CN218309381U - Wafer sorting blocking device - Google Patents

Wafer sorting blocking device Download PDF

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Publication number
CN218309381U
CN218309381U CN202222449064.2U CN202222449064U CN218309381U CN 218309381 U CN218309381 U CN 218309381U CN 202222449064 U CN202222449064 U CN 202222449064U CN 218309381 U CN218309381 U CN 218309381U
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guide
wafer
guide mechanism
base
wafers
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CN202222449064.2U
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Chinese (zh)
Inventor
袁康
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Suzhou Tuosi Semiconductor Technology Co ltd
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Suzhou Tuosi Semiconductor Technology Co ltd
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Abstract

The utility model discloses a wafer sorting stuck device, include: the device comprises a first base, a second base and a control device, wherein two first clamping holes and two second clamping holes are symmetrically arranged on the first base, and a first guide mechanism and a second guide mechanism are respectively embedded in the two first clamping holes in a matching manner; one side of the first guide mechanism is provided with a plurality of first guide grooves, and one side of the second guide mechanism is provided with a plurality of second guide grooves; the wafers are stacked on the inner sides of the first guide mechanism and the second guide mechanism, the wafers are guided and clamped through the first guide groove and the second guide groove, and a gap is formed between every two adjacent wafers; supporting platform, supporting platform bottom symmetry are provided with two and support the cassette, and two support cassettes imbed two second card holes respectively, and the card stopper device can be in the finite space with the range upon range of the placing of wafer to utilize the guide way surface to remain the space about the wafer, prevent the wafer adhesion, prevent wafer surface fish tail.

