CN218743599U - Quick discharge groove - Google Patents
Quick discharge groove Download PDFInfo
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- CN218743599U CN218743599U CN202223400062.0U CN202223400062U CN218743599U CN 218743599 U CN218743599 U CN 218743599U CN 202223400062 U CN202223400062 U CN 202223400062U CN 218743599 U CN218743599 U CN 218743599U
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Abstract
The utility model provides a quick discharge tank includes: the device comprises a cleaning tank, a bubbling assembly, a spraying assembly, a quick discharge valve and a locking assembly; a liquid discharge pipe suitable for mounting the quick discharge valve is arranged at the bottom of the cleaning tank; the locking assembly and the quick-discharge valve are sleeved on the liquid discharge pipe, and the locking assembly is suitable for fixing the quick-discharge valve on the liquid discharge pipe; the bubbling assembly and the spraying assembly are arranged above the cleaning tank; the bubbling assembly is suitable for bubbling nitrogen into the liquid medicine in the cleaning tank; the spraying assembly is suitable for spraying and cleaning objects to be cleaned in the cleaning tank. The cleaning liquid in the tank can be quickly drained by arranging the bottom drainage connecting pipe with a large caliber and the drainage valve. Thereby achieving good cleaning effect.
Description
Technical Field
The utility model relates to a wash the field, concretely relates to quick drain tank.
Background
In the cleaning industry, in full-automatic wet cleaning equipment, quick drainage is an important cleaning function; the method can effectively strip dirt off the surface of the wafer or the cell. The user wants the drainage rate to be as fast as possible without causing fragments, which means that the drain opening is made large. The manufacturing of the existing groove body is difficult, the cost is difficult to control, and the overall dimension is also difficult to control.
Therefore, there is a need for a quick drain tank that quickly drains the cleaning solution in the tank to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a quick discharge tank to the realization carries out the purpose of quick discharge to the washing liquid in the washing tank.
In order to solve the technical problem, the utility model provides a quick drain tank, include:
the device comprises a cleaning tank, a bubbling assembly, a spraying assembly, a quick discharge valve and a locking assembly;
a liquid discharge pipe suitable for mounting the quick discharge valve is arranged at the bottom of the cleaning tank;
the locking assembly and the quick-discharge valve are sleeved on the liquid discharge pipe, and the locking assembly is suitable for fixing the quick-discharge valve on the liquid discharge pipe;
the bubbling assembly and the spraying assembly are arranged above the cleaning tank;
the bubbling assembly is suitable for bubbling nitrogen into the liquid medicine in the cleaning tank;
the spraying assembly is suitable for spraying and cleaning the object to be cleaned in the cleaning tank.
Further, the bubbling assembly comprises a bubbling tube;
the section of the air blowing pipe is L-shaped;
and one end of the air blowing pipe extends into the cleaning tank and is attached to the side wall of the cleaning tank, and the other end of the air blowing pipe is communicated with an external nitrogen source.
Furthermore, the quick discharge groove also comprises a sheet detection device;
the sheet detection device is fixedly arranged on the outer wall of the cleaning tank.
Further, the locking assembly comprises a lock nut and a compression ring;
the outer side wall of the quick exhaust valve is provided with an external thread matched with the locking nut;
the locking nut and the compression ring are sequentially sleeved on the liquid discharge pipe;
the compression ring is inserted into the quick-release valve;
the locking nut is suitable for compressing the compression ring and the liquid discharge pipe when being screwed on the quick discharge valve.
Furthermore, the pressing ring is conical, and the diameter of one end inserted into the quick-release valve is smaller than that of the end far away from the quick-release valve.
Furthermore, the quick-release valve comprises a valve body, a clamping seat and a pneumatic sealing part;
a liquid discharge port is formed in the side wall of the middle part of the valve body;
the clamping seat is inserted into the top of the valve body;
the pneumatic sealing part is in threaded connection with the bottom of the valve body;
the pneumatic sealing part is suitable for opening or closing the liquid outlet of the valve body under the driving of external air pressure.
Further, the pneumatic sealing portion includes: the sealing device comprises a sealing main body, a piston rod and a pneumatic sleeve;
the pneumatic sleeve is provided with a pneumatic cavity;
one end of the piston rod penetrates through the top of the pneumatic cavity to be fixedly connected with the sealing main body, and the other end of the piston rod is connected in the pneumatic cavity in a sliding mode;
the pneumatic cavity is provided with at least one air port for changing the pressure in the pneumatic cavity, so that the piston rod is controlled to lift, and the main body is driven to open or close the liquid outlet of the valve body.
