CN220627768U - Wafer loading attachment with detect function - Google Patents
Wafer loading attachment with detect function Download PDFInfo
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- CN220627768U CN220627768U CN202322340765.7U CN202322340765U CN220627768U CN 220627768 U CN220627768 U CN 220627768U CN 202322340765 U CN202322340765 U CN 202322340765U CN 220627768 U CN220627768 U CN 220627768U
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- wafer
- assembly
- wafer loading
- carrier plate
- loading device
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- 238000001514 detection method Methods 0.000 claims abstract description 27
- 235000012431 wafers Nutrition 0.000 claims description 146
- 238000007689 inspection Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 abstract description 4
- 230000005484 gravity Effects 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a wafer loading device with a detection function, which comprises a rack, a wafer loading assembly and a detection assembly, wherein the wafer loading assembly and the detection assembly are assembled on the rack, the wafer loading assembly comprises a carrier plate, a wafer box borne by the carrier plate, and a rotary driving assembly connected with the carrier plate, the wafer box is configured to be arranged at an opening on the side face and is vertically stacked at a groove position on the inner side wall, and the detection assembly comprises a plurality of sensors and information readers arranged around the wafer box, and a lifting driving assembly connected with at least one sensor. The wafer loading device is provided with a wafer loading assembly which is convenient to detect, and a plurality of sensors and information readers are arranged around the wafer box and used for reading the identity information of the wafer box and the wafer and detecting the gravity, the quantity, the position and other information of the wafer, so that the monitoring requirement of customers on the wafer box and the wafer in the processing process is met.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing, in particular to a wafer loading device with a detection function.
Background
Before the wafer is put into the cleaning equipment for cleaning, the wafer is firstly placed into a wafer box with a plurality of slots, and each slot is used for placing one wafer, so that a plurality of wafers are placed into the same wafer box, and batch carrying and feeding are realized.
The existing wafer loading device is generally only provided with a pressure sensor to carry out weighing detection on the wafer box supporting plate, and whether the wafer box is full is judged. Along with the continuous improvement of information management requirements of customers on wafers in the processing process, the wafer box and all wafers in the wafer box are required to be identified and detected one by one when the wafers are fed, corresponding information management is carried out, the detection function of the conventional wafer feeding device is not perfect, and the requirements of the customers cannot be met.
In view of the foregoing, there is a need for an improved wafer loading apparatus in the prior art to solve the above-mentioned problems.
Disclosure of Invention
The utility model aims to disclose a wafer feeding device with a detection function, and solves the problem that the existing wafer feeding device is imperfect in detection function on a wafer box and a wafer.
In order to achieve the above purpose, the utility model provides a wafer loading device with a detection function, which comprises a rack, a wafer loading assembly and a detection assembly, wherein the wafer loading assembly is assembled on the rack, the wafer loading assembly comprises a carrier plate, a wafer box borne by the carrier plate, and a rotary driving assembly connected with the carrier plate, the wafer box is configured to be arranged at an opening on the side surface and is vertically stacked at a groove position on the inner side wall, and the detection assembly comprises a plurality of sensors and information readers arranged around the wafer box, and a lifting driving assembly connected with at least one sensor.
As a further improvement of the utility model, the carrier plate is provided with a plurality of limiting structures, a plurality of limiting structures are surrounded to form a limiting area corresponding to the bottom of the wafer box, and the wafer box is arranged in the limiting area.
As a further improvement of the utility model, a plurality of limiting structures are surrounded to form a rectangular limiting area, and a pair of pressure sensor groups are arranged on opposite angles of the limiting area.
As a further improvement of the utility model, the wafer box comprises openings which are oppositely arranged at the front side and the rear side, and a limit bar and a limit sensor which is connected with the limit bar are vertically arranged at the position of the carrier plate corresponding to the opening at one side of the wafer box.
As a further improvement of the utility model, the frame comprises an upper support plate and a lower support plate, the wafer loading assembly is assembled on the upper support plate, the lifting driving assembly is assembled on the lower support plate, the lifting end of the lifting driving assembly extends upwards and penetrates through the upper support plate, and the counting sensor is arranged on the lifting end of the lifting driving assembly.
