CN218887156U

CN218887156U - Suction nozzle and chip mounter

Info

Publication number: CN218887156U
Application number: CN202223376074.4U
Authority: CN
Inventors: 郭雷; 宋闯; 陈安东; 康会源; 吴士华
Original assignee: Kunshanqiu Titanium Photoelectric Technology Co Ltd
Current assignee: Kunshanqiu Titanium Photoelectric Technology Co Ltd
Priority date: 2022-12-15
Filing date: 2022-12-15
Publication date: 2023-04-18
Anticipated expiration: 2032-12-15

Abstract

The utility model discloses a suction nozzle and chip mounter relates to wafer production technical field, has improved the limited technical problem of suction nozzle life among the correlation technique. The suction nozzle includes main part and the mouth ring of being connected with main part one side, and the main part is equipped with mounting hole and connecting hole, and the mounting hole is used for assisting the suction nozzle to install on the suction nozzle pole, and the connecting hole is used for the inner chamber of intercommunication mounting hole and mouth ring, and the axis of connecting hole is first straight line, is the surface of the mouth ring of cyclic annular setting including the top surface of keeping away from the main part, divide and arrange the top surface both sides in and with inner wall and the outer wall of top surface connection, inner wall, outer wall are the acute angle with the contained angle that first straight line formed respectively. The cross section of the nozzle ring is designed into a shape similar to a trapezoid, the weak part of the original nozzle ring structure is improved, the upper limit of the service life of the suction nozzle is improved, 30K is improved to 40-60K, and continuous production of wafers is facilitated.

Description

Suction nozzle and chip mounter

Technical Field

The utility model relates to a wafer production technical field especially relates to a suction nozzle and chip mounter.

Background

In the production of related to the wafer, the wafer is assisted to remove by the suction nozzle commonly used, and current suction nozzle adopts the rubber suction nozzle and is connected with metal suction nozzle pole, and metal suction nozzle pole is installed on equipment, makes the rubber suction nozzle evacuation through the suction nozzle pole, absorbs the wafer, however, because the rubber suction nozzle material is softer, and receives the structure restriction, as shown in fig. 1 and fig. 2, the suction nozzle is easy wearing and tearing, damage after the atress, and the life-span upper limit of general suction nozzle is 30K, must change the suction nozzle in due date, manufacturing cost is higher. Therefore, it is necessary to improve the structure of the suction nozzle to improve the service life of the suction nozzle and reduce the production cost.

SUMMERY OF THE UTILITY MODEL

The application provides a suction nozzle and a chip mounter, and improves the technical problem that the service life of the suction nozzle is limited in the related technology.

The application provides a suction nozzle, include main part and the mouth ring of being connected with main part one side, the main part is equipped with mounting hole and connecting hole, the mouth ring is cyclic annular setting, the mounting hole is used for supplementary suction nozzle to install on the suction nozzle pole, the connecting hole is used for the inner chamber of intercommunication mounting hole and mouth ring, the axis of connecting hole is first straight line, the surface that is the mouth ring of cyclic annular setting is including the top surface of keeping away from the main part, divide and arrange the top surface both sides in and with inner wall and the outer wall that the top surface is connected, the inner wall, the outer wall is the acute angle with the contained angle that first straight line formed respectively.

Optionally, the inner wall comprises a first inclined section and a second inclined section connected with the first inclined section, one side of the first inclined section, which is far away from the second inclined section, is connected with the top surface, and one side of the second inclined section, which is far away from the first inclined section, is connected with the main body;

an acute angle formed by the first inclined section and the first straight line is a first included angle, an included angle formed by the second inclined section and the first straight line is a second included angle, and the first included angle is smaller than the second included angle.

Optionally, the first angled section forms a third angle with the outer wall, the third angle being in the range of 40 ° -60 ° (degrees)

Optionally, the third included angle takes a value of 50 °.

Optionally, an included angle formed between the second inclined section and the top surface is a fourth included angle, and the value range of the fourth included angle is 10 ° to 70 °.