Further, the top and the bottom of the pneumatic cavity are provided with air ports.
Furthermore, a plurality of O-shaped sealing rings are arranged on the contact surface of the pneumatic sleeve and the piston rod.
Furthermore, the quantity of leakage fluid dram is a plurality of, and follows the lateral wall of valve body is the setting of circumference array.
The beneficial effects of the utility model are that, the utility model provides a quick discharge tank includes: the device comprises a cleaning tank, a bubbling assembly, a spraying assembly, a quick discharge valve and a locking assembly; a liquid discharge pipe suitable for mounting the quick discharge valve is arranged at the bottom of the cleaning tank; the locking assembly and the quick-discharge valve are sleeved on the liquid discharge pipe, and the locking assembly is suitable for fixing the quick-discharge valve on the liquid discharge pipe; the bubbling assembly and the spraying assembly are arranged above the cleaning tank; the bubbling assembly is suitable for bubbling nitrogen into the liquid medicine in the cleaning tank; the spraying assembly is suitable for spraying and cleaning the object to be cleaned in the cleaning tank. The cleaning liquid in the tank can be quickly drained by arranging the bottom drainage connecting pipe with the large caliber and the drainage valve. Thereby achieving good cleaning effect.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural view of a quick drain tank provided in the present embodiment.
Fig. 2 is a sectional view of the quick drain tank provided in the present embodiment.
Fig. 3 is an exploded view of the quick release valve and locking assembly provided in this embodiment.
Fig. 4 is a schematic diagram of the state of the quick exhaust valve provided in this embodiment when it is closed.
Fig. 5 is a schematic view of the quick release valve provided in the present embodiment in an open state.
In the figure: 100. a cleaning tank; 200. a bubbling assembly; 210. blowing a gas pipe; 300. a spray assembly; 400. a quick discharge valve; 410. a valve body; 411. a liquid discharge port; 412. a pin; 420. a card holder; 430. a pneumatic seal section; 431. a sealing body; 432. a piston rod; 433. a pneumatic sleeve; 434. an O-shaped sealing ring; 4331. a gas port; 500. a locking assembly; 510. a lock nut; 520. a compression ring; 600. there is a piece detection device.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic drawings, which illustrate the basic structure of the present invention in a schematic manner, and thus show only the components related to the present invention.
Example 1
Referring to fig. 1 to 5, the present invention provides a rapid drain tank, including: a cleaning tank 100, a bubbling assembly 200, a spraying assembly 300, a quick-drain valve 400 and a locking assembly 500; a drain pipe suitable for mounting the quick drain valve 400 is arranged at the bottom of the cleaning tank 100; the locking assembly 500 and the quick release valve 400 are sleeved on the drain pipe, and the locking assembly 500 is suitable for fixing the quick release valve 400 on the drain pipe; the bubbling assembly 200 and the spraying assembly 300 are both arranged above the cleaning tank 100; the bubbling assembly 200 is suitable for bubbling nitrogen gas into the liquid medicine in the cleaning tank 100; the spray assembly 300 is adapted to spray clean the object to be cleaned in the cleaning tank 100. The cleaning liquid in the tank can be quickly drained by arranging the bottom drainage connecting pipe with the large caliber and the drainage valve. Thereby achieving good cleaning effect.
In this embodiment, the bubbling assembly 200 includes a bubbling tube 210; the section of the air blowing pipe 210 is L-shaped; one end of the air blowing pipe 210 extends into the cleaning tank 100 and is attached to the side wall of the cleaning tank 100, and the other end of the air blowing pipe is communicated with an external nitrogen source. Through setting up tympanic bulla subassembly 200, for cell body bottom drum nitrogen gas, make liquid and wafer abundant contact, improve the cleaning performance to the wafer.
In this embodiment, the rapid discharge tank further comprises a piece detection device 600; the sheet detection device 600 is fixedly disposed on an outer wall of the cleaning tank 100. A wafer detection device 600 is provided to detect whether a wafer is placed in the tank, and because there is a reverse situation, it is possible that the wafer may be removed during the cleaning process. If the wafer is taken out, the quick discharge is not used, and the cleaning liquid is prevented from being wasted.
Specifically, the wafer detecting device 600 may be an infrared sensor, and the wafer loading or unloading is sensed by the infrared sensor. In other embodiments, the sheet detection may also be performed by providing an image sensor or the like, and the specific connection relationship and detection process belong to the prior art, which is not described in this embodiment.
