CN217926672U - Bolt for single crystal furnace and single crystal furnace - Google Patents
Bolt for single crystal furnace and single crystal furnace Download PDFInfo
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- CN217926672U CN217926672U CN202221651305.5U CN202221651305U CN217926672U CN 217926672 U CN217926672 U CN 217926672U CN 202221651305 U CN202221651305 U CN 202221651305U CN 217926672 U CN217926672 U CN 217926672U
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Abstract
The embodiment of the utility model relates to monocrystalline silicon manufacturing technical field provides a bolt and single crystal growing furnace for single crystal growing furnace, and the bolt includes for the single crystal growing furnace: the screw rod and the screw cap that are connected, the screw cap is kept away from the surface of screw rod has first screw, the bottom surface of first screw has at least one with first screw link up's second screw, and along the screw rod points to on the screw cap, the orthographic projection of second screw on the screw cap surface is located first screw is in the orthographic projection on screw cap surface. The utility model provides a single crystal growing furnace is with bolt and single crystal growing furnace can reduce the manufacturing cost of silicon rod at least.
Description
Technical Field
The embodiment of the utility model relates to monocrystalline silicon manufacturing technical field, in particular to bolt and single crystal growing furnace for single crystal growing furnace.
Background
The substrate used for the solar cell is generally a single crystal silicon wafer, and the single crystal silicon rod is generally prepared by a Czochralski method (CZ method) or a float Zone method (FZ method), and is classified into Czochralski silicon and float Zone silicon, and the apparatus for preparing the Czochralski silicon is generally a single crystal furnace.
A single crystal furnace, a full-automatic Czochralski crystal growing furnace, is a device for melting polycrystalline materials such as polycrystalline silicon and the like by a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by a Czochralski method. The single crystal furnace mainly comprises a furnace chamber, a crucible and a driving structure. The driving structure realizes the rotation and the up-and-down movement of the crucible through the crucible shaft and the crucible supporting rod, and the crucible is positioned in the single crystal furnace and used for melting polycrystalline materials and preparing single crystal silicon rods. Then, in the process of producing the single crystal silicon rod, the production cost of the silicon rod may be increased due to the influence of the environment and the operation process.
For example, the supporting rod bolt is used for connecting the supporting rod and the crucible shaft, the top of the supporting rod is in contact with the crucible, the temperature in the single crystal furnace is up to thousands of degrees centigrade, the internal screw hole of the supporting rod lower shaft bolt can slide along with the increase of the using times of the supporting rod bolt of the single crystal furnace, namely, the supporting rod and the crucible shaft cannot be normally disassembled, the crystal bar can only be taken out in a mode of manually breaking the supporting rod, and the damaged supporting rod cannot be continuously used, so that the production cost of the crystal bar is increased.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a bolt and single crystal growing furnace for single crystal growing furnace is favorable to reducing the manufacturing cost of silicon rod at least.
According to some embodiments of the utility model, the embodiment of the utility model provides an aspect provides a bolt for single crystal growing furnace, include: the screw rod and the screw cap that are connected, the screw cap keeps away from the surface of screw rod and has first screw, and the bottom surface of first screw has at least one second screw that link up mutually with first screw, and along the directional direction of screw rod at the screw cap, the orthographic projection of second screw on the screw cap surface is located the orthographic projection of first screw on the screw cap surface.
In addition, the axis of the first screw hole is overlapped with the axis of the second screw hole; or the distance between the axis of the first screw hole and the axis of the second screw hole ranges from 0mm to 3mm.
In addition, the distance between the first screw hole and the second screw hole is 2 mm-6 mm along the direction parallel to the surface of the screw cap.
In addition, in the direction of the screw rod pointing to the screw cap, the ratio range of the depth of the first screw hole to the thickness of the screw cap is 1.
In addition, the depth of the first screw hole is equal to the depth of the second screw hole.
In addition, the depth range of the first screw hole is 1.5 mm-6 mm.