Optionally, the fourth included angle takes 45 °.

Optionally, the thickness of the top surface is 0.05-0.15cm.

Optionally, the first inclined section and the second inclined section are equal in length.

Optionally, the mouth ring is square in configuration.

A chip mounter comprises a suction nozzle rod and the suction nozzle arranged on the suction nozzle rod.

The beneficial effect of this application is as follows: the suction nozzle comprises a main body and a nozzle ring, wherein the nozzle ring is connected with one side of the main body, the main body is provided with a mounting hole, the mounting hole is used for mounting the suction nozzle on a suction nozzle rod, and the suction nozzle is also provided with a connecting hole which is communicated with an inner cavity of the nozzle ring so as to form negative pressure in a surrounding area of the nozzle ring to achieve the purpose of adsorbing a wafer through the nozzle ring; this application lies in improving the structure of mouth ring, the axis of injecing the connecting hole is first straight line, obviously the mouth ring is complete annular setting, one side and the main part of mouth ring are connected, will look sideways at this and be the bottom side of mouth ring, the surface of mouth ring still includes top surface and inner wall, the outer wall, and inner wall and outer wall are located the both sides of top surface respectively, inner wall and first straight line, the outer wall has formed the contained angle respectively with first straight line, set this contained angle to the acute angle, this contained angle is greater than 0 promptly, be equivalent to setting the cross section of mouth ring to similar trapezoidal shape, the weak department of original mouth ring structure has been improved, the deformation after the atress has been reduced, the life upper limit of suction nozzle has been improved, promote 30K to 40-60K, more be favorable to the continuous production of wafer.

Drawings

In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention.

FIG. 1 is a schematic view of a suction nozzle in the prior art;

FIG. 2 is a partial schematic view of FIG. 1 at A;

FIG. 3 is a schematic view of the overall structure of a mouthpiece provided by the present application;

FIG. 4 is a front view of FIG. 3;

FIG. 5 is a side view of FIG. 3;

FIG. 6 is a cross-sectional view taken at B-B of FIG. 4;

fig. 7 is a partial schematic view at C in fig. 6.

The attached drawings are marked as follows: 100-main body, 110-mounting hole, 120-connecting hole, 121-first straight line, 200-nozzle ring, 210-top surface, 220-inner wall, 221-first inclined section, 221 a-first included angle, 222-second inclined section, 222 a-second included angle, 222 b-fourth included angle, 230-outer wall, 230 a-third included angle.

Detailed Description

The embodiment of the application provides a suction nozzle and a chip mounter, and the technical problem that the service life of the suction nozzle is limited in the related technology is solved.

In order to solve the technical problems, the general idea of the embodiment of the application is as follows:

the utility model provides a suction nozzle, include main part and the mouth ring of being connected with main part one side, the main part is equipped with mounting hole and connecting hole, the mouth ring is cyclic annular setting, the mounting hole is used for supplementary suction nozzle to install on the suction nozzle pole, the connecting hole is used for the inner chamber of intercommunication mounting hole and mouth ring, the axis of connecting hole is first straight line, the surface that is the mouth ring of cyclic annular setting is including the top surface of keeping away from the main part, divide and arrange the inner wall and the outer wall that the top surface both sides just are connected with the top surface in, inner wall, outer wall are the acute angle with the contained angle that first straight line formed respectively.

In order to better understand the technical scheme, the technical scheme is described in detail in the following with reference to the attached drawings of the specification and specific embodiments.

Referring to fig. 1 and 2, a suction nozzle structure in the background art is shown, which includes a main body 100 and a nozzle ring 200 connected to one side of the main body 100, wherein the main body 100 is provided with a mounting hole 110 and a connecting hole 120, the nozzle ring 200 is annularly disposed, the mounting hole 110 is used for assisting a suction nozzle to be mounted on a suction nozzle rod, and the connecting hole 120 is used for communicating the mounting hole 110 and an inner cavity of the nozzle ring 200.

