CN218548394U - Wafer cassette loading attachment and wafer cassette - Google Patents

Abstract

The application provides a wafer boat box feeding device and a wafer boat box, wherein the wafer boat box feeding device is used for being installed on a wafer boat box body to support and position wafers contained in the wafer boat box body, and comprises a jig body for placing the wafers and a locking mechanism for detachably connecting the jig body and the wafer boat box body; the utility model discloses can directly install the tool body on the wafer boat box, need not the manual work and take out the wafer from the wafer boat box and put into the hand-basket again, save this manual work and get the step of putting, can effectively avoid contacting the wafer and lead to uncertain scratch risk to production efficiency has been improved.

Description

Wafer cassette loading attachment and wafer cassette

Technical Field

The utility model belongs to the technical field of the semiconductor processing equipment technique and specifically relates to a wafer boat box loading attachment and have this wafer boat box loading attachment's wafer boat box is related to.

Background

Wafer cassettes, also known as cassettes, are used primarily for the placement and transport of wafers in semiconductor manufacturing, and are used by chip manufacturers to handle and store wafers for ease of transport and to minimize the risk of contamination.

The wafer boat comprises a shell and an upper cover, wafers placed in the wafer boat need to be transferred to a wafer fixing machine for next process in the production process, the upper cover of the wafer boat needs to be detached, and after the upper cover is detached, a part of the wafers are exposed out of the shell of the wafer boat. Due to the characteristic that the wafer is easily damaged, the shell with part of the wafer exposed cannot be directly placed on the die bonder. At present, two main ways are used for transferring the wafer to the die bonder, namely, the wafer is directly taken out from the wafer boat box through a robot and is directly placed on the die bonder, so that the wafer can be prevented from being manually contacted, but the cost of the robot is higher; secondly, the wafer in the wafer boat box shell is taken out and discharged onto the lifting basket manually, then the lifting basket is placed on the wafer fixing machine, and the existing lifting basket can only be used for placing 6 wafers on the premise of ensuring the wafer spacing, so that the wafer transferring efficiency is low.

Therefore, a technical solution for transferring the wafer without manual contact with the wafer is needed.

SUMMERY OF THE UTILITY MODEL

The utility model provides a wafer boat box loading attachment and have this wafer boat box loading attachment's wafer boat box, its purpose is lower in order to provide a cost, and need not the technical scheme that can shift the wafer of manual contact wafer to improve production efficiency.

The utility model adopts the technical scheme as follows: the utility model provides a wafer boat box loading attachment, wafer boat box loading attachment is used for installing and supports the location to the wafer that holds in the wafer boat box body on the wafer boat box body, wafer boat box loading attachment is including being used for laying the tool body of wafer and will the tool body with the locking mechanism that the connection can be dismantled to the wafer boat box body.

Further, the locking mechanism comprises a lock catch and a connecting part, the lock catch is fixedly installed on the side wall of the jig body, the connecting part is fixedly arranged on the outer side wall of the wafer boat box body, and the lock catch and the connecting part are used for mutually locking and installing the jig body on the wafer boat box body.

Further, the inner side of the jig body is used for being abutted against the outer side wall of the wafer boat box body; the lock catch is a hasp, the connecting part is a protrusion which is integrally formed on the outer side wall of the wafer boat box body, and when the lock catch and the connecting part are mutually locked, the lock catch is used for tensioning the connecting part, so that the jig body is tightly pressed and connected on the wafer boat box body.

Further, the jig body comprises two first plate bodies arranged oppositely and two second plate bodies arranged oppositely, the first plate bodies and the second plate bodies are mutually perpendicular to form a containing cavity for containing the wafer boat box body, and the size of the containing cavity is changed by replacing the first plate bodies and/or the second plate bodies with different sizes or changing the connecting position between the first plate bodies and the second plate bodies, so that the jig body is suitable for wafer boat box bodies with different sizes; the lock catch is arranged on the first plate body, and the first plate body and the second plate body are used for being abutted against the opening of the wafer boat box body.

