-load probe lifting mechanism thereof, which mainly solve the technical problems that: how to improve the guiding precision of the lifting mechanism under heavy load.

In order to achieve the above purpose, the present utility model mainly provides the following technical solutions:

in a first aspect, an embodiment of the present utility model provides a high-precision heavy-load probe lifting mechanism, which includes a base, a movable block and a guiding mechanism, wherein the movable block is liftably disposed on the base, and the movable block is used for mounting a probe;

the guide mechanism is used for guiding the lifting of the movable block;

the guide mechanism comprises a needle roller guide post, so that the movable block is guided in a lifting manner through the needle roller guide post.

In some embodiments, the needle guide post is provided with a guide sleeve, the movable block is provided with a through mounting hole, and the guide sleeve penetrates through the mounting hole and is fixed with the hole wall of the mounting hole through glue adhesion.

In some embodiments, both ends of the guide sleeve extend out of the mounting hole.

In some embodiments, the bottom of the needle guide post is fixed with the base by a screw; the base is provided with a supporting surface, and the base provides support for the guide post through the supporting surface.

In some embodiments, the base is provided with a avoidance groove for avoiding the guide sleeve of the needle roller guide post, and the bottom surface of the avoidance groove is used as the supporting surface.

In some embodiments, the high-precision heavy-load probe lifting mechanism further comprises a driving motor and a grating ruler, wherein the driving motor is used for providing power for lifting the movable block; the grating ruler is used for generating a stall signal when the probe on the movable block moves to a set position;

the driving motor is used for stopping running according to the stalling signal.

In some embodiments, the high-precision heavy-load probe lifting mechanism further comprises a correlation type photoelectric sensor, wherein the correlation type photoelectric sensor is arranged on the base, and a limiting piece is arranged on the movable block; the limiting piece is used for moving to the induction light path of the correlation type photoelectric sensor under the drive of the movable block when the movable block moves to the limit position, so that the correlation type photoelectric sensor controls the driving motor to stop running.

In some embodiments, the number of the correlation type photoelectric sensors is three, namely an upper correlation type photoelectric sensor, a middle correlation type photoelectric sensor and a lower correlation type photoelectric sensor, when the movable block is positioned at the initial position, the limiting piece is positioned on the sensing light path of the middle correlation type photoelectric sensor; when the movable block moves to the upper limit position, the limiting piece is positioned on the induction optical path of the upper correlation photoelectric sensor; when the movable block moves to the lower limit position, the limiting piece is positioned on the sensing light path of the lower correlation photoelectric sensor.

In some embodiments, the drive motor drives the movable block to lift and lower through a ball screw mechanism.

In a second aspect, embodiments of the present utility model also provide a probe station that may include any of the high precision, heavy duty probe lifting mechanisms described above.

By means of the technical scheme, the probe station and the high-precision heavy-load probe lifting mechanism thereof have the following beneficial effects:

1. by adopting the needle roller guide post as the lifting guide of the movable block, compared with the point contact of the ball guide post in the prior art, the needle roller guide post is in line contact, the needle roller guide post can better exert the rigidity advantage of the guide post, ensure that the deformation of the needle roller guide post is small under heavy load, and further have higher guide precision;

2. the 4 guide posts are independently arranged on the supporting surface of the base, and the high linearity characteristic of the guide posts is matched, so that the enough parallelism can be kept after the whole installation, and the uniform stress in all directions is ensured;

3. the high-precision motion control of vertical lifting in the field of probe stations under the environments of high rigidity, heavy load and high response is realized.

The foregoing description is only an overview of the present utility model, and is intended to provide a better understanding of the present utility model, as it is embodied in the following description, with reference to the preferred embodiments of the present utility model and the accompanying drawings.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a probe station according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a structure reflecting a grating scale on a probe station;

fig. 3 is a schematic view showing the configuration of the opposite-type photoelectric sensor on the probe station and the cooperation of the stopper.

Reference numerals: 1. a base; 2. a movable block; 3. needle roller guide posts; 4. a fixing plate; 5. a grating ruler; 7. a limiting piece; 8. a support frame; 9. a driving motor; 10. a ball screw mechanism; 21. a mounting hole; 31. a guide post; 32. guide sleeve; 51. a scale grating; 52. a grating reading head; 61. an upper correlation photoelectric sensor; 62. a middle correlation photoelectric sensor; 63. a downward correlation type photoelectric sensor; 11. a clearance groove; 111. a support surface.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that, if directional indications (such as up, down, left, right, front, and rear … …) are included in the embodiments of the present utility model, the directional indications are merely used to explain the relative positional relationship, movement conditions, etc. between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are correspondingly changed.