In this embodiment, the locking assembly 500 includes a lock nut 510 and a compression ring 520; the outer side wall of the quick exhaust valve 400 is provided with an external thread matched with the lock nut 510; the lock nut 510 and the compression ring 520 are sequentially sleeved on the liquid discharge pipe; the compression ring 520 is inserted into the quick release valve 400; the lock nut 510 is adapted to compress the compression ring 520 against the drain pipe when screwed onto the quick drain valve 400. The leakage is prevented by tightly holding the liquid discharge pipe through self deformation when the screw is locked, the screw is more convenient to install than common screw locking, and the thread sealing strip does not need to be wound.
Wherein the compression ring 520 is tapered, and the diameter of the end inserted into the quick release valve 400 is smaller than the end far away from the quick release valve 400. The clamp ring 520 is tapered, and is deformed by itself to be tightly held with the drain pipe to prevent liquid leakage when the clamp ring is locked.
In this embodiment, the quick release valve 400 includes a valve body 410, a cartridge 420, and a pneumatic seal 430; a liquid outlet 411 is formed in the side wall of the middle part of the valve body 410; the cartridge 420 is inserted into the top of the valve body 410; the pneumatic sealing part 430 is screwed to the bottom of the valve body 410; the pneumatic sealing portion 430 is adapted to open or close the liquid discharge port 411 of the valve body 410 by the driving of the external air pressure. Through setting up the valve body 410 structure of pneumatic type for when the pneumatic seal portion 430 is at the pressure release, the pressure of the liquid in the washing tank 100 can assist and promote the pneumatic seal portion 430 to retreat fast, accelerates opening of the leakage fluid dram 411 of the quick exhaust valve 400, makes the liquid in the washing tank 100 discharge fast.
The number of the liquid discharge ports 411 is plural, and the liquid discharge ports are arranged along the side wall of the valve body 410 in a circumferential array.
Specifically, the pneumatic sealing portion 430 includes: a seal body 431, a piston rod 432, and a pneumatic sleeve 433; the pneumatic sleeve 433 is provided with a pneumatic cavity; one end of the piston rod 432 penetrates through the top of the pneumatic cavity to be fixedly connected with the sealing main body 431, and the other end of the piston rod is connected in the pneumatic cavity in a sliding mode; the pneumatic cavity is provided with at least one air port 4331 for changing the pressure in the pneumatic cavity, so as to control the piston rod 432 to ascend and descend, and further drive the main body to open or close the liquid outlet 411 of the valve body 410.
In this embodiment, the cartridge 420 is secured to the valve body by a pin 412.
In this embodiment, the top and bottom of the pneumatic chamber are provided with air ports 4331. When the valve is used specifically, air can be fed through the air port 4331 at the top of the pneumatic cavity, and the air port 4331 at the bottom discharges air, so that the piston rod 432 descends, and the liquid discharge port 411 of the valve body 410 is opened, or air can be discharged through the air port 4331 at the top of the pneumatic cavity, and the air is fed through the air port 4331 at the bottom, so that the piston rod 432 ascends until the piston rod 432 abuts against the top of the valve body 410, and the liquid discharge port 411 of the valve body 410 is closed.
In order to ensure the tightness of the pneumatic cavity, a plurality of O-rings 434 are arranged on the contact surface between the pneumatic sleeve 433 and the piston rod 432.
To sum up, the utility model provides a quick discharge tank includes: a cleaning tank 100, a bubbling assembly 200, a spraying assembly 300, a quick-drain valve 400 and a locking assembly 500; a drain pipe suitable for mounting the quick drain valve 400 is arranged at the bottom of the cleaning tank 100; the locking assembly 500 and the quick release valve 400 are sleeved on the drain pipe, and the locking assembly 500 is suitable for fixing the quick release valve 400 on the drain pipe; the bubbling assembly 200 and the spraying assembly 300 are both arranged above the cleaning tank 100; the bubbling assembly 200 is suitable for bubbling nitrogen gas into the liquid medicine in the cleaning tank 100; the spray assembly 300 is adapted to spray clean the object to be cleaned in the cleaning tank 100. The cleaning liquid in the tank can be quickly drained by arranging the bottom drainage connecting pipe with the large caliber and the drainage valve. Thereby achieving good cleaning effect.
