CN218673186U - Intelligent control system for temperature of ceramic kiln - Google Patents
Intelligent control system for temperature of ceramic kiln Download PDFInfo
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- CN218673186U CN218673186U CN202222844633.3U CN202222844633U CN218673186U CN 218673186 U CN218673186 U CN 218673186U CN 202222844633 U CN202222844633 U CN 202222844633U CN 218673186 U CN218673186 U CN 218673186U
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Abstract
The utility model discloses a ceramic kiln temperature intelligence control system belongs to ceramic sintering equipment field, including heating device, heat sink and temperature regulating device, heating device includes a plurality of nozzles, a plurality of nozzles set up in ceramic kiln, the heat sink includes rapid cooling pipeline and slow cooling pipeline, rapid cooling pipeline and slow cooling pipeline set up in ceramic kiln in turn, temperature regulating device is used for controlling the temperature of heating device and heat sink in to ceramic kiln to carry out real-time adjustment, reduce the temperature fluctuation in the ceramic kiln, it is on the temperature through the contrast, lower limit critical point and the size of setting value, enlarge the induction range of temperature, it opens and close some firearm and gas valve to decide, make some firearm and gas valve under the temperature, lower limit critical point or temperature wave can not frequently open and close when big, improve equipment's life, make the change range of temperature in the ceramic kiln little, thereby the quality of product has been improved, the consumption of gas has been reduced.
Description
Technical Field
The utility model relates to a ceramic sintering equipment field, concretely relates to ceramic kiln temperature intelligence control system.
Background
The ceramic kiln is an important device for producing building ceramics, a stick is taken as a carrying tool, a green body can be continuously fired, the green body is placed on a roller way during production, the green body is sequentially preheated by a preheating zone, fired at high temperature by a firing zone and cooled by a cooling zone along with the rotation of the stick, the ceramic kiln is mainly heated by electricity, gas or biomass fuel, the ceramic kiln is heated by gas, the pollution is low due to the fact that the ceramic kiln is heated by gas, the energy source is wide, particularly, the natural gas heating is low in cost and low in pollution compared with other modes, the gas heating is limited by the air volume and pressure of gas and combustion-supporting wind in a main pipeline, the control on the temperature and the pressure in the ceramic kiln needs to be accurately controlled by the pressure difference and the flow ratio of the combustion-supporting wind and the gas before a burner, the control mode at present mostly adopts a proportional valve combined with a PID program at a control end to control, the control on the accuracy of the control on the furnace temperature is not enough, the complexity of the accuracy control on the accuracy of the accuracy control on the accuracy of the control on the temperature of the firing valve and the ignition quality control of ignition products to be more frequently improved by the use control of the firing equipment at present, and the use of firing equipment.
The prior patent application with publication number CN108931144A discloses an intelligent optimization method for temperature control of a ceramic kiln, which comprises the following specific steps: step (1), in each firing process, a kiln controller performs PID control on the temperature in the kiln through a PID control module according to a set control curve of the temperature in the kiln; step (2), after each firing, the kiln controller transmits the actual temperature data in the kiln to a PC (personal computer) through wireless communication; step (3), the firing worker scores and evaluates the ceramic firing result, inputs the evaluation into a PC, and forms a sample together with the actual temperature data; step (4), the PC machine optimizes the temperature curve in the furnace through a genetic algorithm according to the samples; and (5) transmitting the optimized temperature control curve to a kiln controller through wireless communication by a PC (personal computer) for controlling the next ceramic firing process, wherein the PID control method can only eliminate steady-state errors as much as possible, but can not realize suburban control on the furnace temperature close to the critical point of the temperature, so that the repeated ignition can be carried out when the furnace temperature is at the critical point or the temperature fluctuation is large, the furnace temperature fluctuation is large, and the quality control of the fired products is not facilitated.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a ceramic kiln furnace temperature intelligence control system has solved the problem that the nozzle frequently opened when the temperature leads to inaccurate appearing big fluctuation in the ceramic kiln.
