CN219092829U - Cleaning equipment for binding gaps of target materials - Google Patents

Abstract

The utility model relates to a target production facility field discloses a bind clearance of target clean-up equipment, including first handle and the second handle of mutual articulated, first handle one end is first handheld portion, and the other end is first line strutting arrangement, second handle one end is second handheld portion, and the other end is second line strutting arrangement, its characterized in that still includes clearance line, take-up pulley and stopper, clearance line one end and first handle, second handle or line wheel fixed connection, clearance line's the other end and line wheel fixed connection; the limiter is used for limiting the rotation of the take-up pulley. The cleaning range can be manually adjusted, residual impurities at corners can be cleaned, and meanwhile, excessive damage to the surface of the target material caused by large-scale secondary cleaning can be avoided due to the fact that the range can be adjusted.

Description

Cleaning equipment for binding gaps of target materials

Technical Field

The application relates to the field of target production equipment, in particular to cleaning equipment for binding a target gap.

Background

At present, the target is a key core material in the fields of semiconductors, display panels, heterojunction photovoltaics and the like, the process is not replaceable, in order to prevent the target from being cracked due to nonuniform heating in the sputtering process of the target, a target binding mode is generally adopted, in addition, the cost can be saved for binding the target, deformation is prevented, if the target is too expensive, the target can be thinned, the back target is bound to prevent deformation, one of key parameters determining the performance of the sputtering target is the binding integrity and binding rate between the sputtering target and a backboard, a binding gap exists between a target blank and the backboard after the target is bound, the gap size is generally within 0.5mm, some binding medium or impurities possibly exist in the binding gap, before sputtering, sputtering quality is influenced, but the size is too small, the difficulty in cleaning the binding gap is increased, in particular to splicing the rotating target, the gap existing between each section of targets is deeper (generally the thickness of the target), and the gap of each section of target is small, so that the polishing process is difficult under the condition of not damaging the target, the polishing process is easy, the new abrasive paper is difficult to produce in the conventional polishing mode, but the dust is difficult to easily produce in the polishing process.

Chinese patent 202022976247.0 discloses a clearance cleaning device is bound to plane target, including the base, go up the frame, lift control axle, left side axis of rotation subassembly, right side axis of rotation subassembly, the motor and by the annular clearance silk thread that the motor drove, go up the frame and peg graft on the base, lift control axle upper portion is provided with the location bearing that is used for jacking up the frame, lift control axle passes the frame, lift control axle's lower part passes through threaded connection with the base, left side, right side axis of rotation subassembly mainly comprises axis of rotation support and rolling location bearing, left side, right side axis of rotation subassembly passes through the axis of rotation support and installs in the both sides of upper frame respectively, annular clearance silk thread tensioning is installed in the rolling location bearing of left side, right axis of rotation subassembly and the pivot of motor.

According to the scheme, an operator only needs to place the device on the target, the cleaning silk wire is aligned to the gap of the planar target by adjusting the position, after the height of the cleaning silk wire is properly adjusted by lifting the lifting control shaft, the annular cleaning silk wire is driven by the starting motor to rotate so as to clean the gap of the target, the proper annular cleaning silk wire can be selected according to the size requirement of the gap in the cleaning mode, the gap of the target can be smooth and attractive, the gap of the target can be cleaned, the edge breakage is difficult to occur in the cleaning process, the product quality is not affected, however, the phenomenon that the cleaning is not thorough is caused at the corners of the gap of the target due to the mechanical cleaning is difficult to occur, and the phenomenon can be solved through multiple cleaning.

Problems to be solved by the present application: how to develop a rapid cleaning device which can adjust the cleaning range of the binding target gap.

Disclosure of Invention

The utility model aims at providing a bind clearance equipment in target clearance, it can manual regulation clearance scope, realizes clearing up the remaining impurity of corner, simultaneously because of its scope can be adjusted, also can avoid extensive secondary cleaning to cause too much damage on target surface, simultaneously, its manual clear mode also is convenient for operate, need not to remove the position of target, moreover, this equipment self weight is lighter, operating personnel only need handheld and aim at need carry out clear position and carry out manual cleanness can.

