CN218235400U - Cryopump is regenerated with heating band and has its cryopump - Google Patents
Cryopump is regenerated with heating band and has its cryopump Download PDFInfo
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- CN218235400U CN218235400U CN202221694844.7U CN202221694844U CN218235400U CN 218235400 U CN218235400 U CN 218235400U CN 202221694844 U CN202221694844 U CN 202221694844U CN 218235400 U CN218235400 U CN 218235400U
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- cryopump
- regeneration
- heating block
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Abstract
The utility model discloses a cryopump is heat band for regeneration belongs to cryopump regeneration technical field. This cryopump is heat band for regeneration includes heating block temperature detect switch, mirror board and wire cover, the heating block is provided with the heating wire, heating wire evenly distributed is inside the heating block, temperature detect switch sets up inside the heating block, temperature detect switch is used for protecting heat band and equipment, the heating block is connected with the mirror board, the mirror board is connected with the wire cover. The utility model discloses not only adopt the integral type heating piece, make the utility model discloses can heat evenly when using, moreover the utility model discloses built-in 80 ℃ constant temperature control switch appears unusually (if lasting intensification exceeds 80 ℃), will the auto-power-off, has reduced the potential safety hazard, has also protected heating zone and equipment. The utility model also discloses an use the cryopump of this cryopump regeneration with heating band.
Description
Technical Field
The utility model belongs to the technical field of the cryopump regeneration, more specifically say so, relate to a cryopump is heating tape and has its cryopump for the regeneration.
Background
Cryopumps are vacuum pumps that condense gases using cryogenic surfaces, also known as condensate pumps. The cryopump can obtain clean vacuum with the maximum pumping speed and the minimum limiting pressure, and is widely applied to the research and production of semiconductors and integrated circuits, the research and production of molecular beams, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like. The cold plate is arranged in the cryopump and is cooled to the extremely low temperature by liquid helium or a refrigerator. The cryogenic pump is used in cooperation with the vacuum tank, condenses gas, and keeps the vapor pressure of the condensate lower than the limit pressure of the pump, so that the air pumping effect is achieved. After the cryopump works for a period of time, the cold plate is covered by the condensed solid of the gas, the surface temperature rises, the adsorption effect on the gas is gradually weakened, and finally the adsorption effect is lost. Thus, when a corporation uses a cryopump, the cryopump is heated every time to remove solids that condense on the cold plates, so called "regeneration".
Regeneration methods are generally classified into: natural heating regeneration, gas flushing regeneration and electric heating regeneration.
The natural heating regeneration is the simplest low-temperature pump regeneration method, the heat exchange between the pump wall and the ambient air is utilized to heat the pump, and when the regeneration is started, the vacuum degree in the pump is higher, so the cold plate is gradually heated mainly by the heat radiation of the pump wall and the heat conduction in the pump, and the heating process is quite slow. When the pressure rises to the range of 10 < -1 > to 10Pa, the convection heat exchange starts to play a relatively large role. The time required for natural heating regeneration is long, and generally, it takes ten or more hours.
Gas purge regeneration is a widely used method of heating a pump with either room temperature or heated dry inert gas (N2 or Ar) flushed into the pump, both in the form of a constant pressure method and a pulse purge method. Because effective convection heat exchange can be carried out, the regeneration time can be shortened, the gas flushing is favorable for the desorption of water vapor from the activated carbon, the regeneration quality of the cryogenic pump is improved, and in addition, the cryogenic pump can dilute toxic and explosive gas stored in the pump. However, gas-flushed regeneration also has disadvantages: the regeneration cost is obviously improved.
The electric heating regeneration is an economic regeneration method, and at present, two different heating modes exist, namely heating by wrapping a heating belt on the outer surface of a pump wall. The heating belt is convenient to use, and the regeneration time required by the mode is shorter than that of natural heating regeneration, so that the regeneration efficiency is improved. However, when the heating belt is used alone to regenerate the cryopump, the regeneration time is still longer. The other is heating by a heating plate on the cold head in the pump. The regeneration by the heating plate only needs a short temperature rise time, but the structure is more complex. Since some of the components in a cryopump cannot withstand high temperatures, the heating process needs to be controlled.
In contrast, heating with heating tape and gas (N) 2 ) The cooperation of washing is used and can all shorten a lot of times than adopting gas washing and natural heating regeneration alone, uses the heating tape to regenerate moreover, need not to carry out any change to the original structure of pump. Therefore, the regeneration mode of the N2+ heating belt can greatly improve the regeneration efficiency, is more economical and practical, and can also improve the service efficiency of the pump.