As a further improvement of the present utility model, the frame further includes a mounting table mounted on the upper support plate, the carrier plate is mounted above the mounting table, the rotation driving assembly is mounted below the mounting table, and the rotation driving assembly is connected with the carrier plate through the upper support plate and the mounting table.
As a further improvement of the utility model, the lifting driving assembly comprises a screw motor, the counting sensor is arranged at the upper end of the screw, and the counting sensor scans wafers stacked in the wafer box by lifting up and down.
As a further improvement of the utility model, the detection assembly comprises a first information reader for reading identity information of the wafer cassette, the rack comprises a supporting riser, and the first information reader is arranged on the upper side of the supporting riser and faces the upper surface of the wafer cassette.
As a further improvement of the utility model, the inspection assembly further comprises a second information reader for reading the identity information of the wafer, the second information reader being arranged above the side of the opening of the wafer cassette.
As a further improvement of the utility model, the detection assembly further comprises a third information reader for reading the identity information of the wafer, and the third information reader is arranged on the carrier plate.
Compared with the prior art, the utility model has the beneficial effects that:
in the wafer loading device provided by the information, the opening of the wafer box is arranged on the side surface, the groove positions are vertically stacked on the inner side wall, and the rotary driving assembly drives the wafer box to rotate so as to adjust the position of the opening, so that the wafer can be conveniently conveyed through the opening without being influenced by the position of the sensor or the information reader; a plurality of sensors are arranged around the wafer box and used for detecting the information of the gravity, the number, the position and the like of the wafers, wherein the number of the wafers is counted by adopting a mode of connecting at least one sensor with a lifting driving assembly through lifting sensing; information readers are arranged around the wafer box and used for reading the identity information of the wafer box and the wafers in the wafer box before feeding, so that the monitoring requirement of customers on the wafer box and the wafers in the processing process is met.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a wafer loading apparatus according to the present utility model;
FIG. 2 is a schematic view of a portion of the wafer loading apparatus of FIG. 1;
FIG. 3 is a schematic view of a wafer loading assembly;
FIG. 4 is a schematic view of a wafer loading assembly from another perspective;
FIG. 5 is a schematic view of the bottom of the carrier plate;
FIG. 6 is a schematic diagram of a sensor configuration for a lift drive assembly;
Detailed Description
The present utility model will be described in detail below with reference to the embodiments shown in the drawings, but it should be understood that the embodiments are not limited to the present utility model, and functional, method, or structural equivalents and alternatives according to the embodiments are within the scope of protection of the present utility model by those skilled in the art.
It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present technology and simplify description, and do not indicate or imply that the devices or elements being referred to must have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present technology.
An embodiment of a wafer loading device with a detection function is disclosed with reference to fig. 1 to 6.
Referring to fig. 1 and 2, in this embodiment, the wafer loading device includes: the wafer loading device comprises a frame 10, a wafer loading assembly 20 and a detection assembly 30, wherein the wafer loading assembly 20 is assembled on the frame 10, the wafer loading assembly 20 comprises a carrier plate 21, a wafer box 22 carried by the carrier plate 21 and a rotary driving assembly 23 connected with the carrier plate 21, and the detection assembly 30 comprises a plurality of sensors and information readers arranged around the wafer box 22.
In the present embodiment, the frame 10 includes an upper support plate 11, a lower support plate 12, and a support riser 13, which are laterally disposed, and a mounting table 111 mounted to the upper support plate. The wafer loading assembly 20 is assembled on the mounting table 111, the carrier 21 and the rotation driving assembly 23 are mounted on the mounting table 111 before loading, and then the wafer cassette 22 is placed on the mounting table 111 for detection. In the present embodiment, two mounting tables 111 are disposed on the frame 10, and the number of corresponding mounting tables 111 may be disposed as needed in the specific implementation.
The carrier plate 21 is mounted above the mounting table 111, the rotation driving assembly 23 is mounted below the mounting table 111, and the rotation driving assembly 23 is connected to the carrier plate 21 through the upper support plate 11 and the mounting table 111. For example, the rotation driving unit 23 is configured with a servo motor as a driving motor to drive and rotate the carrier 21 and the wafer cassette 22.