In addition, the number of the second screw holes is more than or equal to 2, and the width of the second screw holes close to the first screw holes is larger than that of the second screw holes far away from the first screw holes along the direction parallel to the surface of the screw cap.
According to some embodiments of the present invention, another aspect of the embodiments of the present invention further provides a single crystal growing furnace, including: heat preservation section of thick bamboo, crucible, draft tube, crucible nation and bolt, the bolt is as any one of above embodiment.
In addition, the bolt is a supporting rod bolt; the bottom of the crucible is provided with a crucible supporting rod and a crucible shaft, the crucible supporting rod comprises a supporting rod body and a supporting rod bolt, and the supporting rod body is connected with the crucible shaft through the supporting rod bolt.
In addition, the bolt is an electrode bolt which is used for fixing the heating electrode; or the bolts are connecting bolts which are used for fixing the crucible and the crucible side, and the heat-insulating cylinder and the crucible side.
The embodiment of the utility model provides a technical scheme has following advantage at least:
the embodiment of the utility model provides an among the technical scheme, screw through to the bolt is reformed transform, the bottom surface that sets up first screw has at least one and the second screw that first screw link up mutually, when one of them screw (first screw or second screw) lead to warping or the high frequency uses when leading to smooth silk owing to high temperature, can dismantle the die-pin lower shaft through using another screw, avoid single screw to lead to the problem that the die-pin lower shaft can't take out when taking place to damage, reduce the die-pin loss, thereby reduce the manufacturing cost of crystal bar. The orthographic projection of the second screw hole on the surface of the screw cap is located in the orthographic projection of the first screw hole on the surface of the screw cap, namely the size of the second screw hole is smaller than that of the first screw hole, a plurality of overlapped screw holes with gradually reduced sizes can be formed in a unit area and the screw cap with fixed depth, the practicability of the bolt can be improved, and the production cost of crystal bars can be reduced from the quantity of the bolt.
Drawings
One or more embodiments are illustrated by corresponding figures in the drawings, which are not to be construed as limiting the embodiments, unless expressly stated otherwise, and which are not intended to be limiting in scale.
Fig. 1 is a schematic structural diagram of a bolt for a single crystal furnace according to an embodiment of the present invention;
fig. 2 is another schematic structural diagram of a bolt for a single crystal furnace according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a screw cap of a bolt for a single crystal furnace according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention.
Detailed Description
As can be seen from the background art, the single crystal furnace in the prior art has the problem of high production cost of the silicon rod.
The embodiment of the utility model provides a bolt and single crystal growing furnace for single crystal growing furnace, screw through to the bolt is reformed transform, the bottom surface that sets up first screw has at least one second screw that link up mutually with first screw, when one of them screw (first screw or second screw) leads to warping or high frequency to use when leading to smooth silk owing to high temperature, can dismantle the die-pin lower shaft through using another screw, avoid single screw to lead to the problem that the die-pin lower shaft can't take out when taking place to damage, reduce the die-pin loss, thereby reduce the manufacturing cost of crystal bar. The orthographic projection of the second screw hole on the surface of the screw cap is located in the orthographic projection of the first screw hole on the surface of the screw cap, namely the size of the second screw hole is smaller than that of the first screw hole, a plurality of overlapped screw holes with gradually reduced sizes can be formed in a unit area and the screw cap with fixed depth, the practicability of the bolt can be improved, and the production cost of crystal bars can be reduced from the quantity of the bolt.
Embodiments of the present application will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that in the various embodiments of the present application, numerous technical details are set forth in order to provide a better understanding of the present application. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments.
Fig. 1 is a schematic structural diagram of a bolt for a single crystal furnace according to an embodiment of the present invention; fig. 2 is another schematic structural diagram of a bolt for a single crystal furnace according to an embodiment of the present invention; fig. 3 is a schematic structural diagram of a screw cap of a bolt for a single crystal furnace according to an embodiment of the present invention.