In addition, if there is a description of "first", "second", etc. in the embodiments of the present utility model, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.

As shown in fig. 1, one embodiment of the present utility model provides a high-precision heavy-load probe lifting mechanism, which includes a base 1, a movable block 2 and a guide mechanism. The movable block 2 is arranged on the base 1 in a lifting manner, the movable block 2 is used for mounting the probe, and the movable block 2 can drive the probe to lift together. The assembly structure between the probe and the movable block 2 is the prior art, and will not be described herein.

The guide mechanism is used for guiding the movable block 2 to lift and move so that the movable block 2 moves along a set track. The guide mechanism comprises a needle guide post 3, so that the movable block 2 is guided in a lifting manner through the needle guide post 3.

In the above example, by adopting the needle guide post 3 as the lifting guide of the movable block 2, the needle guide post 3 is in line contact with respect to the point contact of the ball guide post in the prior art, and the needle guide post 3 can better exert the rigidity advantage of the guide post 31, so as to ensure that the deformation of the needle guide post 3 is small under heavy load, thereby having higher guide precision.

Preferably, the number of the needle guide posts 3 may be more than two, and the needle guide posts are uniformly spaced along the circumferential direction of the movable block 2. In a specific application example, the number of the needle guide posts 3 may be four.

In the above example, by arranging more than two needle guide posts 3, the lifting mechanism is restrained and positioned in multiple directions by using the needle guide posts 3, and the perpendicularity of each guide post 31 and the bottom surface can be effectively ensured due to the high straightness of the guide posts 31 of the needle guide posts 3, so that the stress uniformity of each guide area can be ensured, and finally, reliable support is provided for positioning accuracy.

What needs to be explained here is: the needle guide post 3 may be a commercially available member, and the needle guide post 3 includes a guide post 31 and a guide sleeve 32 sleeved on the guide post 31, and a needle is disposed between the guide post 31 and the guide sleeve 32.

As shown in fig. 1, the needle guide post 3 has a guide sleeve 32, the movable block 2 is provided with a through mounting hole 21, and the guide sleeve 32 passes through the mounting hole 21 and is adhered and fixed to the wall of the mounting hole 21 by glue.

In the prior art, the guide sleeve 32 is generally fixed on the movable block 2 by adopting a screw, and screw holes are required to be processed on the guide sleeve 32 and the movable block 2. In the utility model, the guide sleeve 32 is directly stuck in the mounting hole 21 by adopting glue, so that the processing of screw holes is omitted, and the processing cost is lower.

As shown in fig. 1, both ends of the guide sleeve 32 extend out of the mounting hole 21, so that the guide sleeve 32 and the entire hole wall of the mounting hole 21 can be glued and fixed, and the fixing effect of the guide sleeve 32 and the mounting hole 21 can be improved.

The bottom of the guide post 31 of the needle guide post 3 is fixed with the base 1 by a screw. As shown in fig. 1, the base 1 has a supporting surface 111 thereon, and the base 1 provides support to the guide post 31 through the supporting surface 111.

In the above example, the support surface 111 is a finishing plane, and the guide post 31 may be mounted with the support surface 111 as a reference. The support surface 111 can ensure the verticality of the installation of the guide post 31, when the verticality of the guide post 31 deviates, a gasket can be added at the bottom of the guide post 31 until the verticality of the guide post 31 meets the requirement, and then the installation of the guide post 31 can be completed by screwing down a screw.

As shown in fig. 1, the base 1 may be provided with a clearance groove 11 for taking away the guide bush 32 of the needle guide post 3, and a bottom surface of the clearance groove 11 may be the support surface 111. In this example, the guide sleeve 32 can be prevented from being bumped into the base 1 by the provision of the avoidance groove 11.

As shown in fig. 1 and 2, the high-precision heavy-load probe lifting mechanism of the present utility model may further include a driving motor 9 and a grating ruler 5. The driving motor 9 is used for providing power for lifting and lowering the movable block 2. The grating scale 5 is used to generate a stall signal when the probe on the movable block 2 moves to a set position. The drive motor 9 is used to stop operation based on the stall signal.

In the above example, by the grating ruler 5 being provided, closed-loop control of the movement of the movable block 2 can be realized, so that the movement accuracy of the movable block 2 can be improved.