In order to realize the purpose of the utility model, the utility model adopts the following technical scheme:
the utility model provides a ceramic kiln temperature intelligence control system, its includes heating device, heat sink and temperature regulating device, heating device includes a plurality of nozzles, and is a plurality of the nozzle sets up in the ceramic kiln, the heat sink includes rapid cooling pipeline and slow cooling pipeline, rapid cooling pipeline with slow cooling pipeline sets up in turn in the ceramic kiln, temperature regulating device is used for control heating device with the heat sink is right temperature in the ceramic kiln carries out real time adjustment, reduces temperature fluctuation in the ceramic kiln.
The temperature control device comprises a controller, an actuator and a temperature signal input end, wherein the temperature signal input end is connected with the controller, the controller is connected with the actuator and used for processing input signals and outputting control signals, and the burner is controlled by the actuator.
The temperature control device further comprises a thermal fuse, and the thermal fuse is arranged between the actuator and the power line and used for providing overcurrent and overheat protection for the actuator.
The heating device further comprises a gas transmission main pipe, a first electric valve, a second electric valve and a flowmeter, wherein the gas transmission main pipe is used for providing a plurality of burners with gas, and the first electric valve, the second electric valve and the flowmeter are sequentially connected to the gas transmission main pipe and are used for controlling the flow of the gas in the gas transmission main pipe and preventing the gas from leaking.
The burner comprises a nozzle, a gas valve, an igniter and a flexible pipeline, wherein the nozzle and the igniter are arranged at the end part of the burner, one end of the flexible pipeline is connected with the burner, the other end of the flexible pipeline is connected with a gas transmission main pipe, the gas valve is arranged on the flexible pipeline, the gas valve can release gas quantitatively, and the flexible pipeline is convenient to adjust the combustion direction of the nozzle.
The rapid cooling pipeline comprises a first temperature sensor, the slow cooling pipeline comprises a second temperature sensor, the first temperature sensor is arranged on two side walls of the rapid cooling pipeline, the second temperature sensor is arranged on two side walls of the slow cooling pipeline, and the first temperature sensor and the second temperature sensor are both connected with the temperature control device and used for providing temperature setting reference for the temperature control device.
The slow cooling pipeline further comprises a first gas transmission branch pipe and a first frame, the first gas transmission branch pipe is arranged on the first frame, and the first frame is arranged close to the inner wall of the ceramic kiln and used for slowly reducing the temperature in the ceramic kiln and realizing slow cooling of the ceramic tile adobe.
The plurality of burners are divided into an upper row and a lower row, each row of the plurality of burners is divided into a plurality of groups, and each group of the plurality of burners is controlled by the temperature control device respectively, so that the sectional control of the temperature in the ceramic kiln can be realized.
The utility model has the advantages that:
this ceramic kiln temperature intelligence control system is by heating device, the kiln temperature is controlled to heat sink and control temperature device, the last a plurality of nozzles that are equipped with of heating device, the nozzle falls into a plurality of groups, can divide and carry out the independent control in order to adjust the kiln temperature to each group's nozzle, be equipped with temperature sensor on quench line and the gentle cooling line, can set for the reference temperature according to the temperature of selecting different position sensor or synthesizing each temperature sensor, it is high just to obtain the uniformity of actual temperature and settlement temperature, the quality of processing ceramic tile has been improved.
Drawings
Fig. 1 is a first schematic structural diagram of an intelligent control system for the temperature of a ceramic kiln provided by the utility model;
FIG. 2 is a schematic structural diagram II of the intelligent control system for the temperature of the ceramic kiln provided by the utility model;
FIG. 3 is a first structure diagram of a quench pipeline provided by the present invention;
fig. 4 is a structure diagram of a slow cooling pipeline provided by the present invention;
FIG. 5 is a second structural view of a quenching pipeline provided by the present invention;
fig. 6 is a third schematic structural view of the intelligent control system for the temperature of the ceramic kiln provided by the utility model;
FIG. 7 is a control diagram of the intelligent control system for the temperature of the ceramic kiln provided by the utility model;
FIG. 8 is a circuit diagram of a temperature control device according to the present invention;
fig. 9 is a flow chart of the intelligent control method for the temperature of the ceramic kiln provided by the utility model.
