CN218871697U - Low-concentration sulfur hexafluoride waste gas adsorption and purification device - Google Patents
Low-concentration sulfur hexafluoride waste gas adsorption and purification device Download PDFInfo
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- CN218871697U CN218871697U CN202022863580.0U CN202022863580U CN218871697U CN 218871697 U CN218871697 U CN 218871697U CN 202022863580 U CN202022863580 U CN 202022863580U CN 218871697 U CN218871697 U CN 218871697U
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Abstract
The utility model provides a low concentration sulfur hexafluoride waste gas adsorbs purification device, includes that the inlet gas main line, first molecular sieve jar, second molecular sieve jar, exhaust main line, recovery purification main line, gas holder, first inlet branch pipeline and second inlet branch pipeline. The utility model discloses be suitable for low concentration sulfur hexafluoride waste gas adsorption purification processing, to the sulfur hexafluoride waste gas adsorption treatment of low concentration, rethread regeneration treatment will adsorb sulfur hexafluoride gas recovery, obtain the sulfur hexafluoride of higher concentration is gaseous. The utility model discloses a sulfur hexafluoride exhaust purification of low concentration handles, and it is gaseous through the sulfur hexafluoride that obtains higher concentration after handling, has reduced greenhouse gas's emission, has both protected the environment, has practiced thrift the resource again, and economic benefits is showing with environmental benefit.
Description
Technical Field
The utility model belongs to the technical field of sulfur hexafluoride purification processing, concretely relates to low concentration sulfur hexafluoride waste gas adsorbs purification device.
Background
Sulfur hexafluoride (SF) 6 ) The gas has high dielectric strength characteristic and stable chemical property, so that the gas becomes a main insulating and arc extinguishing medium of high-voltage switch equipment and is widely applied to the power industry. Sulfur hexafluoride (SF) 6 ) SF is one of six greenhouse gases prohibited from being discharged by the Kyoto protocol and the decomposition of the gas can generate part of toxic and harmful gases 6 The gas cannot be discharged to the atmosphere at will.
At present, low concentration of SF 6 The exhaust gases are generally discharged directly or stored in a vessel, the SF being discharged directly 6 The gas not only pollutes the environment but also causes resource waste, and the SF stored in the container 6 The waste gas occupies a field because the waste gas has to be stored for years without related treatment equipment. Therefore, it is highly desirable to design a low concentration of SF 6 The waste gas is adsorbed, purified and reused.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a solve the weak point among the prior art, provide a low concentration sulfur hexafluoride waste gas adsorption purification device, can be to low concentration SF 6 Waste gas is adsorbed and purified to obtain SF with higher concentration 6 Gas, the adsorption module of which can be reused by regeneration, both to reduce SF 6 The gas discharge can be recycled for many times.
In order to solve the technical problem, the utility model adopts the following technical scheme: a low-concentration sulfur hexafluoride waste gas adsorption purification device comprises an air inlet main pipeline, a first molecular sieve tank, a second molecular sieve tank, an exhaust main pipeline, a recovery purification main pipeline and an air storage tank; the lower parts of the first molecular sieve tank and the second molecular sieve tank are respectively provided with a first air inlet branch pipeline and a second air inlet branch pipeline, air inlets of the first air inlet branch pipeline and the second air inlet branch pipeline are connected with an air outlet of an air inlet main pipeline, the upper parts of the first molecular sieve tank and the second molecular sieve tank are respectively provided with a first exhaust branch pipeline and a second exhaust branch pipeline, air outlets of the first exhaust branch pipeline and the second exhaust branch pipeline are connected with an air inlet of the air outlet main pipeline, an air inlet of the recovery purification main pipeline is connected with a first recovery purification branch pipeline and a second recovery purification branch pipeline in parallel, air inlets of the first recovery purification branch pipeline and the second recovery purification branch pipeline are respectively connected with the first exhaust branch pipeline and the second exhaust branch pipeline, and an air outlet of the recovery purification main pipeline is connected with an air inlet of an air storage tank.
An air inlet joint and a first electromagnetic valve are sequentially arranged on the air inlet main pipeline along the airflow direction;
a second electromagnetic valve and a first needle valve are sequentially arranged on the first air inlet branch pipeline along the airflow direction;
and a third electromagnetic valve and a second needle valve are sequentially arranged on the second air inlet branch pipeline along the airflow direction.
A first heating rod and a second heating rod are respectively arranged in the first molecular sieve tank and the second molecular sieve tank; and a first pressure gauge and a second pressure gauge are respectively arranged on the first molecular sieve tank and the second molecular sieve tank.