As shown in fig. 2, the aforementioned grating scale 5 includes a scale grating 51 and a grating reading head 52. The base 1 is provided with a support frame 8, and the support frame 8 can be fixed on the base 1 through screws. One of the grating reading head 52 and the scale grating 51 is provided on the support frame 8, and the other is provided on the movable block 2.

As shown in fig. 3, the high-precision heavy-load probe lifting mechanism may further include an opposite-type photoelectric sensor, where the opposite-type photoelectric sensor is disposed on the support frame 8, for example, is fixed on the support frame 8 by a screw, and the opposite-type photoelectric sensor is connected with the base 1 through the support frame 8. The movable block 2 is provided with a limiting piece 7, the limiting piece 7 can be in a sheet shape, and the limiting piece 7 can be fixed on the movable block 2 through screws. The limiting piece 7 is used for moving to an induction optical path of the correlation type photoelectric sensor under the drive of the movable block 2 when the movable block 2 moves to the limit position, so that the correlation type photoelectric sensor controls the driving motor 9 to stop running.

In the above example, the correlation photoelectric sensor cooperates with the limiting member 7 to limit the movement range of the movable block 2, so that the movable block 2 can only move within a set range, and the movable block 2 is prevented from being collided with other surrounding components due to the oversized movement range.

In a specific application example, as shown in fig. 3, the number of the aforementioned correlation type photosensors may be three, that is, the upper correlation type photosensor 61, the middle correlation type photosensor 62, and the lower correlation type photosensor 63, respectively. When the movable block 2 is located at the initial position, the stopper 7 is located on the sensing optical path of the intermediate correlation type photoelectric sensor 62. When the movable block 2 moves to the upper limit position, the limiting piece 7 is positioned on the induction optical path of the upper correlation photoelectric sensor 61, so that the driving motor 9 stops driving the movable block 2 to continue to move upwards. When the movable block 2 moves to the lower limit position, the limiting piece 7 is positioned on the induction optical path of the lower opposite-emission photoelectric sensor 63, so that the driving motor 9 stops driving the movable block 2 to continue to move downwards.

In the above example, three correlation photoelectric sensors are engaged with the stopper 7, so that the movable block 2 can be stopped at the initial position, the upper limit position, or the lower limit position.

In a specific application example, as shown in fig. 2, the aforementioned driving motor 9 may drive the movable block 2 to move up and down through the ball screw mechanism 10. The specific structure of the needle roller screw mechanism is the prior art and is not described in detail herein.

What needs to be explained here is: as shown in fig. 1, the base 1 and the movable block 2 may each have a plate shape. The upper end of a guide post 31 of the needle roller guide post 3 is provided with a fixing plate 4. When the number of the needle roller guide posts 3 is more than two, the upper ends of the guide posts 31 of each needle roller guide post 3 are all arranged on the same fixing plate 4.

One embodiment of the present utility model contemplates a probe station that may include any of the high precision, heavy load probe lifting mechanisms described above. In this example, because the probe station adopts the high-precision heavy-load probe lifting mechanism, the lifting mechanism adopts the needle guide post 3 as lifting guide of the movable block 2, compared with the point contact of the ball guide post in the prior art, the needle guide post 3 is in line contact, the needle guide post 3 can better exert the rigidity advantage of the guide post 31, and the deformation of the needle guide post 3 is ensured to be small under heavy load, so that the guiding precision is higher.

For ease of understanding, the overall structure of the utility model is described below and its working principle is explained.

The utility model aims at designing a high-precision heavy-load probe lifting mechanism which is applied to a probe platform. The lifting mechanism is installed by using 4 needle guide posts 3, the lifting mechanism is restrained and positioned in multiple directions by using the needle guide posts 3, and meanwhile, the original ball point contact mode is upgraded to a needle line contact mode, so that the rigidity of guiding is greatly improved. In addition, 4 needle guide posts 3 are independently arranged on the base 1, and due to the high straightness of the guide posts 31 of the needle guide posts 3, the perpendicularity of each guide post 31 and the supporting surface 111 of the base 1 can be effectively ensured, so that the stress uniformity of each guide area can be ensured, and finally, reliable support is provided for positioning accuracy.

The high-precision and high-rigidity vertical lifting mechanism is used as an important moving part of the probe station, and influences the stability of wafer detection and the capability of detecting the size of a chip. In wafer inspection, the accuracy of vertical lift determines the contact stability during inspection, and the rigidity of the structure determines the ability to inspect the wafer.