As can be seen from fig. 1 and 2, the cross-section of the mouth ring 200 is rectangular in shape by cutting the mouth ring 200 in a plane perpendicular to the axis of the mouth ring 200. In detail, the cross section is set according to the shape of the wafer.

The present embodiment provides a suction nozzle in which the structure of the nozzle ring 200 is modified as shown in fig. 7. Specifically, referring to fig. 3 to 7 in combination, taking the axis of the connection hole 120 as a first straight line 121, the first straight line 121 defines the bottom side of the nozzle ring 200 to be connected with the main body 100 as shown in fig. 6, so that the surface of the nozzle ring 200 further includes a top surface 210, an inner wall 220 located on the inner circumferential side and an outer wall 230 located on the outer circumferential side, and as shown in fig. 7, the inner wall 220 and the outer wall 230 are respectively defined on both sides of the top surface 210. Then there is the following relationship: the top surface 210 is located on a side of the mouthpiece ring 200 remote from the main body 100; in the direction of the first straight line 121, the top surface 210, the inner wall 220 and the body 100 are connected in sequence; and, the top surface 210, the outer wall 230 and the body 100 are connected in sequence in the direction of the first straight line 121.

Referring to fig. 6 and 7, the outer wall 230 forms an included angle with the first line 121, the inner wall 220 forms an included angle with the first line 121, and the included angles are both defined as acute angles, i.e., greater than 0 ° and less than 90 °, and the inner wall 220 and the outer wall 230 are respectively defined on both sides of the top surface 210. The cross section of the nozzle ring 200 is cut off by taking the plane of the first straight line 121, the cross section of the nozzle ring 200 is two spaced parts, the two parts are the same in shape, and one part is taken as the cross section of the nozzle ring 200 for example, in the scheme, the cross section of the nozzle ring 200 is improved into a trapezoid-like shape, the deformation after stress is reduced, the weak part of the original nozzle ring structure is improved, the upper limit of the service life of the suction nozzle is improved, and 30K is improved to 40-60K, for example, 50K, so that the continuous production of wafers is facilitated. In detail, the nozzle ring 200 is set according to the non-photosensitive area of the wafer, and the width thereof may be variable.

It is mentioned above that the cross section of the mouth ring 200 parallel to the first straight line 121 is modified to be trapezoid-like, mainly to illustrate that the top side and the bottom side of the cross section are parallel to each other, and the two waist sides are inclined outward, and the cross section may be in a trapezoid shape, including an isosceles trapezoid shape, or the waist sides may be differently set.

In a preferred embodiment, referring to fig. 7, the inner wall 220 includes a first inclined section 221 and a second inclined section 222 connected to the first inclined section 221, wherein a side of the first inclined section 221 away from the second inclined section 222 is connected to the top surface 210, a side of the second inclined section 222 away from the first inclined section 221 is connected to the main body 100, an acute angle formed by the first inclined section 221 and the first straight line 121 is a first included angle 221a, and an included angle formed by the second inclined section 222 and the first straight line 121 is a second included angle 222a. The present solution defines that the first included angle 221a is smaller than the second included angle 222a, and by arranging the inner wall 220 of the nozzle ring 200 into the first inclined section 221 and the second inclined section 222, the top surface 210, the first inclined section 221, the second inclined section 222 and the main body 100 are arranged in sequence along the first straight line 121. Therefore, when the suction nozzle is in a use state, namely when the suction nozzle adsorbs a wafer, the suction nozzle is pressed to deform, the two slopes of the first inclined section 221 and the second inclined section 222 play a mutual supporting effect, the structural weakness of the nozzle ring 200 is further improved, and the upper limit of the service life of the suction nozzle is improved.

Optionally, referring to fig. 6 and fig. 7 in combination, the lengths of the first inclined section 221 and the second inclined section 222 are equal, and the lengths can be understood as the expanded widths/thicknesses of the cross sections of the nozzle rings corresponding to the first inclined section 221 and the second inclined section 222, respectively.

