CN220083693U

CN220083693U - Auxiliary cylinder for sintering

Info

Publication number: CN220083693U
Application number: CN202320485970.XU
Authority: CN
Inventors: 徐涛; 张莉兰; 汪强; 高建成; 钟小华
Original assignee: Leading Film Materials Anhui Co ltd
Current assignee: Leading Film Materials Anhui Co ltd
Priority date: 2023-03-14
Filing date: 2023-03-14
Publication date: 2023-11-24
Anticipated expiration: 2033-03-14

Abstract

The utility model belongs to the technical field of ITO target production, and relates to an auxiliary cylinder for sintering. The novel water heater comprises a cylinder body, wherein the cylinder body is provided with a plurality of through holes, and the through holes penetrate through the inner wall and the outer wall of the cylinder body. According to the utility model, the cylinder body is arranged outside the target to be sintered, so that the problem that the temperature difference exists inside the sintering furnace can be effectively solved, and the deformation of the target is effectively reduced.

Description

Auxiliary cylinder for sintering

Technical Field

The utility model belongs to the technical field of ITO target production, and relates to an auxiliary cylinder for sintering.

Background

In recent years, with the continuous development of the display field, the market share of the rotary target is continuously improved in both the international market and the domestic market.

During sintering of a rotating target, the target often bends. The target material can naturally bend towards the direction of the heating body due to the temperature difference in the sintering furnace. For targets of longer length, this abnormal bending is more pronounced. Even the target is cracked when the temperature difference problem is serious, and the cracked target can fall to the heating element to damage the furnace body.

Disclosure of Invention

The utility model aims to solve the technical problems that: the auxiliary cylinder for sintering can effectively reduce bending deformation caused by temperature difference, and can reduce damage to a furnace body caused by impact of a target material after cracking.

The technical scheme provided by the utility model is as follows:

an auxiliary cylinder for sintering comprises a cylinder body,

the cylinder is provided with a plurality of through holes, and the through holes penetrate through the inner wall and the outer wall of the cylinder.

Preferably, the device further comprises an upper cover and a lower cover, wherein the upper cover and the lower cover are respectively arranged at the upper end and the lower end of the cylinder body, and ventilation holes are formed in the upper cover and the lower cover.

Preferably, filter screens are arranged in the ventilation holes and the through holes.

Preferably, the device further comprises a support, wherein the lower cover, the cylinder body and the upper cover are sequentially arranged at the upper end of the support from bottom to top, and a runner for entering external air is reserved in the support.

Preferably, the support comprises a plurality of first support plates and a plurality of second support plates, the first support plates are placed on the same plane, the second support plates are supported by the first support plates, the lower cover is supported by the second support plates, and the support built by the first support plates and the second support plates is reserved with a runner for entering external air.

Preferably, the first support plate and the second support plate are respectively provided with a clamping groove at one side close to each other, and the second support plates and the first support plates are relatively fixed through the clamping grooves.

Preferably, the cylinder further comprises a connecting structure, the cylinder comprises at least one sleeve, and a plurality of sleeves are spliced in the axial direction through the connecting structure.

Preferably, the connecting structure comprises a connecting piece and a connecting groove, the connecting piece and the connecting groove are respectively arranged at two ends of the sleeve, and the connecting piece is inserted into the connecting groove to connect the upper sleeve and the lower sleeve.

Compared with the prior art, the utility model has the beneficial effects that:

according to the utility model, the cylinder body is arranged outside the target to be sintered, so that the problem that the temperature difference exists inside the sintering furnace can be effectively solved, and the deformation of the target is effectively reduced.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model.

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a cross-sectional view of a sleeve of the present utility model;

FIG. 3 is an exploded view of the stent of the present utility model;

fig. 4 is a schematic view of the structure of the bracket according to the present utility model.

In the figure: 1. a cylinder; 11. a through hole; 12. a sleeve; 111. a filter screen; 2. an upper cover; 21. ventilation holes; 3. a lower cover; 4. a bracket; 41. a first support plate; 42. a second support plate; 411. a clamping groove; 5. a connection structure; 51. a connecting piece; 52. and a connecting groove.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

For clarity of description and understanding of this patent, other tool structures and equipment portion structures that can be used in addition to the tools designed in this patent are also shown in the drawings.

Example 1

Referring to fig. 1-4, an auxiliary cartridge for sintering comprises a cartridge body 1,

the target to be sintered is arranged in the cylinder body 1, the cylinder body 1 is provided with a plurality of through holes 11, and the through holes 11 penetrate through the inner wall and the outer wall of the cylinder body 1.

Specifically, taking the rotary target as an example, before sintering, the cylinder 1 is arranged outside the target, temperature differences can be generated at different positions in the furnace, and when the rotary target acts on the cylinder 1, heat transfer occurs to the cylinder 1 on one hand, and heat of the cylinder 1 radiates to the target on the other hand, due to the effect of the heat transfer of the cylinder 1, the heat finally radiated to the target is uniform, and adverse effects caused by the temperature differences are reduced.