Reference numerals are as follows:
1. a heating device; 11. burning the nozzle; 111. a spout; 112. a gas valve; 113. an igniter; 114. a flexible conduit; 12. a gas transmission main pipe; 13. a first electrically operated valve; 14. a second electrically operated valve; 15. a third electrically operated valve; 16. a fourth electrically operated valve; 17. a flow meter; 18. a pressure regulating device; 2. a cooling device; 21. a quench line; 211. a first sensor; 22. a slow cooling pipeline; 221. a second temperature sensor; 222. a first gas delivery branch pipe; 223. a first frame; 3. a temperature control device; 31. a controller; 32. an actuator; 33. a temperature signal input; 34. a thermal fuse.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given in the application without any inventive step, are within the scope of the present invention.
Example one
As shown in fig. 1-8, an intelligent control system for the temperature of a ceramic kiln comprises a heating device 1, a cooling device 2 and a temperature control device 3, wherein the heating device 1 comprises a plurality of burners 11, the plurality of burners 11 are arranged in the ceramic kiln, the cooling device 2 comprises a rapid cooling pipeline 21 and a slow cooling pipeline 22, the rapid cooling pipeline 21 and the slow cooling pipeline 22 are alternately arranged in the ceramic kiln, and the temperature control device 3 is used for controlling the heating device 1 and the cooling device 2 to adjust the temperature in the ceramic kiln in real time.
Further, referring to fig. 8 specifically, the temperature control device 3 includes a controller 31, an actuator 32 and a temperature signal input end 33, the temperature signal input end 33 is connected to the controller 31, the controller 31 is connected to the actuator 32, the actuator 32 is connected to a plurality of electromagnetic valves, the electromagnetic valves are proportional electromagnetic valves or servo valves, the proportional electromagnetic valves and the servo valves can adjust the opening of the gas valve 112 according to the received signals, so as to adjust the temperature rise speed in the ceramic kiln, and also adjust the temperature rise or the heat preservation in the ceramic kiln, the gas valve 112 is used for controlling the output of the combustible gas, the actuator 32 is controlled by the signal from the controller 31, the actuator 32 can drive the electromagnetic valves to operate, the controller 31 can uniformly adjust the plurality of gas valves 112 at one time, one controller 31 can output driving signals to the plurality of actuators 32, thereby satisfying the use of large-sized ceramic kilns, and improving the temperature uniformity in the ceramic kiln.
Preferably, the controller 31 is a Programmable Logic Controller (PLC), which is a digital arithmetic operation electronic system suitable for industrial applications, and has a programmable memory, in which instructions for performing operations such as logic operation, sequence control, timing, counting, and arithmetic operation are stored, and the controller controls the actuator 32 to operate by outputting the instructions through a digital or analog temperature signal input terminal 33 after the internal logic operation.
Preferably, the temperature control device 3 is further provided with a thermal fuse 34, the thermal fuse 34 is disposed between the actuator 32 and the power line, the thermal fuse 34 is used for over-temperature protection and over-current protection of the actuator 32, the actuator 32 drives the plurality of gas valves 112 to act at the same time, over-current or over-temperature conditions may occur during operation, the cost of the actuator 32 is high, a certain protection strategy needs to be implemented on the actuator 32, the furnace shutdown time of the ceramic furnace is reduced, and once the ceramic furnace is shutdown, furnace tiles are scrapped.
Preferably, the heating device 1 further includes a gas transmission main pipe 12, a first electric valve 13, a second electric valve 14, and a flow meter 17, wherein the gas transmission main pipe 12 is used for providing gas to the plurality of burners 11, the first electric valve 13, the second electric valve 14, and the flow meter 17 are sequentially connected to the gas transmission main pipe 12, the first electric valve 13 and the second electric valve 14 are used for controlling the gas in the gas transmission main pipe 12 to flow to the burners 11, double-switch control prevents gas leakage, improves stability of gas supply, and also prevents gas leakage at the position where the burners 11 are closed, one end of the gas transmission main pipe 12 is connected to an external gas storage device, the other end is connected to the plurality of first gas transmission branch pipes 222, the flow meter 17 is used for measuring the gas flow passing through the gas transmission main pipe 12, the flow meter 17 can be connected to the controller 31, and feeds back gas flow data to the controller 31, thereby improving accuracy of gas release.