A third needle valve and a fourth electromagnetic valve are sequentially arranged on the first exhaust branch pipeline along the airflow direction;
a fourth needle valve and a fifth electromagnetic valve are sequentially arranged on the second exhaust branch pipeline along the airflow direction;
the exhaust main pipeline is sequentially provided with a first SF along the airflow direction 6 A concentration sensor, a sixth electromagnetic valve, a third molecular sieve and a second SF 6 A concentration sensor and a seventh electromagnetic valve.
The gas inlet of the first recovery and purification branch pipeline is connected between the third needle valve and the fourth electromagnetic valve of the first exhaust branch pipeline, and the gas inlet of the second recovery and purification branch pipeline is connected between the fourth needle valve and the fifth electromagnetic valve of the second exhaust branch pipeline;
the first recovery and purification branch pipeline and the second recovery and purification branch pipeline are respectively provided with an eighth electromagnetic valve and a ninth electromagnetic valve.
And a first temperature sensor, a cooler, a second temperature sensor, a tenth electromagnetic valve, a compressor and an eleventh electromagnetic valve are sequentially arranged on the recovery and purification main pipeline along the airflow direction.
A pressure increasing pipeline is connected in parallel between the air inlet and the air outlet of the tenth electromagnetic valve, and a twelfth electromagnetic valve, a negative pressure compressor and a thirteenth electromagnetic valve are sequentially arranged on the pressure increasing pipeline along the airflow direction.
Adopt above-mentioned technical scheme, the utility model discloses holistic theory of operation does: low concentration of SF 6 Waste gas firstly enters the first molecular sieve tank or the second molecular sieve tank for adsorption, the first molecular sieve tank or the second molecular sieve tank is alternately used (the other molecular sieve tank is regenerated during one adsorption operation), and the waste gas is adsorbed according to the SF at the outlet of the first molecular sieve tank or the second molecular sieve tank 6 Gas concentration, control of low concentration SF 6 Waste gas treatment process, after adsorption saturation, the adsorbed SF in the first molecular sieve tank or the second molecular sieve tank 6 The gas is treated to be recycled, and SF with higher concentration is obtained after treatment 6 The gas is stored in a gas tank.
Low concentration of SF 6 The waste gas adsorption purification treatment process comprises the following steps: external low concentration of SF 6 Waste gas is connected with the gas inlet joint, and the first electromagnetic valve and the second electromagnetic valve are opened, SF 6 Waste gas enters the first gas inlet branch pipeline through the gas inlet main pipeline, the pressure of the first molecular sieve tank and the flow of the gas passing through are controlled by adjusting the opening degree of the first needle valve and the third needle valve, the gas enters the first molecular sieve tank through the first needle valve, and low-concentration SF (sulfur hexafluoride) gas 6 The waste gas is adsorbed by the adsorbent in the first molecular sieve tank, and the unadsorbed gas enters the main exhaust pipeline through the fourth electromagnetic valve and is first SF 6 Concentration sensor for detecting SF contained in gas in exhaust main pipeline 6 The gas concentration is that the gas enters a third molecular sieve tank through a sixth electromagnetic valve and is treated again, and the gas enters a rear stage from the third molecular sieve tank and is treated by a second SF 6 The concentration sensor detects again the SF contained in the gas 6 Gas concentration due to SF contained in the gas entering the third molecular sieve tank 6 The gas concentration is low, when the gas contains SF 6 When the concentration exceeds a set value, the adsorption capacity of the third molecular sieve tank reaches the limit, and the third molecular sieve tank needs to be replaced and passes through the third molecular sieve tankAnd discharging the treated tail gas through a seventh electromagnetic valve.
