CN214177548U - Microphone diaphragm and microphone - Google Patents
Microphone diaphragm and microphone Download PDFInfo
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- CN214177548U CN214177548U CN202120243027.9U CN202120243027U CN214177548U CN 214177548 U CN214177548 U CN 214177548U CN 202120243027 U CN202120243027 U CN 202120243027U CN 214177548 U CN214177548 U CN 214177548U
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Abstract
The utility model relates to an electron device technical field especially relates to a microphone vibrating diaphragm and microphone. Microphone diaphragm includes the vibrating diaphragm body, sets up the first hole of disappointing of unclosed annular on the vibrating diaphragm body in order to form the structure of disappointing, and the structure of disappointing includes vibration portion and connecting portion, and connecting portion are connected with the vibrating diaphragm body, and the length of connecting portion is greater than the width in first hole of disappointing, and the structure of disappointing can be for vibrating diaphragm body luffing motion to the volume of disappointing in the first hole of disappointing of adjustment. Microphone vibrating diaphragm passes through the setting of connecting portion, can reduce the rigidity of being connected between structure of disappointing and the vibrating diaphragm body to make the structure of disappointing more easily for vibrating diaphragm body luffing motion, thereby make the range of opening of structure of disappointing under the effect of external acoustic pressure bigger, the volume of disappointing is increased, improves the ability of disappointing, thereby improves the reliability of vibrating diaphragm body. The microphone can ensure the low-frequency response performance of the microphone and improve the stability of the microphone by applying the microphone diaphragm.
Description
Technical Field
The utility model relates to an electron device technical field especially relates to a microphone vibrating diaphragm and microphone.
Background
In the conventional microphone structure, in order to ensure the low frequency response performance, the air-bleed structure on the diaphragm is usually circular. The rigidity of the circular air leakage structure is high, and the circular air leakage structure cannot timely release air under the action of large external sound pressure, so that the diaphragm is excessively deformed, the sound effect of a microphone product is influenced, and even the microphone product fails. Therefore, a microphone diaphragm is needed to solve the above problems.
SUMMERY OF THE UTILITY MODEL
A first object of the utility model is to provide a microphone vibrating diaphragm can guarantee microphone low frequency response performance, makes the structure that loses heart under big atmospheric pressure effect, and it is bigger to open the angle, improves the volume of losing heart, reduces the deformation volume of vibrating diaphragm.
A second object of the present invention is to provide a microphone, which can ensure low frequency response performance of the microphone by applying the above-mentioned microphone diaphragm, thereby improving the stability of the microphone.
In order to realize the purpose, the following technical scheme is provided:
on the one hand, a microphone vibrating diaphragm is provided, including the vibrating diaphragm body, set up the first hole of disappointing of unclosed annular on the vibrating diaphragm body and lose heart the structure in order to form, it includes vibration portion and connecting portion to lose heart the structure, connecting portion with the vibrating diaphragm body is connected, just the length of connecting portion is greater than the width in the first hole of disappointing, it can for to lose heart the structure vibrating diaphragm body luffing motion, with the adjustment the volume of disappointing in the first hole of disappointing.
As the alternative of microphone vibrating diaphragm, first disappointing hole is including the main part and the extension that are linked together, the both ends of main part all are provided with the extension, just the extending direction of extension with the extending direction of main part is the contained angle setting.
As an alternative of the microphone diaphragm, the air release structure is provided with a second air release hole.
As an alternative to the microphone diaphragm, the second air-release hole in at least one of the air-release structures is linear.
As an alternative of the microphone diaphragm, at least two second air release holes are arranged in parallel at intervals.
As an alternative of the microphone diaphragm, the distance between two adjacent second air release holes is 1 μm-10 μm; and/or the length of the second air leakage hole is 1-20 μm.
As an alternative to the microphone diaphragm, the second air-release hole in at least one of the air-release structures is an unclosed annular shape, and the shape of the second air-release hole is substantially the same as the outer contour shape of the air-release structure.
As an alternative of the microphone diaphragm, the distance between the second air release hole and the edge of the outer contour of the air release structure is 1 μm-10 μm.
As an alternative of the microphone diaphragm, N air release structures are arranged along the circumferential direction of the diaphragm body, wherein N is larger than or equal to 1.
As an alternative of the microphone diaphragm, the width of the first air release hole is 0 μm to 5 μm, the circumference of the first air release hole is 10 μm to 100 μm, and the distance between the two air release holes is 1 μm to 20 μm.