Preferably, the heating device 1 is further provided with a third electric valve 15, a fourth electric valve 16 and a pressure adjusting device 18, the third electric valve 15 and the fourth electric valve 16 are connected to the gas transmission main pipe 12 for enhancing gas supply control and improving the safety of gas use, and the pressure adjusting device 18 is composed of three pressure valves, can detect the gas pressure in the gas transmission main pipe 12 and adjust the gas pressure to ensure gas supply of the burner 11, and can check whether gas leaks or not to improve the safety of gas use.
Preferably, the burner 11 comprises a nozzle 111, a gas valve 112, an igniter 113 and a flexible pipe 114, the nozzle 111 and the igniter 113 are arranged at the end of the burner 11, one end of the flexible pipe 114 is connected with the burner 11, the other end of the flexible pipe is connected with the gas transmission main pipe 12, the gas valve 112 is arranged on the flexible pipe 114 and is used for controlling the amount of gas finally sprayed out of the nozzle 111, the flexible pipe 114 can be bent towards any direction and is used for adjusting the direction of flame of the nozzle 111 to prevent the flame from directly burning the tile blank, the nozzle 111 is made of ceramic or high temperature resistant metal, and the nozzle 111 is further provided with an oxygen increasing hole for supplying oxygen to improve the combustion rate of the gas, release heat more quickly and make the temperature control in the ceramic kiln more sensitive.
Preferably, the quenching pipeline 21 comprises a first temperature sensor 211, the slow cooling pipeline 22 comprises a second temperature sensor 221, the first temperature sensor 211 is arranged on two side walls of the quenching pipeline 21, the second temperature sensor 221 is arranged on two side walls of the slow cooling pipeline 22, the first temperature sensor 211 and the second temperature sensor 221 are both connected with the temperature control device 3, a plurality of first temperature sensors 211 are arranged in the quenching pipeline 21, the temperature control meter comprises a plurality of first temperature sensors 211 and a plurality of second temperature sensors 221, and the reference temperature T in the ceramic kiln can be selected through the temperature control meter sv Reference temperature T sv The selection is realized manually, the selected temperature is determined by manual trial for a plurality of times, the comprehensive consideration can also be realized according to the temperature values of the first temperature sensor 211 and the second temperature sensor 221, and the reference temperature T is determined according to different types and installation conditions of the ceramic kiln sv The selection of the quenching pipeline 21 is different and needs to be set through the specific conditions of the ceramic kiln stage, and the quenching pipeline 21 is used for quickly reducing the temperature in the ceramic kiln and can quickly empty the heat in the ceramic kiln.
Preferably, slow-cooling pipeline 22 still includes first gas transmission branch pipe 222 and first frame 223, first gas transmission branch pipe 222 sets up on first frame 223, first frame 223 is close to the inner wall of ceramic kiln and arranges, slow-cooling pipeline 22 is used for slowly reducing the temperature in the ceramic kiln, the realization is to the slow cooling of ceramic tile adobe, prevent that the temperature from dropping too fast and causing the inside fracture of ceramic tile adobe, first gas transmission branch pipe 222 is by self tapping screw connection on first frame 223, first frame 223 is the door font, simple to operate is swift.
Preferably, the plurality of burners 11 are divided into an upper row and a lower row, the plurality of burners 11 in each row are divided into a plurality of groups, the plurality of burners 11 in each group are respectively controlled by the temperature control device 3, the temperature control device 3 controls the heating conditions of the burners 11 in groups, the pressure on the control device 3 is reduced, and meanwhile, more accurate temperature adjustment can be performed on each section in the ceramic kiln.
Example two
As shown in fig. 9, an intelligent control method for the temperature of a ceramic kiln specifically comprises the following steps:
s1, parameter setting: manually setting an upper limit T of the comparison temperature max And a lower limit T min And selecting a reference temperature T sv ；
S2, access detection: judging whether the burner is connected to the temperature control device 3, if so, acquiring a reference temperature T sv And the actual temperature T in the ceramic kiln pv Comparing, and then entering step S3; if the system is not accessed, the program is quitted, an alarm is given to an operator for maintenance, after the maintenance is finished, the program is manually set to finish the control, and the system self-checking is carried out through the step to prevent the temperature in the ceramic kiln from being unstable due to the error of the system;
s3, judging the temperature;
s3.1, judging T pv -T sv Whether the value is more than or equal to 0 is judged, if yes, the step is carried out to S3.2, and if not, the step is carried out to S3.3;
s3.2, judging T pv -T sv ＞T max If true, the process proceeds to step S3.4, if true, the process proceeds to step S3.5
S3.3, judging T min < 0 and T pv -T sv ＜T min Whether the two are simultaneously established or not, if so, the step is carried out to the step S3.6, and if not, the step is carried out to the step S3.7;
s3.4, closing the burner 11, and then entering the step S4;
s3.5, judging T min > 0 and T pv -T sv ＜T min If both are true, the process proceeds to step S3.6 if true, and proceeds to step S3.7 if false
S3.6, starting the burner and then entering the step S4;
s3.7, maintaining the burner in an original state;
and S4, circularly executing the steps S1-S3 to control the opening and closing states of the burners, so as to prevent the burners from being opened and closed frequently and reduce the temperature fluctuation in the ceramic kiln.