In general, during high-temperature sintering, a protective gas is introduced, and in order to bring the protective gas into sufficient contact with the target, a plurality of through holes 11 are formed in the cylinder 1, so that the protective gas can enter.

Further, the effects of the present utility model are further explained by experiments.

Taking sintering of an indium tin oxide target as an example, the indium tin oxide target is decomposed at high temperature, oxygen is adopted as protective gas, a Nantong Fu-thermal special kiln is adopted, the sintering temperature is set at 1400-1600 ℃, and the sintering time is 8-12 h.

The temperature of oxygen is low, and the oxygen has a certain constant temperature effect.

Comparative example 1

Two molded greenware cylinders with the pre-sintering length of 935mm are placed into a sintering furnace, the temperature is set at 1600 ℃, the sintering time is 8 hours, two greenware cylinders with the same length are adopted, and an auxiliary cylinder is added to continue sintering test under the same temperature and the same sintering time. After sintering, the bending degree of the cylinder after sintering is measured by using a level bar and a feeler gauge. The bending size of the target material sintered by the traditional sintering process is 2.2mm and 2.4mm, and the bending size of the target material added with the auxiliary cylinder is 0.9mm and 1.0mm.

Comparative example 2

Two molded greenware cylinders with the length of 1105mm before sintering are placed into a sintering furnace, the temperature is set at 1500 ℃, the sintering time is 10 hours, two greenware cylinders with the same length are adopted, and an auxiliary cylinder is added to continue sintering test under the same temperature and the same sintering time. After sintering, the bending degree of the cylinder after sintering is measured by using a level bar and a feeler gauge. The bending sizes of the targets sintered by the traditional sintering process are 2.5 and 2.8, and the bending sizes of the targets added with the auxiliary cylinder are 1.0mm and 1.3mm.

Comparative example 3

Two molded greenware cylinders with the length of 1325mm before sintering are placed into a sintering furnace, the temperature is set at 1400 ℃, the sintering time is 12h, two greenware cylinders with the same length are adopted, an auxiliary cylinder is added, and the sintering test is continued under the same temperature and the same sintering time. After sintering, the bending degree of the cylinder after sintering is measured by using a level bar and a feeler gauge. The bending size of the target material sintered by the traditional sintering process is 2.7mm and 3.1mm, and the bending size of the target material added with the auxiliary cylinder is 1.2mm and 1.4mm.

Conclusion: in the sintering process, the deformation of the target is effectively reduced after the auxiliary cylinder is added.

Example 2

Further modifications were made on the basis of example 1.

Referring to fig. 1, the portable electronic device further comprises an upper cover 2 and a lower cover 3, wherein the upper cover 2 and the lower cover 3 are respectively arranged at the upper end and the lower end of the cylinder 1, and ventilation holes 21 are respectively formed in the upper cover 2 and the lower cover 3.

The purpose of setting up upper cover 2 and lower cover 3 is to avoid impurity to enter into in barrel 1, in order to fix a position the relative position of upper cover 2, lower cover 3 and barrel 1, can set up the round platform in upper cover 2 and lower cover 3 one side that is close to barrel 1, the round platform agrees with the inner chamber of barrel 1.

As a further scheme, the air holes 21 and the through holes 11 are respectively provided with a filter screen 111, and the filter screen 111 can block large particles.

Example 3

Further improvements were made on the basis of example 2.

Referring to fig. 3 and 4, in order to supply air to the lower part of the target, a bracket 4 is provided, and a lower cover 3, a cylinder 1 and an upper cover 2 are sequentially provided at the upper end of the bracket 4 from bottom to top.

The support 4 comprises a plurality of first support plates 41 and a plurality of second support plates 42, a plurality of first support plates 41 are placed on the same plane, a plurality of second support plates 42 are supported by the plurality of first support plates 41, the lower cover 3 is supported by the plurality of second support plates 42, and a flow passage for external air to enter is reserved in the support 4 built by the first support plates 41 and the second support plates 42.

The first support plate 41 and the second support plate 42 may be constructed in various structures.

The construction scheme is as follows: the first support plates 41 are arranged at intervals, the first support plates 41 are parallel to each other, the second support plates 42 are stacked on the first support plates 41, the second support plates 42 are vertically arranged relative to the first support plates 41, and the spaces between the first support plates 41 arranged at intervals are channels for gas to enter and exit.

The other construction scheme is as follows: the three first support plates 41 are placed in an equilateral triangle shape with enough space reserved between the two first support plates 41 that are close to each other, and then three second support plates 42 are placed above the first support plates 41, with both ends of the second support plates 42 being located on the upper sides of the two first support plates 41, respectively.

Obviously, overlapping schemes of quadrilateral, pentagonal and other shapes can also be adopted.