Furthermore, a reinforcing plate body is arranged on the outer side of the first plate body and fixedly connected with the first plate body; when the jig body is installed on the wafer boat box body, the inner side wall of the lower part of the reinforcing plate body is abutted to the outer side wall of the wafer boat box body.

Furthermore, a process groove is formed in the reinforcing plate body, the process groove penetrates through the reinforcing plate body, and the lock catch is arranged on the first plate body and located in the process groove.

Furthermore, a vertical handle is arranged on the outer side face of the reinforcing plate body, and a horizontal handle is arranged on the outer side face of the second plate body.

Furthermore, second bulges are arranged on the inner side wall of the jig body and are arranged at equal intervals to form a third slot; when the jig body is mounted on the wafer boat box body, the third slot is used for supporting and positioning the exposed part of the wafer accommodated in the wafer boat box body.

The utility model also provides a wafer boat box, including foretell wafer boat box loading attachment and wafer boat box body, be equipped with first arch on the inside wall of wafer boat box body, first protruding equidistant setting forms first slot and second slot, first slot with the second slot sets up in turn, first slot is used for placing the wafer.

Furthermore, second bulges are arranged on the inner side wall of the jig body corresponding to the second slot at intervals to form a third slot, and the third slot is arranged corresponding to the first slot; when the jig body is installed on the wafer boat box body, the third slot is arranged right above the first slot, the second protrusions are located right above the second slot, at least one of the second protrusions is provided with a connecting protrusion, and the connecting protrusion is used for being inserted into the second slot.

The beneficial effects of the utility model are that:

(1) This application will the tool body passes through locking mechanism detachable sets up wafer boat box body opening part, thereby, the tool body can protect wafer on the wafer boat box body prevents that the external world from exposing the wafer this external part of wafer boat box from causing the harm, like this, when wafer when the supplied materials need go up solid brilliant machine and carry out next process, can directly install the tool body on the wafer boat box body, then put tool body and wafer boat box body as a whole on solid brilliant machine, need not the manual work and take out the wafer from wafer boat box body and put into the hand-basket and put solid brilliant machine again on, save the manual work and get the step of putting, can effectively avoid contacting the wafer and lead to uncertain scratch risk to production efficiency has been improved.

(2) This application passes through hasp locking connecting portion can realize tool body detachably installs on the crystal boat box body, locking mechanism simple structure, it is easy and simple to handle, improve production speed.

(3) This application the tool body passes through first plate body with the second plate body butt is installed on the brilliant boat box body, and pass through strengthen the plate body increase with the area of contact of brilliant boat box body, in order to increase the brilliant boat box body with connection stability between the tool body.

(4) According to the wafer boat box, the second bulges are arranged on the inner side wall of the jig body at intervals to form a third slot, when the jig body is installed on the wafer boat box body, the exposed part of the upper end of a wafer placed in the first slot is positioned in the third slot, so that the jig body can protect the part of the wafer exposed outside the wafer boat box body; meanwhile, the connection protrusion is inserted into the second slot, so that the jig body and the wafer boat box body are connected more stably.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. In the drawings:

fig. 1 is a schematic structural view of a wafer cassette according to the present invention.

Fig. 2 is a schematic view of a wafer cassette body according to the present invention.

Fig. 3 is a schematic view of the structure of the fixture of the present invention.

Fig. 4 is a partially enlarged view of a portion a in fig. 3.

Fig. 5 is a front view schematically illustrating a wafer cassette according to the present invention.

Fig. 6 is a schematic cross-sectional view at B-B in fig. 5.

Fig. 7 is a partial enlarged view at C in fig. 6.

Fig. 8 is a schematic structural view of the middle angle iron of the present invention.

Reference numerals are as follows: 1. a wafer boat body; 11. a step portion; 12. a first protrusion; 121. a first slot; 122. a second slot; 13. locking the groove; 2. a jig body; 21. a first plate body; 22. a second plate body; 23. a reinforcing plate body; 231. a process tank; 24. a second protrusion; 241. a third slot; 242. a connecting projection; 243. a guide portion; 25. a vertical handle; 26. a horizontal handle; 31. locking; 32. a connecting portion; 4. angle iron; 41. a kidney-shaped hole.