Wherein, when the nozzle 11 is closed, the power of the spout 111, the gas valve 112 and the igniter 113 on the nozzle 11 are all in a closed state, preventing gas leakage or false operation of the igniter 113 in the ceramic kiln, when the nozzle 11 is opened, the gas valve 112 is opened and the igniter 113 is ignited, the heat generated by gas improves the temperature in the ceramic kiln or realizes heat preservation, and the method is implemented by adding the actual temperature T pv And obtaining the reference temperature T from the inside of the ceramic kiln sv The reaction temperature interval of the ignition of the control burner 11 is enlarged by comparison, so that when the temperature in the ceramic kiln fluctuates, the temperature change in the ceramic kiln caused by frequent ignition of the burner 11 is not large, the stability of ceramic tile firing and heat preservation is improved, the yield of the ceramic tile is improved, and the service life of the heating device 1 is prolonged.
Preferably, step S3.8 further includes a PID temperature adjustment method and a PID temperature adjustment method, the PID temperature adjustment method is operated after step S3.7, and then step S4 is performed, wherein the PID temperature adjustment method is used to control the opening size of the burner, and the two methods are combined to perform stable temperature control on the whole firing process in the ceramic kiln. The intelligent ceramic kiln temperature control method also comprises a PID temperature adjusting method, wherein when the burner 11 of the intelligent ceramic kiln temperature control method is maintained, the opening of the burner 11 is controlled by the PID temperature adjusting method, the controller 31 on the temperature control device 3 can simultaneously execute the PID adjusting method and the intelligent kiln temperature control method, the PID adjusting method is the temperature control method mentioned in the background technology CN108931144A, the opening of the gas valve 112 is adjusted by PID to control the flame size on the burner 11 and the quantity of generated heat so as to increase the temperature or preserve the temperature in the ceramic kiln, the temperature in the ceramic kiln is controlled by combining the two methods, the temperature in the ceramic kiln can be stabilized in the firing process, when the temperature is close to a critical point, the frequent starting and stopping of the igniter 113 are reduced, the stability of the temperature in the ceramic kiln is improved, and the service life of equipment is prolonged.
The detailed process of the temperature control of the ceramic kiln comprises the following steps:
when the ceramic kiln is used for baking ceramic tile adobes, the heating device 1 is heated by a PID temperature regulation method through a temperature curve, so that the actual temperature T in the ceramic kiln is ensured pv And the firing temperature of the ceramic tile adobe is as close as possible and is protected to be stable, when the temperature reaches the upper critical point of the ceramic tile firing temperature, the burner 11 needs to be closed to reduce the temperature or maintain the temperature to be stable, the intelligent control method of the temperature of the ceramic kiln is used for controlling, by expanding the reaction interval of the temperature, the frequent start and stop of the burner 11 are reduced, when the firing temperature in the ceramic kiln reaches the lower critical point, the burner 11 needs to be opened to improve the temperature in the ceramic kiln or the temperature is preserved, the intelligent control method of the temperature of the ceramic kiln is also used for controlling, by expanding the reaction interval of the temperature of the lower critical point, the frequent start and stop of the burner 11 are reduced, and the control logics of the two control methods are loaded on the controller 31, so that the accurate control of the firing temperature in the ceramic kiln is realized.