According to some embodiments of the utility model, the embodiment of the utility model provides an aspect provides a bolt for single crystal growing furnace, include: the screw 11 and the screw cap 12 are connected, the surface of the screw cap 12 away from the screw 11 has a first screw hole 121, the bottom surface of the first screw hole 121 has at least one second screw hole 122 communicated with the first screw hole 121, and along the direction Y of the screw 11 pointing to the screw cap 12, the orthographic projection of the second screw hole 122 on the surface of the screw cap 12 is located in the orthographic projection of the first screw hole 121 on the surface of the screw cap 11.
In some embodiments, the bolt is a strut bolt; the bottom of the crucible is provided with a crucible supporting rod and a crucible shaft, the crucible supporting rod comprises a supporting rod body and a supporting rod bolt, and the supporting rod body is connected with the crucible shaft through the supporting rod bolt. In other embodiments, the bolt is an electrode bolt for securing an electrode; or the bolts are connecting bolts which are used for fixing the crucible and the crucible side, and the heat-insulating cylinder and the crucible side.
In some embodiments, the screw 11 is a cylinder with external threads. The screw cap 12 may include a hexagonal head screw cap, a round head screw cap, a square head screw cap, a countersunk head screw cap, or the like according to the shape. The extending direction of the long side of the screw 11 is perpendicular to the extending direction of the long side of the screw cap 12, and the axis of the screw 11 is overlapped with the axis of the screw cap 12.
In some embodiments, as shown in fig. 1, the axis 101 of the first threaded hole 121 overlaps the axis of the second threaded hole 122. So, the thickness on second screw 122 both sides is comparatively even, and the impetus on both sides is the same when using the spanner to rotate the dismantlement or assemble, can not take place the skew and lead to the screw rod of bolt because the inhomogeneous phenomenon that wearing and tearing appear of power or even the screw thread of screw rod appears grinding, causes the cost of bolt to rise. In addition, the areas of the bottom surfaces of the first screw holes 121 on both sides of the second screw hole 122 are equal, and the contact surface of the wrench is larger, thereby facilitating disassembly and assembly. In other embodiments, the distance L between the axis 101 of the first threaded hole 121 and the axis 102 of the second threaded hole 122 ranges from 0mm to 3mm, and may specifically be 0.3mm, 1.1mm, 2.08mm, or 2.89mm. It can be understood that the distance L between the axis 101 of the first screw hole 121 and the axis 102 of the second screw hole 122 is less than 0.5 times the distance between the first screw hole 121 and the second screw hole 122, so as to ensure that the bottom surface of the first screw hole 121 on one side has enough area to serve as a force bearing point for bearing a wrench.
In some embodiments, referring to fig. 3, the distance S between the first screw hole 121 and the second screw hole 122 along the direction X parallel to the surface of the screw cap 12 is in a range of 2mm to 6mm, and further, the distance S between the first screw hole 121 and the second screw hole 122 is in a range of 3mm to 5mm, which may be 3.1mm, 3.9mm, 4.24mm, or 4.97mm. The range of the distance S can be considered as the range of the thickness of the second screw hole 122 or the range of the width of the bottom surface of the first screw hole 121, and on one hand, the range of the distance S is used for ensuring that, in the direction X parallel to the surface of the screw cap 12, more screw holes can be formed in the limited area of the screw cap 12 of a single bolt as much as possible so as to save the production cost of the silicon rod; on the other hand, the thickness of the second screw hole 122 is small or the area of the bottom surface of the first screw hole 121 is too small, so that the thickness and the area of the bottom surface are not enough to be taken as a supporting point for performing rotary disassembly or assembly.