However, the regeneration of the heating zone has the problem of uneven heating possibility, and particularly, a heating blind zone is generated by some block-type heating modes, an over-temperature phenomenon is also generated, and some potential safety hazards exist.
SUMMERY OF THE UTILITY MODEL
To heating inhomogeneous, the too high problem that has the potential safety hazard of temperature, the utility model aims at providing a cryopump regeneration is with heating band, including heating block, temperature detect switch, mirror panel and wire cover. The utility model discloses not only adopt the integral type heating piece, make the utility model discloses can heat evenly when using, moreover the utility model discloses built-in 80 ℃ constant temperature control switch appears unusually (if lasting intensification exceeds 80 ℃), will the auto-power-off, has reduced the potential safety hazard, has also protected heating zone and equipment.
One of the concepts of the present invention is to provide a heating tape for cryopump regeneration, which includes a heating block.
The heating block is an integrated heating block.
The heating block is provided with electric heating wires which are uniformly distributed in the heating block,
the heating block is internally provided with a heating source.
In some embodiments, the heating source is a silicone rubber electric heating sheet, and the silicone rubber electric heating sheet has the following characteristics:
(1) the silicon rubber electric heating sheet has excellent physical strength and flexibility; the electric heating film is applied with external force, so that the electric heating element can be well contacted with a heated object.
(2) The silicon rubber electric heating sheet has strong plasticity, can be processed into any shape and is convenient to process.
(3) The silicon rubber electric heating sheet has light weight, adjustable thickness and small heat capacity, and can achieve fast heating rate and higher temperature control precision.
(4) The silicon rubber electric heating sheet has good weather resistance and ageing resistance, and the service life of the product is greatly prolonged.
(5) The silicon rubber electric heating sheet has good chemical corrosion resistance, and can be used in places with severe environments such as humid and corrosive gases.
Another concept of the present invention is to provide a heating tape for regeneration of a cryopump, the heating tape for regeneration of a cryopump includes a temperature control switch, a mirror panel, a wire cover, and a pin.
The temperature control switch is arranged inside the heating block and used for protecting the heating belt and the equipment.
In some embodiments, the temperature control switch is a constant temperature control switch at 80 ℃, the temperature is limited to 80 ℃ and is normal at 55 ℃, and when the temperature is abnormal (if the temperature continuously rises to be higher than 80 ℃), the power can be automatically cut off, so that potential safety hazards are reduced, and a heating belt and equipment are protected.
The mirror board is connected with the heating block.
In some embodiments, the mirror plate is larger in area than the heat block.
In some embodiments, the mirror plate has a length greater than a length of the heating block and the mirror plate has a width greater than a width of the heating block.
The mirror panel is provided with the department of bending.
In some embodiments, the bend is rectangular.
In some embodiments, the R angle at the bend is within the bezel of the mirror plate.
In some embodiments, the bend is used to connect the heating block, i.e. the mirror plate is connected to the heating block through the bend.
In some embodiments, the mirror panel is provided with eight bends, and each of the two long sides is provided with four bends.
The wire cover is connected with the mirror panel, and the wire cover is used for wiring.
In some embodiments, the wire cover and the mirror panel are connected by a welding connection.
In some embodiments, the wire cover is disposed at the center of the mirror plate.
The pin is connected with the mirror panel.
In some embodiments, the pins are connected to two wide sides of the mirror plate.
In some embodiments, three pins are connected to one width of the mirror plate, three pins are connected to the other width, and the pins on the two widths correspond one to one.
The pin comprises three cylinders, and the diameter of the cylinder in the middle is larger than the diameters of the cylinders at the two ends, and the diameters of the cylinders at the two ends are the same.
In some embodiments, the surface of the pin is provided with bright nickel, and the bright nickel plated on the surface of the pin can prevent the surface of the pin from being oxidized and rusted.
The pin is provided with a pin hole.
In some embodiments, the pin hole is disposed in the middle of the middle cylinder.
In some embodiments, the pin holes are circular.
Another aspect of the present invention is to provide a cryopump including the above-described heat tape for cryopump regeneration.
The utility model discloses a technological effect and advantage:
1. the utility model discloses an integral type heating piece, and heating wire evenly distributed is inside the heating piece, makes the utility model discloses with N 2 In combination with regeneration of the cryopump, the cryopump is heated uniformly.