In another aspect, a microphone is provided, which includes a microphone diaphragm as described above.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model provides a microphone vibrating diaphragm, including the vibrating diaphragm body, set up the first disappointing hole of unclosed annular in order to form disappointing structure on the vibrating diaphragm body, disappointing structure includes vibration portion and connecting portion, and connecting portion are connected with the vibrating diaphragm body, and the length of connecting portion is greater than the width in the first hole that loses heart, and disappointing structure can be for the luffing motion of vibrating diaphragm body to the first volume of disappointing in hole of adjustment. Microphone vibrating diaphragm passes through the setting of connecting portion, can reduce the rigidity of being connected between structure of disappointing and the vibrating diaphragm body to make the structure of disappointing more easily for vibrating diaphragm body luffing motion, thereby make the range of opening of structure of disappointing under the effect of external acoustic pressure bigger, the volume of disappointing is increased, improves the ability of disappointing, thereby improves the reliability of vibrating diaphragm body.
The utility model provides a microphone, through using above-mentioned microphone vibrating diaphragm, can guarantee microphone low frequency response performance, improve the stability of microphone.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a schematic cross-sectional view of a microphone according to an embodiment of the present invention in one direction;
fig. 2 is a schematic cross-sectional view of a microphone in another direction according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first air leakage structure according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a second air leakage structure according to an embodiment of the present invention;
fig. 5 is a top view of a microphone diaphragm according to a first embodiment of the present invention;
fig. 6 is a schematic structural view of a first air leakage structure according to a second embodiment of the present invention;
fig. 7 is a schematic structural view of a second air leakage structure according to a second embodiment of the present invention;
fig. 8 is a schematic structural view of a third air leakage structure according to the second embodiment of the present invention;
fig. 9 is a schematic structural view of a fourth air release structure according to the second embodiment of the present invention;
fig. 10 is a schematic structural view of a fifth air leakage structure according to the second embodiment of the present invention;
fig. 11 is a schematic structural view of a sixth air leakage structure according to the second embodiment of the present invention;
fig. 12 is a schematic structural diagram of a first air leakage structure according to a third embodiment of the present invention;
fig. 13 is a schematic structural diagram of a second air leakage structure according to a third embodiment of the present invention.
Reference numerals:
100-a substrate; 110-a first support layer; 120-a second support layer; 200-a microphone diaphragm; 300-a back plate;
201-a diaphragm body; 2011-first bleed hole; 20111-a body portion; 20112-an extension;
202-air leakage structure; 2021a, 2021 b-second bleed hole.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the present invention is further described below by referring to the drawings and the detailed description.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used in the orientation or positional relationship shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
Example one
As shown in fig. 1-2, the present embodiment provides a microphone including a substrate 100, a microphone diaphragm 200, and a backplate 300. The bottom surface of the microphone diaphragm 200 is disposed on the substrate 100 through the first supporting layer 110, and the top surface of the microphone diaphragm 200 is connected to the backplate 300 through the second supporting layer 120.
The substrate 100 is made of a semiconductor material, which may be, for example, silicon. The backplate 300 may be a silicon nitride, polysilicon composite layer. The first support layer 110 over the substrate 100 may be silicon oxide, and the first support layer 110 may be formed by a silicon micro-machining process or etching. The second supporting layer 120 above the microphone diaphragm 200 may be silicon oxide, or may be formed by a silicon micro-machining process or etching.
As shown in fig. 2-4, in order to improve the efficiency of losing air of microphone diaphragm 200, prevent microphone diaphragm 200 excessive deformation under the acoustic pressure effect, the microphone diaphragm 200 that this embodiment provided includes diaphragm body 201, set up the first hole 2011 of losing air of unclosed annular on diaphragm body 201 in order to form the structure 202 of losing air, it includes vibrating part and connecting portion to lose air the structure 202, connecting portion are connected with diaphragm body 201, and the length of connecting portion is greater than the width of first hole 2011 of losing air, it can rock from top to bottom for diaphragm body 201 to lose air the structure 202, in order to adjust the volume of losing air of first hole 2011 of losing air.
In addition, compared with the circular air-bleed structure in the prior art, the microphone diaphragm 200 provided by the embodiment has the advantages of low cost, convenience in processing and applicability to mass production.
Optionally, the first air release hole 2011 includes a main body portion 20111 and an extending portion 20112 that are communicated with each other, both ends of the main body portion 20111 are provided with the extending portions 20112, and an extending direction of the extending portion 20112 and an extending direction of the main body portion 20111 form an included angle. Specifically, set up main part 20111 in order to form the vibration portion on diaphragm body 201, set up extension 20112 in order to form connecting portion on diaphragm body 201, wherein, connecting portion and vibration portion roughly form the fan structure of taking the handle, through the connecting portion that extends to in the structure 202 that loses heart for diaphragm body 201 luffing motion, improve the efficiency of ventilating of first release hole 2011.