According to the technical scheme, the roller pin guide post 3 is used as a guide in the vertical direction, the line contact is replaced by the previous point contact mode, and the rigidity advantage of the guide post 31 can be better exerted. In the use and installation of the needle guide posts 3, the perpendicularity between each guide post 31 and the supporting surface 111 of the base 1 is taken as a main index, 4 guide posts 31 are independently installed on the supporting surface 111 of the base 1 through precise assembly, and the high straightness characteristics of the guide posts 31 are matched, so that the sufficient parallelism can be kept after the whole installation, and the uniform stress in all directions is ensured.

By adopting the technical scheme, the utility model can solve the following technical problems: 1. the problem of the guiding parallelism under high rigidity and heavy load is effectively solved; 2. the problem of balanced stress under high rigidity and high load is effectively solved; 3. the excessive dependence on high parallelism and vertical isopositional precision of the machined part is reduced, and the machining difficulty of the part is effectively reduced.

By adopting the technical scheme, the utility model can achieve the following beneficial effects: the high-precision motion control of vertical lifting in the field of probe stations under the environments of high rigidity, heavy load and high response is realized.

The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structural changes made by the description of the present utility model and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the utility model.

Claims (10)

1. The high-precision heavy-load probe lifting mechanism is characterized by comprising a base (1), a movable block (2) and a guide mechanism, wherein the movable block (2) is arranged on the base (1) in a lifting manner, and the movable block (2) is used for mounting a probe;

the guide mechanism is used for guiding the lifting of the movable block (2);

the guide mechanism comprises a needle guide post (3) so as to guide the lifting of the movable block (2) through the needle guide post (3).

2. The high precision heavy load probe lift mechanism of claim 1,

the needle roller guide post (3) is provided with a guide sleeve (32), the movable block (2) is provided with a penetrating installation hole (21), and the guide sleeve (32) penetrates through the installation hole (21) and is fixedly bonded with the hole wall of the installation hole (21) through glue.

3. The high precision heavy load probe lift mechanism of claim 2,

both ends of the guide sleeve (32) extend out of the mounting hole (21).

4. A high precision heavy load probe lift mechanism as described in any one of claims 1 to 3,

the bottom of the guide post (31) of the needle roller guide post (3) is fixed with the base (1) through a screw; the base (1) is provided with a supporting surface (111), and the base (1) provides support for the guide post (31) through the supporting surface (111).

5. The high precision heavy load probe lift mechanism of claim 4,

the base (1) is provided with a avoidance groove (11) for avoiding the guide sleeve (32) of the needle guide post (3), and the bottom surface of the avoidance groove (11) is used as the supporting surface (111).

6. The high-precision heavy-load probe lifting mechanism according to any one of claims 1 to 3 and 5, further comprising a driving motor (9) and a grating scale (5), wherein the driving motor (9) is used for providing power for lifting and lowering the movable block (2); the grating ruler (5) is used for generating a stall signal when the probe on the movable block (2) moves to a set position;

the driving motor (9) is used for stopping running according to the stopping signal.

7. The high-precision heavy-load probe lifting mechanism according to any one of claim 1 to 3 and 5,

the high-precision heavy-load probe lifting mechanism further comprises a correlation type photoelectric sensor, wherein the correlation type photoelectric sensor is arranged on the base (1), and a limiting piece (7) is arranged on the movable block (2); the limiting piece (7) is used for moving to an induction light path of the correlation type photoelectric sensor under the drive of the movable block (2) when the movable block (2) moves to the limit position, so that the correlation type photoelectric sensor controls the driving motor (9) to stop running.

8. The high precision heavy load probe lift mechanism of claim 7,

the number of the opposite-type photoelectric sensors is three, namely an upper opposite-type photoelectric sensor (61), a middle opposite-type photoelectric sensor (62) and a lower opposite-type photoelectric sensor (63), and when the movable block (2) is positioned at the initial position, the limiting piece (7) is positioned on the induction optical path of the middle opposite-type photoelectric sensor (62); when the movable block (2) moves to the upper limit position, the limiting piece (7) is positioned on the induction light path of the upper correlation photoelectric sensor (61); when the movable block (2) moves to the lower limit position, the limiting piece (7) is positioned on the induction light path of the lower correlation photoelectric sensor (63).

9. The high-precision heavy-load probe lifting mechanism according to claim 6, wherein the driving motor (9) drives the movable block (2) to lift through a ball screw mechanism (10).

10. A probe station comprising the high precision heavy load probe lifting mechanism of any one of claims 1 to 9.