As a further solution, the sides of the first support plate 41 and the second support plate 42, which are close to each other, are respectively provided with a clamping slot 411, and the plurality of second support plates 42 and the plurality of first support plates 41 are relatively fixed through the clamping slots 411, and it should be noted that the depth of the clamping slots 411 needs to be appropriate, and enough space can be reserved for the gas to enter.

It should be noted that the support 4 may obviously take other configurations, for example, four square plates may be arranged in a square array.

Example 4

Further improvements were made on the basis of example 1.

Referring to fig. 1 and 2, the device further comprises a connecting structure 5, the cylinder 1 comprises at least one sleeve 12, the sleeves 12 are spliced in the axial direction through the connecting structure 5, and targets with different diameters and lengths can be met by arranging the cylinder 1 into sleeves 12 spliced in multiple sections.

The connection structure 5 includes a connection member 51 and a connection groove 52, where the connection member 51 and the connection groove 52 are respectively disposed at two ends of the sleeve 12, the connection member 51 is inserted into the connection groove 52 to connect the upper sleeve 12 and the lower sleeve 12, the structure of the connection member 51 and the connection groove 52 may be a diagram in fig. 2, the connection member 51 may extend outwards along the axial direction along the end surface of one end of the sleeve 12 to form a boss, the connection groove 52 is recessed along the inner wall of the other end of the sleeve 12 to the outer wall, and when the connection is performed, the boss is inserted into the connection groove 52, so that the positions of the two sleeves 12 can be relatively fixed in the radial direction.

In order to fix the sleeves 12 relatively in the axial direction, threads are arranged on the outer wall of the boss and the inner wall of the connecting groove 52, and the two sleeves are fixed relatively in the axial direction in a threaded connection mode; a snap feature may also be provided on the boss and attachment slot 52.

The connecting member 51 may obviously also be a plurality of cylindrical structures (not shown in the drawings) uniformly arranged on the end surface of the sleeve 12, and the connecting groove 52 may be a hole corresponding to the positions of the plurality of cylindrical structures.

The connection structure 5 can also be realized by adopting the diagram b in fig. 2, and two flanges close to each other are connected and fixed in a bolting way by arranging flanges at two ends of the sleeve 12, so that the two sleeves 12 are connected and fixed.

The connection structure 5 may also be implemented by a clip, as shown in fig. 1, in which the end surfaces of the upper and lower sleeves 12 are tightly attached to each other, and then the sleeves 12 that are adjacent to each other are connected and fixed by the clip.

It should be noted that, the present utility model needs to withstand higher temperatures during use, and therefore, the present utility model needs to be made of materials resistant to high temperatures, such as alumina.

It should be noted that, in the embodiment of the present utility model, only the rotary target is taken as an example, the structure of the present utility model is not limited to a circular ring shape, but may be a triangle, a quadrilateral, a polygon, or the like, and specifically, the structure is designed based on the cross-sectional shape of the target to be sintered.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An auxiliary cylinder for sintering is characterized by comprising a cylinder body (1),

the cylinder (1) is provided with a plurality of through holes (11), and the through holes (11) penetrate through the inner wall and the outer wall of the cylinder (1).

2. The auxiliary cylinder according to claim 1, further comprising an upper cover (2) and a lower cover (3), wherein the upper cover (2) and the lower cover (3) are respectively arranged at the upper end and the lower end of the cylinder body (1), and ventilation holes (21) are respectively formed in the upper cover (2) and the lower cover (3).

3. The auxiliary cylinder according to claim 2, characterized in that the air holes (21) and the through holes (11) are provided with filter screens (111).

4. The auxiliary cylinder according to claim 2, further comprising a bracket (4), wherein the lower cover (3), the cylinder body (1) and the upper cover (2) are sequentially arranged at the upper end of the bracket (4) from bottom to top, and a flow channel for entering external air is reserved in the bracket (4).

5. The auxiliary cartridge as claimed in claim 4, wherein the bracket (4) comprises a plurality of first support plates (41) and a plurality of second support plates (42), the plurality of first support plates (41) being placed on the same plane, the plurality of second support plates (42) being supported by the plurality of first support plates (41), the lower cover (3) being supported by the plurality of second support plates (42).

6. The auxiliary cylinder according to claim 5, wherein the first support plate (41) and the second support plate (42) are respectively provided with a clamping groove (411) on a side close to each other, and a plurality of the second support plates (42) and a plurality of the first support plates (41) are relatively fixed through the clamping grooves (411).

7. The auxiliary cartridge of claim 1, further comprising a connecting structure (5), the cartridge body (1) comprising at least one sleeve (12), a plurality of said sleeves (12) being spliced in an axial direction by the connecting structure (5).

8. The auxiliary cartridge as claimed in claim 7, wherein the connection structure (5) comprises a connection member (51) and a connection groove (52), the connection member (51) and the connection groove (52) being provided at both ends of the sleeve (12), respectively, the connection member (51) being inserted into the connection groove (52) to connect the upper and lower sleeves (12).