Description

Wafer sorting blocking device
Technical Field
The utility model relates to a wafer separation calorie of stopper field specifically is a wafer separation calorie of stopper device.
Background
In the production and processing process of wafers, in order to ensure the cleanness of the surfaces of the wafers, the wafers are usually placed in a chuck and plug box and circulated in each production and processing link. In the process of wafer sorting, a mechanical arm or manpower needs to take out a single wafer from the jam boxes for sorting, and after sorting is finished, the wafer is placed in different jam boxes according to thickness specification classification. The placing position and the taking and placing mode of the blocking box influence the taking and placing efficiency of the wafer, and therefore the blocking device for wafer sorting is provided.
SUMMERY OF THE UTILITY MODEL
The utility model overcomes prior art's is not enough, provides a wafer sorting stuck device.
In order to achieve the above purpose, the utility model adopts the technical scheme that: a wafer sorting truck apparatus comprising:
the device comprises a first base, a second base and a driving device, wherein two first clamping holes and two second clamping holes are symmetrically arranged on the first base, and a first guide mechanism and a second guide mechanism are respectively embedded in the two first clamping holes in a matched manner;
a plurality of first guide grooves are formed in one side of the first guide mechanism, a plurality of second guide grooves are formed in one side of the second guide mechanism, and the plurality of first guide grooves correspond to the plurality of second guide grooves one to one;
the wafers are stacked on the inner sides of the first guide mechanism and the second guide mechanism, the wafers are guided and clamped through the first guide groove and the second guide groove, and a gap is formed between every two adjacent wafers;
the supporting platform is located at the bottom of the wafer, and the supporting platform is used for supporting and fixing the wafer.
The utility model discloses a preferred embodiment still includes the second base, the second base sets up the bottom of first base, first base with through the bolt through the first fixed orifices fixed connection between the second base, be provided with a plurality of second fixed orificess on the second base.
In a preferred embodiment of the present invention, the first guiding mechanism and the second guiding mechanism are both provided with a clamping block at the bottom, and the clamping block is in interference fit with the first clamping hole.
In a preferred embodiment of the present invention, the first guiding mechanism and the second guiding mechanism are fixedly connected to the housing.
In a preferred embodiment of the present invention, two holding plates are disposed at one end of the housing, and the two holding plates are disposed in parallel, and the distance between the two holding plates is smaller than the distance between the first guiding mechanism and the second guiding mechanism.
In a preferred embodiment of the present invention, the height of the first guiding groove is the same as the height of the second guiding groove, and the height of the first guiding groove and the height of the second guiding groove are both greater than the thickness of the wafer.
In a preferred embodiment of the present invention, the distance between adjacent first guide grooves is M, and the distance between adjacent second guide grooves is N, where M = N.
The utility model provides a defect that exists among the background art, the utility model discloses possess following beneficial effect:
(1) The blocking device can stack the wafers in a limited space, and spaces are reserved on the upper surface and the lower surface of the wafers by utilizing the guide grooves, so that the wafers are prevented from being adhered, and the surfaces of the wafers are prevented from being scratched.
(2) The first guide mechanism and the second guide mechanism can be conveniently detached and replaced, the wafer guide stacking device is suitable for guiding and stacking wafers of different sizes, the upper side and the lower side of the shell and the guide groove are reserved with picking and placing operation spaces, and the wafers are conveniently picked and placed by a mechanical arm or a worker.
Drawings
Fig. 1 is a schematic perspective view of a wafer sorting stopper device according to a preferred embodiment of the present invention;
fig. 2 is a front view of the wafer sorting stopper device of the present invention.
In the figure: 1. the device comprises a shell, 2, a first guide mechanism, 3, a first guide groove, 4, a supporting platform, 5, a first clamping hole, 6, a first fixing hole, 7, a second clamping hole, 8, a supporting clamping seat, 9, a first base, 10, a wafer, 11, a second guide groove, 12, a second base, 13, a second guide mechanism, 14, a supporting plate, 15 and a second fixing hole.
Detailed Description
In order to make the above objects, features and advantages of the present invention more clearly understandable, the present invention is further described in detail below with reference to the accompanying drawings and the detailed description, wherein the drawings are simplified schematic drawings, and only the basic structure of the present invention is schematically illustrated, so that only the components related to the present invention are shown, and it is to be noted that the embodiments and features of the embodiments in the present application can be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
Referring to fig. 1-2, the present invention provides a technical solution: a wafer sorting jam apparatus, comprising: two first clamping holes 5 and two second clamping holes 7 are symmetrically arranged on the first base 9, and a first guide mechanism 2 and a second guide mechanism 13 are respectively embedded in the two first clamping holes 5 in a matching manner;
a plurality of first guide grooves 3 are formed in one side of the first guide mechanism 2, a plurality of second guide grooves 11 are formed in one side of the second guide mechanism 13, and the plurality of first guide grooves 3 correspond to the plurality of second guide grooves 11 one by one;
a plurality of wafers 10 are stacked on the inner sides of the first guide mechanism 2 and the second guide mechanism 13, the wafers 10 are guided and blocked through the first guide groove 3 and the second guide groove 11, and a gap is formed between every two adjacent wafers 10; the bottoms of the first guide mechanism 2 and the second guide mechanism 13 are respectively provided with a clamping block, the clamping blocks are in interference fit with the first clamping holes 5, and the tops of the first guide mechanism 2 and the second guide mechanism 13 are fixedly connected with the shell 1.
Two supporting clamping seats 8 are symmetrically arranged at the bottom of the supporting platform 4, the two supporting clamping seats 8 are respectively embedded into the two second clamping holes 7, the supporting platform 4 is located at the bottom of the wafer 10, and the supporting platform 4 is used for supporting and fixing the wafer 10.
In other words, a box body with a front opening and a rear opening is formed between the first guide mechanism 2 and the second guide mechanism 13, the shell 1 and the first base 9 and used for storing the wafer 10, the size of the box body is larger than the diameter of the wafer 10 to ensure that the wafer 10 can be placed into the box body, the first guide mechanism 2 and the second guide mechanism 13 are vertically arranged, the first guide mechanism 2 and the second guide mechanism 13 are perpendicular to the top surface of the first base 9, the distance between the first guide mechanism 2 and the second guide mechanism 13 is adjusted according to the size of the wafer 10, the wafer 10 can be placed into the first guide groove 3 and the second guide groove 11 to be clamped and positioned, the same wafer 10 is clamped in the first guide groove 3 and the second guide groove 11 at the same height, and a plurality of wafers 10 are stacked layer by layer, positioning placement and separation of the wafer 10 are realized, surface scratches of the wafer 10 are avoided, and the space utilization rate is improved.
Furthermore, the bottom of the wafer 10 positioned at the lowermost layer is provided with a supporting platform 4, the bottom of the supporting platform 4 is provided with a supporting clamping seat 8, the supporting clamping seat 8 is embedded into the second clamping hole 7, the two ends of the supporting platform 4 are inclined planes, the cross section of the supporting platform 4 is of a trapezoidal structure, the supporting clamping seat 8 is matched with the second clamping hole 7, the supporting platform 4 can be conveniently detached, and the supporting platforms 4 with different heights can be replaced.
According to the utility model discloses, still include second base 12, second base 12 sets up in the bottom of first base 9, runs through first fixed orifices 6 through the bolt between first base 9 and the second base 12 and carries out fixed connection, is provided with a plurality of second fixed orifices 15 on the second base 12.
It should be noted that, the first base 9 and the second base 12 can be fixed by screws or bolts, and those skilled in the art can fix the first base 9 and the second base 12 by other fixing mechanisms according to practical situations, and are not limited to use the bolts or the screws or the bolts shown in this application, and in addition, the blocking device can be fixed with other devices by the fixing holes of the second base 12.
Further, two abutting plates 14 are arranged at one end of the housing 1, the two abutting plates 14 are arranged in parallel, the distance between the two abutting plates 14 is smaller than the distance between the first guide mechanism 2 and the second guide mechanism 13, guide grooves are also formed in the abutting plates 14, the two abutting plates 14, the first guide mechanism 2 and the second guide mechanism 13 form a necking blocking device, the wafer 10 is prevented from sliding out along the first guide groove 3 and the second guide groove 11, the wafer 10 can be blocked at the inner side of the sorting blocking device, the first guide groove 3 and the second guide groove 11 are identical in size and height, the height of the first guide groove 3 and the height of the second guide groove 11 are both larger than the thickness of the wafer 10, the distance between the adjacent first guide grooves 3 is M, the distance between the adjacent second guide grooves 11 is N, wherein M = N.
To sum up, the utility model discloses the jam device can be in the finite space with 10 range upon range of placements of wafer to utilize the guide way to remain the space at the upper and lower surface of wafer 10, prevent the adhesion of wafer 10, prevent 10 surperficial fish tails of wafer, first guiding mechanism 2 and second guiding mechanism 13 can conveniently be dismantled and change, are suitable for the range upon range of placement of the 10 direction of not unidimensional wafer, and both sides all remain about shell 1 and the guide way and get and put operating space, make things convenient for manipulator or manual work to get and put wafer 10.
The utility model discloses the standard part that uses all can purchase from the market, dysmorphism piece all can be customized according to the description with the record of attached drawing, the concrete connected mode of each part all adopts conventional means such as ripe bolt, rivet, welding among the prior art, machinery, part and equipment all adopt among the prior art, conventional model, including circuit connection adopts conventional connected mode among the prior art, and the details are not repeated here, and the content that does not make detailed description in this description belongs to the prior art that expert technical personnel know in this field.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims (7)