Detailed Description

The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings. It is to be understood that the description of the embodiments herein is for purposes of illustration and explanation only and is not intended to limit the invention.

Referring to fig. 1 to 8, the present invention provides a wafer boat, which includes a wafer boat loading device and a wafer boat body 1, wherein the wafer boat loading device is installed on the wafer boat body 1 to support and position wafers received in the wafer boat body 1; the wafer boat box feeding device comprises a jig body 2 and a locking mechanism which detachably connects the jig body 2 and the wafer boat box body 1.

The inner side wall of the wafer boat body 1 is provided with first protrusions 12, the first protrusions 12 are arranged at equal intervals to form first slots 121 and second slots 122, the first slots 121 and the second slots 122 are alternately arranged, that is, one second slot 122 is arranged between every two adjacent first slots 121, and one first slot 121 is arranged between every two adjacent second slots 122; the first slot 121 is used for placing a wafer; the first slot 121 and the second slot 122 have the same size and dimension, and the second slot 122 is used for increasing the interval between the wafers.

According to the arrangement, the jig body 2 is detachably mounted on the wafer boat box body 1 through the locking mechanism, when the jig body 2 is mounted on the wafer boat box body 1, the jig body 2 can protect wafers on the wafer boat box body 1, and the wafers exposed outside the wafer boat box body 1 are prevented from being damaged by the outside; therefore, when wafers are fed and need to go up a die bonder to carry out the next process, the jig body 2 can be directly installed on the wafer boat box body 1, the wafers do not need to be manually taken out of the wafer boat box body 1 and then put into a basket, the manual taking and placing steps are omitted, the risk of uncertain scratching caused by wafer contact can be effectively avoided, and the production efficiency is improved.

Further, second protrusions 24 are arranged on the inner side wall of the jig body 2 corresponding to the second slots 122, the second protrusions 24 are arranged at equal intervals to form third slots 241, and the third slots 241 are arranged corresponding to the first slots 121; when the jig body 2 is installed on the wafer boat box body 1, the third slot 241 is disposed right above the second slot 122, the second protrusion 24 is located right above the second slot 122, at least one of the second protrusion 24 is provided with a connecting protrusion 242, the connecting protrusion 242 is used for being inserted into the second slot 122, and the third slot 241 can support and position the exposed portion of the wafer contained in the wafer boat box body 1.

With the above arrangement, when the jig body 2 is mounted on the wafer boat body 1, the upper end of the wafer placed in the first slot 121 is located in the third slot 241, so that the jig body 2 can protect the portion of the wafer exposed outside the opening of the wafer boat body 1; meanwhile, the connection between the jig body 2 and the wafer boat body 1 is more stable by inserting the connection protrusions 242 into the second insertion grooves 122.

Wherein, there is the slot of symmetry (promptly the utility model provides a first slot 121 and second slot 122) inside the wafer boat box of current, and the size is strict unified for support the both sides of wafer, the box 25 wafers of packing of a wafer boat usually. Because of the vulnerable property of the wafers themselves, in order to avoid damaging the wafers due to the small spacing between the wafers, the handling or picking and placing actions usually set up an empty slot (i.e. the second slot 122 in the present invention) between the wafers to increase the spacing between the wafers, therefore, the number of full-load wafers in a wafer cassette is generally 13, and the number of full-load baskets in the prior art is 6.

Like this, through the utility model provides a 2 direct mountings of tool body are in on the wafer boat box body 1 to can protect the wafer to expose the part outside the 1 opening of wafer boat box body shifts the wafer through this kind of mode, can shift 13 wafers at every turn, and the transfer mode of current hand-basket can only shift 6 wafers at every turn. Therefore, utilize the utility model provides a tool body 2 directly acts on directly shift on the wafer boat box body 1, the quantity that shifts at every turn improves greatly to can reduce the number of times that shifts the wafer, further improve production efficiency, also avoid because the wafer that manual operation caused damages.