In order to achieve the above purpose, the technical scheme adopted in the application is as follows:

the cleaning equipment for binding the target gap comprises a first handle and a second handle which are mutually hinged, wherein one end of the first handle is a first handheld part, the other end of the first handle is a first wire supporting device, one end of the second handle is a second handheld part, the other end of the second handle is a second wire supporting device, the cleaning equipment further comprises a cleaning wire, a wire winding wheel and a limiter, one end of the cleaning wire is fixedly connected with the first handle, the second handle or the wire winding wheel, and the other end of the cleaning wire is fixedly connected with the wire winding wheel;

the limiter is used for limiting the rotation of the take-up pulley.

Preferably, the take-up pulley comprises a pulley shaft and a take-up pulley body, the take-up pulley body is sleeved on the outer surface of the pulley shaft, the pulley shaft is provided with a first through hole, the take-up pulley body is provided with an adapter, and the limiter penetrates through the adapter and the first through hole to further limit rotation of the take-up pulley.

Preferably, a second through hole is formed in the axial direction of the take-up pulley, and the limiter penetrates through the second through hole and is matched with the first handle or the second handle to limit rotation of the take-up pulley.

Preferably, the first and second wire supporting devices are pulleys, and the cleaning wire is wound around surfaces of the pulleys.

Preferably, the first and second wire support means are tubular bodies through which the cleaning wire passes.

Preferably, the first hand-held part and the second hand-held part are both fixed with handle rings.

Preferably, the cleaning line is a diamond line, and the diameter of the diamond line is 0.03-0.05mm.

Preferably, the material of the first wire supporting device and the second wire supporting device is a metal material or an alloy material.

The beneficial effects of this application are:

this application can manual regulation clearance scope, realizes clearing up the remaining impurity of corner, simultaneously because of its scope can be adjusted, also can avoid extensive secondary cleaning to cause too much damage on target surface, simultaneously, its manual clear mode also is convenient for operate, need not to remove the position of target, moreover, this equipment self weight is lighter, operating personnel only need handheld and aim at need clear position carry out manual cleanness can.

Description of the drawings:

FIG. 1 is a front view of a cleaning apparatus for binding a target gap in example 1;

FIG. 2 is a side view of the cleaning apparatus of the binding target gap in example 1;

FIG. 3 is a cross-sectional view of the stopper in example 1;

fig. 4 is a front view of the first handle in embodiment 1;

FIG. 5 is a front view of the cleaning apparatus of the binding target gap in example 2;

fig. 6 is a cross-sectional view of the stopper in example 3.

Detailed Description

The present application will be described more fully hereinafter with reference to the accompanying examples, in which specific conditions are not identified, and are indicated by conventional or manufacturer-suggested conditions. The reagents or apparatus used were conventional products commercially available without the manufacturer's attention.

Example 1

Referring to fig. 1-4, a cleaning device for binding a target gap comprises a first handle 1 and a second handle 2 which are mutually hinged, wherein one end of the first handle 1 is a first handheld part 3, the other end of the first handle is a first wire supporting device 4, one end of the second handle 2 is a second handheld part 5, the other end of the second handle is a second wire supporting device 6, the cleaning device further comprises a cleaning wire 7, a wire take-up pulley 8 and a limiter 10, one end, fixedly connected with the first handle 1, of the cleaning wire 7 is a connecting end, the free end of the cleaning wire 7 sequentially penetrates through the first wire supporting device 4 and the second wire supporting device 6 and is fixed on the surface of the wire take-up pulley 8, and the cleaning wire 7 is wound on or far away from the surface of the wire take-up pulley 8 along with the rotation of the wire take-up pulley 8, so that the length of the cleaning wire between the first wire supporting device 4 and the second wire supporting device 6 is prolonged or shortened;

the wire take-up wheel 8 is axially provided with a second through hole 9, and the limiter 10 penetrates through the second through hole 9 to be matched with the first handle 1 or the second handle 2 to limit the rotation of the wire take-up wheel 8;

for ease of understanding we will name the cleaning wire 7 between the first wire support device 4, the second wire support device 6 and the first wire support device 4, the second wire support device 6 as cleaning section 11.