Referring to fig. 3 to 5, in the present embodiment, the wafer cassette 22 is configured in a rectangular parallelepiped structure, and the wafer cassette 22 is configured with a first opening 221 and a second opening 222 provided opposite to each other on the front and rear sides thereof, and a groove 223 provided in the inner side wall in a vertically stacked manner.
The carrier plate 21 is correspondingly rectangular plate-shaped, and four diagonal corners of the carrier plate 21 are provided with limiting structures 211, and four limiting structures 111 are surrounded to form a limiting area corresponding to the bottom of the wafer box 22, and the wafer box 22 is placed in the limiting area. The first sensor 31 and the second sensor 32 are disposed in opposite corners of the inner periphery of the limit structure 211, and the first sensor 31 and the second sensor 32 are each configured as a pressure sensor. When a wafer is placed in the wafer box 22 through the first opening 221, the first sensor 31 and the second sensor 32 sense pressure signals, and weight information of the wafer and the wafer box is calculated from the pressure signals.
The back side of the carrier 21 is vertically provided with a limiting bar 212, and the limiting bar 212 is correspondingly disposed at the second opening 222 for preventing the crystal from being removed. In the present embodiment, the third sensor 33 is configured to be connected to the limit bar 212 for detecting whether the wafer is about to slip out. For example, the limit bar 212 is fixed to the rear side edge of the carrier plate 21, the third sensor 33 is connected to the lower end of the limit bar 212, and the third sensor 33 is configured as a limit sensor.
Referring to fig. 1, 2 and 6, the detecting unit 30 includes a fourth sensor 34 driven by a lift driving unit 340 in addition to a first sensor 31 and a second sensor 32 for detecting pressure, and a third sensor 33 for limiting.
The lifting driving assembly 340 is mounted on the lower support plate 12 through a mounting frame 341, the lifting end of the lifting driving assembly 340 extends upward and penetrates the upper support plate 11, and the fourth sensor 34 is mounted on the lifting end of the lifting motor 42. In this embodiment, the lift driving assembly 340 uses a screw motor as a driving motor, and a slide rail 342 for sliding up and down of the screw motor 343 is provided on the mounting frame 341. The fourth sensor 34 is connected to the upper end of the screw 344, and is driven by the screw motor 343 to move up and down to sweep the wafer, so as to confirm the number of wafers. The rotary driving assembly 23 drives the carrier plate 21 to rotate, so that the wafer box 22 placed on the carrier plate 21 is driven to rotate, the orientation of the first opening 221 is adjusted, the first opening 221 is oriented to the fourth sensor 34, the wafer is scanned by matching with the fourth sensor 34, and the number of the wafers is counted; after the inspection is completed, the direction of the first opening 221 may be adjusted, so that the wafer may be grasped by the robot.
Referring to fig. 1 and 2, the inspection assembly 30 further includes a first information reader 35 for reading information of the wafer cassette, and two information readers for reading information of the wafer.
In this embodiment, a first information reader 35 is configured corresponding to each of the two wafer loading modules 20, and the identity information of the wafer cassette 22 is identified and read. The first information reader 35 is disposed on the upper side of the supporting riser 13 and faces the upper surface of the corresponding wafer cassette 22, a tag (for example, a two-dimensional code) corresponding to the wafer cassette 22 is disposed on the upper surface of the wafer cassette 22, and the first information reader 35 is a code scanner, and recognizes and reads the corresponding information from the wafer cassette 22 by scanning the code.
Since the wafers now have different specifications, and the wafers are loaded in the same wafer cassette 22, and possibly different specifications, some of the wafers can be identified by scanning the scanner, and some of the wafers need to be identified by the sensor. Thus, in the present embodiment, an information reader that performs information reading in two different ways of scanning and sensing is configured. A code scanner is disposed as a second information reader 36 above the side of the first opening 221 of the wafer cassette 22 for scanning the two-dimensional code on the wafer surface. A sensor is provided as a third information reader 37 on the carrier plate 21 for detecting a Load ID (a two-dimensional code for identifying a wafer and confirming a station) of the wafer. Before the wafer is grasped by the manipulator, the second information reader 36 and the third information reader 37 are matched together to read the identity information of the wafer, so as to meet the requirement of information supervision on wafers with different specifications in the wafer box 22.