EXAMPLE III
The intelligent control method for the temperature of the ceramic kiln in the second embodiment is realized by the intelligent control system for the temperature of the ceramic kiln in the first embodiment, and the temperature in the ceramic kiln in the heat preservation and cooling stages can be controlled by utilizing the cooling device, so that the effect of better controlling the temperature in the kiln is achieved, and the dimensional stability and the surface quality of the formed ceramic tile blank are better.
Variations and modifications to the above-described embodiments may occur to those skilled in the art, in light of the above teachings and teachings. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and changes to the present invention should fall within the protection scope of the claims of the present invention. Furthermore, although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.
Claims (8)
1. The utility model provides a ceramic kiln temperature intelligence control system which characterized in that: including heating device (1), heat sink (2) and temperature regulating device (3), heating device (1) includes a plurality of nozzles (11), and is a plurality of nozzle (11) set up in the ceramic kiln, heat sink (2) are including sharp cooling pipeline (21) and slow cooling pipeline (22), sharp cooling pipeline (21) with slow cooling pipeline (22) set up in turn in the ceramic kiln, temperature regulating device (3) are used for controlling heating device (1) with heat sink (2) are right the temperature in the ceramic kiln is adjusted in real time.
2. The intelligent control system for the temperature of the ceramic kiln of claim 1, wherein:
temperature regulating device (3) include controller (31), executor (32) and temperature signal input end (33), temperature signal input end (33) with controller (31) link to each other, controller (31) with executor (32) link to each other.
3. The intelligent control system for the temperature of the ceramic kiln of claim 2, wherein:
the temperature control device (3) further comprises a thermal fuse (34), and the thermal fuse (34) is arranged between the actuator (32) and the power line.
4. The intelligent control system for the temperature of the ceramic kiln of claim 2, characterized in that:
the heating device (1) further comprises a gas transmission main pipe (12), a first electric valve (13), a second electric valve (14) and a flowmeter (17), wherein the gas transmission main pipe (12) is used for providing a plurality of fuel gas for the burner (11), and the first electric valve (13), the second electric valve (14) and the flowmeter (17) are sequentially connected to the gas transmission main pipe (12).
5. The intelligent control system for the temperature of the ceramic kiln of claim 4, wherein:
the burner (11) comprises a nozzle (111), a gas valve (112), an igniter (113) and a flexible pipeline (114), the nozzle (111) and the igniter (113) are arranged at the end part of the burner (11), one end of the flexible pipeline (114) is connected with the burner (11), the other end of the flexible pipeline is connected with the gas transmission main pipe (12), and the gas valve (112) is arranged on the flexible pipeline (114).
6. The intelligent control system for the temperature of the ceramic kiln of claim 5, wherein:
the rapid cooling pipeline (21) comprises a first temperature sensor (211), the slow cooling pipeline (22) comprises a second temperature sensor (221), the first temperature sensor (211) is arranged on two side walls of the rapid cooling pipeline (21), the second temperature sensor (221) is arranged on two side walls of the slow cooling pipeline (22), and the first temperature sensor (211) and the second temperature sensor (221) are connected with the temperature control device (3).
7. The intelligent control system for the temperature of the ceramic kiln of claim 6, characterized in that:
the slow cooling pipeline (22) further comprises a first gas transmission branch pipe (222) and a first frame (223), the first gas transmission branch pipe (222) is arranged on the first frame (223), and the first frame (223) is arranged close to the inner wall of the ceramic kiln.
8. The intelligent control system for the temperature of the ceramic kiln of claim 1, wherein:
the plurality of burners (11) are divided into an upper row and a lower row, the plurality of burners (11) in each row are divided into a plurality of groups, and the plurality of burners (11) in each group are respectively controlled by the temperature control device (3).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222844633.3U CN218673186U (en) | 2022-10-27 | 2022-10-27 | Intelligent control system for temperature of ceramic kiln |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116518722A (en) * | 2023-06-09 | 2023-08-01 | 合肥费舍罗智能装备有限公司 | Semiconductor ceramic sintering furnace temperature control system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116518722A (en) * | 2023-06-09 | 2023-08-01 | 合肥费舍罗智能装备有限公司 | Semiconductor ceramic sintering furnace temperature control system |
| CN116518722B (en) * | 2023-06-09 | 2024-01-19 | 合肥费舍罗智能装备有限公司 | Semiconductor ceramic sintering furnace temperature control system |
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