Specifically, referring to fig. 5 and 6, one end of the second protrusion 24 is provided with a guide portion 243, and the width of the guide portion 243 is gradually reduced toward the end.

In this embodiment, the upper and lower ends of the second protrusion 24 are provided with guide portions 243.

With the above arrangement, when the jig body 2 is installed and a wafer is taken and placed, the guide portion 243 can guide the wafer, thereby reducing the risk of damaging the wafer.

Further, referring to fig. 1 to 4, the locking mechanism includes a lock 31 and a connecting portion 32, the lock 31 is fixedly mounted on the sidewall of the jig body 2, the connecting portion 32 is fixedly disposed on the outer sidewall of the wafer boat box body 1, and the lock 31 and the connecting portion 32 are used for locking each other to mount the jig body 2 on the wafer boat box body 1.

Above setting, through hasp 31 locking connecting portion 32 can realize tool body 2 detachably installs on the crystal boat box body 1, like this, locking mechanism simple structure, it is easy and simple to handle, improve production speed.

Specifically, the latch 31 is a snap fastener, the connecting portion 32 is a protrusion integrally formed on the outer side wall of the wafer boat case body 1, and when the latch 31 and the connecting portion 32 are locked to each other, the latch 31 tightens the connecting portion 32, thereby tightly connecting the jig body 2 to the wafer boat case body 1.

In the present embodiment, referring to fig. 2, the connecting portion 32 is a strip-shaped protrusion extending outward from the outer sidewall of the boat body 1.

Referring to fig. 1, 2 and 4, a locking recess 13 is formed on the boat case body 1 corresponding to the connecting portion 32, the locking recess 13 is a blind groove, the locking recess 13 is recessed toward the inner side of the boat case body 1, and the connecting portion 32 is formed by extending outward from the bottom wall of the locking recess 13; when the jig body 2 is mounted on the boat case body 1, the locking grooves 13 provide a space for the snaps to lock the coupling parts 32, so that the snaps can more easily lock the coupling parts 32.

In other embodiments, the connecting portion 32 may also be a barb formed to extend outward and downward from the outer sidewall of the wafer boat body 1.

Further, referring to fig. 1 and fig. 3, the jig body 2 includes two first plate bodies 21 disposed opposite to each other and two second plate bodies 22 disposed opposite to each other, and the first plate bodies 21 and the second plate bodies 22 are disposed adjacent to each other; a cavity for accommodating the wafer boat body 1 is vertically formed between the first plate body 21 and the second plate body 22, and the size of the cavity is changed by replacing the first plate body 21 and/or the second plate body 22 with different sizes or changing the connection position between the first plate body 21 and the second plate body 22, so as to adapt to the wafer boat bodies 1 with different sizes; the lock catch 31 is disposed at the first plate 21, and the first plate 21 and the second plate 22 are configured to abut against the opening of the wafer boat main body.

Further, referring to fig. 1, fig. 3 and fig. 4, a reinforcing plate 23 is further disposed on an outer side of the first plate 21, and the reinforcing plate 23 is fixedly connected to the first plate 21; when the jig body 2 is mounted on the wafer boat box body 1, the inner side wall of the lower end of the reinforcing plate 23 abuts against the outer side wall of the wafer boat box body 1.

Specifically, referring to fig. 4, in the height direction of the boat box body 1, the height of the reinforcing plate 23 is greater than that of the first plate 21, so that when the jig body 2 is mounted on the boat box body 1, the lower end of the reinforcing plate 23 can be pressed against the boat box body 1.

More than setting up, the tool body 2 passes through first plate body 21 with the butt of second plate body 22 is installed on wafer boat box body 1 open-ended step portion 11, and pass through strengthen the plate body 23 increase with wafer boat box body 1's area of contact, in order to increase wafer boat box body 1 with the stability of being connected between the tool body 2.