When in actual use, the method mainly comprises the following steps:

step 1: the operator rotates the take-up pulley 8 to enable the cleaning wire 7 to be far away from the surface of the take-up pulley 8, and the cleaning wire 7 between the first wire supporting device 4 and the second wire supporting device 6 is in a loose state;

step 2: adjusting the distance between the first wire supporting device 4 and the second wire supporting device 6 according to the area to be cleaned;

step 3: the wire take-up wheel 8 is rotated, and the cleaning wire 7 is tightly attached to the surface of the wire take-up wheel 8 until the cleaning wire 7 between the first wire supporting device 4 and the second wire supporting device 6 is in a tight state;

step 4: a limiter 10 passes through the take-up pulley 8 from the second through hole 9, the first handle 1 and the second handle 2 are controlled to be in fixed positions, and the movement of the limiter 10 is limited through the first handle 1 or the second handle 2, so that the rotation of the take-up pulley 8 is restrained;

step 5: the cleaning part 11 is aligned to a position to be cleaned and impurities on the surface of the target material are scraped by the cleaning part 11.

Meanwhile, it should be noted that when the limiting mode is used for limiting, an operator needs to manually control the first handle 1 and the second handle 2 to be at a fixed position, so that the movement of the limiter 10 is limited by the first handle 1 and the second handle 2 with fixed positions, and further the rotation of the take-up pulley 8 is limited; however, the limit mode has high requirements on operators and is relatively complex to operate.

In practical applications, as preferable, the first wire supporting device 4 and the second wire supporting device 6 are tubular bodies 13, the tubular bodies 13 are fixed at one end of the first handle 1 far away from the first hand-holding part 3, and the cleaning wire 7 passes through the hollow of the tubular bodies 13, it should be noted that in this design, the supporting effect of the first wire supporting device 4 and the second wire supporting device 6 on the cleaning wire 7 is better, but the abrasion between the first wire supporting device 4, the second wire supporting device 6 and the cleaning wire 7 is larger when the tubular bodies 13 are used relative to the pulleys 12, so that in the practical use process, an operator can select the wire supporting device according to the practical situation.

In this embodiment, for convenience of handling, the handle ring 14 is preferably fixed to each of the first and second handpieces 3 and 5.

In this embodiment, since there may be some impurities with higher hardness on the surface of the target material and the adsorption force between some impurities and the target material is stronger, preferably, the cleaning wire 7 is a diamond wire with a diameter of 0.03-0.05mm, and of course, in practical application, the operator may also select the cleaning wire 7 of other materials, such as a metal wire made of steel, nickel, cadmium, or the like, or an alloy wire made of an alloy material of steel, nickel, cadmium, or the like, and meanwhile, the embodiment does not limit the diameter of the cleaning wire 7 too much, and it should be noted that as the diameter of the cleaning wire 7 decreases, the sharpness of the cleaning portion 11 gradually increases, and at the same time, the damage resistance of the cleaning wire 7 decreases significantly, and therefore, the operator may change the diameter of the cleaning wire 7 according to practical requirements.

In this embodiment, preferably, in order to reduce the wear of the first wire supporting device 4 and the second wire supporting device 6 and improve the service lives of the first wire supporting device 4 and the second wire supporting device 6, the materials of the first wire supporting device 4 and the second wire supporting device 6 are metal materials or alloy materials, and the first wire supporting device 4 and the second wire supporting device 6 in this embodiment are made of steel materials with chrome plating on the surfaces.

Example 2

Referring to fig. 5, the difference is that the first wire supporting device 4 and the second wire supporting device 6 are pulleys 12, which improves the smoothness of operation of the cleaning wire 7 in loosening and tightening during practical application, and the cleaning wire 7 slides more smoothly during winding and unwinding, so that on one hand, the working efficiency can be improved, and on the other hand, the abrasion between the first wire supporting device 4, the second wire supporting device 6 and the cleaning wire 7 is reduced.