The wafer loading device disclosed by the embodiment is used for carrying out the detection flow when the wafer is loaded: the wafer is put into the wafer box 22, and the pressure signals of the first sensor 31 and the second sensor 32 are confirmed first; then scanning the two-dimensional code on the wafer box 22 through the first information reader 35; then the fourth sensor 34 moves up and down under the drive of the screw motor 343 to confirm the number of wafers in the wafer cassette; before the wafer is taken out from the wafer box 22 by the manipulator, the two-dimensional code on the surface of the wafer is scanned by the second information reader 36 or the Load ID of the wafer is detected by the third information reader 37, so that the identity information of the wafer box and the wafer in the wafer box is read before feeding; and performs information management on the detected data.
The above list of detailed descriptions is only specific to practical embodiments of the present utility model, and they are not intended to limit the scope of the present utility model, and all equivalent embodiments or modifications that do not depart from the spirit of the present utility model should be included in the scope of the present utility model.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (10)
1. The wafer loading device with the detection function is characterized by comprising a frame, a wafer loading assembly and a detection assembly, wherein the wafer loading assembly is assembled on the frame and comprises a carrier plate, a wafer box borne by the carrier plate and a rotary driving assembly connected with the carrier plate, the wafer box is configured to be arranged at an opening of a side face and is vertically stacked at a groove position of an inner side wall, and the detection assembly comprises a plurality of sensors and information readers arranged around the wafer box, and a lifting driving assembly connected with at least one sensor.
2. The wafer loading device with the detection function according to claim 1, wherein a plurality of limiting structures are arranged on the carrier plate, a plurality of limiting areas corresponding to the bottoms of the wafer boxes are formed by surrounding the limiting structures, and the wafer boxes are placed in the limiting areas.
3. The wafer loading device with the detection function according to claim 2, wherein a plurality of limiting structures are surrounded to form a rectangular limiting area, and a pair of pressure sensor groups are arranged on opposite corners of the limiting area.
4. The wafer loading device with the detection function according to claim 1, wherein the wafer box comprises openings which are oppositely arranged on the front side and the rear side, and a limit bar and a limit sensor which is connected with the limit bar are vertically arranged at one side opening of the carrier plate corresponding to the wafer box.
5. The wafer loading device with a detection function according to claim 1, wherein the frame comprises an upper support plate and a lower support plate, the wafer loading assembly is assembled on the upper support plate, the lifting driving assembly is assembled on the lower support plate, a lifting end of the lifting driving assembly extends upwards and penetrates through the upper support plate, and a counting sensor is installed on the lifting end of the lifting driving assembly.
6. The wafer loading device with inspection function according to claim 5, wherein the frame further comprises a mounting table assembled to the upper support plate, the carrier plate is assembled above the mounting table, the rotation driving assembly is assembled below the mounting table, and the rotation driving assembly is connected to the carrier plate through the upper support plate and the mounting table.
7. The wafer loading device with the detection function according to claim 5, wherein the lifting driving assembly comprises a screw motor, the counting sensor is mounted at the upper end of the screw, and the counting sensor scans wafers stacked in the wafer box by lifting up and down.
8. The wafer loading device with inspection function according to claim 1, wherein the inspection assembly includes a first information reader for reading identity information of a wafer cassette, the frame includes a support riser, and the first information reader is disposed on an upper side of the support riser and faces an upper surface of the wafer cassette.
9. The wafer loading device with inspection function according to claim 1, wherein the inspection assembly further comprises a second information reader for reading identity information of a wafer, the second information reader being disposed above a side of the opening of the wafer cassette.
10. The wafer loading device with inspection function according to claim 1 or 9, wherein the inspection assembly further comprises a third information reader for reading identity information of the wafer, the third information reader being disposed on the carrier plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322340765.7U CN220627768U (en) | 2023-08-30 | 2023-08-30 | Wafer loading attachment with detect function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322340765.7U CN220627768U (en) | 2023-08-30 | 2023-08-30 | Wafer loading attachment with detect function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220627768U true CN220627768U (en) | 2024-03-19 |
Family
ID=90230312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322340765.7U Active CN220627768U (en) | 2023-08-30 | 2023-08-30 | Wafer loading attachment with detect function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220627768U (en) |
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2023
- 2023-08-30 CN CN202322340765.7U patent/CN220627768U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 215000, No. 889 Zhonghua Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region before: China |