First SF 6 The concentration sensor controls whether the first molecular sieve tank and the second molecular sieve tank are alternately used according to the detected concentration, and when the detected SF is 6 And if the gas concentration is higher than the set value, closing the second electromagnetic valve and the fourth electromagnetic valve, and opening the third electromagnetic valve and the fifth electromagnetic valve. SF 6 The waste gas enters a second molecular sieve tank for adsorption treatment, and SF 6 The waste gas enters a second gas inlet branch pipeline from the gas inlet main pipeline, the pressure of a second molecular sieve tank and the flow of the gas passing through are controlled by adjusting the opening degree of a second needle valve and a fourth needle valve, the gas enters the second molecular sieve tank through the second needle valve, and the low-concentration SF gas enters a second molecular sieve tank through the second needle valve 6 The waste gas is adsorbed by the adsorbent in the second molecular sieve tank, and the unadsorbed gas enters the main exhaust pipeline through the fifth electromagnetic valve and the first SF 6 Concentration sensor for detecting SF contained in gas in exhaust main pipeline 6 The gas concentration is that the gas enters a third molecular sieve tank through a sixth electromagnetic valve and is treated again, and the gas enters a rear stage from the third molecular sieve tank and is treated by a second SF 6 The concentration sensor again detects the SF contained in the gas 6 Gas concentration due to SF contained in the gas entering the third molecular sieve tank 6 The gas concentration is low, when the gas contains SF 6 When the concentration exceeds a set value, the adsorption capacity of the third molecular sieve tank reaches the limit, the third molecular sieve tank needs to be replaced, and the tail gas treated by the third molecular sieve tank is discharged through a seventh electromagnetic valve.
The desorption regeneration treatment can be carried out on the first molecular sieve tank while the second molecular sieve tank is in adsorption operation, and the desorption regeneration treatment can also be carried out on the first molecular sieve tank independently after the second molecular sieve tank is in adsorption operation. The first molecular sieve tank is regenerated and SF 6 The gas purification process comprises the following steps: the second electromagnetic valve is in a closed state, the eighth electromagnetic valve, the tenth electromagnetic valve and the eleventh electromagnetic valve are opened, the compressor is started, the adsorbed gas in the first molecular sieve tank is recovered through the recovery and purification main pipeline and the first recovery and purification branch pipeline, and when the first pressure gauge monitors that the pressure in the first molecular sieve tank is less than 0.1MPa (absolute pressure), the tenth electromagnetic valve is openedTwo solenoid valves and thirteenth solenoid valves, close the tenth solenoid valve, start the negative pressure compressor, start first heating rod when pressure is the negative pressure in first molecular sieve jar and heat the adsorbent in the first molecular sieve jar, first heating rod reaches the setting value temperature and keeps this temperature value promptly, the cooler lets in the cooling water from the cooling water import, flow out through the cooling water outlet, first temperature sensor is used for detecting cooler air inlet temperature, second temperature sensor is used for detecting cooler gas outlet temperature, if second temperature sensor detects the gas temperature value and is higher than the setting value, then reduce the heating temperature of first heating rod, first heating rod heats for a long time and reaches the setting value and stops the heating promptly. In the process, the gas is recycled to the gas storage tank through the negative pressure compressor and the compressor through the eleventh electromagnetic valve to obtain SF with higher concentration 6 A gas. Similarly, the desorption process of the second molecular sieve tank is the same as that of the first molecular sieve tank, and is not described herein again. The first molecular sieve tank and the second molecular sieve tank are alternately used, and can be recycled after regeneration.
To sum up, the utility model discloses be suitable for low concentration sulfur hexafluoride waste gas adsorption purification processing, to the sulfur hexafluoride waste gas adsorption processing of low concentration, rethread regeneration treatment, with the gaseous recovery of adsorbed sulfur hexafluoride, obtain the gaseous sulfur hexafluoride of higher concentration.
The utility model discloses a sulfur hexafluoride exhaust purification of low concentration handles, and it is gaseous through the sulfur hexafluoride that obtains higher concentration after handling, has reduced greenhouse gas's emission, has both protected the environment, has practiced thrift the resource again, and economic benefits is showing with environmental benefit.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
As shown in fig. 1, the low concentration sulfur hexafluoride waste gas adsorption purification device of the present invention includes a main gas inlet pipeline 45, a first molecular sieve tank 8, a second molecular sieve tank 13, a main gas exhaust pipeline 37, a main recovery and purification pipeline 38 and a gas storage tank 35; a first air inlet branch pipeline 39 and a second air inlet branch pipeline 40 are respectively arranged at the lower parts of the first molecular sieve tank 8 and the second molecular sieve tank 13, air inlets of the first air inlet branch pipeline 39 and the second air inlet branch pipeline 40 are both connected with an air outlet of an air inlet main pipeline 45, a first exhaust branch pipeline 41 and a second exhaust branch pipeline 42 are respectively arranged at the upper parts of the first molecular sieve tank 8 and the second molecular sieve tank 13, air outlets of the first exhaust branch pipeline 41 and the second exhaust branch pipeline 42 are both connected with an air inlet of an exhaust main pipeline 37, an air inlet of the recovery and purification main pipeline 38 is connected with a first recovery and purification branch pipeline 43 and a second recovery and purification branch pipeline 44 in parallel, air inlets of the first recovery and purification branch pipeline 43 and the second recovery and purification branch pipeline 44 are respectively connected to the first exhaust branch pipeline 41 and the second exhaust branch pipeline 42, and an air outlet of the recovery and purification main pipeline 38 is connected with an air inlet of an air storage tank 35.