In this embodiment, referring to fig. 3 and 4, the second plate 22 and the reinforcing plate 23 are perpendicular to each other and fixedly connected, the first plate 21 is fixedly connected to the inner side of the reinforcing plate 23 by means of bolts or welding, and the first plate 21 and the second plate 22 are perpendicular to each other to form a cavity for accommodating the wafer cassette body 1.

Referring to fig. 4 and 8, an angle iron 4 is further arranged between the reinforcing plate 23 and the second plate 22, the angle iron 4 is used for connecting the reinforcing plate 23 and the second plate 22, referring to fig. 7, two faces of the angle iron 4 are respectively provided with a waist hole 41, the reinforcing plate 23 and the second plate 22 are respectively fixedly mounted on two faces of the angle iron 4 through bolts, and when the size of the cavity needs to be adjusted, the relative positions of the reinforcing plate 23 and the second plate 22 and the waist holes 41 can be adjusted, so that the crystal boat box body 1 with different sizes can be adapted; in other embodiments, a plurality of screw holes (not shown in the drawings) may be further disposed at intervals on two surfaces of the angle iron 4, and the reinforcing plate 23 and the second plate 22 are respectively connected to the screw holes on the two surfaces of the angle iron 4 through bolts, so that the size of the receiving cavity can be changed by connecting different screw holes.

A step part 11 is arranged on the opening of the wafer boat body 1; when the jig body 2 is mounted on the wafer boat body 1, the first plate 21 and the second plate 22 are respectively abutted against the side wall of the step portion 11.

Above setting, pass through between the reinforcing plate body 23 in the tool body 2 and the second plate body 22 angle bar 4 interconnect can adjust according to the size of crystal boat box body 1 reinforcing plate body 23 with the second plate body 22 is connected relative position on the angle bar 4 changes the size that holds the chamber to adapt to not unidimensional crystal boat box body 1.

In another embodiment, the length, width and size of the jig body 2 can be changed by replacing the first plate 21, the second plate 22, the reinforcing plate 23 and the angle iron 4 with different sizes, so that the jig body 2 can adapt to the wafer boat body 1 with different sizes.

Further, referring to fig. 1, fig. 3 and fig. 4, a process groove 231 is formed on the reinforcing plate 23, the process groove is a through groove, the process groove 231 penetrates through the reinforcing plate 23, and the lock catch 31 is disposed on the outer side surface of the first plate 21 and located in the process groove 231.

In this embodiment, two process grooves 231 are disposed on the reinforcing plate 23, and the process grooves 231 are disposed on the left and right sides of the reinforcing plate 23.

With the above arrangement, by arranging the process groove 231 on the reinforcing plate 23, the weight of the jig body 2 can be reduced, and the lock catch 31 arranged on the outer side surface of the first plate 21 is arranged in the process groove 231, so that the structure of the jig body 2 is more compact.

Further, referring to fig. 1 and 3, an upright handle 25 is disposed on an outer side surface of the reinforcing plate 21. In this embodiment, the vertical handle 25 is fixedly mounted on the reinforcing plate body 23 by bolts and is located between the two process grooves 231 of the reinforcing plate body 23.

With the arrangement, when the wafer boat body 1 containing wafers is loaded on the die bonder, due to process requirements, the opening of the wafer boat body 1 needs to be horizontally arranged, and through the arrangement of the vertical handle 25, a worker can conveniently turn over the wafer boat body 1 to enable the wafers in the wafer boat body 1 to be horizontally arranged and placed on the die bonder.

Further, referring to fig. 1 and 3, a horizontal handle 26 is disposed on an outer side surface of the second plate 22. In this embodiment, two of the second boards 22 are each provided with a horizontal handle 26, and the horizontal handles 26 are fixedly mounted on the second boards 22 by bolts. With the arrangement, the wafer boat box body 1 can be conveniently lifted by workers by arranging the horizontal handle 26.

The utility model also provides a crystal boat box loading attachment, preferably the crystal boat box loading attachment that above-mentioned crystal boat box contained.

In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. It will be understood that when an element such as a layer, region or substrate is referred to as being "formed on," "disposed on" or "located on" another element, it can be directly on the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly formed on" or "directly disposed on" another element, there are no intervening elements present.