Alternatively, the width of the first air release hole 2011 is 0 μm to 5 μm, the circumference of the first air release hole 2011 is 10 μm to 100 μm, the distance w1 between the two ends of the first air release hole 2011 is 1 μm to 20 μm, and the length of the extension 20112 may be 2 μm to 6 μm. Note that when the width of the first air release hole 2011 is 0 μm, that is, the first air release hole 2011 is a slit, the outer edge of the air release structure 202 contacts the diaphragm body 201. For example, the extending direction of the extending portion 20112 may be substantially perpendicular to the extending direction of the main body portion 20111. The extension 20112 is smoothly connected to the body 20111. In other embodiments, the extending direction of the extending portion 20112 may be arranged at an acute angle or an obtuse angle with the extending direction of the main body portion 20111.
Alternatively, as shown in fig. 3, the first air release hole 2011 may have an extension 20112 at each end of the main body 20111 extending into the main body 20111, and the first air release hole 2011 may have a shape that forms a connection portion of the air release structure 202 inside the first air release hole 2011. As shown in fig. 4, the first air release hole 2011 may also have extensions 20112 at two ends of the main body 20111 extending to the outside, and the first air release hole 2011 of this shape forms a connection portion of the air release structure 202 outside the first air release hole 2011. The air release structures 202 of the two structures can realize the function of easily swinging up and down relative to the diaphragm body 201.
For example, the main body 20111 may be a non-closed circular ring, and the extensions 20112 at both ends of the main body 20111 extend inward or outward. Or the main body 20111 may also be unclosed and bent, and the extensions 20112 at both ends of the main body 20111 extend inward or outward. Further preferably, the turning of the first air release hole 2011 may be in smooth transition connection, which can improve the processing manufacturability of the air release structure 202.
In the embodiment, N air escape structures 202 are arranged along the circumferential direction of the diaphragm body 201, wherein N is greater than or equal to 1. As shown in fig. 5, when the number of the air escape structures 202 is plural, the plural air escape structures 202 are arranged at even intervals along the circumferential direction of the diaphragm body 201. Alternatively, the shapes of the plurality of air leakage structures 202 can be identical or different, and can be designed according to the needs.
Example two
As shown in fig. 6 to 11, the present embodiment is different from the first embodiment in that: in order to improve the air release capability of the diaphragm, the air release structure 202 is provided with a second air release hole 2021a, and the second air release hole 2021a is linear.
Optionally, the extending direction of the second relief hole 2021a is substantially parallel to the connecting line of the two ends of the first relief hole 2011. Of course, in other embodiments, the extending direction of the second relief hole 2021a may also be substantially perpendicular to or at an acute angle with the connecting line between the two ends of the first relief hole 2011, which is not illustrated herein.
Illustratively, the width of the second relief hole 2021a is 0 μm to 5 μm. When the width of the second relief hole 2021a is 0 μm, the second relief hole 2021a is a slit on the relief structure 202. Illustratively, the length w4 of the second relief hole 2021a is 1 μm to 20 μm.
Alternatively, the number of the second relief holes 2021a may be any number of one, two, three, and the like. Alternatively, when the number of the second relief holes 2021a is greater than or equal to two, at least two second relief holes 2021a are arranged in parallel at intervals. The distance w5 between two adjacent second air-leakage holes 2021a is 1 μm-10 μm.
A plurality of air escape structures 202 may be provided on one diaphragm body 201, and the plurality of air escape structures 202 may be any one of the air escape structures 202 shown in fig. 6 to 11, or any combination of the air escape structures 202 shown in fig. 6 to 11, which is not illustrated herein.
EXAMPLE III
As shown in fig. 12 to 13, the present embodiment is different from the first embodiment in that: in order to improve the air-release capability of the diaphragm, the air-release structure 202 is provided with a second air-release hole 2021b, and the second air-release hole 2021b is in an unclosed annular shape.
Alternatively, the shape of the second relief hole 2021b is substantially the same as the outer contour shape of the relief structure 202. Of course, in other embodiments, the second relief hole 2021b may also be an unclosed ring with other shapes.
Illustratively, the distance w2 between the two ends of the second relief hole 2021b is 1 μm to 20 μm. The width of the second relief hole 2021b is 0 μm to 5 μm. When the width of the second relief hole 2021b is 0 μm, the second relief hole 2021b is a slit on the relief structure 202.