The air inlet joint 1 and the first electromagnetic valve 2 are sequentially arranged on the air inlet main pipeline 45 along the airflow direction;
the first air inlet branch pipeline 39 is sequentially provided with a second electromagnetic valve 5 and a first needle valve 7 along the air flow direction;
the second air intake branch pipe 40 is provided with a third electromagnetic valve 3 and a second needle valve 4 in sequence along the air flow direction.
A first heating rod 11 and a second heating rod 36 are respectively arranged in the first molecular sieve tank 8 and the second molecular sieve tank 13; and a first pressure gauge 9 and a second pressure gauge 6 are respectively arranged on the first molecular sieve tank 8 and the second molecular sieve tank 13.
The first exhaust branch pipeline 41 is sequentially provided with a third needle valve 10 and a fourth electromagnetic valve 15 along the airflow direction;
the fourth needle valve 12 and the fifth electromagnetic valve 16 are sequentially arranged on the second exhaust branch pipeline 42 along the airflow direction;
the exhaust main pipeline 37 is sequentially provided with a first SF along the airflow direction 6 A concentration sensor 18, a sixth electromagnetic valve 19, a third molecular sieve 20 and a second SF 6 A concentration sensor 21 and a seventh electromagnetic valve 22.
An inlet port of the first recovery and purification branch line 43 is connected between the third needle valve 10 and the fourth solenoid valve 15 of the first exhaust branch line 41, and an inlet port of the second recovery and purification branch line 44 is connected between the fourth needle valve 12 and the fifth solenoid valve 16 of the second exhaust branch line 42;
the first recovery and purification branch line 43 and the second recovery and purification branch line 44 are respectively provided with an eighth solenoid valve 14 and a ninth solenoid valve 17.
The recovery and purification main pipeline 38 is provided with a first temperature sensor 24, a cooler 25, a second temperature sensor 28, a tenth electromagnetic valve 29, a compressor 33 and an eleventh electromagnetic valve 34 in sequence along the gas flow direction.
A pressure increasing pipeline 46 is connected in parallel between the air inlet and the air outlet of the tenth electromagnetic valve 29, and a twelfth electromagnetic valve 30, a negative pressure compressor 31 and a thirteenth electromagnetic valve 32 are sequentially arranged on the pressure increasing pipeline 46 along the air flow direction.
The utility model discloses holistic theory of operation does: low concentration of SF 6 The waste gas firstly enters the first molecular sieve tank 8 or the second molecular sieve tank 13 for adsorption, the first molecular sieve tank 8 or the second molecular sieve tank 13 is alternately used (the other is regenerated during one adsorption operation), and the waste gas is adsorbed according to the SF at the outlet of the first molecular sieve tank 8 or the second molecular sieve tank 13 6 Gas concentration, control of low concentration SF 6 A waste gas treatment process, after the adsorption saturation, the adsorbed SF in the first molecular sieve tank 8 or the second molecular sieve tank 13 is treated 6 The gas is treated to be recycled, and SF with higher concentration is obtained after treatment 6 The gas is stored in the gas tank 35.
Low concentration of SF 6 The waste gas adsorption purification treatment process comprises the following steps: external low concentration of SF 6 The waste gas is connected with an air inlet joint 1, a first electromagnetic valve 2 and a second electromagnetic valve 5 are opened 6 Waste gas enters the first air inlet branch pipeline 39 through the air inlet main pipeline 45, the pressure of the first molecular sieve tank 8 and the flow of the gas passing through are controlled by adjusting the opening degree of the first needle valve 7 and the third needle valve 10, the gas enters the first molecular sieve tank 8 through the first needle valve 7, and low-concentration SF 6 The waste gas is adsorbed by the adsorbent in the first molecular sieve tank 8, the eighth electromagnetic valve 14 is closed, and the unadsorbed gas enters the main exhaust pipeline 37 through the fourth electromagnetic valve 15, namely the first SF 6 The concentration sensor detects SF contained in the gas in the exhaust main pipe 37 6 The gas concentration is that the gas enters a third molecular sieve tank 20 through a sixth electromagnetic valve 19 and is treated again, and the gas enters the rear stage from the third molecular sieve tank 20, namely, the second SF 6 Rechecking the concentration sensorMeasuring SF contained in gas 6 Gas concentration due to SF contained in the gas entering the third molecular sieve tank 20 6 The gas concentration is low, when the gas contains SF 6 When the concentration exceeds the set value, it is indicated that the adsorption capacity of the third molecular sieve tank 20 reaches the limit, the third molecular sieve tank 20 needs to be replaced, and the tail gas treated by the third molecular sieve tank 20 is discharged through a seventh electromagnetic valve.