Example 3

Referring to fig. 6, the difference is that the limiting means of the limiter 10 is different from that of embodiment 1, in this embodiment, the take-up pulley 8 includes a wheel shaft 15 and a take-up pulley body 16, the take-up pulley body 16 is sleeved on the outer surface of the wheel shaft 15, the wheel shaft is provided with a first through hole 17, the take-up pulley body 16 is provided with an adapter 18, and the limiter 10 passes through the adapter 18 and the through hole 17, so as to limit rotation of the take-up pulley 8.

Compared with the embodiment 1 and the embodiment 2, the limiting mode has the advantages that the limiting mode limits the rotation of the take-up pulley body 16 through the rotation of the take-up pulley body 16 sleeved on the surface of the pulley shaft 15, the rotatable take-up pulley body 16, the fixed pulley shaft 15 and the limiter 10 penetrating through the take-up pulley body 16 and the pulley shaft 15, and further limits the shortening and releasing of the cleaning wire 7.

Meanwhile, for easy understanding, the specific positions of the operation steps in this embodiment are as follows:

step 1: the operator rotates the take-up pulley 8 to enable the cleaning wire 7 to be far away from the surface of the take-up pulley 8, and the cleaning wire 7 between the first wire supporting device 4 and the second wire supporting device 6 is in a loose state;

step 2: adjusting the distance between the first wire supporting device 4 and the second wire supporting device 6 according to the area to be cleaned;

step 3: the wire take-up wheel 8 is rotated, and the cleaning wire 7 is tightly attached to the surface of the wire take-up wheel 8 until the cleaning wire 7 between the first wire supporting device 4 and the second wire supporting device 6 is in a tight state;

step 4: the rotation of the take-up pulley body 16 is limited by using the limiter 10 to pass through the fixed and non-rotating wheel shaft 15 and the adapter 18 sleeved on the rotatable take-up pulley body 16 on the surface of the wheel shaft 15, so that the cleaning part 11 is in a continuous tightening state;

step 5: the cleaning part 11 is aligned to a position to be cleaned and impurities on the surface of the target material are scraped by the cleaning part 11.

The limiting mode does not need to manually control the positions of the first handle 1 and the second handle 2, so the requirements on operators are lower than those of the embodiment 1 and the embodiment 2.

To sum up, this application can manual regulation clearance scope, realizes clearing up the remaining impurity of corner, simultaneously because of its scope can be adjusted, also can avoid extensive secondary cleaning to cause target surface too much damage, simultaneously, its manual clear mode also is convenient for operate, need not to remove the position of target, moreover, this equipment self weight is lighter, operating personnel only need handheld and aim at need carry out clear position and carry out manual cleanness can.

Claims (8)

1. The cleaning equipment for binding the target gap comprises a first handle and a second handle which are mutually hinged, wherein one end of the first handle is a first handheld part, the other end of the first handle is a first wire supporting device, one end of the second handle is a second handheld part, and the other end of the second handle is a second wire supporting device;

the limiter is used for limiting the rotation of the take-up pulley.

2. The device for cleaning a gap between binding targets according to claim 1, wherein the take-up pulley comprises a pulley shaft and a take-up pulley body, the take-up pulley body is sleeved on the outer surface of the pulley shaft, the pulley shaft is provided with a first through hole, the take-up pulley body is provided with an adapter, and the limiter penetrates through the adapter and the first through hole to limit rotation of the take-up pulley.

3. The target gap binding cleaning device according to claim 1, wherein a second through hole is formed in the axial direction of the take-up pulley, and the limiter penetrates through the second through hole and is matched with the first handle or the second handle to limit rotation of the take-up pulley.

4. The apparatus of claim 1, wherein the first and second wire support devices are pulleys and the cleaning wire is wound around a surface of the pulleys.

5. The apparatus of claim 1, wherein the first and second wire support devices are tubular bodies through which the cleaning wire passes.

6. The target gap-binding cleaning apparatus of claim 1, wherein the first and second handholds are each secured with a handle ring.

7. The apparatus of claim 1, wherein the cleaning wire is a diamond wire having a diameter of 0.03-0.05mm.

8. The apparatus of claim 1, wherein the first and second wire support devices are made of a metal or alloy material.

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