In some embodiments, the depth H of the first screw hole 121 is along the direction Y of the screw 11 pointing to the screw cap 12 1 Thickness H of screw cap 12 2 The range of the ratio of (1) 1 Thickness H of screw cap 12 2 The ratio of (b) is in a range from 1. This ratio range is used to ensure that, on the one hand, in the direction Y in which the screw 11 points toward the screw cap 12, more screw holes can be formed in the limited thickness of the screw cap 12 of a single bolt as much as possible, thereby saving the production cost of the silicon rod; on the other hand, the situation that the first screw hole is thin and does not have enough depth to be used as a supporting point for rotary disassembly or assembly during disassembly or assembly can be avoided.
In some embodiments, the depth H of the first screw hole 121 2 Equal to the depth of the second screw hole 122, by properly setting the depth H of the first screw hole 121 2 The number of screw holes in the limited thickness of the screw cap is ensured, and the thickness of the screw rod is utilized to the maximum extent. Further, the depth H of the first screw hole 121 2 In the range of 1.5mm to 6mm, and further, the depth H of the first screw hole 121 2 In the range of 1.5mm to 3mm, and further, the depth H of the first screw hole 121 2 Specifically, it may be 1.5mm, 1.9mm, 2.6mm or 3mm. In other embodiments, H of the first screw hole 121 2 And is not the same as the depth of the second screw hole 122.
In some embodiments, the number of the second screw holes 122 is greater than or equal to 2, and the width of the second screw hole 122 close to the first screw hole 121 is greater than the width of the second screw hole 122 far from the first screw hole 121 along the direction X parallel to the surface of the screw cap 12. On the directional screw cap 12's of following screw rod 11 direction Y, the quantity of second screw 122 is more, and along the direction of keeping away from first screw 121, the width of second screw 122 presents the trend less gradually, through setting up a plurality of second screws 122, when the unable normal work of condition such as damaged or smooth silk takes place for one of them screw, bolt self has reserve scheme (other screw) as the strong point of dismantlement or installation, improves the practicality of bolt.
In some embodiments, the shape of the first screw hole 121 includes a hexagon, a cross, an octagon, or a straight line. The shape of the second screw hole 122 includes a hexagon, a cross, an octagon, or a straight line. In actual operation, the bolt can be disassembled and assembled by replacing different mounting tools, and the compatibility of the bolt is improved. When the first screw hole 121 and the second screw hole 122 are both hexagonal, the six inner wall surfaces are all stressed surfaces, which can bear larger load, thereby ensuring the installation stability.
In some embodiments, the material of the bolt includes graphite and stainless steel. The bolt made of graphite or stainless steel materials has good high-temperature resistance and wear resistance, and the service life of the bolt can be prolonged, so that the production cost of the crystal bar is reduced.
The embodiment of the utility model provides an among the technical scheme, screw through to the bolt is reformed transform, the bottom surface that sets up first screw 121 has at least one second screw 122 that link up mutually with first screw 121, when one of them screw (first screw 121 or second screw 122) leads to warping or high frequency use when leading to smooth silk because of high temperature, can dismantle the die-pin lower shaft through using another screw, lead to the unable problem of taking out of die-pin lower shaft when avoiding single screw to take place to damage, reduce the die-pin loss, thereby reduce the manufacturing cost of crystal bar. The orthographic projection of the second screw hole 122 on the surface of the screw cap 12 is positioned in the orthographic projection of the first screw hole 121 on the surface of the screw cap 12, namely the size of the second screw hole 122 is smaller than that of the first screw hole 121, a plurality of screw holes which are overlapped and gradually reduced in size can be formed in a unit area and the screw cap 12 with fixed depth, the practicability of the bolt can be improved, and the production cost of crystal bars can be reduced from the number of the bolt.
Fig. 4 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention.
Correspondingly, referring to fig. 4, another embodiment of the present invention further provides a single crystal furnace, including: insulation cylinder 23, crucible 24, draft tube 21, crucible upper and bolt, the bolt is as described in any one of the above embodiments.