The first inclined section 221 has two opposite ends, the two ends are connected to form a direction of the first straight line 121, and the two ends are spaced apart by a first dimension; the second inclined section 222 has two opposite ends, the two ends are connected to form a direction of the first straight line 121, and the two ends are spaced from each other by a second size; the first size is equal to the second size.

Optionally, referring to fig. 7, the first inclined section 221 forms a third included angle 230a with the outer wall 230, and the third included angle 230a ranges from 40 ° to 60 °, including 40 °, 60 °, and preferably 50 °.

Optionally, referring to fig. 7, the included angle formed by the second inclined section 222 and the top surface 210 is a fourth included angle 222b, and the value of the fourth included angle 222b ranges from 10 ° to 70 °, including 10 ° and 70 °, and preferably 45 °.

As shown in fig. 7, the top surface 210 has a thickness parameter, which is also the distance from the top end of the inner wall 220 to the top end of the outer wall 230, as shown in detail by reference character h in fig. 7. In the background art shown in fig. 1, the thickness of the nozzle is 0.15cm, and in the embodiment of the present embodiment, the thickness of the top surface 210 is in the range of 0.05-0.15cm.

Alternatively, referring to fig. 3 and 4, the mouth ring 200 is provided in a square shape.

It should also be noted that, in conjunction with fig. 1 and 5, the relevant dimensions such as the mounting holes 110, the connecting holes 120, etc. are the same for the purpose of adapting the improved nozzle to existing equipment.

Based on the suction nozzle, the embodiment further provides a chip mounter, which comprises a suction nozzle rod and the suction nozzle arranged on the suction nozzle rod, and is used for the production process of wafers, the continuous production of the wafers is facilitated, the replacement times of the suction nozzle is reduced, and the production cost is reduced.

While the preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the appended claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the invention.

It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A suction nozzle is characterized by comprising a main body and a nozzle ring connected with one side of the main body, wherein the nozzle ring is annularly arranged, the main body is provided with a mounting hole and a connecting hole, the mounting hole is used for assisting the suction nozzle to be mounted on a suction nozzle rod, the connecting hole is used for communicating the mounting hole with an inner cavity of the nozzle ring, and the axis of the connecting hole is a first straight line;

the surface of the nozzle ring comprises a top surface far away from the main body, an inner wall and an outer wall, wherein the inner wall and the outer wall are respectively arranged on two sides of the top surface and connected with the top surface, and included angles formed by the inner wall and the outer wall and the first straight line are acute angles respectively.

2. The spout of claim 1 wherein the inner wall includes a first sloped section and a second sloped section connected to the first sloped section, the first sloped section being connected to the top surface on a side away from the second sloped section, the second sloped section being connected to the body on a side away from the first sloped section;

the first inclined section and an acute angle formed by the first straight line are first included angles, the second inclined section and an included angle formed by the first straight line are second included angles, and the first included angles are smaller than the second included angles.

3. A nozzle according to claim 2, wherein said first angled section forms a third angle with said outer wall, said third angle being in the range of 40 ° to 60 °.

4. A nozzle according to claim 3, wherein said third included angle takes on a value of 50 °.

5. The suction nozzle as claimed in claim 2, wherein said second angled section forms a fourth angle with said top surface, said fourth angle being in the range of 10 ° to 70 °.

6. A nozzle according to claim 5, wherein said fourth angle takes on a value of 45 °.

7. A nozzle according to claim 1, wherein the thickness of said top surface is in the range of 0.05-0.15cm.

8. The suction nozzle as set forth in claim 2 wherein said first angled section and said second angled section are equal in length.

9. A nozzle according to any one of claims 1-8, characterized in that said nozzle ring is arranged in a square.

10. A mounter characterized by comprising a nozzle bar and the nozzle according to any one of claims 1 to 9 mounted on the nozzle bar.