First SF 6 The concentration sensor controls whether the first molecular sieve tank 8 and the second molecular sieve tank 13 are alternately used or not according to the detected concentration, and when the detected SF is 6 The gas concentration is higher than the set value, the second solenoid valve 5 and the fourth solenoid valve 15 are closed, and the third solenoid valve 3 and the fifth solenoid valve 16 are opened. SF 6 The waste gas enters a second molecular sieve tank 13 for adsorption treatment, and SF 6 The waste gas enters the second inlet branch pipeline 40 from the inlet main pipeline 45, the pressure of the second molecular sieve tank 13 and the flow rate of the gas passing through are controlled by adjusting the opening degree of the second needle valve 4 and the fourth needle valve 12, the gas enters the second molecular sieve tank 13 through the second needle valve 4, and the low-concentration SF gas 6 The waste gas is adsorbed by the adsorbent in the second molecular sieve tank 13, and the unadsorbed gas enters the main exhaust pipeline 37 through the fifth electromagnetic valve 16 and is the first SF 6 The concentration sensor detects SF contained in the gas in the exhaust main line 37 6 The gas concentration is that the gas enters a third molecular sieve tank 20 through a sixth electromagnetic valve 19 and is treated again, and the gas enters the rear stage from the third molecular sieve tank 20, namely, the second SF 6 The concentration sensor detects again the SF contained in the gas 6 Gas concentration due to SF contained in the gas entering the third molecular sieve tank 20 6 The gas concentration is low, when the gas contains SF 6 When the concentration exceeds the set value, it is indicated that the adsorption capacity of the third molecular sieve tank 20 reaches the limit, the third molecular sieve tank 20 needs to be replaced, and the tail gas treated by the third molecular sieve tank 20 is discharged through a seventh electromagnetic valve.
While the second molecular sieve tank 13 is performing adsorption work, the first molecular sieve tank 8 may be subjected to desorption regeneration treatment, or the first molecular sieve tank 8 may be subjected to desorption regeneration treatment separately after the adsorption work of the second molecular sieve tank 13 is completed. A first moleculeThe sieve tank 8 is regenerated and SF is added 6 The gas purification process comprises the following steps: when the second electromagnetic valve 5 is in a closed state, the eighth electromagnetic valve 14, the tenth electromagnetic valve 29 and the eleventh electromagnetic valve 34 are opened, the compressor 33 is started, the recovery and purification main pipeline 38 and the first recovery and purification branch pipeline 43 are used for recovering the adsorbed gas in the first molecular sieve tank 8, when the first pressure gauge 9 monitors that the pressure in the first molecular sieve tank 8 is less than 0.1MPa (absolute pressure), the twelfth electromagnetic valve 30 and the thirteenth electromagnetic valve 32 are opened, the tenth electromagnetic valve 29 is closed, the negative pressure compressor 31 is started, when the pressure in the first molecular sieve tank 8 is negative pressure, the first heating rod 11 is started to heat the adsorbent in the first molecular sieve tank 8, the first heating rod 11 reaches a set temperature value, namely, the temperature value is maintained, the cooler 25 is filled with cooling water from the cooling water inlet and flows out through the cooling water outlet, the first temperature sensor 24 is used for detecting the temperature of the air inlet 25, the second temperature sensor 28 is used for detecting the air outlet temperature of the cooler 25, and when the temperature of the gas detected by the second temperature sensor 28 is higher than the set value, the first heating rod 11 is reduced, and the heating of the heating rod is stopped. In the above process, the gas is recovered to the gas storage tank 35 through the negative pressure compressor 31 and the compressor 33 via the eleventh electromagnetic valve 34, so as to obtain SF with higher concentration 6 A gas. Similarly, the desorption process of the second molecular sieve tank 13 is identical to that of the first molecular sieve tank 8, and is not described herein again. The first molecular sieve tank 8 and the second molecular sieve tank 13 are used alternately, and can be recycled after regeneration.
