CN219800798U

CN219800798U - Anti-collision wafer placement boat

Info

Publication number: CN219800798U
Application number: CN202320846636.2U
Authority: CN
Inventors: 汪良恩; 孙培刚
Original assignee: Anhui Anxin Electronic Technology Co ltd
Current assignee: Anhui Anxin Electronic Technology Co ltd
Priority date: 2023-04-11
Filing date: 2023-04-11
Publication date: 2023-10-03
Anticipated expiration: 2033-04-11

Abstract

The utility model provides an anti-collision wafer placement boat, and relates to the technical field of wafer placement boats. The wafer placement boat includes: a boat body and an anti-collision beam; the inner wall of the boat body is provided with a plurality of vertically extending accommodating grooves; the anti-collision beam is arranged at the bottom of the boat body; the top of the anti-collision beam is provided with a buffer cushion; the wafer is put into the in-process of holding tank and contacts with the blotter earlier, through the blotter buffering, has effectively avoided the wafer directly to strike with the tank bottom of holding tank and has led to the condition of wafer damage.

Description

Anti-collision wafer placement boat

Technical Field

The utility model relates to the technical field of wafer placement boats, in particular to an anti-collision wafer placement boat.

Background

The wafer placing boat is a carrier for loading and transporting wafers, and conventional wafer placing boats load wafers through vertical receiving grooves, can prevent wafers from being stacked or pressed against each other to cause damage to the wafers, and can load a large number of wafers in a limited space, and has a high space utilization.

However, in the process of placing wafers into the wafer placement boat, the wafers are likely to collide with the bottom of the accommodating groove under the action of gravity, so that the wafers are damaged.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides an anti-collision wafer placement boat, which solves the problem that wafers are easy to damage in the process of being placed into the placement boat.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme:

an anti-collision wafer placement boat, the wafer placement boat comprising: a boat body and an anti-collision beam;

a plurality of vertically extending accommodating grooves are formed in the inner wall of the boat body;

the anti-collision beam is arranged at the bottom of the boat body;

the top of the anti-collision beam is provided with a buffer cushion;

the wafer is first contacted with the buffer pad during the process of being placed in the accommodating groove.

Preferably, the cushion pad is adhered to the top of the anti-collision beam.

Preferably, two ends of the anti-collision beam are connected with the boat body through cross beams.

Preferably, a buffer block is arranged at the bottom of the accommodating groove.

(III) beneficial effects

The utility model provides an anti-collision wafer placement boat. Compared with the prior art, the method has the following beneficial effects:

in the present utility model, the wafer placing boat comprises: a boat body and an anti-collision beam; the inner wall of the boat body is provided with a plurality of vertically extending accommodating grooves; the anti-collision beam is arranged at the bottom of the boat body; the top of the anti-collision beam is provided with a buffer cushion; the wafer is put into the in-process of holding tank and contacts with the blotter earlier, through the blotter buffering, has effectively avoided the wafer directly to strike with the tank bottom of holding tank and has led to the condition of wafer damage.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a wafer boat according to an embodiment of the present utility model.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions in the embodiments of the present utility model are clearly and completely described, and it is obvious that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The embodiment of the utility model solves the problem that the wafers are easy to damage in the process of placing the wafers into the placing boat by providing the anti-collision wafer placing boat.

The technical scheme in the embodiment of the utility model aims to solve the technical problems, and the overall thought is as follows:

in an embodiment of the present utility model, the wafer placement boat includes: a boat body and an anti-collision beam; the inner wall of the boat body is provided with a plurality of vertically extending accommodating grooves; the anti-collision beam is arranged at the bottom of the boat body; the top of the anti-collision beam is provided with a buffer cushion; the wafer is put into the in-process of holding tank and contacts with the blotter earlier, through the blotter buffering, has effectively avoided the wafer directly to strike with the tank bottom of holding tank and has led to the condition of wafer damage.

In order to better understand the above technical solutions, the following detailed description will refer to the accompanying drawings and specific embodiments.

Examples:

as shown in fig. 1, the present utility model provides an impact-resistant wafer boat, comprising: the boat body 1 and the anti-collision beam 2;

a plurality of vertically extending accommodating grooves 3 are formed in the inner wall of the boat body 1;

the anti-collision beam 2 is arranged at the bottom of the boat body 1;

the top of the anti-collision beam 2 is provided with a buffer cushion 4;

the wafer is put into the in-process of holding tank 3 and contacts with blotter 4 earlier, and through the buffering of blotter 4, has effectively avoided the wafer direct with the tank bottom striking of holding tank 3 to lead to the circumstances of wafer damage.

The buffer cushion 4 is stuck at the top of the anti-collision beam 2, so that the buffer cushion 4 is convenient to replace, when the buffer cushion 4 is deformed and fatigued and can not be effectively buffered, the buffer cushion 4 is directly torn off, a new buffer cushion 4 is stuck, and the service life of the wafer placement boat is effectively prolonged.

As shown in fig. 1, two ends of the anti-collision beam 2 are connected with the boat body 1 through a cross beam 5.

As shown in fig. 1, a buffer block is disposed at the bottom of the accommodating groove 3, so as to further improve the service life of the wafer placement boat.

In summary, compared with the prior art, the utility model has the following beneficial effects:

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. An anti-collision wafer placement boat, the wafer placement boat comprising: a boat body (1) and an anti-collision beam (2);

a plurality of vertically extending accommodating grooves (3) are formed in the inner wall of the boat body (1);

the anti-collision beam (2) is arranged at the bottom of the boat body (1);

the top of the anti-collision beam (2) is provided with a buffer cushion (4);

the wafer is firstly contacted with the buffer pad (4) in the process of being placed in the accommodating groove (3).

2. The crash-proof wafer placement boat according to claim 1, characterized in that the cushion pad (4) is stuck on top of the crash beam (2).

3. The crashproof wafer placement boat according to claim 1, characterized in that both ends of the crashproof beam (2) are connected with the boat body (1) through a cross beam (5).

4. The crashproof wafer placement boat of claim 1, wherein a bottom of the accommodation groove (3) is provided with a buffer block.