2. The utility model discloses a built-in 80 ℃ constant temperature control switch appears unusually (if continuously rising temperature exceeds 80 ℃), will the auto-power-off, has reduced the potential safety hazard, has also protected heating zone and equipment.
3. The utility model discloses still protect personnel's personal safety, not only the surface adopts SUS201 mirror panel, cuts off the heating source and opens, has avoided the hand directly to touch the heat source, has both prevented to scald, has certain aesthetic property again, still pastes high temperature warning label in the striking department of heat band.
Drawings
FIG. 1 is a schematic representation of the use of the heat tape for cryopump regeneration of the present application;
FIG. 2 is an assembled expanded view of a heat belt for cryopump regeneration of the present application;
FIG. 3 is an enlarged schematic view at A of FIG. 2;
FIG. 4 is a front view of a pin of the heat belt for cryopump regeneration of the present application;
fig. 5 is a schematic view showing the development of a wire cover of the heating belt for cryopump regeneration according to the present application.
In the figure:
1. a mirror panel;
2. a heating block;
3. a pin;
4. a wire cover;
5. a high temperature warning sign;
6. a nameplate;
7. and (7) bending.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
Referring to fig. 1 to 5 (unless otherwise specified, the indicated orientation or positional relationship in this embodiment is based on the orientation or positional relationship shown in fig. 1), in this embodiment, a heating tape for regeneration of a cryopump is provided, which includes a heating block 2, a temperature control switch, a mirror panel 1, a wire cover 4, and a pin 3, wherein the heating block 2 is rectangular, the heating block 2 is an integrated heating block, a heating source is disposed inside the heating block 2, the heating source is a silicon rubber electric heating sheet, the heating source is provided with electric heating wires, and the electric heating wires are uniformly distributed inside the heating source; the temperature control switch is a constant temperature control switch at 80 ℃, is arranged in the wire cover 4 and is used for protecting the heating belt and equipment (the limit is 80 ℃, the normal temperature is 55 ℃, and when the temperature is abnormal (if the temperature is continuously increased to exceed 80 ℃), the power is automatically cut off); the area of the mirror panel 1 is larger than that of the heating block 2 (the area of the mirror panel 1 is larger than that of the heating block 2, the width of the mirror panel is larger than that of the heating block), the material of the mirror panel 1 is SUS201, four bending parts 7 are arranged on the upper side of the mirror panel 1, the bending parts 7 are rectangular, the R angle of each bending part 7 is in the frame of the mirror panel 1, the four bending parts 7 are arranged on the lower side of the mirror panel 1, the bending parts 7 are rectangular, the R angle of each bending part 7 is in the frame of the mirror panel 1, the bending parts 7 on the upper side and the lower side of the mirror panel 1 are symmetrical, the mirror panel 1 is connected with the heating block 2 through the bending parts 7 (when the mirror panel 1 and the heating block 2 are wrapped outside the pump shell of the low-temperature pump together, the heating block 2 is positioned on the inner side of the mirror panel 1, namely the heating block 2 is positioned between the pump shell of the low-temperature pump and the mirror panel 1, the bending part 7 on the upper side of the mirror panel 1 is folded downwards and inwards, the mirror panel 7 on the lower side of the mirror panel 1 is positioned on the mirror panel and the mirror shell of the mirror panel 1, the mirror panel 1 is provided with the left and right side of the mirror panel, the warning pin 5, and left side of the warning pin 1, and right side of the warning plate 1 are provided with the warning pin 1, and the warning pin 1; the pin 3 consists of three cylinders, the diameter of the middle cylinder is larger than that of the cylinders at two ends, the diameters of the cylinders at two ends are the same, the pin 3 is provided with a pin hole which is circular, the pin hole is arranged in the middle of the middle cylinder, bright nickel is arranged on the surface of the pin 3 (the bright nickel plated on the surface of the pin can prevent the surface of the pin from being oxidized and rusted), the cylinders at two ends of the pin 3 are connected with the through hole of the mirror surface plate 1 (so that the pin 3 is connected with the mirror surface plate 1), the three pins 3 are connected with the left side of the mirror surface plate 1, the other three pins 3 are connected with the right side of the mirror surface plate 1, and the three pins on the left side are parallel to and symmetrical with the three pins on the right side one by one; the wire cover 4 is used for wiring, the wire cover 4 is connected with the mirror panel 1 (the connection means that the wire cover 4 is connected with the mirror panel 1 through a welding connection mode), the wire cover 4 is arranged at the center of the mirror panel 1 (the position relation indicated here is based on fig. 2), and the wire cover 4 is in