In this document, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms can be understood in a specific case to those of ordinary skill in the art.

In this document, the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the sake of clarity and convenience of description of the technical solutions, and thus, should not be construed as limiting the present invention.

As used herein, the ordinal adjectives "first", "second", etc., to describe a component, merely indicate that similar elements are being referred to, and are not intended to imply that the components so described must be in a given sequence, either temporally, spatially, in ranking, or in any other manner.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

As used herein, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, including not only those elements listed, but also other elements not expressly listed.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. The wafer boat box feeding device is characterized by being arranged on a wafer boat box body and used for supporting and positioning wafers contained in the wafer boat box body, and the wafer boat box feeding device comprises a jig body used for placing the wafers and a locking mechanism which enables the jig body and the wafer boat box body to be detachably connected.

2. The wafer boat cassette loading apparatus according to claim 1, wherein the locking mechanism comprises a latch fixedly mounted on a sidewall of the jig body and a connecting portion fixedly disposed on an outer sidewall of the wafer boat cassette body, the latch and the connecting portion being adapted to be locked to each other to mount the jig body on the wafer boat cassette body.

3. The wafer boat loading apparatus according to claim 2, wherein the inner side of the jig body is adapted to abut against an outer sidewall of the wafer boat body; the hasp is the hasp, connecting portion be integrated into one piece in the arch on the lateral wall of crystal boat box body, will the hasp with when connecting portion locks each other, the hasp is used for straining connecting portion, thereby will the tool body compresses tightly to be connected on the crystal boat box body.

4. The wafer boat box loading device according to claim 2, wherein the jig body comprises two oppositely arranged first plate bodies and two oppositely arranged second plate bodies, the first plate bodies and the second plate bodies are arranged perpendicular to each other to form a cavity for accommodating the wafer boat box body, and the size of the cavity is changed by replacing the first plate bodies and/or the second plate bodies with different sizes or changing the connection position between the first plate bodies and the second plate bodies, so as to adapt to wafer boat box bodies with different sizes; the lock catch is arranged on the first plate body, and the first plate body and the second plate body are used for being abutted against the opening of the wafer boat box body.

5. The wafer boat cassette loading apparatus according to claim 4, wherein a reinforcing plate is further provided on an outer side of the first plate, and the reinforcing plate is fixedly connected to the first plate; when the jig body is installed on the wafer boat box body, the inner side wall of the lower end of the reinforcing plate body is abutted to the outer side wall of the wafer boat box body.

6. The apparatus of claim 5, wherein the reinforcing plate has a process groove formed therein, the process groove is disposed through the reinforcing plate, and the latch is disposed on the first plate and located in the process groove.

7. The wafer boat cassette loading apparatus according to claim 5, wherein vertical handles are provided on outer side surfaces of the reinforcing plate bodies, and horizontal handles are provided on outer side surfaces of the second plate bodies.

8. The wafer boat cassette loading device according to claim 1, wherein second protrusions are formed on an inner sidewall of the jig body, and the second protrusions are arranged at equal intervals to form third slots; when the jig body is mounted on the wafer boat box body, the third slot is used for supporting and positioning the exposed part of the wafer accommodated in the wafer boat box body.

9. A wafer boat, comprising the wafer boat loading apparatus of any one of claims 1 to 8, and a wafer boat body, wherein first protrusions are provided on an inner sidewall of the wafer boat body, the first protrusions are disposed at equal intervals to form first slots and second slots, the first slots and the second slots are alternately disposed, and the first slots are used for placing wafers.

10. The wafer boat box of claim 9, wherein second protrusions are formed on the inner sidewall of the jig body, and the second protrusions are disposed at equal intervals to form third slots; the third slot is arranged corresponding to the first slot; when the jig body is installed on the wafer boat box body, the third slot is arranged right above the first slot, the second protrusion is located right above the second slot, at least one of the second protrusions is provided with a connecting protrusion, and the connecting protrusion is used for being inserted into the second slot.

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