Illustratively, the distance w3 between the second relief hole 2021b and the outer contour edge of the relief structure 202 is 1 μm to 10 μm.
A plurality of air escape structures 202 may be provided on one diaphragm body 201, and the plurality of air escape structures 202 may be any one of the air escape structures 202 shown in fig. 12-13, or any combination of the air escape structures 202 shown in fig. 12-13, which is not illustrated herein.
Example four
The present embodiment is different from the second embodiment and the third embodiment in that: the diaphragm body 201 provided in this embodiment is provided with a plurality of air escape structures 202, and the plurality of air escape structures 202 may be any one of the air escape structures 202 shown in fig. 4 to 13, or may be any combination of the air escape structures 202 shown in fig. 4 to 13, which is not illustrated herein.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (11)
1. The utility model provides a microphone diaphragm, a serial communication port, including diaphragm body (201), set up the first hole of disappointing (2011) of disappointing in order to form on diaphragm body (201) and lose heart structure (202), it includes vibration portion and connecting portion to lose heart structure (202), connecting portion with diaphragm body (201) are connected, just the length of connecting portion is greater than the width in first hole of disappointing (2011), it can be for to lose heart structure (202) diaphragm body (201) luffing motion, in order to adjust the volume of disappointing of first hole of disappointing (2011).
2. The microphone diaphragm of claim 1, wherein the first air release hole (2011) includes a main body portion (20111) and an extension portion (20112) that are connected, the two ends of the main body portion (20111) are both provided with the extension portion (20112), and an extending direction of the extension portion (20112) and an extending direction of the main body portion (20111) form an included angle.
3. The microphone diaphragm of claim 1, wherein the air-bleed structure (202) is provided with a second air-bleed hole (2021a/2021 b).
4. The microphone diaphragm of claim 3, wherein the second relief hole (2021a) is linear.
5. The microphone diaphragm of claim 4, wherein at least two of the second relief holes (2021a) are arranged in parallel at intervals.
6. The microphone diaphragm of claim 5, wherein the distance between two adjacent second relief holes (2021a) is 1 μm to 10 μm; and/or the length of the second relief hole (2021a) is 1 μm to 20 μm.
7. The microphone diaphragm of claim 3, wherein the second relief hole (2021b) is an unclosed annular shape, and the shape of the second relief hole (2021b) is substantially the same as the outer contour shape of the relief structure (202).
8. The microphone diaphragm of claim 7, wherein the distance between the second relief hole (2021b) and the outer contour edge of the relief structure (202) is 1 μm to 10 μm.
9. The microphone diaphragm of any one of claims 1 to 8, wherein N bleed structures (202) are arranged along the circumferential direction of the diaphragm body (201), where N is greater than or equal to 1.
10. The microphone diaphragm according to any one of claims 1 to 8, wherein the width of the first air release hole (2011) is 0 μm to 5 μm, the circumference of the first air release hole (2011) is 10 μm to 100 μm, and the interval between both ends of the first air release hole (2011) is 1 μm to 20 μm.
11. A microphone, comprising the microphone diaphragm according to any one of claims 1 to 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120243027.9U CN214177548U (en) | 2021-01-28 | 2021-01-28 | Microphone diaphragm and microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120243027.9U CN214177548U (en) | 2021-01-28 | 2021-01-28 | Microphone diaphragm and microphone |
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| Publication Number | Publication Date |
|---|---|
| CN214177548U true CN214177548U (en) | 2021-09-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120243027.9U Ceased CN214177548U (en) | 2021-01-28 | 2021-01-28 | Microphone diaphragm and microphone |
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| CN (1) | CN214177548U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
| CN115119121A (en) * | 2022-08-22 | 2022-09-27 | 瑶芯微电子科技(上海)有限公司 | Vibrating diaphragm and MEMS microphone |
-
2021
- 2021-01-28 CN CN202120243027.9U patent/CN214177548U/en not_active Ceased
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
| CN114125664B (en) * | 2021-11-15 | 2024-03-19 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
| CN115119121A (en) * | 2022-08-22 | 2022-09-27 | 瑶芯微电子科技(上海)有限公司 | Vibrating diaphragm and MEMS microphone |
| CN115119121B (en) * | 2022-08-22 | 2022-11-22 | 瑶芯微电子科技(上海)有限公司 | Vibrating diaphragm and MEMS microphone |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| IW01 | Full invalidation of patent right |
Decision date of declaring invalidation: 20220517 Decision number of declaring invalidation: 55720 Granted publication date: 20210910 |
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| IW01 | Full invalidation of patent right |