1. A wafer sorting jam apparatus, comprising:
the device comprises a first base, a second base and a driving device, wherein two first clamping holes and two second clamping holes are symmetrically arranged on the first base, and a first guide mechanism and a second guide mechanism are respectively embedded in the two first clamping holes in a matched manner;
a plurality of first guide grooves are formed in one side of the first guide mechanism, a plurality of second guide grooves are formed in one side of the second guide mechanism, and the plurality of first guide grooves correspond to the plurality of second guide grooves one to one;
the wafers are stacked on the inner sides of the first guide mechanism and the second guide mechanism, the wafers are guided and clamped through the first guide groove and the second guide groove, and a gap is formed between every two adjacent wafers;
the supporting platform is located at the bottom of the wafer, and the supporting platform is used for supporting and fixing the wafer.
2. The wafer sorting and blocking device as claimed in claim 1, wherein: the base is characterized by further comprising a second base, the second base is arranged at the bottom of the first base, the first base is fixedly connected with the second base through bolts penetrating through the first fixing holes, and the second base is provided with a plurality of second fixing holes.
3. The wafer sorting and blocking device as claimed in claim 1, wherein: clamping blocks are arranged at the bottoms of the first guide mechanism and the second guide mechanism and are in interference fit with the first clamping holes.
4. The wafer sorting and blocking device as claimed in claim 3, wherein: the first guide mechanism and the second guide mechanism are fixedly connected with a shell at the top.
5. The wafer sorting and blocking device as claimed in claim 4, wherein: two abutting plates are arranged at one end of the shell in parallel, and the distance between the two abutting plates is smaller than the distance between the first guide mechanism and the second guide mechanism.
6. The wafer sorting and blocking device as claimed in claim 1, wherein: the first guide groove and the second guide groove are the same in size and height, and the height of the first guide groove and the height of the second guide groove are both larger than the thickness of the wafer.
7. The wafer sorting truck device of claim 6, characterized in that: the distance between the adjacent first guide grooves is M, the distance between the adjacent second guide grooves is N, and M = N.
CN202222449064.2U 2022-09-15 2022-09-15 Wafer sorting blocking device Active CN218309381U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222449064.2U CN218309381U (en) 2022-09-15 2022-09-15 Wafer sorting blocking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222449064.2U CN218309381U (en) 2022-09-15 2022-09-15 Wafer sorting blocking device

Publications (1)

Publication Number Publication Date
CN218309381U true CN218309381U (en) 2023-01-17

Family

ID=84837383

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222449064.2U Active CN218309381U (en) 2022-09-15 2022-09-15 Wafer sorting blocking device

Country Status (1)

Country Link
CN (1) CN218309381U (en)

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