In some embodiments, the crucible 24 is located in the heat-preserving cylinder 23, and the heat-preserving cylinder 23 includes an upper heat-preserving cylinder 231, a middle heat-preserving cylinder 232, and a lower heat-preserving cylinder 233 from top to bottom. Go up heat preservation section of thick bamboo 231 and be located the top of crucible 24, it sets up in draft tube 21 periphery to go up heat preservation section of thick bamboo 231, well heat preservation section of thick bamboo sets up in graphite crucible 242 periphery, it covers greatly still to be equipped with graphite on heat preservation section of thick bamboo 231, the middle part of the big lid of graphite is equipped with the through-hole, draft tube 21 assembles in the through-hole, be equipped with the water-cooling screen in the draft tube 21, lower heat preservation section of thick bamboo 233 has the sole of protection clamp plate, be equipped with the second insulation material layer between sole of protection clamp plate and the furnace body bottom, the bottom of furnace body is equipped with heating electrode 27, heating electrode 27 pierces through sole of protection clamp plate and second insulation material layer.
In some embodiments, the materials of the upper thermal insulation cylinder 231, the middle thermal insulation cylinder 232 and the lower thermal insulation cylinder 233 may include any one or more of slag wool, asbestos, carbon fiber, graphite and any other materials having thermal insulation function.
In some embodiments, the end of draft tube 21 is tapered to facilitate the entry of silicon crystal material into crucible 24. The crucible 24 includes a quartz crucible 241 and a graphite crucible 242, and the graphite crucible 242 is located on the outer side surface of the quartz crucible 241. The quartz crucible 241 is used for accommodating silicon raw materials and dopants, and the quartz crucible 241 is resistant to high temperature and can perform a high temperature resistant process for a long time; the graphite crucible 242 can be used as a carrier of the quartz crucible 241, so that the silicon raw material is prevented from leaking out after the high-temperature quartz crucible 241 is softened, and the graphite crucible can carry the raw material to rotate in the crystal pulling process; the graphite crucible 242 has good heat transfer properties and can rapidly conduct heat required by the silicon raw material. The graphite crucible 242 may be a three-piece split crucible or a vertically split crucible, and can alleviate the expansive force during the cooling process of the silicon liquid, which is beneficial to the safety production of monocrystalline silicon. In other embodiments, the graphite crucible can be replaced by a carbon/carbon composite crucible, and compared with the graphite crucible, the carbon/carbon composite crucible has the advantages of better thermal stability, light weight, low thermal expansion coefficient and long service life, and is more beneficial to the safe production of a single crystal furnace. The carbon/carbon composite material crucible can be an integral crucible, a three-valve split crucible, a multi-valve split crucible or an up-and-down sectional crucible.
In some embodiments, the crucible end is located at the periphery of the crucible 24, and the crucible end is used for supporting the crucible 24 and also for maintaining the temperature to reduce the heat dissipation of the crucible 24 to the outside. Crucible is bound and can be for integral crucible nation and split type crucible nation, and split type crucible nation is heated at crucible 24 and tightly laminates when crucible nation in, and convenient to detach can avoid the crucible damaged and the crucible that splashes to hinder the danger of people, and the cost is reduced simultaneously, if there is the part that the damage only needs the replacement, need not wholly change, and it is more convenient to maintain. The bottom of the crucible 24 comprises a supporting rod tray 261 and a crucible supporting rod 262, the crucible supporting rod 262 is used for bearing the crucible 24, and the other end of the crucible supporting rod 262 is connected with the crucible shaft. The crucible shaft is connected to a driving device, and the crucible shaft drives the crucible 24 to rotate and lift under the action of the driving device. The single crystal furnace further comprises a heater 25, and the heater 25 is connected with a heating electrode 27. The heater 25 may be any heating device of any structure in the prior art, and only needs to be able to achieve the heating effect, and is not limited herein.
In some embodiments, the bolt is a strut bolt; the bottom of the crucible 24 is provided with a crucible supporting rod 262 and a crucible shaft, the crucible supporting rod 262 comprises a supporting rod body and a supporting rod bolt, and the supporting rod body is connected with the crucible shaft through the supporting rod bolt.