a cuboid shape; when the heating tape for the regeneration of the cryopump is used on the cryopump (the cryopump is the prior art, and is not described herein), the heating tape for the regeneration of the cryopump covers on the cryopump pump shell (the heating block 2 is in the inner side, is closer to the cryopump pump shell, and the mirror panel 1 is at the outer side), and adopts the long screw to fix (specifically, the long screw passes through two pin holes on the pin 3 which is symmetrical at the left and right sides on the mirror panel 1, and adopts the long screw to fix and can adjust the tightness, so that the heating tape is more attached to the pump shell, the temperature conductivity is better, and the mode of combining the pin 3 and the long screw is adopted to ensure that the stress is more uniform when the pump shell is fixed on the pump shell); the center of the bottom of the cryogenic pump is provided with an air inlet, the bottom of the cryogenic pump is provided with four backflow holes, and the four backflow holes are uniformly distributed at the bottom of the cryogenic pump; the process of regenerating the cryopump using the nitrogen plus heating tape combination is as follows: nitrogen enters a cavity of the cryopump from an air inlet at the bottom of the cryopump, a heating tape outside a pump shell of the cryopump is heated, the heated nitrogen flows back to the outside of the cryopump from the cavity through four backflow holes at the bottom of the cryopump, a wire cover 4 on the mirror panel 1 is provided with a temperature control module for measuring the temperature of the heating tape, and when the temperature is abnormal (such as the temperature continuously rises to exceed 80 ℃), the power can be automatically cut off.
In the description of the present invention, it should be understood that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art and related fields without creative efforts shall fall within the protection scope of the present invention. The structures, devices, and methods of operation of the present invention, not specifically described and illustrated, are generally practiced by those of ordinary skill in the art without specific recitation or limitation.
Claims (10)
1. A cryopump regeneration heating belt, comprising: heating block (2), temperature detect switch, mirror board (1) and wire casing (4), heating block (2) are provided with the heating wire, heating wire evenly distributed is inside heating block (2), temperature detect switch sets up inside heating block (2), temperature detect switch is used for protecting heating tape and equipment, heating block (2) are connected with mirror board (1), mirror board (1) is connected with wire casing (4).
2. A cryopump regeneration heating belt according to claim 1, characterised in that the heating block (2) is an integral heating block.
3. The heat belt for regeneration of a cryopump according to claim 1, wherein a heating source is provided inside the heating block (2), and the heating source is a silicone rubber electrothermal sheet.
4. The heat belt for regeneration of a cryopump as claimed in claim 1, wherein the temperature controlled switch is a 80 ℃ thermostatic temperature controlled switch.
5. A heating tape for regeneration of a cryopump according to claim 1, characterised in that the mirror panel (1) is provided with a bend (7), said bend (7) being used for connecting a heating block (2).
6. A cryopump regeneration heating tape according to claim 5, characterized in that the R angle of said bend (7) is within the border of the mirror panel (1).
7. A cryopump regeneration heating tape according to claim 1, characterised in that it further comprises a pin (3), said pin (3) being connected to the mirror panel (1).
8. A cryopump regeneration heating tape according to claim 7, characterised in that said pin (3) is provided with a pin hole.
9. The heat belt for regeneration of a cryopump according to claim 7, wherein a surface of said pin (3) is provided with bright nickel.
10. A cryopump comprising the heat tape for regenerating a cryopump as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221694844.7U CN218235400U (en) | 2022-07-04 | 2022-07-04 | Cryopump is regenerated with heating band and has its cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221694844.7U CN218235400U (en) | 2022-07-04 | 2022-07-04 | Cryopump is regenerated with heating band and has its cryopump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218235400U true CN218235400U (en) | 2023-01-06 |
Family
ID=84674835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221694844.7U Active CN218235400U (en) | 2022-07-04 | 2022-07-04 | Cryopump is regenerated with heating band and has its cryopump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218235400U (en) |
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2022
- 2022-07-04 CN CN202221694844.7U patent/CN218235400U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230817 Address after: Room 411, No. 68 Changshou East Road, Yinzhou District, Ningbo City, Zhejiang Province, 315000 Patentee after: Yaxiang (Ningbo) Vacuum Equipment Co.,Ltd. Address before: 315101 Shen Jia Cun, Qiu Ai Zhen, Yinzhou District, Ningbo City, Zhejiang Province Patentee before: Yaxiang (Ningbo) Low Temperature Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right |