The present embodiment is not intended to limit the shape, material, structure, etc. of the present invention in any form, and all of the technical matters of the present invention belong to the protection scope of the present invention to any simple modification, equivalent change and modification made by the above embodiments.
Claims (7)
1. The utility model provides a low concentration sulfur hexafluoride waste gas adsorbs purification device which characterized in that: the device comprises an air inlet main pipeline, a first molecular sieve tank, a second molecular sieve tank, an air exhaust main pipeline, a recovery and purification main pipeline and an air storage tank; the lower parts of the first molecular sieve tank and the second molecular sieve tank are respectively provided with a first air inlet branch pipeline and a second air inlet branch pipeline, air inlets of the first air inlet branch pipeline and the second air inlet branch pipeline are connected with an air outlet of an air inlet main pipeline, the upper parts of the first molecular sieve tank and the second molecular sieve tank are respectively provided with a first exhaust branch pipeline and a second exhaust branch pipeline, air outlets of the first exhaust branch pipeline and the second exhaust branch pipeline are connected with an air inlet of the air outlet main pipeline, an air inlet of the recovery purification main pipeline is connected with a first recovery purification branch pipeline and a second recovery purification branch pipeline in parallel, air inlets of the first recovery purification branch pipeline and the second recovery purification branch pipeline are respectively connected with the first exhaust branch pipeline and the second exhaust branch pipeline, and an air outlet of the recovery purification main pipeline is connected with an air inlet of an air storage tank.
2. The adsorption purification device for low-concentration sulfur hexafluoride waste gas as claimed in claim 1, wherein: an air inlet joint and a first electromagnetic valve are sequentially arranged on the air inlet main pipeline along the airflow direction;
a second electromagnetic valve and a first needle valve are sequentially arranged on the first air inlet branch pipeline along the airflow direction;
and a third electromagnetic valve and a second needle valve are sequentially arranged on the second air inlet branch pipeline along the airflow direction.
3. The adsorption purification device for low-concentration sulfur hexafluoride waste gas as claimed in claim 1, wherein: a first heating rod and a second heating rod are respectively arranged in the first molecular sieve tank and the second molecular sieve tank; and a first pressure gauge and a second pressure gauge are respectively arranged on the first molecular sieve tank and the second molecular sieve tank.
4. The adsorption purification device for low-concentration sulfur hexafluoride exhaust gas as claimed in claim 1, 2 or 3, wherein: a third needle valve and a fourth electromagnetic valve are sequentially arranged on the first exhaust branch pipeline along the airflow direction;
a fourth needle valve and a fifth electromagnetic valve are sequentially arranged on the second exhaust branch pipeline along the airflow direction;
the exhaust main pipeline is sequentially provided with a first SF along the airflow direction 6 Concentration sensor, sixth electromagnetic valveA third molecular sieve, a second SF 6 A concentration sensor and a seventh electromagnetic valve.
5. The adsorption purification device for low-concentration sulfur hexafluoride waste gas as claimed in claim 4, wherein: the gas inlet of the first recovery and purification branch pipeline is connected between the third needle valve and the fourth electromagnetic valve of the first exhaust branch pipeline, and the gas inlet of the second recovery and purification branch pipeline is connected between the fourth needle valve and the fifth electromagnetic valve of the second exhaust branch pipeline;
and the first recovery and purification branch pipeline and the second recovery and purification branch pipeline are respectively provided with an eighth electromagnetic valve and a ninth electromagnetic valve.
6. The adsorption purification device for low-concentration sulfur hexafluoride waste gas as claimed in claim 5, wherein: and a first temperature sensor, a cooler, a second temperature sensor, a tenth electromagnetic valve, a compressor and an eleventh electromagnetic valve are sequentially arranged on the recovery and purification main pipeline along the airflow direction.
7. The adsorption purification device for low-concentration sulfur hexafluoride waste gas as claimed in claim 6, wherein: a pressure increasing pipeline is connected in parallel between the air inlet and the air outlet of the tenth electromagnetic valve, and a twelfth electromagnetic valve, a negative pressure compressor and a thirteenth electromagnetic valve are sequentially arranged on the pressure increasing pipeline along the airflow direction.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022863580.0U CN218871697U (en) | 2020-12-03 | 2020-12-03 | Low-concentration sulfur hexafluoride waste gas adsorption and purification device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022863580.0U CN218871697U (en) | 2020-12-03 | 2020-12-03 | Low-concentration sulfur hexafluoride waste gas adsorption and purification device |
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