In some embodiments, the bolts are electrode bolts 22, the electrode bolts 22 being used to secure the heater electrodes 27; or the bolts are connecting bolts which are used for fixing the crucible 24 and the crucible side, and the heat-insulating cylinder 23 and the crucible side.
In the technical scheme provided by the embodiment of the utility model, at least one of the supporting rod bolt, the connecting bolt and the electrode bolt is designed to be a bolt with a first screw hole and a second screw hole which are communicated with each other; then reform transform through the screw to the bolt, when one of them screw (first screw or second screw) leads to warping or high frequency use to lead to smooth the silk because high temperature, can dismantle through using another screw, lead to the unable problem of dismantling of subassembly when avoiding single screw to take place to damage to avoid destroying one of them subassembly and reach the purpose of separation, thereby reduce the manufacturing cost of crystal bar.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples of implementations of the present application, and that various changes in form and details may be made therein without departing from the spirit and scope of the present application. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the application, and it is intended that the scope of the application be limited only by the claims appended hereto.
Claims (10)
1. A bolt for a single crystal furnace, comprising: the screw rod and the screw cap that are connected, the screw cap is kept away from the surface of screw rod has first screw, the bottom surface of first screw has at least one with first screw link up's second screw, and along the screw rod points to on the screw cap, the orthographic projection of second screw on the screw cap surface is located first screw is in the orthographic projection on screw cap surface.
2. The bolt for a single crystal furnace according to claim 1, wherein an axis of the first screw hole overlaps with an axis of the second screw hole; or the distance between the axis of the first screw hole and the axis of the second screw hole ranges from 0mm to 3mm.
3. The bolt for a single crystal furnace according to claim 1, wherein the first screw hole and the second screw hole are spaced apart by 2mm to 6mm in a direction parallel to the surface of the screw cap.
4. The bolt for the single crystal furnace according to claim 1, wherein the ratio of the depth of the first screw hole to the thickness of the screw cap in the direction in which the screw is directed toward the screw cap ranges from 1.
5. The bolt for a single crystal furnace according to claim 1 or 4, wherein the depth of the first screw hole is equal to the depth of the second screw hole.
6. The bolt for a single crystal furnace according to claim 1 or 4, wherein the depth of the first screw hole ranges from 1.5mm to 6mm.
7. The bolt for a single crystal furnace according to claim 1, wherein the number of the second screw holes is 2 or more, and the width of the second screw hole closer to the first screw hole is larger than the width of the second screw hole farther from the first screw hole in a direction parallel to the surface of the screw cap.
8. A single crystal furnace, comprising:
a holding cylinder, a crucible, a draft tube, a crucible pot, and a bolt according to any one of claims 1 to 7.
9. The single crystal furnace of claim 8, wherein the bolts are trunnion bolts; the crucible supporting rod comprises a supporting rod body and a supporting rod bolt, and the supporting rod body is connected with the crucible shaft through the supporting rod bolt.
10. The single crystal furnace of claim 8, wherein the bolts are electrode bolts for fixing the heating electrodes; or, the bolt is connecting bolt, and connecting bolt is used for fixing the crucible with the crucible side, the heat preservation cylinder with the crucible side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221651305.5U CN217926672U (en) | 2022-06-28 | 2022-06-28 | Bolt for single crystal furnace and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221651305.5U CN217926672U (en) | 2022-06-28 | 2022-06-28 | Bolt for single crystal furnace and single crystal furnace |
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| Publication Number | Publication Date |
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| CN217926672U true CN217926672U (en) | 2022-11-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221651305.5U Active CN217926672U (en) | 2022-06-28 | 2022-06-28 | Bolt for single crystal furnace and single crystal furnace |
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| Country | Link |
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| CN (1) | CN217926672U (en) |
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2022
- 2022-06-28 CN CN202221651305.5U patent/CN217926672U/en active Active
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