The components selected for use in the present application (components not illustrated for specific structures) are all common standard components or components known to those skilled in the art, and the structure and principle thereof can be known to those skilled in the art through technical manuals or through routine experimentation. Moreover, the software programs referred to in the present application are all prior art, and the present application does not relate to any improvement of the software programs.
In the description of the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is only one logical division, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A quick drain tank, comprising:
the device comprises a cleaning tank, a bubbling assembly, a spraying assembly, a quick discharge valve and a locking assembly;
a liquid discharge pipe suitable for mounting the quick discharge valve is arranged at the bottom of the cleaning tank;
the locking assembly and the quick-discharge valve are sleeved on the liquid discharge pipe, and the locking assembly is suitable for fixing the quick-discharge valve on the liquid discharge pipe;
the bubbling assembly and the spraying assembly are arranged above the cleaning tank;
the bubbling assembly is suitable for bubbling nitrogen into the liquid medicine in the cleaning tank;
the spraying assembly is suitable for spraying and cleaning objects to be cleaned in the cleaning tank.
2. The quick drain tank of claim 1,
the bubbling assembly comprises a bubbling pipe;
the section of the air blowing pipe is L-shaped;
and one end of the air blowing pipe extends into the cleaning tank and is attached to the side wall of the cleaning tank, and the other end of the air blowing pipe is communicated with an external nitrogen source.
3. The quick drain tank of claim 1,
the quick discharge groove also comprises a sheet detection device;
the sheet detection device is fixedly arranged on the outer wall of the cleaning tank.
4. The quick drain tank of claim 1,
the locking assembly comprises a locking nut and a compression ring;
the outer side wall of the quick exhaust valve is provided with an external thread matched with the locking nut;
the locking nut and the compression ring are sequentially sleeved on the liquid discharge pipe;
the compression ring is inserted into the quick-release valve;
the locking nut is suitable for pressing the pressing ring and the liquid discharge pipe when being screwed on the quick discharge valve.
5. The quick drain tank of claim 4,
the compression ring is conical, and the diameter of one end inserted into the quick-release valve is smaller than that of one end far away from the quick-release valve.
6. The quick drain tank of claim 4,
the quick-release valve comprises a valve body, a clamping seat and a pneumatic sealing part;
a liquid discharge port is formed in the side wall of the middle part of the valve body;
the clamping seat is inserted into the top of the valve body;
the pneumatic sealing part is in threaded connection with the bottom of the valve body;
the pneumatic sealing part is suitable for opening or closing the liquid outlet of the valve body under the driving of external air pressure.
7. The quick drain tank of claim 6,
the pneumatic seal portion includes: the sealing device comprises a sealing main body, a piston rod and a pneumatic sleeve;
the pneumatic sleeve is provided with a pneumatic cavity;
one end of the piston rod penetrates through the top of the pneumatic cavity to be fixedly connected with the sealing main body, and the other end of the piston rod is connected in the pneumatic cavity in a sliding mode;
the pneumatic cavity is provided with at least one air port for changing the pressure in the pneumatic cavity so as to control the piston rod to lift and further drive the main body to open or close the liquid outlet of the valve body.
8. The quick drain tank of claim 7,
the top and the bottom of the pneumatic cavity are provided with air ports.
9. The quick drain tank of claim 7,
and a plurality of O-shaped sealing rings are arranged on the contact surface of the pneumatic sleeve and the piston rod.
10. The quick drain tank of claim 6,
the quantity of leakage fluid dram is a plurality of, and follows the lateral wall of valve body is the circumference array setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223400062.0U CN218743599U (en) | 2022-12-19 | 2022-12-19 | Quick discharge groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223400062.0U CN218743599U (en) | 2022-12-19 | 2022-12-19 | Quick discharge groove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218743599U true CN218743599U (en) | 2023-03-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223400062.0U Active CN218743599U (en) | 2022-12-19 | 2022-12-19 | Quick discharge groove |
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| Country | Link |
|---|---|
| CN (1) | CN218743599U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117884413A (en) * | 2024-03-14 | 2024-04-16 | 山东瑞翼德科技股份有限公司 | Silicon wafer cleaning machine |
-
2022
- 2022-12-19 CN CN202223400062.0U patent/CN218743599U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117884413A (en) * | 2024-03-14 | 2024-04-16 | 山东瑞翼德科技股份有限公司 | Silicon wafer cleaning machine |
| CN117884413B (en) * | 2024-03-14 | 2024-05-31 | 山东瑞翼德科技股份有限公司 | Silicon wafer cleaning machine |
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